Abstract

The present work demonstrates the potential applicability of additive manufacturing to X-Ray refractive nano-lenses. A compound refractive lens with a radius of 5 µm was produced by the two-photon polymerization induced lithography. It was successfully tested at the X-ray microfocus laboratory source and a focal spot of 5 μm was measured. An amorphous nature of polymer material combined with the potential of additive technologies may result in a significantly enhanced focusing performance compared to the best examples of modern X-ray compound refractive lenses.

© 2017 Optical Society of America

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References

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    [Crossref]
  2. A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
    [Crossref]
  3. B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
    [Crossref]
  4. B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
    [Crossref]
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    [Crossref]
  6. M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
    [Crossref] [PubMed]
  7. S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref] [PubMed]
  22. A. I. Kuznetsov, R. Kiyan, and B. N. Chichkov, “Laser fabrication of 2d and 3d metal nanoparticle structures and arrays,” Opt. Express 18(20), 21198–21203 (2010).
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    [Crossref]
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    [PubMed]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref] [PubMed]
  35. R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14(2), 810–816 (2006).
    [Crossref] [PubMed]
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  37. Excillium microfocus Metal Jet X-ray source - http://www.excillum.com/technology/metal-jet-technology.html
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]

2017 (3)

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

2016 (2)

D. Momotenko, A. Page, M. Adobes-Vidal, and P. R. Unwin, “Write-read 3d patterning with a dual-channel nanopipette,” ACS Nano 10(9), 8871–8878 (2016).
[Crossref] [PubMed]

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

2015 (4)

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

2014 (2)

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

A. Snigirev, I. Snigireva, M. Lyubomirskiy, V. Kohn, V. Yunkin, and S. Kuznetsov, “X-ray multilens interferometer based on si refractive lenses,” Opt. Express 22(21), 25842–25852 (2014).
[Crossref] [PubMed]

2013 (2)

M. Vaezi, H. Seitz, and S. Yang, “A review on 3d micro-additive manufacturing technologies,” Int. J. Adv. Manuf. Technol. 67(5-8), 1721–1754 (2013).
[Crossref]

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

2012 (1)

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

2011 (2)

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

2010 (3)

A. Bosak, I. Snigireva, K. S. Napolskii, and A. Snigirev, “High-resolution transmission x-ray microscopy: A new tool for mesoscopic materials,” Adv. Mater. 22(30), 3256–3259 (2010).
[Crossref] [PubMed]

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

A. I. Kuznetsov, R. Kiyan, and B. N. Chichkov, “Laser fabrication of 2d and 3d metal nanoparticle structures and arrays,” Opt. Express 18(20), 21198–21203 (2010).
[Crossref] [PubMed]

2009 (3)

S. Maruo, A. Takaura, and Y. Saito, “Optically driven micropump with a twin spiral microrotor,” Opt. Express 17(21), 18525–18532 (2009).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

2008 (2)

I. Utke, P. Hoffmann, and J. Melngailis, “Gas-assisted focused electron beam and ion beam processing and fabrication,” J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. Process. Meas. Phenom. 26(4), 1197 (2008).
[Crossref]

A. Boltasseva and V. M. Shalaev, “Fabrication of optical negative-index metamaterials: Recent advances and outlook,” Metamaterials (Amst.) 2(1), 1–17 (2008).
[Crossref]

2007 (2)

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

2006 (2)

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14(2), 810–816 (2006).
[Crossref] [PubMed]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

2005 (4)

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94(5), 054802 (2005).
[Crossref] [PubMed]

C. Sun, N. Fang, D. M. Wu, and X. Zhang, “Projection micro-stereolithography using digital micro-mirror dynamic mask,” Sens. Actuators A Phys. 121(1), 113–120 (2005).
[Crossref]

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, “X-ray high-resolution diffraction using refractive lenses,” Appl. Phys. Lett. 86(1), 014102 (2005).
[Crossref]

2004 (1)

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

2003 (1)

V. Kohn, I. Snigireva, and A. Snigirev, “Diffraction theory of imaging with x-ray compound refractive lens,” Opt. Commun. 216(4-6), 247–260 (2003).
[Crossref]

2000 (1)

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

1999 (2)

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

1997 (1)

1996 (1)

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high-energy x-rays,” Nature 384(6604), 49–51 (1996).
[Crossref]

Abrashitova, K. A.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Achenbach, S.

