Abstract

We fabricated photonic crystal high-quality factor (Q) nanocavities on a 300-mm-wide silicon-on-insulator wafer by using argon fluoride immersion photolithography. The heterostructure nanocavities showed an average experimental Q value of 1.5 million for 12 measured samples. The highest Q value was 2.3 million, which represents a record for a nanocavity fabricated by complementary metal–oxide–semiconductor (CMOS)-compatible machinery. We also demonstrated an eight-channel drop filter with 4 nm spacing consisting of arrayed nanocavities with three missing air holes. The standard deviation in the drop wavelength was less than 1 nm. These results will accelerate ultrahigh-Q nanocavity research in various areas.

© 2017 Optical Society of America

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References

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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref]
  34. A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
    [Crossref]
  35. Q. Fang, T. Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express 18(5), 5106–5113 (2010).
    [Crossref] [PubMed]
  36. Q. Fang, Y. T. Phang, C. W. Tan, T. Y. Liow, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Multi-channel silicon photonic receiver based on ring-resonators,” Opt. Express 18(13), 13510–13515 (2010).
    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]

2017 (3)

2016 (2)

2015 (2)

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs,” J. Microelectromech. Syst. 24(3), 556–564 (2015).
[Crossref]

2014 (5)

J. Lu, L. Zhang, H. Takagi, and R. Maeda, “A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer,” Microelectron. Eng. 119(1), 28–31 (2014).
[Crossref]

W. Xie, M. Fiers, S. Selvaraja, P. Bienstman, J. V. Campenhout, P. Absil, and D. V. Thourhout, “High-Q Photonic Crystal Nanocavities on 300mm SOI Substrate Fabricated With 193 nm Immersion Lithography,” J. Lightwave Technol. 32(8), 1457–1462 (2014).
[Crossref]

Y. Takahashi, T. Asano, D. Yamashita, and S. Noda, “Ultra-compact 32-channel drop filter with 100 GHz spacing,” Opt. Express 22(4), 4692–4698 (2014).
[Crossref] [PubMed]

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

H. Sekoguchi, Y. Takahashi, T. Asano, and S. Noda, “Photonic crystal nanocavity with a Q-factor of ~9 million,” Opt. Express 22(1), 916–924 (2014).
[Crossref] [PubMed]

2013 (4)

M. G. Scullion, T. F. Krauss, and A. Di Falco, “Slotted photonic crystal sensors,” Sensors (Basel) 13(3), 3675–3710 (2013).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

2012 (2)

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

2011 (1)

2010 (4)

Q. Fang, T. Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express 18(5), 5106–5113 (2010).
[Crossref] [PubMed]

Q. Fang, Y. T. Phang, C. W. Tan, T. Y. Liow, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Multi-channel silicon photonic receiver based on ring-resonators,” Opt. Express 18(13), 13510–13515 (2010).
[Crossref] [PubMed]

T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

D. P. Sanders, “Advances in patterning materials for 193 nm immersion lithography,” Chem. Rev. 110(1), 321–360 (2010).
[Crossref] [PubMed]

2009 (2)

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

2008 (1)

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

2007 (2)

S. Iwamoto, Y. Arakawa, and A. Gomyo, “Observation of enhanced photoluminescence from silicon photonic crystal nanocavity at room temperature,” Appl. Phys. Lett. 91(21), 211104 (2007).
[Crossref]

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

2006 (2)

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

T. Asano, B. S. Song, and S. Noda, “Analysis of the experimental Q factors (~ 1 million) of photonic crystal nanocavities,” Opt. Express 14(5), 1996–2002 (2006).
[Crossref] [PubMed]

2005 (3)

2003 (1)

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

2001 (1)

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[Crossref]

2000 (1)

S. Noda, A. Chutinan, and M. Imada, “Trapping and emission of photons by a single defect in a photonic bandgap structure,” Nature 407(6804), 608–610 (2000).
[Crossref] [PubMed]

1991 (1)

T. Terasawa, N. Hasegawa, H. Fukuda, and S. Katagiri, “Imaging characteristics of multi-phase-shifting and halftone phase-shifting masks,” Jpn. J. Appl. Phys. 30(1), 2991–2997 (1991).
[Crossref]

Absil, P.

