Abstract

We demonstrate resonance fluorescence from single In-GaAs/GaAs quantum dots embedded in a rib waveguide beamsplitter structure operated under pulsed laser excitation. A systematic study on the excitation laser pulse duration depicts that a sufficiently small laser linewidth enables a substantial improved single-photon-to-laser-background ratio inside a waveguide chip. This manifests in the observation of clear Rabi oscillations over two periods of the quantum dot emission as a function of laser excitation power. A photon cross-correlation measurement between the two output arms of an on-chip beamsplitter results in a g(2)(0)=0.18, demonstrating the generation, guiding and splitting of triggered single photons under resonant excitation in an on-chip device. The present results open new perspectives for the implementation of photonic quantum circuits with integrated quantum dots as resonantly-pumped deterministic single-photon sources.

© 2016 Optical Society of America

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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
  4. M. Benyoucef, H. S. Lee, J. Gabel, T. W. Kim, H. L. Park, A. Rastelli, and O. Schmidt, “Wavelength tunable triggered single-photon source from a single CdTe quantum dot on silicon substrate,” Nano Lett. 9(1), 304–307 (2009).
    [Crossref]
  5. M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
    [Crossref] [PubMed]
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  7. J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
  16. G. Reithmaier, M. Kaniber, F. Flassig, S. Lichtmannecker, K. Müller, A. Andrejew, J. Vuckovic, R. Gross, and J. J. Finley, “On-chip generation, routing, and detection of resonance fluorescence,” Nano Lett. 15, 5208 (2015).
    [Crossref] [PubMed]
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    [Crossref]
  18. O. Gazzano, S. M. de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
    [Crossref] [PubMed]
  19. N. Akopian, N. H. Lindner, E. Poem, Y. Berlatzky, J. Avron, D. Gershoni, B. D. Gerardot, and P. M. Petroff, “Entangled photon pairs from semiconductor quantum dots,” Phys. Rev. Lett. 96(4), 130501 (2006).
    [Crossref] [PubMed]
  20. R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
    [Crossref]
  21. C. Santori, D. Fattal, J. Vuckovic, G. S. Solomon, and Y. Yamamoto, “Indistinguishable photons from a single-photon device,” Nature 419(6907), 594–597 (2002).
    [Crossref] [PubMed]
  22. S. Ates, S. M. Ulrich, S. Reitzenstein, A. Löffler, A. Forchel, and P. Michler, “Post-selected indistinguishable photons from the resonance fluorescence of a single quantum dot in a microcavity,” Phys. Rev. Lett. 103(16), 167402 (2009).
    [Crossref] [PubMed]
  23. Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
    [Crossref]
  24. H. Kamada, H. Gotoh, J. Temmyo, T. Takagahara, and H. Ando, “Exciton rabi oscillation in a single quantum dot,” Phys. Rev. Lett. 87(4), 246401 (2001).
    [Crossref] [PubMed]
  25. M. N. Makhonin, J. E. Dixon, R. J. Coles, B. Royall, I. J. Luxmoore, E. Clarke, M. Hugues, M. S. Skolnick, and A. M. Fox, “Waveguide coupled resonance fluorescence from on-chip quantum emitter,” Nano Lett. 14(12), 6997–7002 (2014).
    [Crossref] [PubMed]
  26. M. Müller, S. Bounouar, K. D. Jöns, M. Glässl, and P. Michler, “On-demand generation of indistinguishable polarization-entangled photon pairs,” Nat. Photonics 8(3), 224–228 (2014).
    [Crossref]
  27. H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
    [Crossref] [PubMed]
  28. Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
    [Crossref]
  29. K. D. Jöns, P. Atkinson, M. Müller, M. Heldmaier, S. M. Ulrich, O. G. Schmidt, and P. Michler, “Triggered Indistinguishable single photons with narrow line widths from site-controlled quantum dots,” Nano Lett. 13(1), 126–130 (2013).
    [Crossref]

2015 (4)