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

Adobes-Vidal, M.

D. Momotenko, A. Page, M. Adobes-Vidal, and P. R. Unwin, “Write-read 3d patterning with a dual-channel nanopipette,” ACS Nano 10(9), 8871–8878 (2016).
[Crossref] [PubMed]

Aristov, V.

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Benner, B.

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

Bessonov, V. O.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Blank, V.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Boesenberg, U.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Boltasseva, A.

A. Boltasseva and V. M. Shalaev, “Fabrication of optical negative-index metamaterials: Recent advances and outlook,” Metamaterials (Amst.) 2(1), 1–17 (2008).
[Crossref]

Bosak, A.

A. Bosak, I. Snigireva, K. S. Napolskii, and A. Snigirev, “High-resolution transmission x-ray microscopy: A new tool for mesoscopic materials,” Adv. Mater. 22(30), 3256–3259 (2010).
[Crossref] [PubMed]

Boye, P.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Burghammer, M.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Byelov, D. V.

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Bytchkov, A.

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

Cao, Y.-Y.

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

Chang, W. S.

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

Chichkov, B.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Chichkov, B. N.

A. I. Kuznetsov, R. Kiyan, and B. N. Chichkov, “Laser fabrication of 2d and 3d metal nanoparticle structures and arrays,” Opt. Express 18(20), 21198–21203 (2010).
[Crossref] [PubMed]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

Chizhov, A. S.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Curfs, C.

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

Detlefs, C.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Di Michiel, M.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

Diabaté, S.

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

Dorwling-Carter, L.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Drakopoulos, M.

M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, “X-ray high-resolution diffraction using refractive lenses,” Appl. Phys. Lett. 86(1), 014102 (2005).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

Duan, X.-M.

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

Emons, M.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Ershov, P.

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

Eyberger, C.

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

Ezhov, A. A.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Falkenberg, G.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Fang, N.

C. Sun, N. Fang, D. M. Wu, and X. Zhang, “Projection micro-stereolithography using digital micro-mirror dynamic mask,” Sens. Actuators A Phys. 121(1), 113–120 (2005).
[Crossref]

Fedyanin, A. A.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Feldkamp, J.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Frenner, K.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Galtier, E. C.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Garrevoet, J.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Giakoumidis, S.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Gleyzolle, H.

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

Goikhman, A.

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

Grigoriev, M.

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Gulkin, D. N.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Günzler, T. F.

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

Guo, R.

Haverich, A.

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

Hilhorst, J.

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Hirt, L.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Hoffmann, M.

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Hoffmann, P.

I. Utke, P. Hoffmann, and J. Melngailis, “Gas-assisted focused electron beam and ion beam processing and fabrication,” J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. Process. Meas. Phenom. 26(4), 1197 (2008).
[Crossref]

Huang, W.

Ihle, S.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Ja Lee, H.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Kawata, S.

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

Kim, D.

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

Kim, J. H.

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

Kim, J. T.

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

King, A.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Kiyan, R.

Kohn, V.

A. Snigirev, I. Snigireva, M. Lyubomirskiy, V. Kohn, V. Yunkin, and S. Kuznetsov, “X-ray multilens interferometer based on si refractive lenses,” Opt. Express 22(21), 25842–25852 (2014).
[Crossref] [PubMed]

V. Kohn, I. Snigireva, and A. Snigirev, “Diffraction theory of imaging with x-ray compound refractive lens,” Opt. Commun. 216(4-6), 247–260 (2003).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high-energy x-rays,” Nature 384(6604), 49–51 (1996).
[Crossref]

Kokareva, N. G.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Kolodziej, T.

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Kuhlmann, M.

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

Kurapova, O.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

Kuznetsov, A. I.

Kuznetsov, S.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, M. Lyubomirskiy, V. Kohn, V. Yunkin, and S. Kuznetsov, “X-ray multilens interferometer based on si refractive lenses,” Opt. Express 22(21), 25842–25852 (2014).
[Crossref] [PubMed]

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Lai, B.

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

Lee, S.

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

Leferink op Reinink, A. B. G. M.

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Lengeler, B.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94(5), 054802 (2005).
[Crossref] [PubMed]

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high-energy x-rays,” Nature 384(6604), 49–51 (1996).
[Crossref]

Li, J.