Akahane, Y.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-High-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[Crossref]

Y. Akahane, T. Asano, H. Takano, B. S. Song, Y. Takana, and S. Noda, “Two-dimensional photonic-crystal-slab channeldrop filter with flat-top response,” Opt. Express 13(7), 2512–2530 (2005).
[Crossref] [PubMed]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

Akin, T.

M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs,” J. Microelectromech. Syst. 24(3), 556–564 (2015).
[Crossref]

Alper, S. E.

M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs,” J. Microelectromech. Syst. 24(3), 556–564 (2015).
[Crossref]

Ang, K. W.

Arakawa, Y.

S. Iwamoto, Y. Arakawa, and A. Gomyo, “Observation of enhanced photoluminescence from silicon photonic crystal nanocavity at room temperature,” Appl. Phys. Lett. 91(21), 211104 (2007).
[Crossref]

Asano, T.

K. Maeno, Y. Takahashi, T. Nakamura, T. Asano, and S. Noda, “Analysis of high-Q photonic crystal L3 nanocavities designed by visualization of the leaky components,” Opt. Express 25(1), 367–376 (2017).
[Crossref] [PubMed]

T. Asano, Y. Ochi, Y. Takahashi, K. Kishimoto, and S. Noda, “Photonic crystal nanocavity with a Q factor exceeding eleven million,” Opt. Express 25(3), 1769–1777 (2017).
[Crossref]

T. Nakamura, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Improvement in the quality factors for photonic crystal nanocavities via visualization of the leaky components,” Opt. Express 24(9), 9541–9549 (2016).
[Crossref] [PubMed]

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

H. Sekoguchi, Y. Takahashi, T. Asano, and S. Noda, “Photonic crystal nanocavity with a Q-factor of ~9 million,” Opt. Express 22(1), 916–924 (2014).
[Crossref] [PubMed]

Y. Takahashi, T. Asano, D. Yamashita, and S. Noda, “Ultra-compact 32-channel drop filter with 100 GHz spacing,” Opt. Express 22(4), 4692–4698 (2014).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

Y. Taguchi, Y. Takahashi, Y. Sato, T. Asano, and S. Noda, “Statistical studies of photonic heterostructure nanocavities with an average Q factor of three million,” Opt. Express 19(12), 11916–11921 (2011).
[Crossref] [PubMed]

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

T. Asano, B. S. Song, and S. Noda, “Analysis of the experimental Q factors (~ 1 million) of photonic crystal nanocavities,” Opt. Express 14(5), 1996–2002 (2006).
[Crossref] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-High-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[Crossref]

Y. Akahane, T. Asano, H. Takano, B. S. Song, Y. Takana, and S. Noda, “Two-dimensional photonic-crystal-slab channeldrop filter with flat-top response,” Opt. Express 13(7), 2512–2530 (2005).
[Crossref] [PubMed]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

Baba, T.

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

Badolato, A.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Bienstman, P.

Campenhout, J. V.

Chihara, M.

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

Chutinan, A.

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[Crossref]

S. Noda, A. Chutinan, and M. Imada, “Trapping and emission of photons by a single defect in a photonic bandgap structure,” Nature 407(6804), 608–610 (2000).
[Crossref] [PubMed]

Daud, N. A. B.

Di Falco, A.

M. G. Scullion, T. F. Krauss, and A. Di Falco, “Slotted photonic crystal sensors,” Sensors (Basel) 13(3), 3675–3710 (2013).
[Crossref] [PubMed]

Englund, D.

Fang, Q.

Fiers, M.

Fukuda, H.

T. Terasawa, N. Hasegawa, H. Fukuda, and S. Katagiri, “Imaging characteristics of multi-phase-shifting and halftone phase-shifting masks,” Jpn. J. Appl. Phys. 30(1), 2991–2997 (1991).
[Crossref]

Fushimi, A.

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

Fushman, I.

Galli, M.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Gerace, D.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Gomyo, A.

S. Iwamoto, Y. Arakawa, and A. Gomyo, “Observation of enhanced photoluminescence from silicon photonic crystal nanocavity at room temperature,” Appl. Phys. Lett. 91(21), 211104 (2007).
[Crossref]

Hagino, H.

