Abstract

In this work, a 25 Gb ps silicon push-pull Mach-Zehnder modulator operating in the O-Band (1260 nm – 1360 nm) of optical communications and fabricated on a 300 mm platform is presented. The measured modulation efficiency (VπLπ) was comprised between 0.95 V cm and 1.15 V cm, which is comparable to the state-of-the-art modulators in the C-Band, that enabled its use with a driving voltage of 3.3 Vpp, compatible with BiCMOS technology. An extinction ratio of 5 dB and an on-chip insertion losses of 3.6 dB were then demonstrated at 25 Gb ps.

© 2017 Optical Society of America

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2016 (5)

D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, and D. Marris-Morini, “Silicon modulator based on interleaved capacitors in subwavelength grating waveguides,” Proc. SPIE 9891, 989112 (2016)
[Crossref]

T. Ferroti, B. Blampey, C. Jany, H. Duprez, A. Chantre, F. Boeuf, C. Seassal, and B. Ben Bakir, “Co-integrated 1.3μm hybrid III–V/silicon tunable laser and silicon Mach-Zehnder modulator operating at 25Gb/s,” Opt. Express 24, 30379–30401 (2016).
[Crossref]

D. Pérez-Galacho, D. Marris-Morini, R. Stoffer, E. Cassan, C. Baudot, T. Korthorst, F. Boeuf, and L. Vivien, “Simplified modeling and optimization of silicon modulators based on free-carrier plasma dispersion effect,” Opt. Express 24, 26332–26337 (2016).
[Crossref] [PubMed]

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

2015 (5)

2014 (5)

2013 (4)

2011 (1)

M. J. Paniccia, “A perfect marriage: optics and silicon,” Optik & Photonik 6, 34–38 (2011).
[Crossref]

2008 (1)

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE T. Comput. 57, 1246–1260 (2008).
[Crossref]

2006 (1)

1987 (1)

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Elec. 23, 123–129 (1987).
[Crossref]

Abraham, A.

D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, and D. Marris-Morini, “Silicon modulator based on interleaved capacitors in subwavelength grating waveguides,” Proc. SPIE 9891, 989112 (2016)
[Crossref]

A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, and L. Vivien, “Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide,” in Proceedings of IEEE 12th International Conference on Group IV Photonics (GFP) (IEEE, 2015), pp. 118–119.

Adibi, A.

Akiyama, S.

Al-Saadi, A.

Baba, T.

Baehr-Jones, T.

Barth, R.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Batail, E.

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Baudot, C.

D. Pérez-Galacho, D. Marris-Morini, R. Stoffer, E. Cassan, C. Baudot, T. Korthorst, F. Boeuf, and L. Vivien, “Simplified modeling and optimization of silicon modulators based on free-carrier plasma dispersion effect,” Opt. Express 24, 26332–26337 (2016).
[Crossref] [PubMed]

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Ben Bakir, B.

Bennett, B. R.

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Elec. 23, 123–129 (1987).
[Crossref]

Bergman, K.

Q. Li, R. Ding, Y. Liu, T. Baehr-Jones, M. Hochberg, and K. Bergman, “High-speed bpsk modulation in silicon,” IEEE Photonic. Tech. L. 27, 1329–1332 (2015).
[Crossref]

Z. Xuan, Y. Ma, Y. Liu, R. Ding, Y. Li, N. Ophir, A. E.-J. Lim, G.-Q. Lo, P. Magill, K. Bergman, T. Baehr-Jones, and M. Hochberg, “Silicon microring modulator for 40 gb/s nrz-ook metro networks in o-band,” Opt. Express 22, 28284–28291 (2014).
[Crossref] [PubMed]

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE T. Comput. 57, 1246–1260 (2008).
[Crossref]

Bernard, E.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Blampey, B.

