Abstract

Photostructurable properties of photo-thermo-refractive glass are discovered for the first time. The etching kinetics in HF solutions for virgin photo-thermo-refractive glass and glass ceramics are investigated. The etching rate of the glass ceramics is shown to be more than ten times higher than that of glass. Future prospects of applying the chemical etching technology for developing various PTR glass-based photonic and mechatronic elements are discussed.

© 2016 Optical Society of America

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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
  35. L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).
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2015 (2)

S. A. Ivanov, A. I. Ignatiev, and N. V. Nikonorov, “Advances in photo-thermo-refractive glass composition modifications,” Proc. SPIE 9508, 95080E (2015).
[Crossref]

Y. M. Sgibnev, N. V. Nikonorov, V. N. Vasilev, and A. I. Ignatiev, “Optical gradient waveguides in photo-thermo-refractive glass formed by ion exchange method,” J. Lightwave Technol. 33(17), 3730–3735 (2015).
[Crossref]

2014 (3)

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

S. A. Ivanov, A. I. Ignatiev, N. V. Nikonorov, and V. A. Aseev, “Holographic characteristics of a modified photothermorefractive glass,” J. Opt. Technol. 81(6), 356–360 (2014).
[Crossref]

J. Lumeau, K. Chamma, L. Glebova, and L. B. Glebov, “X-ray diffraction study of NaF nano-crystals in photo-thermo-refractive glass,” J. Non-Cryst. Solids 405, 188–195 (2014).
[Crossref]

2013 (2)

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

2012 (1)

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

2011 (1)

2010 (2)

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

J. D. Williams, C. Schmidt, and D. Serkland, “Processing advances in transparent Foturan MEMS,” Appl. Phys., A Mater. Sci. Process. 99(4), 777–782 (2010).
[Crossref]

2008 (5)

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Z. Wang, K. Sugioka, and K. Midorikawa, “Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass,” Appl. Phys., A Mater. Sci. Process. 93(1), 225–229 (2008).
[Crossref]

V. A. Aseev and N. V. Nikonorov, “Spectroluminescence properties of photothermorefractive nanoglass-ceramics doped with ytterbium and erbium ions,” J. Opt. Technol. 75(10), 676–681 (2008).
[Crossref]

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

J. Lumeau, L. Glebova, and L. B. Glebov, “Influence of UV-exposure on the crystallization and optical properties of photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(2-9), 425–430 (2008).
[Crossref]

2007 (2)

J. Stillman, J. Judy, and H. Helvajian, “Processing parameters for the development of glass/ceramic MEMS,” Proc. SPIE 6462, 64620A (2007).
[Crossref]

P. Abgrall and A.-M. Gué, “Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem−a review,” J. Micromech. Microeng. 17(5), R15–R49 (2007).
[Crossref]

2005 (2)

F. E. Livingston and H. Helvajian, “Variable UV laser exposure processing of photosensitive glass-ceramics: maskless micro- to meso-scale structure fabrication,” Appl. Phys., A Mater. Sci. Process. 81(8), 1569–1581 (2005).
[Crossref]

M. Kösters, H.-T. Hsieh, D. Psaltis, and K. Buse, “Holography in commercially available photoetchable glasses,” Appl. Opt. 44(17), 3399–3402 (2005).
[Crossref] [PubMed]

2003 (1)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

2002 (4)

L. B. Glebov, L. Glebova, and O. Lopatiuk, “Photoinduced chemical etching of silicate and borosilicate glasses,” Glas. Sci. Technol. 75, 298–301 (2002).