Ludwig, W.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Lyubomirskiy, M.

Maruo, S.

McNulty, I.

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
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Melngailis, J.

I. Utke, P. Hoffmann, and J. Melngailis, “Gas-assisted focused electron beam and ion beam processing and fabrication,” J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. Process. Meas. Phenom. 26(4), 1197 (2008).
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Mohr, J.

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

Momotenko, D.

D. Momotenko, A. Page, M. Adobes-Vidal, and P. R. Unwin, “Write-read 3d patterning with a dual-channel nanopipette,” ACS Nano 10(9), 8871–8878 (2016).
[Crossref] [PubMed]

Morgner, U.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Morse, J.

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

Nagler, B.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Nakamura, O.

Napolskii, K. S.

A. Bosak, I. Snigireva, K. S. Napolskii, and A. Snigirev, “High-resolution transmission x-ray microscopy: A new tool for mesoscopic materials,” Adv. Mater. 22(30), 3256–3259 (2010).
[Crossref] [PubMed]

Nazmov, V.

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

Ngezahayo, A.

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

Nolte, S.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Obata, K.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Osten, W.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Ovsianikov, A.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

Page, A.

D. Momotenko, A. Page, M. Adobes-Vidal, and P. R. Unwin, “Write-read 3d patterning with a dual-channel nanopipette,” ACS Nano 10(9), 8871–8878 (2016).
[Crossref] [PubMed]

Pan, Z.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Pantleon, W.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Parfeniukas, K.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Patommel, J.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Paz, V. F.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Peterhänsel, S.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Petukhov, A. V.

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Polikarpov, M.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Polyakov, S.

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Portale, G.

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Poulsen, H. F.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Qian, J.

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Rahomäki, J.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Rau, C.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Reinhardt, C.

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

Reiser, A.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Reznikova, E.

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

Richwin, M.

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

Riekel, C.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Rödel, C.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Rossat, M.

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
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Safronov, K. R.

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

Saile, V.

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

Saito, Y.

Schilling, J.

M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, “X-ray high-resolution diffraction using refractive lenses,” Appl. Phys. Lett. 86(1), 014102 (2005).
[Crossref]

Schlie, S.

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

Schmidt, S.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Scholz, M.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Schroer, C.

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

Schroer, C. G.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94(5), 054802 (2005).
[Crossref] [PubMed]

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

Schropp, A.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Seiboth, F.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Seitz, H.

M. Vaezi, H. Seitz, and S. Yang, “A review on 3d micro-additive manufacturing technologies,” Int. J. Adv. Manuf. Technol. 67(5-8), 1721–1754 (2013).
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Seol, S. K.

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
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Shabelnikov, L.

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Shalaev, V. M.

A. Boltasseva and V. M. Shalaev, “Fabrication of optical negative-index metamaterials: Recent advances and outlook,” Metamaterials (Amst.) 2(1), 1–17 (2008).
[Crossref]

Shvyd’ko, Y.

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Simon, R.

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

Simons, H.

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Snigirev, A.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, M. Lyubomirskiy, V. Kohn, V. Yunkin, and S. Kuznetsov, “X-ray multilens interferometer based on si refractive lenses,” Opt. Express 22(21), 25842–25852 (2014).
[Crossref] [PubMed]

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

A. Bosak, I. Snigireva, K. S. Napolskii, and A. Snigirev, “High-resolution transmission x-ray microscopy: A new tool for mesoscopic materials,” Adv. Mater. 22(30), 3256–3259 (2010).
[Crossref] [PubMed]

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, “X-ray high-resolution diffraction using refractive lenses,” Appl. Phys. Lett. 86(1), 014102 (2005).
[Crossref]

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

V. Kohn, I. Snigireva, and A. Snigirev, “Diffraction theory of imaging with x-ray compound refractive lens,” Opt. Commun. 216(4-6), 247–260 (2003).
[Crossref]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high-energy x-rays,” Nature 384(6604), 49–51 (1996).
[Crossref]

Snigireva, I.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, M. Lyubomirskiy, V. Kohn, V. Yunkin, and S. Kuznetsov, “X-ray multilens interferometer based on si refractive lenses,” Opt. Express 22(21), 25842–25852 (2014).
[Crossref] [PubMed]

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

A. Bosak, I. Snigireva, K. S. Napolskii, and A. Snigirev, “High-resolution transmission x-ray microscopy: A new tool for mesoscopic materials,” Adv. Mater. 22(30), 3256–3259 (2010).
[Crossref] [PubMed]

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, “X-ray high-resolution diffraction using refractive lenses,” Appl. Phys. Lett. 86(1), 014102 (2005).
[Crossref]

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

V. Kohn, I. Snigireva, and A. Snigirev, “Diffraction theory of imaging with x-ray compound refractive lens,” Opt. Commun. 216(4-6), 247–260 (2003).
[Crossref]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high-energy x-rays,” Nature 384(6604), 49–51 (1996).
[Crossref]

Spolenak, R.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Sun, C.