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

Hasegawa, N.

T. Terasawa, N. Hasegawa, H. Fukuda, and S. Katagiri, “Imaging characteristics of multi-phase-shifting and halftone phase-shifting masks,” Jpn. J. Appl. Phys. 30(1), 2991–2997 (1991).
[Crossref]

Hashimoto, S.

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

Ihara, T.

T. Ihara, Y. Takahashi, S. Noda, and Y. Kanemitsu, “Enhanced radiative recombination rate for electron-hole droplets in silicon photonic crystal nanocavity,” under submission.
[Crossref]

Imada, M.

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[Crossref]

S. Noda, A. Chutinan, and M. Imada, “Trapping and emission of photons by a single defect in a photonic bandgap structure,” Nature 407(6804), 608–610 (2000).
[Crossref] [PubMed]

Inui, Y.

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

Iwamoto, S.

S. Iwamoto, Y. Arakawa, and A. Gomyo, “Observation of enhanced photoluminescence from silicon photonic crystal nanocavity at room temperature,” Appl. Phys. Lett. 91(21), 211104 (2007).
[Crossref]

Kanemitsu, Y.

T. Ihara, Y. Takahashi, S. Noda, and Y. Kanemitsu, “Enhanced radiative recombination rate for electron-hole droplets in silicon photonic crystal nanocavity,” under submission.
[Crossref]

Katagiri, S.

T. Terasawa, N. Hasegawa, H. Fukuda, and S. Katagiri, “Imaging characteristics of multi-phase-shifting and halftone phase-shifting masks,” Jpn. J. Appl. Phys. 30(1), 2991–2997 (1991).
[Crossref]

Kishimoto, K.

Konoike, R.

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

Krauss, T. F.

M. G. Scullion, T. F. Krauss, and A. Di Falco, “Slotted photonic crystal sensors,” Sensors (Basel) 13(3), 3675–3710 (2013).
[Crossref] [PubMed]

Kuramochi, E.

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

Kwong, D. L.

Lai, Y.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Liow, T. Y.

Lo, G. Q.

Lu, J.

J. Lu, L. Zhang, H. Takagi, and R. Maeda, “A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer,” Microelectron. Eng. 119(1), 28–31 (2014).
[Crossref]

Maeda, R.

J. Lu, L. Zhang, H. Takagi, and R. Maeda, “A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer,” Microelectron. Eng. 119(1), 28–31 (2014).
[Crossref]

Maeno, K.

Minkov, M.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Mitsugi, S.

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

Mochizuki, M.

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[Crossref]

Nagashima, T.

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

Nakadai, M.

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

Nakagawa, H.

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

Nakamura, T.

Nguyen, H. C.

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

Noda, S.

K. Maeno, Y. Takahashi, T. Nakamura, T. Asano, and S. Noda, “Analysis of high-Q photonic crystal L3 nanocavities designed by visualization of the leaky components,” Opt. Express 25(1), 367–376 (2017).
[Crossref] [PubMed]

T. Asano, Y. Ochi, Y. Takahashi, K. Kishimoto, and S. Noda, “Photonic crystal nanocavity with a Q factor exceeding eleven million,” Opt. Express 25(3), 1769–1777 (2017).
[Crossref]

T. Nakamura, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Improvement in the quality factors for photonic crystal nanocavities via visualization of the leaky components,” Opt. Express 24(9), 9541–9549 (2016).
[Crossref] [PubMed]

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

H. Sekoguchi, Y. Takahashi, T. Asano, and S. Noda, “Photonic crystal nanocavity with a Q-factor of ~9 million,” Opt. Express 22(1), 916–924 (2014).
[Crossref] [PubMed]

Y. Takahashi, T. Asano, D. Yamashita, and S. Noda, “Ultra-compact 32-channel drop filter with 100 GHz spacing,” Opt. Express 22(4), 4692–4698 (2014).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

Y. Taguchi, Y. Takahashi, Y. Sato, T. Asano, and S. Noda, “Statistical studies of photonic heterostructure nanocavities with an average Q factor of three million,” Opt. Express 19(12), 11916–11921 (2011).
[Crossref] [PubMed]