H. Becker, M. Arundell, A. Harnisch, and D. Hülsenberg, “Chemical analysis in photostructurable glass chips,” Sens. Actuators B Chem. 86(2-3), 271–279 (2002).
[Crossref]

F. E. Livingston, W. W. Hansen, A. Huang, and H. Helvajian, “Effect of laser parameters on the exposure and selective etch rate in photostructurable glass,” Proc. SPIE 4637, 404–412 (2002).
[Crossref]

L. B. Glebov, V. I. Smirnov, C. M. Stickley, and I. V. Ciapurin, “New approach to robust optics for HEL systems,” Proc. SPIE 4724, 101–109 (2002).
[Crossref]

2001 (3)

A. Freitag, D. Vogel, R. Scholz, and T. R. Dietrich, “Microfluidic devices made of glass,” J. Assoc. Lab. Autom. 6(4), 45–49 (2001).
[Crossref]

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Rev. 32, 57–63 (2001).

N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and A. V. Chukharev, “Influence of glass composition on the refractive index change upon photothermoinduced crystallization,” Glass Phys. Chem. 27(3), 241–249 (2001).
[Crossref]

1996 (1)

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

1994 (1)

E. V. Anoshkina, I. A. Evdoseeva, E. I. Panysheva, and I. V. Tunimanova, “Precipitation of a microcrystalline phase in a polychromatic glass,” Glass Phys. Chem. 20(1), 33–37 (1994).

1990 (1)

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

1978 (1)

S. D. Stookey, G. H. Beall, and J. E. Pierson, “Full-color photosensitive glass,” J. Appl. Phys. 49(10), 5114–5123 (1978).
[Crossref]

1976 (1)

1953 (1)

S. D. Stookey, “Chemical machining of photosensitive glass,” Ind. Eng. Chem. 45(1), 115–118 (1953).
[Crossref]

Abgrall, P.

P. Abgrall and A.-M. Gué, “Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem−a review,” J. Micromech. Microeng. 17(5), R15–R49 (2007).
[Crossref]

Abyzov, A. S.

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

Agafonova, D. S.

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

Anoshkina, E. V.

E. V. Anoshkina, I. A. Evdoseeva, E. I. Panysheva, and I. V. Tunimanova, “Precipitation of a microcrystalline phase in a polychromatic glass,” Glass Phys. Chem. 20(1), 33–37 (1994).

Aoki, N.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Arundell, M.

H. Becker, M. Arundell, A. Harnisch, and D. Hülsenberg, “Chemical analysis in photostructurable glass chips,” Sens. Actuators B Chem. 86(2-3), 271–279 (2002).
[Crossref]

Aseev, V. A.

Beall, G. H.

S. D. Stookey, G. H. Beall, and J. E. Pierson, “Full-color photosensitive glass,” J. Appl. Phys. 49(10), 5114–5123 (1978).
[Crossref]

Beckel, D.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Becker, H.

H. Becker, M. Arundell, A. Harnisch, and D. Hülsenberg, “Chemical analysis in photostructurable glass chips,” Sens. Actuators B Chem. 86(2-3), 271–279 (2002).
[Crossref]

Bernard, A.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Bieberle-Hütter, A.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Bieri, N. R.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Buse, K.

Chamma, K.

J. Lumeau, K. Chamma, L. Glebova, and L. B. Glebov, “X-ray diffraction study of NaF nano-crystals in photo-thermo-refractive glass,” J. Non-Cryst. Solids 405, 188–195 (2014).
[Crossref]

Cheng, Y.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Chukharev, A. V.

N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and A. V. Chukharev, “Influence of glass composition on the refractive index change upon photothermoinduced crystallization,” Glass Phys. Chem. 27(3), 241–249 (2001).
[Crossref]

Ciapurin, I. V.

L. B. Glebov, V. I. Smirnov, C. M. Stickley, and I. V. Ciapurin, “New approach to robust optics for HEL systems,” Proc. SPIE 4724, 101–109 (2002).
[Crossref]

Dietrich, T. R.

A. Freitag, D. Vogel, R. Scholz, and T. R. Dietrich, “Microfluidic devices made of glass,” J. Assoc. Lab. Autom. 6(4), 45–49 (2001).
[Crossref]

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

Dubrovin, V. D.

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

Dyamant, I.

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

Efimov, A. M.

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

Ehrfeld, W.