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

K. D. Jöns, U. Rengstl, M. Oster, F. Hargart, M. Heldmaier, S. Bounouar, S. M. Ulrich, M. Jetter, and P. Michler, “Monolithic on-chip integration of semiconductor waveguides, beamsplitters and single-photon sources,” J. Phys. D: Appl. Phys. 48(8), 085101 (2015).
[Crossref]

G. Reithmaier, M. Kaniber, F. Flassig, S. Lichtmannecker, K. Müller, A. Andrejew, J. Vuckovic, R. Gross, and J. J. Finley, “On-chip generation, routing, and detection of resonance fluorescence,” Nano Lett. 15, 5208 (2015).
[Crossref] [PubMed]

U. Rengstl, M. Schwartz, T. Herzog, F. Hargart, M. Paul, S. L. Portalupi, M. Jetter, and P. Michler, “On-chip beamsplitter operation on single photons from quasi-resonantly excited quantum dots embedded in GaAs rib waveguides,” Appl. Phys. Lett. 107(2), 021101 (2015).
[Crossref]

2014 (3)

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

M. N. Makhonin, J. E. Dixon, R. J. Coles, B. Royall, I. J. Luxmoore, E. Clarke, M. Hugues, M. S. Skolnick, and A. M. Fox, “Waveguide coupled resonance fluorescence from on-chip quantum emitter,” Nano Lett. 14(12), 6997–7002 (2014).
[Crossref] [PubMed]

M. Müller, S. Bounouar, K. D. Jöns, M. Glässl, and P. Michler, “On-demand generation of indistinguishable polarization-entangled photon pairs,” Nat. Photonics 8(3), 224–228 (2014).
[Crossref]

2013 (6)

Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
[Crossref]

K. D. Jöns, P. Atkinson, M. Müller, M. Heldmaier, S. M. Ulrich, O. G. Schmidt, and P. Michler, “Triggered Indistinguishable single photons with narrow line widths from site-controlled quantum dots,” Nano Lett. 13(1), 126–130 (2013).
[Crossref]

O. Gazzano, S. M. de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref] [PubMed]

G. Reithmaier, S. Lichtmannecker, T. Reichert, P. Hasch, K. Müller, M. Bichler, R. Gross, and J. J. Finley, “On-chip time resolved detection of quantum dot emission using integrated superconducting single photon detectors,” Sci. Rep. 3, 1901 (2013).
[Crossref] [PubMed]

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

M. Benyoucef and J. P. Reithmaier, “Direct growth of III–V quantum dots on silicon substrates: structural and optical properties,” Semicond. Sci. Tech. 28(9), 094004 (2013).
[Crossref]

2012 (4)

M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
[Crossref] [PubMed]

A. Peruzzo, P. Shadbolt, N. Brunner, S. Popescu, and J. L. O’Brien, “A quantum delayed-choice experiment,” Science 338(6107), 634–637 (2012).
[Crossref] [PubMed]

A. Laucht, S. Pütz, T. Günthner, N. Hauke, R. Saive, S. Frédérick, M. Bichler, M.-C. Amann, A. W. Holleitner, M. Kaniber, and J. J. Finley, “A waveguide-coupled on-chip single-photon source,” Phys. Rev. X 2(7), 011014 (2012).

H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
[Crossref] [PubMed]

2011 (2)

A. Schwagmann, S. Kalliakos, I. Farrer, J. P. Griffiths, G. A. C. Jones, D. A. Ritchie, and A. J. Shields, “On-chip single photon emission from an integrated semiconductor quantum dot into a photonic crystal waveguide,” Appl. Phys. Lett. 99(26), 261108 (2011).
[Crossref]

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99(18), 181110 (2011).
[Crossref]

2009 (3)

A. Politi, J. C. F. Matthews, and J. L. O’Brien, “Shor’s quantum factoring algorithm on a photonic chip,” Science 325(5945), 1221 (2009).
[Crossref] [PubMed]

M. Benyoucef, H. S. Lee, J. Gabel, T. W. Kim, H. L. Park, A. Rastelli, and O. Schmidt, “Wavelength tunable triggered single-photon source from a single CdTe quantum dot on silicon substrate,” Nano Lett. 9(1), 304–307 (2009).
[Crossref]

