Abstract

Silicon-based all-dielectric metamaterials (SAMs), with advantages like low loss and simple structure, are attracting more and more attention. However, SAMs usually suffer from narrow bandwidth and low tunability, and thereby their applications are seriously impeded. In this work, we propose and experimentally demonstrate a tunable SAMs in terahertz (THz) ranges by covering the SAMs with a layer of active medium, strontium titanate (STO). It shows that the THz responses of SAMs can be thermally tuned due to the temperature-dependent permittivity of STO. This work provides a convenient route to tunable SAMs from THz to optical ranges.

© 2017 Optical Society of America

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References

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2017 (2)

2016 (2)

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

2015 (3)

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]

2013 (1)

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

2012 (5)

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

2011 (1)

2010 (1)

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

2008 (1)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

2006 (1)

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

2004 (1)

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Abbott, D.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Aieta, F.

Azad, A. K.

Bhaskaran, M.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Boltasseva, A.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Bozhevolnyi, S. I.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Capasso, F.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Chen, H. T.

Chen, W. T.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Chichkov, B. N.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Cui, B.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Cummer, S. A.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Decker, M.

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

Devlin, R.

Devlin, R. C.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Emani, N. K.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Eriksen, R. L.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Evlyukhin, A. B.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Fan, K.

Feng, S.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Fenollosa, R.

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

Fu, Y. H.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Fumeaux, C.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Genevet, P.

Geng, Z.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Gutruf, P.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Headland, D.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Ishii, S.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Jia, Q. X.

Justice, B. J.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Khorasaninejad, M.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Khurgin, J. B.

J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

Kivshar, Y. S.

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

Kuznetsov, A. I.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Landy, N. I.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Liu, X.

Luk’yanchuk, B.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Meseguer, F.

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

Miroshnichenko, A. E.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Mock, J. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Naik, G. V.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Nirantar, S.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Novikov, S. M.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Oh, J.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Padilla, W. J.

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Pendry, J. B.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Reinhardt, C.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Schurig, D.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Shalaev, V. M.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Shi, L.

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

Singh, R.

Smith, D. R.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Sriram, S.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Starr, A. F.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

Staude, I.

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

Suen, J. Y.

Sun, G.

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

Taylor, A. J.

Tuzer, T. U.

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

West, P. R.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Wiltshire, M. C. K.

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Withayachumnankul, W.

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Yang, Y.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Yu, Y. F.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

Zhang, J.

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Zywietz, U.

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

Adv. Mater. (2)

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

Appl. Phys. Lett. (2)

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

J. Opt. (1)

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

Laser Photonics Rev. (1)

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Nano Lett. (2)

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

Nat. Commun. (1)

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

Nat. Nanotechnol. (1)

J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]

Opt. Lett. (1)

Optica (2)

Phys. Rev. Lett. (1)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Proc. Natl. Acad. Sci. U.S.A. (1)

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Sci. Rep. (1)

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Science (2)

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Other (2)

T. Cui, D. Smith, and R. Liu, Metamaterials: Theory, Design, and Applications (Springer, 2009).

N. Engheta and R. W. Ziolkowski, Metamaterials: Physics and Engineering Explorations (Wiley Interscience, 2006).

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Figures (7)

Fig. 1
Fig. 1 (a) Schematic illustration of SAMs. (b) Top view of SAMs and corresponding geometry parameters. (c) Tunable silicon/STO all-dielectric metamaterial in THz ranges. The STO film is represented by blue colour.
Fig. 2
Fig. 2 Process flow of SAMs. (a) Ultrathin silicon wafer (100 um thickness) is cleaned with standard silicon cleaning process. (b) Photoresist is spin-coated on the silicon wafer. (c) Common lithography. (d) Deep silicon etching.
Fig. 3
Fig. 3 Photograph of the fabricated SAMs.
Fig. 4
Fig. 4 (a) Transmission spectrum of tunable silicon/STO all-dielectric metamaterial at different temperatures. (b)(c) The magnetic field and magnetic field intensity distributions at the first resonance, respectively. (d)(e) The magnetic field and magnetic field intensity distributions at the second resonance, respectively.
Fig. 5
Fig. 5 Resonance frequencies with different temperatures: (a) The first resonance (b) The second resonance.
Fig. 6
Fig. 6 Measured transmission spectrum of tunable silicon/STO all-dielectric metamaterial at different temperatures.
Fig. 7
Fig. 7 Measured resonance frequencies with different temperatures: (a) The first resonance (b) The second resonance.

Equations (3)

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ε w = ε + f w 0 2 w 2 iwγ
w 0 (T)[ c m 1 ]= 31.2(T42.5)
γ(T)[ c m 1 ]=3.3+0.094T

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