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

Evdoseeva, I. A.

E. V. Anoshkina, I. A. Evdoseeva, E. I. Panysheva, and I. V. Tunimanova, “Precipitation of a microcrystalline phase in a polychromatic glass,” Glass Phys. Chem. 20(1), 33–37 (1994).

Fokin, V. M.

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

Freitag, A.

A. Freitag, D. Vogel, R. Scholz, and T. R. Dietrich, “Microfluidic devices made of glass,” J. Assoc. Lab. Autom. 6(4), 45–49 (2001).
[Crossref]

Fuqua, P. D.

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Rev. 32, 57–63 (2001).

Gauckler, L. J.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Glebov, A. L.

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

Glebov, L.

Glebov, L. B.

J. Lumeau, K. Chamma, L. Glebova, and L. B. Glebov, “X-ray diffraction study of NaF nano-crystals in photo-thermo-refractive glass,” J. Non-Cryst. Solids 405, 188–195 (2014).
[Crossref]

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

J. Lumeau, L. Glebova, and L. B. Glebov, “Influence of UV-exposure on the crystallization and optical properties of photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(2-9), 425–430 (2008).
[Crossref]

L. B. Glebov, V. I. Smirnov, C. M. Stickley, and I. V. Ciapurin, “New approach to robust optics for HEL systems,” Proc. SPIE 4724, 101–109 (2002).
[Crossref]

L. B. Glebov, L. Glebova, and O. Lopatiuk, “Photoinduced chemical etching of silicate and borosilicate glasses,” Glas. Sci. Technol. 75, 298–301 (2002).

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

Glebova, L.

J. Lumeau, K. Chamma, L. Glebova, and L. B. Glebov, “X-ray diffraction study of NaF nano-crystals in photo-thermo-refractive glass,” J. Non-Cryst. Solids 405, 188–195 (2014).
[Crossref]

Y. Sato, T. Taira, V. Smirnov, L. Glebova, and L. Glebov, “Continuous-wave diode-pumped laser action of Nd³⁺-doped photo-thermo-refractive glass,” Opt. Lett. 36(12), 2257–2259 (2011).
[Crossref] [PubMed]

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

J. Lumeau, L. Glebova, and L. B. Glebov, “Influence of UV-exposure on the crystallization and optical properties of photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(2-9), 425–430 (2008).
[Crossref]

L. B. Glebov, L. Glebova, and O. Lopatiuk, “Photoinduced chemical etching of silicate and borosilicate glasses,” Glas. Sci. Technol. 75, 298–301 (2002).

Glebova, L. N.

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

Gmür, R.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Gué, A.-M.

P. Abgrall and A.-M. Gué, “Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem−a review,” J. Micromech. Microeng. 17(5), R15–R49 (2007).
[Crossref]

Hansen, W. W.

F. E. Livingston, W. W. Hansen, A. Huang, and H. Helvajian, “Effect of laser parameters on the exposure and selective etch rate in photostructurable glass,” Proc. SPIE 4637, 404–412 (2002).
[Crossref]

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Rev. 32, 57–63 (2001).

Harnisch, A.

H. Becker, M. Arundell, A. Harnisch, and D. Hülsenberg, “Chemical analysis in photostructurable glass chips,” Sens. Actuators B Chem. 86(2-3), 271–279 (2002).
[Crossref]

Heeb, P.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Heidrich, P. F.

Helvajian, H.

J. Stillman, J. Judy, and H. Helvajian, “Processing parameters for the development of glass/ceramic MEMS,” Proc. SPIE 6462, 64620A (2007).
[Crossref]

F. E. Livingston and H. Helvajian, “Variable UV laser exposure processing of photosensitive glass-ceramics: maskless micro- to meso-scale structure fabrication,” Appl. Phys., A Mater. Sci. Process. 81(8), 1569–1581 (2005).
[Crossref]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

F. E. Livingston, W. W. Hansen, A. Huang, and H. Helvajian, “Effect of laser parameters on the exposure and selective etch rate in photostructurable glass,” Proc. SPIE 4637, 404–412 (2002).
[Crossref]

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Rev. 32, 57–63 (2001).

