Tunable silicon-based all-dielectric metamaterials with strontium titanate thin film in terahertz range

Yanjiao Zhao; Baiwei Li; Chuwen Lan; Ke Bi; Zhaowei Qu

doi:10.1364/OE.25.022158

Tunable silicon-based all-dielectric metamaterials with strontium titanate thin film in terahertz range

Yanjiao Zhao, Baiwei Li, Chuwen Lan, Ke Bi, and Zhaowei Qu

Optics Express
Vol. 25,
Issue 18,
pp. 22158-22163
(2017)
•https://doi.org/10.1364/OE.25.022158

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Yanjiao Zhao, Baiwei Li, Chuwen Lan, Ke Bi, and Zhaowei Qu, "Tunable silicon-based all-dielectric metamaterials with strontium titanate thin film in terahertz range," Opt. Express 25, 22158-22163 (2017)

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Related Topics
Table of Contents Category
- Metamaterials
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Metamaterials (160.3918)
- Electromagnetic optics (260.2110)

About this Article
History
- Original Manuscript: August 11, 2017
- Revised Manuscript: August 27, 2017
- Manuscript Accepted: August 28, 2017
- Published: September 1, 2017

Accessible

Open Access

Abstract

Silicon-based all-dielectric metamaterials (SAMs), with advantages like low loss and simple structure, are attracting more and more attention. However, SAMs usually suffer from narrow bandwidth and low tunability, and thereby their applications are seriously impeded. In this work, we propose and experimentally demonstrate a tunable SAMs in terahertz (THz) ranges by covering the SAMs with a layer of active medium, strontium titanate (STO). It shows that the THz responses of SAMs can be thermally tuned due to the temperature-dependent permittivity of STO. This work provides a convenient route to tunable SAMs from THz to optical ranges.

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References

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Publication

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[Crossref] [PubMed]
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[Crossref] [PubMed]
D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]
T. Cui, D. Smith, and R. Liu, Metamaterials: Theory, Design, and Applications (Springer, 2009).
N. Engheta and R. W. Ziolkowski, Metamaterials: Physics and Engineering Explorations (Wiley Interscience, 2006).
P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]
J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]
J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]
A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]
A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]
Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]
A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]
R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]
M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]
P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]
L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]
Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]
D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]
K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]
R. Singh, A. K. Azad, Q. X. Jia, A. J. Taylor, and H. T. Chen, “Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates,” Opt. Lett. 36(7), 1230–1232 (2011).
[Crossref] [PubMed]

2017 (2)

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

2016 (2)

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

2015 (3)

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

D. Headland, S. Nirantar, W. Withayachumnankul, P. Gutruf, D. Abbott, M. Bhaskaran, C. Fumeaux, and S. Sriram, “Terahertz magnetic mirror realized with dielectric resonator antennas,” Adv. Mater. 27(44), 7137–7144 (2015).
[Crossref] [PubMed]

J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]

2013 (1)

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

2012 (5)

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

L. Shi, T. U. Tuzer, R. Fenollosa, and F. Meseguer, “A new dielectric metamaterial building block with a strong magnetic response in the sub-1.5-micrometer region: silicon colloid nanocavities,” Adv. Mater. 24(44), 5934–5938 (2012).
[Crossref] [PubMed]

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, “Demonstration of magnetic dipole resonances of dielectric nanospheres in the visible region,” Nano Lett. 12(7), 3749–3755 (2012).
[Crossref] [PubMed]

2011 (1)

R. Singh, A. K. Azad, Q. X. Jia, A. J. Taylor, and H. T. Chen, “Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates,” Opt. Lett. 36(7), 1230–1232 (2011).
[Crossref] [PubMed]

2010 (1)

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

2008 (1)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

2006 (1)

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

2004 (1)

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Abbott, D.

Aieta, F.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Azad, A. K.

Bhaskaran, M.

Boltasseva, A.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Bozhevolnyi, S. I.

Capasso, F.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Chen, H. T.

Chen, W. T.

Chichkov, B. N.

Cui, B.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Cummer, S. A.

Decker, M.

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

Devlin, R.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Devlin, R. C.

Emani, N. K.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Eriksen, R. L.

Evlyukhin, A. B.

Fan, K.

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

Feng, S.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Fenollosa, R.

Fu, Y. H.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Fumeaux, C.

Genevet, P.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Geng, Z.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Gutruf, P.

Headland, D.

Ishii, S.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Jia, Q. X.

Justice, B. J.