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

T. Asano, B. S. Song, and S. Noda, “Analysis of the experimental Q factors (~ 1 million) of photonic crystal nanocavities,” Opt. Express 14(5), 1996–2002 (2006).
[Crossref] [PubMed]

Y. Akahane, T. Asano, H. Takano, B. S. Song, Y. Takana, and S. Noda, “Two-dimensional photonic-crystal-slab channeldrop filter with flat-top response,” Opt. Express 13(7), 2512–2530 (2005).
[Crossref] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-High-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[Crossref]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
[Crossref]

S. Noda, A. Chutinan, and M. Imada, “Trapping and emission of photons by a single defect in a photonic bandgap structure,” Nature 407(6804), 608–610 (2000).
[Crossref] [PubMed]

T. Ihara, Y. Takahashi, S. Noda, and Y. Kanemitsu, “Enhanced radiative recombination rate for electron-hole droplets in silicon photonic crystal nanocavity,” under submission.
[Crossref]

Notomi, M.

T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

Ochi, Y.

Ooka, Y.

Y. Ooka, T. Tetsumoto, N. A. B. Daud, and T. Tanabe, “Ultrasmall in-plane photonic crystal demultiplexers fabricated with photolithography,” Opt. Express 25(2), 1521–1528 (2017).
[Crossref] [PubMed]

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

Otsuka, S.

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

Phang, Y. T.

Pirotta, S.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Sanders, D. P.

D. P. Sanders, “Advances in patterning materials for 193 nm immersion lithography,” Chem. Rev. 110(1), 321–360 (2010).
[Crossref] [PubMed]

Sato, Y.

Savona, V.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

Scullion, M. G.

M. G. Scullion, T. F. Krauss, and A. Di Falco, “Slotted photonic crystal sensors,” Sensors (Basel) 13(3), 3675–3710 (2013).
[Crossref] [PubMed]

Sekoguchi, H.

Selvaraja, S.

Shinya, A.

T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

Song, B. S.

T. Asano, B. S. Song, and S. Noda, “Analysis of the experimental Q factors (~ 1 million) of photonic crystal nanocavities,” Opt. Express 14(5), 1996–2002 (2006).
[Crossref] [PubMed]

Y. Akahane, T. Asano, H. Takano, B. S. Song, Y. Takana, and S. Noda, “Two-dimensional photonic-crystal-slab channeldrop filter with flat-top response,” Opt. Express 13(7), 2512–2530 (2005).
[Crossref] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-High-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[Crossref]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

Song, J. F.

Sugiya, T.

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

Sumikura, H.

T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

Taguchi, Y.

Takagi, H.

J. Lu, L. Zhang, H. Takagi, and R. Maeda, “A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer,” Microelectron. Eng. 119(1), 28–31 (2014).
[Crossref]

Takahashi, Y.

T. Asano, Y. Ochi, Y. Takahashi, K. Kishimoto, and S. Noda, “Photonic crystal nanocavity with a Q factor exceeding eleven million,” Opt. Express 25(3), 1769–1777 (2017).
[Crossref]

K. Maeno, Y. Takahashi, T. Nakamura, T. Asano, and S. Noda, “Analysis of high-Q photonic crystal L3 nanocavities designed by visualization of the leaky components,” Opt. Express 25(1), 367–376 (2017).
[Crossref] [PubMed]

T. Nakamura, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Improvement in the quality factors for photonic crystal nanocavities via visualization of the leaky components,” Opt. Express 24(9), 9541–9549 (2016).
[Crossref] [PubMed]

H. Sekoguchi, Y. Takahashi, T. Asano, and S. Noda, “Photonic crystal nanocavity with a Q-factor of ~9 million,” Opt. Express 22(1), 916–924 (2014).
[Crossref] [PubMed]

Y. Takahashi, T. Asano, D. Yamashita, and S. Noda, “Ultra-compact 32-channel drop filter with 100 GHz spacing,” Opt. Express 22(4), 4692–4698 (2014).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

Y. Taguchi, Y. Takahashi, Y. Sato, T. Asano, and S. Noda, “Statistical studies of photonic heterostructure nanocavities with an average Q factor of three million,” Opt. Express 19(12), 11916–11921 (2011).
[Crossref] [PubMed]

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

T. Ihara, Y. Takahashi, S. Noda, and Y. Kanemitsu, “Enhanced radiative recombination rate for electron-hole droplets in silicon photonic crystal nanocavity,” under submission.
[Crossref]

Takana, Y.