Hocker, T.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Hotz, N.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Hsieh, H.-T.

Huang, A.

F. E. Livingston, W. W. Hansen, A. Huang, and H. Helvajian, “Effect of laser parameters on the exposure and selective etch rate in photostructurable glass,” Proc. SPIE 4637, 404–412 (2002).
[Crossref]

Hülsenberg, D.

H. Becker, M. Arundell, A. Harnisch, and D. Hülsenberg, “Chemical analysis in photostructurable glass chips,” Sens. Actuators B Chem. 86(2-3), 271–279 (2002).
[Crossref]

Ignatiev, A. I.

S. A. Ivanov, A. I. Ignatiev, and N. V. Nikonorov, “Advances in photo-thermo-refractive glass composition modifications,” Proc. SPIE 9508, 95080E (2015).
[Crossref]

Y. M. Sgibnev, N. V. Nikonorov, V. N. Vasilev, and A. I. Ignatiev, “Optical gradient waveguides in photo-thermo-refractive glass formed by ion exchange method,” J. Lightwave Technol. 33(17), 3730–3735 (2015).
[Crossref]

S. A. Ivanov, A. I. Ignatiev, N. V. Nikonorov, and V. A. Aseev, “Holographic characteristics of a modified photothermorefractive glass,” J. Opt. Technol. 81(6), 356–360 (2014).
[Crossref]

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Infortuna, A.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Ivanov, S. A.

S. A. Ivanov, A. I. Ignatiev, and N. V. Nikonorov, “Advances in photo-thermo-refractive glass composition modifications,” Proc. SPIE 9508, 95080E (2015).
[Crossref]

S. A. Ivanov, A. I. Ignatiev, N. V. Nikonorov, and V. A. Aseev, “Holographic characteristics of a modified photothermorefractive glass,” J. Opt. Technol. 81(6), 356–360 (2014).
[Crossref]

Janson, S.

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Rev. 32, 57–63 (2001).

Judy, J.

J. Stillman, J. Judy, and H. Helvajian, “Processing parameters for the development of glass/ceramic MEMS,” Proc. SPIE 6462, 64620A (2007).
[Crossref]

Kawachi, M.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Kharchenko, M. V.

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

Kösters, M.

Krämer, M.

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

Lacher, M.

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

Livingston, F. E.

F. E. Livingston and H. Helvajian, “Variable UV laser exposure processing of photosensitive glass-ceramics: maskless micro- to meso-scale structure fabrication,” Appl. Phys., A Mater. Sci. Process. 81(8), 1569–1581 (2005).
[Crossref]

F. E. Livingston, W. W. Hansen, A. Huang, and H. Helvajian, “Effect of laser parameters on the exposure and selective etch rate in photostructurable glass,” Proc. SPIE 4637, 404–412 (2002).
[Crossref]

Lopatiuk, O.

L. B. Glebov, L. Glebova, and O. Lopatiuk, “Photoinduced chemical etching of silicate and borosilicate glasses,” Glas. Sci. Technol. 75, 298–301 (2002).

Lumeau, J.

J. Lumeau, K. Chamma, L. Glebova, and L. B. Glebov, “X-ray diffraction study of NaF nano-crystals in photo-thermo-refractive glass,” J. Non-Cryst. Solids 405, 188–195 (2014).
[Crossref]

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

J. Lumeau, L. Glebova, and L. B. Glebov, “Influence of UV-exposure on the crystallization and optical properties of photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(2-9), 425–430 (2008).
[Crossref]

Masuda, M.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Midorikawa, K.

Z. Wang, K. Sugioka, and K. Midorikawa, “Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass,” Appl. Phys., A Mater. Sci. Process. 93(1), 225–229 (2008).
[Crossref]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Mokhun, O.