Khorasaninejad, M.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Khurgin, J. B.

J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

Kivshar, Y. S.

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

Kuznetsov, A. I.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Landy, N. I.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Liu, X.

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

Luk’yanchuk, B.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Meseguer, F.

Miroshnichenko, A. E.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Mock, J. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Naik, G. V.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Nirantar, S.

Novikov, S. M.

Oh, J.

Padilla, W. J.

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Pendry, J. B.

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Reinhardt, C.

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Schurig, D.

Shalaev, V. M.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Shi, L.

Singh, R.

Smith, D. R.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Sriram, S.

Starr, A. F.

Staude, I.

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

Suen, J. Y.

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

Sun, G.

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

Taylor, A. J.

Tuzer, T. U.

West, P. R.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Wiltshire, M. C. K.

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Withayachumnankul, W.

Yang, Y.

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

Yu, Y. F.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

Zhang, J.

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Zywietz, U.

Adv. Mater. (2)

Appl. Phys. Lett. (2)

Y. Yang, B. Cui, Z. Geng, and S. Feng, “Terahertz magnetic and electric Mie resonances of an all-dielectric one-dimensional grating,” Appl. Phys. Lett. 106(11), 111106 (2015).
[Crossref]

J. B. Khurgin and G. Sun, “Practicality of compensating the loss in the plasmonic waveguides using semiconductor gain medium,” Appl. Phys. Lett. 100(1), 11105 (2012).
[Crossref]

J. Opt. (1)

M. Decker and I. Staude, “Resonant dielectric nanostructures: a lowloss platform for functional nanophotonics,” J. Opt. 18(10), 103001 (2016).
[Crossref]

Laser Photonics Rev. (1)

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Nano Lett. (2)

A. E. Miroshnichenko and Y. S. Kivshar, “Fano resonances in all-dielectric oligomers,” Nano Lett. 12(12), 6459–6463 (2012).
[Crossref] [PubMed]

Nat. Commun. (1)

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

Nat. Nanotechnol. (1)

J. B. Khurgin, “How to deal with the loss in plasmonics and metamaterials,” Nat. Nanotechnol. 10(1), 2–6 (2015).
[Crossref] [PubMed]

Opt. Lett. (1)

Optica (2)

K. Fan, J. Y. Suen, X. Liu, and W. J. Padilla, “All-dielectric metasurface absorbers for uncooled terahertz imaging,” Optica 4(6), 601–604 (2017).
[Crossref]

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Phys. Rev. Lett. (1)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Proc. Natl. Acad. Sci. U.S.A. (1)

Sci. Rep. (1)

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Science (2)

D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative refractive index,” Science 305(5685), 788–792 (2004).
[Crossref] [PubMed]

Other (2)

T. Cui, D. Smith, and R. Liu, Metamaterials: Theory, Design, and Applications (Springer, 2009).

N. Engheta and R. W. Ziolkowski, Metamaterials: Physics and Engineering Explorations (Wiley Interscience, 2006).

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Fig. 1 (a) Schematic illustration of SAMs. (b) Top view of SAMs and corresponding geometry parameters. (c) Tunable silicon/STO all-dielectric metamaterial in THz ranges. The STO film is represented by blue colour.

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Fig. 2 Process flow of SAMs. (a) Ultrathin silicon wafer (100 um thickness) is cleaned with standard silicon cleaning process. (b) Photoresist is spin-coated on the silicon wafer. (c) Common lithography. (d) Deep silicon etching.

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Fig. 3 Photograph of the fabricated SAMs.

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Fig. 4 (a) Transmission spectrum of tunable silicon/STO all-dielectric metamaterial at different temperatures. (b)(c) The magnetic field and magnetic field intensity distributions at the first resonance, respectively. (d)(e) The magnetic field and magnetic field intensity distributions at the second resonance, respectively.

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Fig. 5 Resonance frequencies with different temperatures: (a) The first resonance (b) The second resonance.

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Fig. 6 Measured transmission spectrum of tunable silicon/STO all-dielectric metamaterial at different temperatures.

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Fig. 7 Measured resonance frequencies with different temperatures: (a) The first resonance (b) The second resonance.

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Equations (3)

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ε_{w} = ε_{\infty} + \frac{f}{w_{0}^{2} - w^{2} - i w γ}

w_{0} (T) [c m^{- 1}] = \sqrt{31.2 (T - 42.5)}

γ (T) [c m^{- 1}] = - 3.3 + 0.094 T