Takano, H.

Tan, C. W.

Tanabe, T.

Y. Ooka, T. Tetsumoto, N. A. B. Daud, and T. Tanabe, “Ultrasmall in-plane photonic crystal demultiplexers fabricated with photolithography,” Opt. Express 25(2), 1521–1528 (2017).
[Crossref] [PubMed]

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

Tanaka, Y.

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

T. Nakamura, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Improvement in the quality factors for photonic crystal nanocavities via visualization of the leaky components,” Opt. Express 24(9), 9541–9549 (2016).
[Crossref] [PubMed]

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
[Crossref] [PubMed]

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

Taniyama, H.

T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

Terasawa, T.

T. Terasawa, N. Hasegawa, H. Fukuda, and S. Katagiri, “Imaging characteristics of multi-phase-shifting and halftone phase-shifting masks,” Jpn. J. Appl. Phys. 30(1), 2991–2997 (1991).
[Crossref]

Terawaki, R.

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

Tetsumoto, T.

Y. Ooka, T. Tetsumoto, N. A. B. Daud, and T. Tanabe, “Ultrasmall in-plane photonic crystal demultiplexers fabricated with photolithography,” Opt. Express 25(2), 1521–1528 (2017).
[Crossref] [PubMed]

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

Thourhout, D. V.

Torunbalci, M. M.

M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs,” J. Microelectromech. Syst. 24(3), 556–564 (2015).
[Crossref]

Upham, J.

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

Urbinati, G.

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
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Vuckovic, J.

Watanabe, T.

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
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Xie, W.

Yamashita, D.

Yazawa, N.

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

Yoshiki, W.

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

Yu, M. B.

Zhang, L.

J. Lu, L. Zhang, H. Takagi, and R. Maeda, “A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer,” Microelectron. Eng. 119(1), 28–31 (2014).
[Crossref]

Appl. Phys. Lett. (6)

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, “Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect,” Appl. Phys. Lett. 88(4), 041112 (2006).
[Crossref]

E. Kuramochi, H. Taniyama, T. Tanabe, A. Shinya, and M. Notomi, “Ultrahigh-Q two-dimensional photonic crystal slab nanocavities in very thin barriers,” Appl. Phys. Lett. 93(11), 111112 (2008).
[Crossref]

Y. Lai, S. Pirotta, G. Urbinati, D. Gerace, M. Minkov, V. Savona, A. Badolato, and M. Galli, “Genetically designed L3 photonic crystal nanocavities with measured quality factor exceeding one million,” Appl. Phys. Lett. 104(24), 241101 (2014).
[Crossref]

S. Iwamoto, Y. Arakawa, and A. Gomyo, “Observation of enhanced photoluminescence from silicon photonic crystal nanocavity at room temperature,” Appl. Phys. Lett. 91(21), 211104 (2007).
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T. Tanabe, H. Sumikura, H. Taniyama, A. Shinya, and M. Notomi, “All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chip,” Appl. Phys. Lett. 96(10), 101103 (2010).
[Crossref]

A. Chutinan, M. Mochizuki, M. Imada, and S. Noda, “Surface-emitting channel drop filters using single defects in two-dimensional photonic crystal slabs,” Appl. Phys. Lett. 79(17), 2690–2692 (2001).
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Chem. Rev. (1)

D. P. Sanders, “Advances in patterning materials for 193 nm immersion lithography,” Chem. Rev. 110(1), 321–360 (2010).
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IEEE J. Sel. Top. Quantum Electron. (1)

H. C. Nguyen, N. Yazawa, S. Hashimoto, S. Otsuka, and T. Baba, “Sub-100μm Photonic Crystal Si Optical Modulators: Spectral, Athermal, and High-Speed Performance,” IEEE J. Sel. Top. Quantum Electron. 19(6), 127–137 (2013).
[Crossref]