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

Muecke, U. P.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Müller, P.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Muralt, P.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Nashchekin, A. V.

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Nikonorov, N. V.

S. A. Ivanov, A. I. Ignatiev, and N. V. Nikonorov, “Advances in photo-thermo-refractive glass composition modifications,” Proc. SPIE 9508, 95080E (2015).
[Crossref]

Y. M. Sgibnev, N. V. Nikonorov, V. N. Vasilev, and A. I. Ignatiev, “Optical gradient waveguides in photo-thermo-refractive glass formed by ion exchange method,” J. Lightwave Technol. 33(17), 3730–3735 (2015).
[Crossref]

S. A. Ivanov, A. I. Ignatiev, N. V. Nikonorov, and V. A. Aseev, “Holographic characteristics of a modified photothermorefractive glass,” J. Opt. Technol. 81(6), 356–360 (2014).
[Crossref]

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

V. A. Aseev and N. V. Nikonorov, “Spectroluminescence properties of photothermorefractive nanoglass-ceramics doped with ytterbium and erbium ions,” J. Opt. Technol. 75(10), 676–681 (2008).
[Crossref]

N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and A. V. Chukharev, “Influence of glass composition on the refractive index change upon photothermoinduced crystallization,” Glass Phys. Chem. 27(3), 241–249 (2001).
[Crossref]

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

Panysheva, E. I.

N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and A. V. Chukharev, “Influence of glass composition on the refractive index change upon photothermoinduced crystallization,” Glass Phys. Chem. 27(3), 241–249 (2001).
[Crossref]

E. V. Anoshkina, I. A. Evdoseeva, E. I. Panysheva, and I. V. Tunimanova, “Precipitation of a microcrystalline phase in a polychromatic glass,” Glass Phys. Chem. 20(1), 33–37 (1994).

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

Pierson, J. E.

S. D. Stookey, G. H. Beall, and J. E. Pierson, “Full-color photosensitive glass,” J. Appl. Phys. 49(10), 5114–5123 (1978).
[Crossref]

Podsvirov, O. A.

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Postnikov, E. S.

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

Poulikakos, D.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Psaltis, D.

Rapaport, A.

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

Rey-Mermet, S.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Rupp, J. L. M.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Sato, Y.

Schmidt, C.

J. D. Williams, C. Schmidt, and D. Serkland, “Processing advances in transparent Foturan MEMS,” Appl. Phys., A Mater. Sci. Process. 99(4), 777–782 (2010).
[Crossref]

Scholz, R.

A. Freitag, D. Vogel, R. Scholz, and T. R. Dietrich, “Microfluidic devices made of glass,” J. Assoc. Lab. Autom. 6(4), 45–49 (2001).
[Crossref]

Serkland, D.

J. D. Williams, C. Schmidt, and D. Serkland, “Processing advances in transparent Foturan MEMS,” Appl. Phys., A Mater. Sci. Process. 99(4), 777–782 (2010).
[Crossref]

Sgibnev, E. M.

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

Sgibnev, Y. M.

Shakhverdov, T. A.

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

Shihoyama, K.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Sidorov, A. I.

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Smirnov, V.

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

Y. Sato, T. Taira, V. Smirnov, L. Glebova, and L. Glebov, “Continuous-wave diode-pumped laser action of Nd³⁺-doped photo-thermo-refractive glass,” Opt. Lett. 36(12), 2257–2259 (2011).
[Crossref] [PubMed]

Smirnov, V. I.

L. B. Glebov, V. I. Smirnov, C. M. Stickley, and I. V. Ciapurin, “New approach to robust optics for HEL systems,” Proc. SPIE 4724, 101–109 (2002).
[Crossref]

Souza, G. P.

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

Speit, B.

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

Stickley, C. M.

L. B. Glebov, V. I. Smirnov, C. M. Stickley, and I. V. Ciapurin, “New approach to robust optics for HEL systems,” Proc. SPIE 4724, 101–109 (2002).
[Crossref]

Stillman, J.