C. Sun, N. Fang, D. M. Wu, and X. Zhang, “Projection micro-stereolithography using digital micro-mirror dynamic mask,” Sens. Actuators A Phys. 121(1), 113–120 (2005).
[Crossref]

Takaura, A.

Takeyasu, N.

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

Tanaka, T.

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

Terentyev, S.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Tümmler, J.

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

Ullsperger, T.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Unwin, P. R.

D. Momotenko, A. Page, M. Adobes-Vidal, and P. R. Unwin, “Write-read 3d patterning with a dual-channel nanopipette,” ACS Nano 10(9), 8871–8878 (2016).
[Crossref] [PubMed]

Utke, I.

I. Utke, P. Hoffmann, and J. Melngailis, “Gas-assisted focused electron beam and ion beam processing and fabrication,” J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. Process. Meas. Phenom. 26(4), 1197 (2008).
[Crossref]

Vaezi, M.

M. Vaezi, H. Seitz, and S. Yang, “A review on 3d micro-additive manufacturing technologies,” Int. J. Adv. Manuf. Technol. 67(5-8), 1721–1754 (2013).
[Crossref]

Vaughan, G.

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

Vaughan, G. B.

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

Vaughan, G. B. M.

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Vincze, L.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Voges, E.

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Vogt, H.

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

Vogt, U.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Vörös, J.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Wagner, U.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Weitkamp, T.

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Wheeler, J. M.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Wittwer, F.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Wright, J.

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

Wright, J. P.

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

Wu, D. M.

C. Sun, N. Fang, D. M. Wu, and X. Zhang, “Projection micro-stereolithography using digital micro-mirror dynamic mask,” Sens. Actuators A Phys. 121(1), 113–120 (2005).
[Crossref]

Wünsche, M.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

Xia, A.

Xiao, S.

Yang, S.

M. Vaezi, H. Seitz, and S. Yang, “A review on 3d micro-additive manufacturing technologies,” Int. J. Adv. Manuf. Technol. 67(5-8), 1721–1754 (2013).
[Crossref]

Yunkin, V.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

A. Snigirev, I. Snigireva, M. Lyubomirskiy, V. Kohn, V. Yunkin, and S. Kuznetsov, “X-ray multilens interferometer based on si refractive lenses,” Opt. Express 22(21), 25842–25852 (2014).
[Crossref] [PubMed]

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

Zambelli, T.

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

Zhai, X.

Zhang, X.

C. Sun, N. Fang, D. M. Wu, and X. Zhang, “Projection micro-stereolithography using digital micro-mirror dynamic mask,” Sens. Actuators A Phys. 121(1), 113–120 (2005).
[Crossref]

Zholudev, S.

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Zhou, H.

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Zontone, F.

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

ACS Nano (1)

D. Momotenko, A. Page, M. Adobes-Vidal, and P. R. Unwin, “Write-read 3d patterning with a dual-channel nanopipette,” ACS Nano 10(9), 8871–8878 (2016).
[Crossref] [PubMed]

Acta Crystallogr. A (1)

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, and L. Vincze, “Hard x-ray nanoprobe with refractive x-ray lenses,” Acta Crystallogr. A 62(a1), s93 (2006).
[Crossref]

Adv. Mater. (2)

L. Hirt, S. Ihle, Z. Pan, L. Dorwling-Carter, A. Reiser, J. M. Wheeler, R. Spolenak, J. Vörös, and T. Zambelli, “Template-free 3d microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition,” Adv. Mater. 28(12), 2311–2315 (2016).
[Crossref] [PubMed]

A. Bosak, I. Snigireva, K. S. Napolskii, and A. Snigirev, “High-resolution transmission x-ray microscopy: A new tool for mesoscopic materials,” Adv. Mater. 22(30), 3256–3259 (2010).
[Crossref] [PubMed]