Blanc, R.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Boeuf, F.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

T. Ferroti, B. Blampey, C. Jany, H. Duprez, A. Chantre, F. Boeuf, C. Seassal, and B. Ben Bakir, “Co-integrated 1.3μm hybrid III–V/silicon tunable laser and silicon Mach-Zehnder modulator operating at 25Gb/s,” Opt. Express 24, 30379–30401 (2016).
[Crossref]

D. Pérez-Galacho, D. Marris-Morini, R. Stoffer, E. Cassan, C. Baudot, T. Korthorst, F. Boeuf, and L. Vivien, “Simplified modeling and optimization of silicon modulators based on free-carrier plasma dispersion effect,” Opt. Express 24, 26332–26337 (2016).
[Crossref] [PubMed]

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Bouville, D.

Buhl, L. L.

Carloni, L. P.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE T. Comput. 57, 1246–1260 (2008).
[Crossref]

Cassan, E.

D. Pérez-Galacho, D. Marris-Morini, R. Stoffer, E. Cassan, C. Baudot, T. Korthorst, F. Boeuf, and L. Vivien, “Simplified modeling and optimization of silicon modulators based on free-carrier plasma dispersion effect,” Opt. Express 24, 26332–26337 (2016).
[Crossref] [PubMed]

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Chagnon, M.

Chantre, A.

Chattin, B.

Chee, E. K. S.

Chen, J.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
[Crossref]

Chen, Y.-K.

P. Dong, C. Xie, L. L. Buhl, Y.-K. Chen, J. H. Sinsky, and G. Raybon, “Silicon in-phase/quadrature modulator with on-chip optical equalizer,” J. Lightwave Technol. 33, 1191–1196 (2015).
[Crossref]

P. Dong, Y.-K. Chen, G.-H. Duan, and D. T. Neilson, “Silicon photonic devices and integrated circuits,” Nanophotonics 3, 215–228 (2014).
[Crossref]

Crémer, S.

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Crozat, P.

Dama, B.

De-Buttet, C.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Ding, R.

Dong, P.

P. Dong, C. Xie, L. L. Buhl, Y.-K. Chen, J. H. Sinsky, and G. Raybon, “Silicon in-phase/quadrature modulator with on-chip optical equalizer,” J. Lightwave Technol. 33, 1191–1196 (2015).
[Crossref]

P. Dong, Y.-K. Chen, G.-H. Duan, and D. T. Neilson, “Silicon photonic devices and integrated circuits,” Nanophotonics 3, 215–228 (2014).
[Crossref]

Douix, M.

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Duan, G.-H.

P. Dong, Y.-K. Chen, G.-H. Duan, and D. T. Neilson, “Silicon photonic devices and integrated circuits,” Nanophotonics 3, 215–228 (2014).
[Crossref]

Dubray, O.

A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, and L. Vivien, “Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide,” in Proceedings of IEEE 12th International Conference on Group IV Photonics (GFP) (IEEE, 2015), pp. 118–119.

Duprez, H.

Eftekhar, A. A.

Eichler, H. J.

Fathpour, S.

Fédéli, J.-M.

Ferroti, T.

Fincato, A.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Fowler, D.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Franke, B. A.

Gagné, J.-F.

Garcia-Lopez, I.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Gardes, F. Y.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Gays, F.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Goll, B.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Hirayama, N.

Hochberg, M.

Horikawa, T.

Hosseinnia, A. H.

Hu, Y.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Imai, M.

Isautier, P.

Jalali, B.

Jany, C.

Jeans, G.

Kissinger, D.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Knoll, D.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Kopp, C.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Korthorst, T.

Kroh, M.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Kupijai, S.

Kuramochi, E.

Latrasse, C.

Lessard, S.

Li, Q.

Q. Li, R. Ding, Y. Liu, T. Baehr-Jones, M. Hochberg, and K. Bergman, “High-speed bpsk modulation in silicon,” IEEE Photonic. Tech. L. 27, 1329–1332 (2015).
[Crossref]

Li, Y.

Lim, A. E.-J.

Lischke, S.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Liu, L.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
[Crossref]

Liu, Y.

Lo, G.-Q.

Lo, P. G.-Q.

Ma, Y.