J. Stillman, J. Judy, and H. Helvajian, “Processing parameters for the development of glass/ceramic MEMS,” Proc. SPIE 6462, 64620A (2007).
[Crossref]

Stookey, S. D.

S. D. Stookey, G. H. Beall, and J. E. Pierson, “Full-color photosensitive glass,” J. Appl. Phys. 49(10), 5114–5123 (1978).
[Crossref]

S. D. Stookey, “Chemical machining of photosensitive glass,” Ind. Eng. Chem. 45(1), 115–118 (1953).
[Crossref]

Stutz, M. J.

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Sugioka, K.

Z. Wang, K. Sugioka, and K. Midorikawa, “Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass,” Appl. Phys., A Mater. Sci. Process. 93(1), 225–229 (2008).
[Crossref]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Taira, T.

Toyoda, K.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Tsekhomsky, V. A.

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Tunimanova, I. V.

N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and A. V. Chukharev, “Influence of glass composition on the refractive index change upon photothermoinduced crystallization,” Glass Phys. Chem. 27(3), 241–249 (2001).
[Crossref]

E. V. Anoshkina, I. A. Evdoseeva, E. I. Panysheva, and I. V. Tunimanova, “Precipitation of a microcrystalline phase in a polychromatic glass,” Glass Phys. Chem. 20(1), 33–37 (1994).

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

Usov, O. A.

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Vasilev, V. N.

Vergnole, S.

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

Vogel, D.

A. Freitag, D. Vogel, R. Scholz, and T. R. Dietrich, “Microfluidic devices made of glass,” J. Assoc. Lab. Autom. 6(4), 45–49 (2001).
[Crossref]

Vostokov, A. V.

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Wang, Z.

Z. Wang, K. Sugioka, and K. Midorikawa, “Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass,” Appl. Phys., A Mater. Sci. Process. 93(1), 225–229 (2008).
[Crossref]

White, J. M.

Williams, J. D.

J. D. Williams, C. Schmidt, and D. Serkland, “Processing advances in transparent Foturan MEMS,” Appl. Phys., A Mater. Sci. Process. 99(4), 777–782 (2010).
[Crossref]

Zanotto, E. D.

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

Appl. Opt. (2)

Appl. Phys., A Mater. Sci. Process. (4)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys., A Mater. Sci. Process. 76(5), 857–860 (2003).
[Crossref]

Z. Wang, K. Sugioka, and K. Midorikawa, “Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass,” Appl. Phys., A Mater. Sci. Process. 93(1), 225–229 (2008).
[Crossref]

J. D. Williams, C. Schmidt, and D. Serkland, “Processing advances in transparent Foturan MEMS,” Appl. Phys., A Mater. Sci. Process. 99(4), 777–782 (2010).
[Crossref]

F. E. Livingston and H. Helvajian, “Variable UV laser exposure processing of photosensitive glass-ceramics: maskless micro- to meso-scale structure fabrication,” Appl. Phys., A Mater. Sci. Process. 81(8), 1569–1581 (2005).
[Crossref]

Glas. Sci. Technol. (1)

L. B. Glebov, L. Glebova, and O. Lopatiuk, “Photoinduced chemical etching of silicate and borosilicate glasses,” Glas. Sci. Technol. 75, 298–301 (2002).

Glass Phys. Chem. (2)

N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and A. V. Chukharev, “Influence of glass composition on the refractive index change upon photothermoinduced crystallization,” Glass Phys. Chem. 27(3), 241–249 (2001).
[Crossref]

E. V. Anoshkina, I. A. Evdoseeva, E. I. Panysheva, and I. V. Tunimanova, “Precipitation of a microcrystalline phase in a polychromatic glass,” Glass Phys. Chem. 20(1), 33–37 (1994).