S. Ates, S. M. Ulrich, S. Reitzenstein, A. Löffler, A. Forchel, and P. Michler, “Post-selected indistinguishable photons from the resonance fluorescence of a single quantum dot in a microcavity,” Phys. Rev. Lett. 103(16), 167402 (2009).
[Crossref] [PubMed]

2008 (1)

A. Politi, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’Brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref] [PubMed]

2006 (2)

N. Akopian, N. H. Lindner, E. Poem, Y. Berlatzky, J. Avron, D. Gershoni, B. D. Gerardot, and P. M. Petroff, “Entangled photon pairs from semiconductor quantum dots,” Phys. Rev. Lett. 96(4), 130501 (2006).
[Crossref] [PubMed]

R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
[Crossref]

2005 (1)

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

2002 (1)

C. Santori, D. Fattal, J. Vuckovic, G. S. Solomon, and Y. Yamamoto, “Indistinguishable photons from a single-photon device,” Nature 419(6907), 594–597 (2002).
[Crossref] [PubMed]

2001 (2)

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409, 46–52 (2001).
[Crossref] [PubMed]

H. Kamada, H. Gotoh, J. Temmyo, T. Takagahara, and H. Ando, “Exciton rabi oscillation in a single quantum dot,” Phys. Rev. Lett. 87(4), 246401 (2001).
[Crossref] [PubMed]

Akopian, N.

N. Akopian, N. H. Lindner, E. Poem, Y. Berlatzky, J. Avron, D. Gershoni, B. D. Gerardot, and P. M. Petroff, “Entangled photon pairs from semiconductor quantum dots,” Phys. Rev. Lett. 96(4), 130501 (2006).
[Crossref] [PubMed]

Amann, M.-C.

A. Laucht, S. Pütz, T. Günthner, N. Hauke, R. Saive, S. Frédérick, M. Bichler, M.-C. Amann, A. W. Holleitner, M. Kaniber, and J. J. Finley, “A waveguide-coupled on-chip single-photon source,” Phys. Rev. X 2(7), 011014 (2012).

Ando, H.

H. Kamada, H. Gotoh, J. Temmyo, T. Takagahara, and H. Ando, “Exciton rabi oscillation in a single quantum dot,” Phys. Rev. Lett. 87(4), 246401 (2001).
[Crossref] [PubMed]

Andrejew, A.

G. Reithmaier, M. Kaniber, F. Flassig, S. Lichtmannecker, K. Müller, A. Andrejew, J. Vuckovic, R. Gross, and J. J. Finley, “On-chip generation, routing, and detection of resonance fluorescence,” Nano Lett. 15, 5208 (2015).
[Crossref] [PubMed]

Arnold, C.

O. Gazzano, S. M. de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref] [PubMed]

Atatüre, M.

Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
[Crossref]

Ates, S.

S. Ates, S. M. Ulrich, S. Reitzenstein, A. Löffler, A. Forchel, and P. Michler, “Post-selected indistinguishable photons from the resonance fluorescence of a single quantum dot in a microcavity,” Phys. Rev. Lett. 103(16), 167402 (2009).
[Crossref] [PubMed]

Atkinson, P.

K. D. Jöns, P. Atkinson, M. Müller, M. Heldmaier, S. M. Ulrich, O. G. Schmidt, and P. Michler, “Triggered Indistinguishable single photons with narrow line widths from site-controlled quantum dots,” Nano Lett. 13(1), 126–130 (2013).
[Crossref]

R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
[Crossref]

Avron, J.

N. Akopian, N. H. Lindner, E. Poem, Y. Berlatzky, J. Avron, D. Gershoni, B. D. Gerardot, and P. M. Petroff, “Entangled photon pairs from semiconductor quantum dots,” Phys. Rev. Lett. 96(4), 130501 (2006).
[Crossref] [PubMed]

Barbieri, M.

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

Beetz, J.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99(18), 181110 (2011).
[Crossref]

Benyoucef, M.