Magill, P.

Mai, C.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Marris-Morini, D.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

D. Pérez-Galacho, D. Marris-Morini, R. Stoffer, E. Cassan, C. Baudot, T. Korthorst, F. Boeuf, and L. Vivien, “Simplified modeling and optimization of silicon modulators based on free-carrier plasma dispersion effect,” Opt. Express 24, 26332–26337 (2016).
[Crossref] [PubMed]

D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, and D. Marris-Morini, “Silicon modulator based on interleaved capacitors in subwavelength grating waveguides,” Proc. SPIE 9891, 989112 (2016)
[Crossref]

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Marrls-Morini, D.

A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, and L. Vivien, “Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide,” in Proceedings of IEEE 12th International Conference on Group IV Photonics (GFP) (IEEE, 2015), pp. 118–119.

Meister, S.

Menezo, S.

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, and L. Vivien, “Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide,” in Proceedings of IEEE 12th International Conference on Group IV Photonics (GFP) (IEEE, 2015), pp. 118–119.

Messaoudène, S.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Metz, P.

Mezzomo, C.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Moradinejad, H.

Muzio, C.

Neilson, D. T.

P. Dong, Y.-K. Chen, G.-H. Duan, and D. T. Neilson, “Silicon photonic devices and integrated circuits,” Nanophotonics 3, 215–228 (2014).
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Nishiguchi, K.

Noguchi, Y.

Notomi, M.

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Olivier, S.

D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, and D. Marris-Morini, “Silicon modulator based on interleaved capacitors in subwavelength grating waveguides,” Proc. SPIE 9891, 989112 (2016)
[Crossref]

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, and L. Vivien, “Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide,” in Proceedings of IEEE 12th International Conference on Group IV Photonics (GFP) (IEEE, 2015), pp. 118–119.

Ophir, N.

Orlando, B.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Osman, M.

Painchaud, Y.

Paniccia, M. J.

M. J. Paniccia, “A perfect marriage: optics and silicon,” Optik & Photonik 6, 34–38 (2011).
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Paquet, C.

Peczek, A.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Perez-Galacho, D.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, and D. Marris-Morini, “Silicon modulator based on interleaved capacitors in subwavelength grating waveguides,” Proc. SPIE 9891, 989112 (2016)
[Crossref]

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Pérez-Galacho, D.

Petermann, K.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Petousi, D.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Planchot, J.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Plant, D.

Porte, H.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Poulin, M.

Ralph, S.

Rasigade, G.

Raybon, G.

Reed, G. T.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Rhee, H.

Richard, C.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

Richter, H. H.

Rideau, D.

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Rito, P.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Rivallin, P.

Roux, X. L.

Schneider, T.

Seassal, C.

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Shastri, K.

Shinya, A.

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Sodagar, M.

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R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Elec. 23, 123–129 (1987).
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Souhaite, A.

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Souhaité, A.

C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

Stoffer, R.

Stolarek, D.

Streshinsky, M.

Sunder, S.

Takahashi, H.

Theiss, C.

Thomson, D. J.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Tian, H.

Tillack, B.

Tu, X.

Ulusoy, A.-C.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Usuki, T.

Vivien, L.

D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, and D. Marris-Morini, “Silicon modulator based on interleaved capacitors in subwavelength grating waveguides,” Proc. SPIE 9891, 989112 (2016)
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C. Baudot, A. Fincato, D. Fowler, D. Perez-Galacho, A. Souhaité, S. Messaoudène, R. Blanc, C. Richard, J. Planchot, C. De-Buttet, B. Orlando, F. Gays, C. Mezzomo, E. Bernard, D. Marris-Morini, L. Vivien, C. Kopp, and F. Boeuf, “Daphne silicon photonics technological platform for research and development on wdm applications,” Proc. SPIE 9891, 98911D (2016).