AIP Conf. Proc. (1)

I. Snigireva, G. B. M. Vaughan, A. Snigirev, I. McNulty, C. Eyberger, and B. Lai, “High-energy nanoscale-resolution x-ray microscopy based on refractive optics on a long beamline,” AIP Conf. Proc. 1365, 188–191 (2011).
[Crossref]

Appl. Phys. Lett. (4)

B. Lengeler, C. G. Schroer, M. Richwin, J. Tümmler, M. Drakopoulos, A. Snigirev, and I. Snigireva, “A microscope for hard x rays based on parabolic compound refractive lenses,” Appl. Phys. Lett. 74(26), 3924–3926 (1999).
[Crossref]

M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, “X-ray high-resolution diffraction using refractive lenses,” Appl. Phys. Lett. 86(1), 014102 (2005).
[Crossref]

V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, and E. Voges, “X-ray refractive planar lens with minimized absorption,” Appl. Phys. Lett. 77(24), 4058–4060 (2000).
[Crossref]

S. Terentyev, V. Blank, S. Polyakov, S. Zholudev, A. Snigirev, M. Polikarpov, T. Kolodziej, J. Qian, H. Zhou, and Y. Shvyd’ko, “Parabolic single-crystal diamond lenses for coherent x-ray imaging,” Appl. Phys. Lett. 107(11), 111108 (2015).
[Crossref]

Int. J. Adv. Manuf. Technol. (1)

M. Vaezi, H. Seitz, and S. Yang, “A review on 3d micro-additive manufacturing technologies,” Int. J. Adv. Manuf. Technol. 67(5-8), 1721–1754 (2013).
[Crossref]

J. Appl. Cryst. (1)

P. Ershov, S. Kuznetsov, I. Snigireva, V. Yunkin, A. Goikhman, and A. Snigirev, “Fourier crystal diffractometry based on refractive optics,” J. Appl. Cryst. 46(5), 1475–1480 (2013).
[Crossref]

J. Laser Appl. (1)

V. F. Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, and W. Osten, “Development of functional sub-100 nm structures with 3d two-photon polymerization technique and optical methods for characterization,” J. Laser Appl. 24(4), 042004 (2012).
[Crossref]

J. Micromech. Microeng. (1)

V. Nazmov, J. Mohr, H. Vogt, R. Simon, and S. Diabaté, “Multi-field x-ray microscope based on array of refractive lenses,” J. Micromech. Microeng. 24(7), 075005 (2014).
[Crossref]

J. Phys. Conf. Ser. (1)

A. Snigirev, I. Snigireva, G. Vaughan, J. Wright, M. Rossat, A. Bytchkov, and C. Curfs, “High energy x-ray transfocator based on al parabolic refractive lenses for focusing and collimation,” J. Phys. Conf. Ser. 186, 012073 (2009).
[Crossref]

J. Phys. D Appl. Phys. (1)

B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys. 38(10A), A218–A222 (2005).
[Crossref]

J. Synchrotron Radiat. (4)

B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, “Imaging by parabolic refractive lenses in the hard x-ray range,” J. Synchrotron Radiat. 6(6), 1153–1167 (1999).
[Crossref]

S. Terentyev, M. Polikarpov, I. Snigireva, M. Di Michiel, S. Zholudev, V. Yunkin, S. Kuznetsov, V. Blank, and A. Snigirev, “Linear parabolic single-crystal diamond refractive lenses for synchrotron x-ray sources,” J. Synchrotron Radiat. 24(1), 103–109 (2017).
[Crossref] [PubMed]

M. Polikarpov, I. Snigireva, J. Morse, V. Yunkin, S. Kuznetsov, and A. Snigirev, “Large-acceptance diamond planar refractive lenses manufactured by laser cutting,” J. Synchrotron Radiat. 22(1), 23–28 (2015).
[Crossref] [PubMed]

G. B. Vaughan, J. P. Wright, A. Bytchkov, M. Rossat, H. Gleyzolle, I. Snigireva, and A. Snigirev, “X-ray transfocators: Focusing devices based on compound refractive lenses,” J. Synchrotron Radiat. 18(2), 125–133 (2011).
[Crossref] [PubMed]