M. Benyoucef and J. P. Reithmaier, “Direct growth of III–V quantum dots on silicon substrates: structural and optical properties,” Semicond. Sci. Tech. 28(9), 094004 (2013).
[Crossref]

M. Benyoucef, H. S. Lee, J. Gabel, T. W. Kim, H. L. Park, A. Rastelli, and O. Schmidt, “Wavelength tunable triggered single-photon source from a single CdTe quantum dot on silicon substrate,” Nano Lett. 9(1), 304–307 (2009).
[Crossref]

Berlatzky, Y.

N. Akopian, N. H. Lindner, E. Poem, Y. Berlatzky, J. Avron, D. Gershoni, B. D. Gerardot, and P. M. Petroff, “Entangled photon pairs from semiconductor quantum dots,” Phys. Rev. Lett. 96(4), 130501 (2006).
[Crossref] [PubMed]

Bertram, F.

M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
[Crossref] [PubMed]

Bianucci, P.

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

Bichler, M.

G. Reithmaier, S. Lichtmannecker, T. Reichert, P. Hasch, K. Müller, M. Bichler, R. Gross, and J. J. Finley, “On-chip time resolved detection of quantum dot emission using integrated superconducting single photon detectors,” Sci. Rep. 3, 1901 (2013).
[Crossref] [PubMed]

A. Laucht, S. Pütz, T. Günthner, N. Hauke, R. Saive, S. Frédérick, M. Bichler, M.-C. Amann, A. W. Holleitner, M. Kaniber, and J. J. Finley, “A waveguide-coupled on-chip single-photon source,” Phys. Rev. X 2(7), 011014 (2012).

Bounouar, S.

K. D. Jöns, U. Rengstl, M. Oster, F. Hargart, M. Heldmaier, S. Bounouar, S. M. Ulrich, M. Jetter, and P. Michler, “Monolithic on-chip integration of semiconductor waveguides, beamsplitters and single-photon sources,” J. Phys. D: Appl. Phys. 48(8), 085101 (2015).
[Crossref]

M. Müller, S. Bounouar, K. D. Jöns, M. Glässl, and P. Michler, “On-demand generation of indistinguishable polarization-entangled photon pairs,” Nat. Photonics 8(3), 224–228 (2014).
[Crossref]

Brunner, N.

A. Peruzzo, P. Shadbolt, N. Brunner, S. Popescu, and J. L. O’Brien, “A quantum delayed-choice experiment,” Science 338(6107), 634–637 (2012).
[Crossref] [PubMed]

Carolan, J.

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

Cassabois, G.

H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
[Crossref] [PubMed]

Christen, J.

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[Crossref] [PubMed]

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M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
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A. Politi, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’Brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
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H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
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H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
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K. D. Jöns, P. Atkinson, M. Müller, M. Heldmaier, S. M. Ulrich, O. G. Schmidt, and P. Michler, “Triggered Indistinguishable single photons with narrow line widths from site-controlled quantum dots,” Nano Lett. 13(1), 126–130 (2013).
[Crossref]

Schneider, C.

Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
[Crossref]

Schulz, W.-M.

M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
[Crossref] [PubMed]

Schwagmann, A.

A. Schwagmann, S. Kalliakos, I. Farrer, J. P. Griffiths, G. A. C. Jones, D. A. Ritchie, and A. J. Shields, “On-chip single photon emission from an integrated semiconductor quantum dot into a photonic crystal waveguide,” Appl. Phys. Lett. 99(26), 261108 (2011).
[Crossref]

Schwartz, M.

U. Rengstl, M. Schwartz, T. Herzog, F. Hargart, M. Paul, S. L. Portalupi, M. Jetter, and P. Michler, “On-chip beamsplitter operation on single photons from quasi-resonantly excited quantum dots embedded in GaAs rib waveguides,” Appl. Phys. Lett. 107(2), 021101 (2015).
[Crossref]

Senellart, P.

O. Gazzano, S. M. de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref] [PubMed]

Shadbolt, P.

A. Peruzzo, P. Shadbolt, N. Brunner, S. Popescu, and J. L. O’Brien, “A quantum delayed-choice experiment,” Science 338(6107), 634–637 (2012).
[Crossref] [PubMed]

Shadbolt, P. J.

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

Shields, A. J.