J. Lightwave Technol. (1)

J. Microelectromech. Syst. (1)

M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs,” J. Microelectromech. Syst. 24(3), 556–564 (2015).
[Crossref]

Jpn. J. Appl. Phys. (1)

T. Terasawa, N. Hasegawa, H. Fukuda, and S. Katagiri, “Imaging characteristics of multi-phase-shifting and halftone phase-shifting masks,” Jpn. J. Appl. Phys. 30(1), 2991–2997 (1991).
[Crossref]

Microelectron. Eng. (1)

J. Lu, L. Zhang, H. Takagi, and R. Maeda, “A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer,” Microelectron. Eng. 119(1), 28–31 (2014).
[Crossref]

Nat. Mater. (2)

Y. Tanaka, J. Upham, T. Nagashima, T. Sugiya, T. Asano, and S. Noda, “Dynamic control of the Q factor in a photonic crystal nanocavity,” Nat. Mater. 6(11), 862–865 (2007).
[Crossref] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, “Ultra-High-Q photonic double-heterostructure nanocavity,” Nat. Mater. 4(3), 207–210 (2005).
[Crossref]

Nat. Photonics (1)

Y. Sato, Y. Tanaka, J. Upham, Y. Takahashi, T. Asano, and S. Noda, “Strong coupling between distant photonic nanocavities and its dynamic control,” Nat. Photonics 6(1), 56–61 (2012).
[Crossref]

Nature (3)

S. Noda, A. Chutinan, and M. Imada, “Trapping and emission of photons by a single defect in a photonic bandgap structure,” Nature 407(6804), 608–610 (2000).
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Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “A micrometre-scale Raman silicon laser with a microwatt threshold,” Nature 498(7455), 470–474 (2013).
[Crossref] [PubMed]

Opt. Express (14)

T. Asano, B. S. Song, and S. Noda, “Analysis of the experimental Q factors (~ 1 million) of photonic crystal nanocavities,” Opt. Express 14(5), 1996–2002 (2006).
[Crossref] [PubMed]

Q. Fang, T. Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express 18(5), 5106–5113 (2010).
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Q. Fang, Y. T. Phang, C. W. Tan, T. Y. Liow, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Multi-channel silicon photonic receiver based on ring-resonators,” Opt. Express 18(13), 13510–13515 (2010).
[Crossref] [PubMed]

Y. Ooka, T. Tetsumoto, N. A. B. Daud, and T. Tanabe, “Ultrasmall in-plane photonic crystal demultiplexers fabricated with photolithography,” Opt. Express 25(2), 1521–1528 (2017).
[Crossref] [PubMed]

Y. Akahane, T. Asano, H. Takano, B. S. Song, Y. Takana, and S. Noda, “Two-dimensional photonic-crystal-slab channeldrop filter with flat-top response,” Opt. Express 13(7), 2512–2530 (2005).
[Crossref] [PubMed]

D. Englund, I. Fushman, and J. Vucković, “General recipe for designing photonic crystal cavities,” Opt. Express 13(16), 5961–5975 (2005).
[Crossref] [PubMed]

T. Nakamura, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Improvement in the quality factors for photonic crystal nanocavities via visualization of the leaky components,” Opt. Express 24(9), 9541–9549 (2016).
[Crossref] [PubMed]

Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, “Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration,” Opt. Express 17(20), 18093–18102 (2009).
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Y. Taguchi, Y. Takahashi, Y. Sato, T. Asano, and S. Noda, “Statistical studies of photonic heterostructure nanocavities with an average Q factor of three million,” Opt. Express 19(12), 11916–11921 (2011).
[Crossref] [PubMed]

R. Terawaki, Y. Takahashi, M. Chihara, Y. Inui, and S. Noda, “Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands,” Opt. Express 20(20), 22743–22752 (2012).
[Crossref] [PubMed]

H. Sekoguchi, Y. Takahashi, T. Asano, and S. Noda, “Photonic crystal nanocavity with a Q-factor of ~9 million,” Opt. Express 22(1), 916–924 (2014).
[Crossref] [PubMed]