Ind. Eng. Chem. (1)

S. D. Stookey, “Chemical machining of photosensitive glass,” Ind. Eng. Chem. 45(1), 115–118 (1953).
[Crossref]

J. Appl. Phys. (1)

S. D. Stookey, G. H. Beall, and J. E. Pierson, “Full-color photosensitive glass,” J. Appl. Phys. 49(10), 5114–5123 (1978).
[Crossref]

J. Assoc. Lab. Autom. (1)

A. Freitag, D. Vogel, R. Scholz, and T. R. Dietrich, “Microfluidic devices made of glass,” J. Assoc. Lab. Autom. 6(4), 45–49 (2001).
[Crossref]

J. Lightwave Technol. (1)

J. Micromech. Microeng. (1)

P. Abgrall and A.-M. Gué, “Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem−a review,” J. Micromech. Microeng. 17(5), R15–R49 (2007).
[Crossref]

J. Non-Cryst. Solids (5)

J. Lumeau, L. Glebova, and L. B. Glebov, “Influence of UV-exposure on the crystallization and optical properties of photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(2-9), 425–430 (2008).
[Crossref]

I. Dyamant, A. S. Abyzov, V. M. Fokin, E. D. Zanotto, J. Lumeau, L. N. Glebova, and L. B. Glebov, “Crystal nucleation and growth kinetics of NaF in photo-thermo-refractive glass,” J. Non-Cryst. Solids 378, 115–120 (2013).
[Crossref]

J. Lumeau, L. Glebova, G. P. Souza, E. D. Zanotto, and L. B. Glebov, “Effect of cooling on the optical properties and crystallization of UV-exposed photo-thermo-refractive glass,” J. Non-Cryst. Solids 354(42-44), 4730–4736 (2008).
[Crossref]

J. Lumeau, K. Chamma, L. Glebova, and L. B. Glebov, “X-ray diffraction study of NaF nano-crystals in photo-thermo-refractive glass,” J. Non-Cryst. Solids 405, 188–195 (2014).
[Crossref]

E. M. Sgibnev, A. I. Ignatiev, N. V. Nikonorov, A. M. Efimov, and E. S. Postnikov, “Effects of silver ion exchange and subsequent treatments on the UV-VIS spectra of silicate glasses. I. Undoped, CeO2-doped, and (CeO2 + Sb2O3)-codoped photo-thermo-refractive matrix glasses,” J. Non-Cryst. Solids 378, 213–226 (2013).
[Crossref]

J. Opt. Technol. (2)

J. Power Sources (1)

A. Bieberle-Hütter, D. Beckel, A. Infortuna, U. P. Muecke, J. L. M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker, “A micro-solid oxide fuel cell system as battery replacement,” J. Power Sources 177(1), 123–130 (2008).
[Crossref]

Microelectron. Eng. (1)

T. R. Dietrich, W. Ehrfeld, M. Lacher, M. Krämer, and B. Speit, “Fabrication technologies for microsystems utilizing photoetchable glass,” Microelectron. Eng. 30(1-4), 497–504 (1996).
[Crossref]

Nucl. Instrum. Methods Phys. Res. B (1)

O. A. Podsvirov, A. I. Ignatiev, A. V. Nashchekin, N. V. Nikonorov, A. I. Sidorov, V. A. Tsekhomsky, O. A. Usov, and A. V. Vostokov, “Modification of Ag containing photo-thermo-refractive glasses induced by electron-beam irradiation,” Nucl. Instrum. Methods Phys. Res. B 268(19), 3103–3106 (2010).
[Crossref]

Opt. Lett. (1)

Opt. Mater. (1)

V. D. Dubrovin, A. I. Ignatiev, N. V. Nikonorov, A. I. Sidorov, T. A. Shakhverdov, and D. S. Agafonova, “Luminescence of silver molecular clusters in photo-thermo-refractive glasses,” Opt. Mater. 36(4), 753–759 (2014).
[Crossref]

Opt. Spectrosc. (1)

L. B. Glebov, N. V. Nikonorov, E. I. Panysheva, I. V. Tunimanova, and M. V. Kharchenko, “Selection properties of multichromatically tinted glass planar waveguides,” Opt. Spectrosc. 68, 471–473 (1990).