A. Schwagmann, S. Kalliakos, I. Farrer, J. P. Griffiths, G. A. C. Jones, D. A. Ritchie, and A. J. Shields, “On-chip single photon emission from an integrated semiconductor quantum dot into a photonic crystal waveguide,” Appl. Phys. Lett. 99(26), 261108 (2011).
[Crossref]

R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
[Crossref]

Shih, C. K.

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

Silverstone, J. W.

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

Skolnick, M. S.

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

M. N. Makhonin, J. E. Dixon, R. J. Coles, B. Royall, I. J. Luxmoore, E. Clarke, M. Hugues, M. S. Skolnick, and A. M. Fox, “Waveguide coupled resonance fluorescence from on-chip quantum emitter,” Nano Lett. 14(12), 6997–7002 (2014).
[Crossref] [PubMed]

Smith, B. J.

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

Smith, P. G. R.

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

Solomon, G. S.

C. Santori, D. Fattal, J. Vuckovic, G. S. Solomon, and Y. Yamamoto, “Indistinguishable photons from a single-photon device,” Nature 419(6907), 594–597 (2002).
[Crossref] [PubMed]

Sparrow, C.

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

Sprengers, J. P.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99(18), 181110 (2011).
[Crossref]

Spring, J. B.

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

Stevenson, R. M.

R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
[Crossref]

Takagahara, T.

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

H. Kamada, H. Gotoh, J. Temmyo, T. Takagahara, and H. Ando, “Exciton rabi oscillation in a single quantum dot,” Phys. Rev. Lett. 87(4), 246401 (2001).
[Crossref] [PubMed]

Temmyo, J.

H. Kamada, H. Gotoh, J. Temmyo, T. Takagahara, and H. Ando, “Exciton rabi oscillation in a single quantum dot,” Phys. Rev. Lett. 87(4), 246401 (2001).
[Crossref] [PubMed]

Thomas-Peter, N.

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

Thompson, M. G.

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

Ulrich, S. M.

K. D. Jöns, U. Rengstl, M. Oster, F. Hargart, M. Heldmaier, S. Bounouar, S. M. Ulrich, M. Jetter, and P. Michler, “Monolithic on-chip integration of semiconductor waveguides, beamsplitters and single-photon sources,” J. Phys. D: Appl. Phys. 48(8), 085101 (2015).
[Crossref]

K. D. Jöns, P. Atkinson, M. Müller, M. Heldmaier, S. M. Ulrich, O. G. Schmidt, and P. Michler, “Triggered Indistinguishable single photons with narrow line widths from site-controlled quantum dots,” Nano Lett. 13(1), 126–130 (2013).
[Crossref]

S. Ates, S. M. Ulrich, S. Reitzenstein, A. Löffler, A. Forchel, and P. Michler, “Post-selected indistinguishable photons from the resonance fluorescence of a single quantum dot in a microcavity,” Phys. Rev. Lett. 103(16), 167402 (2009).
[Crossref] [PubMed]

Voisin, C.

H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
[Crossref] [PubMed]

Vuckovic, J.

G. Reithmaier, M. Kaniber, F. Flassig, S. Lichtmannecker, K. Müller, A. Andrejew, J. Vuckovic, R. Gross, and J. J. Finley, “On-chip generation, routing, and detection of resonance fluorescence,” Nano Lett. 15, 5208 (2015).
[Crossref] [PubMed]

C. Santori, D. Fattal, J. Vuckovic, G. S. Solomon, and Y. Yamamoto, “Indistinguishable photons from a single-photon device,” Nature 419(6907), 594–597 (2002).
[Crossref] [PubMed]

Walmsley, I. A.

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

Wang, Q. Q.

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

Wei, Y.-J.

Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
[Crossref]

Wiesner, M.

M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
[Crossref] [PubMed]

Wu, D.

Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
[Crossref]

Xue, Q. K.

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

Yamamoto, Y.

C. Santori, D. Fattal, J. Vuckovic, G. S. Solomon, and Y. Yamamoto, “Indistinguishable photons from a single-photon device,” Nature 419(6907), 594–597 (2002).
[Crossref] [PubMed]

Young, R. J.