J. Tissue Eng. Regen. Med. (1)

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of cad-designed 3d scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref] [PubMed]

J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. Process. Meas. Phenom. (1)

I. Utke, P. Hoffmann, and J. Melngailis, “Gas-assisted focused electron beam and ion beam processing and fabrication,” J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. Process. Meas. Phenom. 26(4), 1197 (2008).
[Crossref]

Metamaterials (Amst.) (1)

A. Boltasseva and V. M. Shalaev, “Fabrication of optical negative-index metamaterials: Recent advances and outlook,” Metamaterials (Amst.) 2(1), 1–17 (2008).
[Crossref]

Microsyst. Technol. (1)

V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, and V. Saile, “Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers,” Microsyst. Technol. 10(10), 716–721 (2004).
[Crossref]

Nat. Commun. (2)

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. Ja Lee, B. Nagler, and C. G. Schroer, “Perfect x-ray focusing via fitting corrective glasses to aberrated optics,” Nat. Commun. 8, 14623 (2017).
[Crossref] [PubMed]

H. Simons, A. King, W. Ludwig, C. Detlefs, W. Pantleon, S. Schmidt, I. Snigireva, A. Snigirev, and H. F. Poulsen, “Dark-field x-ray microscopy for multiscale structural characterization,” Nat. Commun. 6, 6098 (2015).
[Crossref] [PubMed]

Nature (1)

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high-energy x-rays,” Nature 384(6604), 49–51 (1996).
[Crossref]

Opt. Commun. (1)

V. Kohn, I. Snigireva, and A. Snigirev, “Diffraction theory of imaging with x-ray compound refractive lens,” Opt. Commun. 216(4-6), 247–260 (2003).
[Crossref]

Opt. Express (4)

Opt. Lett. (1)

Phase Transit. (1)

D. V. Byelov, J. Hilhorst, A. B. G. M. Leferink op Reinink, I. Snigireva, A. Snigirev, G. B. M. Vaughan, G. Portale, and A. V. Petukhov, “Diffuse scattering in random-stacking hexagonal close-packed crystals of colloidal hard spheres,” Phase Transit. 83(2), 107–114 (2010).
[Crossref]

Phys. Rev. Lett. (1)

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94(5), 054802 (2005).
[Crossref] [PubMed]

Proc. SPIE (2)

K. A. Abrashitova, D. N. Gulkin, N. G. Kokareva, K. R. Safronov, A. S. Chizhov, A. A. Ezhov, V. O. Bessonov, and A. A. Fedyanin, “Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices,” Proc. SPIE 10115, 101150 (2017).

A. Snigirev, I. Snigireva, M. Grigoriev, V. Yunkin, M. Di Michiel, S. Kuznetsov, and G. Vaughan, “Silicon planar lenses for high energy x-ray nanofocusing,” Proc. SPIE 6705, 670506 (2007).
[Crossref]

Sens. Actuators A Phys. (1)

C. Sun, N. Fang, D. M. Wu, and X. Zhang, “Projection micro-stereolithography using digital micro-mirror dynamic mask,” Sens. Actuators A Phys. 121(1), 113–120 (2005).
[Crossref]

Small (2)

Y.-Y. Cao, N. Takeyasu, T. Tanaka, X.-M. Duan, and S. Kawata, “3d metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction,” Small 5(10), 1144–1148 (2009).
[PubMed]

S. K. Seol, D. Kim, S. Lee, J. H. Kim, W. S. Chang, and J. T. Kim, “Electrodeposition-based 3d printing of metallic microarchitectures with controlled internal structures,” Small 11(32), 3896–3902 (2015).
[Crossref] [PubMed]

Other (1)

Excillium microfocus Metal Jet X-ray source - http://www.excillum.com/technology/metal-jet-technology.html

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Figures (4)

Fig. 1
Fig. 1

The 2PP experimental setup (a) and model of polymer refractive lens (b).

Fig. 2
Fig. 2

SEM image of the fabricated polymer compound refractive lens. Upper insert shows the polymer lens in the cross-section. The insert in the bottom depicts individual refractive lens.

Fig. 3
Fig. 3

Photograph (a) and layout (b) of the X-ray experiment.

Fig. 4
Fig. 4

Beam cross-sections measured at different distances along the lens optical axis (a) and the best knife-edge scan with the minimal size at the imaging distance L2 = 16 cm (b).

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