D. Pérez-Galacho, D. Marris-Morini, R. Stoffer, E. Cassan, C. Baudot, T. Korthorst, F. Boeuf, and L. Vivien, “Simplified modeling and optimization of silicon modulators based on free-carrier plasma dispersion effect,” Opt. Express 24, 26332–26337 (2016).
[Crossref] [PubMed]

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, and L. Vivien, “Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide,” in Proceedings of IEEE 12th International Conference on Group IV Photonics (GFP) (IEEE, 2015), pp. 118–119.

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Voigt, K.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

Vulliet, N.

D. Marris-Morini, C. Baudot, J.-M. Fédéli, G. Rasigade, N. Vulliet, A. Souhaité, M. Ziebell, P. Rivallin, S. Olivier, P. Crozat, X. L. Roux, D. Bouville, S. Menezo, F. Boeuf, and L. Vivien, “Low loss 40 gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm soi wafers,” Opt. Express 21, 22471–22475 (2013).
[Crossref] [PubMed]

M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, and F. Boeuf, “Design of integrated capacitive modulators for 56gbps operation,” in Proceedings of IEEE 13th International Conference on Group IV Photonics (GFP) (IEEE, 2016). pp. 5–7

Wang, J.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
[Crossref]

Wang, T.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
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Webster, M.

Winzer, G.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
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Woggon, U.

Xie, C.

Xuan, Z.

Yang, R.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
[Crossref]

Yang, Y.

Zhou, L.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
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Zhou, Y.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
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Zhu, H.

J. Wang, L. Zhou, H. Zhu, R. Yang, Y. Zhou, L. Liu, T. Wang, and J. Chen, “Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode,” Photonics Research 3, 58–62 (2015).
[Crossref]

Ziebell, M.

Zimmermann, H.

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

Zimmermann, L.

D. Petousi, P. Rito, S. Lischke, D. Knoll, I. Garcia-Lopez, M. Kroh, R. Barth, C. Mai, A.-C. Ulusoy, A. Peczek, G. Winzer, K. Voigt, D. Kissinger, K. Petermann, and L. Zimmermann, “Monolithically integrated high-extinction-ratio mzm with a segmented driver in photonic bicmos,” IEEE Photonic. Tech. L. 28, 2866–2869 (2016).
[Crossref]

D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, and L. Zimmermann, “Silicon carrier depletion modulator with 10 gbit/s driver realized in high-performance photonic bicmos,” Laser Photon. Rev. 8, 180–187 (2014).
[Crossref]

S. Meister, H. Rhee, A. Al-Saadi, B. A. Franke, S. Kupijai, C. Theiss, L. Zimmermann, B. Tillack, H. H. Richter, H. Tian, D. Stolarek, T. Schneider, U. Woggon, and H. J. Eichler, “Matching pin-junctions and optical modes enables fast and ultra-small silicon modulators,” Opt. Express 21, 16210–16221 (2013).
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IEEE J. Quantum Elec. (1)

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Elec. 23, 123–129 (1987).
[Crossref]

IEEE Photonic. Tech. L. (2)

Q. Li, R. Ding, Y. Liu, T. Baehr-Jones, M. Hochberg, and K. Bergman, “High-speed bpsk modulation in silicon,” IEEE Photonic. Tech. L. 27, 1329–1332 (2015).
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Opt. Express (10)

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Figures (5)

Fig. 1
Fig. 1

Schematic view of the lateral PN junction based phase shifter.

Fig. 2
Fig. 2

Schematic view of the experimental setup employed to characterize the modulator.

Fig. 3
Fig. 3

Static response for several reverse applied voltages of (a) the 1 mm long symmetric MZM and (b) the ring resonator (b). (c) Measured modulation efficiency of the phase shifter as a function of the reverse applied voltage.

Fig. 4
Fig. 4

Normalized small signal electro-optical response as a function of the applied frequency.

Fig. 5
Fig. 5

Measured eye diagram at 25 Gb ps of the 1 mm long symmetric MZM with an applied voltage swing of 3.3 Vpp and 1.7 V DC bias.

Tables (1)

Tables Icon

Table 1 Comparison between silicon modulators.

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