K. Maeno, Y. Takahashi, T. Nakamura, T. Asano, and S. Noda, “Analysis of high-Q photonic crystal L3 nanocavities designed by visualization of the leaky components,” Opt. Express 25(1), 367–376 (2017).
[Crossref] [PubMed]

T. Asano, Y. Ochi, Y. Takahashi, K. Kishimoto, and S. Noda, “Photonic crystal nanocavity with a Q factor exceeding eleven million,” Opt. Express 25(3), 1769–1777 (2017).
[Crossref]

Y. Takahashi, T. Asano, D. Yamashita, and S. Noda, “Ultra-compact 32-channel drop filter with 100 GHz spacing,” Opt. Express 22(4), 4692–4698 (2014).
[Crossref] [PubMed]

Phys. Rev. B (2)

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, “Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities,” Phys. Rev. B 79(8), 085112 (2009).
[Crossref]

Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, “High-Q resonant modes in a photonic crystal heterostructure nanocavity and applicability to a Raman silicon laser,” Phys. Rev. B 88(23), 235313 (2013).
[Crossref]

Sci. Adv. (1)

R. Konoike, H. Nakagawa, M. Nakadai, T. Asano, Y. Tanaka, and S. Noda, “On-demand transfer of trapped photons on a chip,” Sci. Adv. 2(5), e1501690 (2016).
[Crossref] [PubMed]

Sci. Rep. (1)

Y. Ooka, T. Tetsumoto, A. Fushimi, W. Yoshiki, and T. Tanabe, “CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform,” Sci. Rep. 5(1), 11312 (2015).
[Crossref] [PubMed]

Sensors (Basel) (1)

M. G. Scullion, T. F. Krauss, and A. Di Falco, “Slotted photonic crystal sensors,” Sensors (Basel) 13(3), 3675–3710 (2013).
[Crossref] [PubMed]

Other (1)

T. Ihara, Y. Takahashi, S. Noda, and Y. Kanemitsu, “Enhanced radiative recombination rate for electron-hole droplets in silicon photonic crystal nanocavity,” under submission.
[Crossref]

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Figures (6)

Fig. 1
Fig. 1 Summary of fabricated samples. (a) Illustration of a measured multi-heterostructure nanocavity. (b) SEM image. (c) Illustration of a measured eight-channel drop filter consisting of arrayed L3 nanocavities. (d) SEM image of a filter unit using an L3 cavity with 0.15an shifted holes. (e) Cross-sectional SEM image of a PC slab. The magnified image indicates the tilt of the holes (about 3°). (f) AFM image of the Si surface for which Ra = 0.26 nm was obtained.
Fig. 2
Fig. 2 Setup for measuring the resonant spectra of nanocavities. PD: photodiode, Pol.: polarizer, N.A.: numerical aperture.
Fig. 3
Fig. 3 Dropped (filled circles) and transmitted (open circle) spectra for the heterostructure nanocavity with the highest Qexp of 2.3 million. The solid curve is the fitting by a Lorentzian function.
Fig. 4
Fig. 4 (a) Resonant wavelengths and (b) experimental Q of 12 measured nanocavities. The solid and dashed lines indicate the average value and its standard deviation.
Fig. 5
Fig. 5 (a) Calculated Q factors of the nanocavity shown in Fig. 1(b) for 30 fluctuation patterns with σhole = 1 nm. (b) Schematic view of the variation in an air hole’s radius and position. δx and δy represent the variation in position. δr represents the variation in radius.
Fig. 6
Fig. 6 (a) Normalized drop spectra for eight channels (b) Relationship between the drop wavelength and lattice constant in the x direction for an eight-channel filter. The red line shows a linear fit.

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

Q load = λ 0 /Δλ.
Q exp = Q load / T 0 .
1/ Q loss =1/ Q fluc 1/ Q ideal .
Avg.(1/ Q loss )=6.17× 10 7 × σ hole 2 .
S.D.(1/ Q loss )=2.57× 10 7 × σ hole 2 .
S.D.(λ)=0.63× σ hole .
S.D.(λ)=0.68× σ hole .

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