Proc. SPIE (5)

S. A. Ivanov, A. I. Ignatiev, and N. V. Nikonorov, “Advances in photo-thermo-refractive glass composition modifications,” Proc. SPIE 9508, 95080E (2015).
[Crossref]

J. Stillman, J. Judy, and H. Helvajian, “Processing parameters for the development of glass/ceramic MEMS,” Proc. SPIE 6462, 64620A (2007).
[Crossref]

L. B. Glebov, V. I. Smirnov, C. M. Stickley, and I. V. Ciapurin, “New approach to robust optics for HEL systems,” Proc. SPIE 4724, 101–109 (2002).
[Crossref]

A. L. Glebov, O. Mokhun, A. Rapaport, S. Vergnole, V. Smirnov, and L. B. Glebov, “Volume Bragg gratings as ultra-narrow and multiband optical filters,” Proc. SPIE 8428, 84280C (2012).
[Crossref]

F. E. Livingston, W. W. Hansen, A. Huang, and H. Helvajian, “Effect of laser parameters on the exposure and selective etch rate in photostructurable glass,” Proc. SPIE 4637, 404–412 (2002).
[Crossref]

RIKEN Rev. (1)

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Rev. 32, 57–63 (2001).

Sens. Actuators B Chem. (1)

H. Becker, M. Arundell, A. Harnisch, and D. Hülsenberg, “Chemical analysis in photostructurable glass chips,” Sens. Actuators B Chem. 86(2-3), 271–279 (2002).
[Crossref]

Other (2)

N. V. Nikonorov, A. I. Sidorov, and V. A. Tsekhomskii, “Silver nanoparticles in oxide glasses : technologies and properties,” in Silver Nanoparticles, D.P. Perez ed. (In-Tech, 2010), pp. 177–210.

P. Patnaik, Handbook of Inorganic Chemicals (McGraw-Hill, 2003).

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Figures (6)

Fig. 1
Fig. 1

Face-view photo of PTR glass sample after exposing its right part to the UV irradiation, the subsequent heat treatment of the sample as a whole at 500°C for 10h, and chemical etching the sample in 0.5N HF solution (a); absorption spectra for unirradiated (b) and UV irradiated (c) parts of the sample.

Fig. 2
Fig. 2

Etched layer thickness vs. the duration of chemical etching in the 3N HF solution for glass and glass ceramics obtained by heat-treating the latter at 500°C for 10 h.

Fig. 3
Fig. 3

Chemical etching rates in the HF solutions vs. the HF concentration for glass and glass ceramics obtained after the UV exposure and heat treatment at 500°C for 10h and the ratio of chemical etching rates of glass ceramics and glass denoted further by the relative etching rate of glass ceramics.

Fig. 4
Fig. 4

Dependence of kinetics of chemical etching the glass ceramics on photo-thermo-induced crystallization parameters. (a) Etched layer thickness vs. the etching duration depending on the UV exposure . The heat treatment temperature and duration are 489оС and 10h, respectively. (b) Etched layer thickness vs. the etching duration depending on the heat treatment duration. The heat treatment temperature and UV exposure duration are 489оС and 50 sec., respectively. (c) Etched layer thickness vs. the etching duration depending on the heat treatment temperature The UV exposure and heat treatment durations are 50 sec. and 10h, respectively.

Fig. 5
Fig. 5

Refractive index profiles of unirradiated heat-treated glass and glass ceramics for λ = 633 nm. The heat treatment was conducted at T = 500°C for 10h.

Fig. 6
Fig. 6

Possible steps allowing for writing and visualizing some images in PTR glass and/or glass ceramics that might be used eventually in the course of developing various devices.

Tables (1)

Tables Icon

Table 1 Glass and glass ceramics compositions measured with X-Ray fluorescence analysis

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