R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
[Crossref]

Yu, S.

A. Politi, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’Brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref] [PubMed]

Appl. Phys. Lett. (4)

A. Schwagmann, S. Kalliakos, I. Farrer, J. P. Griffiths, G. A. C. Jones, D. A. Ritchie, and A. J. Shields, “On-chip single photon emission from an integrated semiconductor quantum dot into a photonic crystal waveguide,” Appl. Phys. Lett. 99(26), 261108 (2011).
[Crossref]

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99(18), 181110 (2011).
[Crossref]

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

U. Rengstl, M. Schwartz, T. Herzog, F. Hargart, M. Paul, S. L. Portalupi, M. Jetter, and P. Michler, “On-chip beamsplitter operation on single photons from quasi-resonantly excited quantum dots embedded in GaAs rib waveguides,” Appl. Phys. Lett. 107(2), 021101 (2015).
[Crossref]

J. Phys. D: Appl. Phys. (1)

K. D. Jöns, U. Rengstl, M. Oster, F. Hargart, M. Heldmaier, S. Bounouar, S. M. Ulrich, M. Jetter, and P. Michler, “Monolithic on-chip integration of semiconductor waveguides, beamsplitters and single-photon sources,” J. Phys. D: Appl. Phys. 48(8), 085101 (2015).
[Crossref]

Nano Lett. (4)

G. Reithmaier, M. Kaniber, F. Flassig, S. Lichtmannecker, K. Müller, A. Andrejew, J. Vuckovic, R. Gross, and J. J. Finley, “On-chip generation, routing, and detection of resonance fluorescence,” Nano Lett. 15, 5208 (2015).
[Crossref] [PubMed]

M. Benyoucef, H. S. Lee, J. Gabel, T. W. Kim, H. L. Park, A. Rastelli, and O. Schmidt, “Wavelength tunable triggered single-photon source from a single CdTe quantum dot on silicon substrate,” Nano Lett. 9(1), 304–307 (2009).
[Crossref]

M. N. Makhonin, J. E. Dixon, R. J. Coles, B. Royall, I. J. Luxmoore, E. Clarke, M. Hugues, M. S. Skolnick, and A. M. Fox, “Waveguide coupled resonance fluorescence from on-chip quantum emitter,” Nano Lett. 14(12), 6997–7002 (2014).
[Crossref] [PubMed]

K. D. Jöns, P. Atkinson, M. Müller, M. Heldmaier, S. M. Ulrich, O. G. Schmidt, and P. Michler, “Triggered Indistinguishable single photons with narrow line widths from site-controlled quantum dots,” Nano Lett. 13(1), 126–130 (2013).
[Crossref]

Nanotechnology (1)

M. Wiesner, W.-M. Schulz, C. Kessler, M. Reischle, S. Metzner, F. Bertram, J. Christen, R. Roßbach, M. Jetter, and P. Michler, “Single-photon emission from electrically driven InP quantum dots epitaxially grown on CMOS-compatible Si(001),” Nanotechnology 23(33), 335201 (2012).
[Crossref] [PubMed]

Nat. Commun. (1)

O. Gazzano, S. M. de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref] [PubMed]

Nat. Nanotechnology (1)

Y. M. He, Y. He, Y.-J. Wei, D. Wu, M. Atatüre, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnology 8(3), 213 (2013).
[Crossref]

Nat. Photonics (1)

M. Müller, S. Bounouar, K. D. Jöns, M. Glässl, and P. Michler, “On-demand generation of indistinguishable polarization-entangled photon pairs,” Nat. Photonics 8(3), 224–228 (2014).
[Crossref]

Nature (2)

C. Santori, D. Fattal, J. Vuckovic, G. S. Solomon, and Y. Yamamoto, “Indistinguishable photons from a single-photon device,” Nature 419(6907), 594–597 (2002).
[Crossref] [PubMed]

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409, 46–52 (2001).
[Crossref] [PubMed]

New J. Phys. (1)

R. J. Young, R. M. Stevenson, P. Atkinson, K. Cooper, D. A. Ritchie, and A. J. Shields, “Improved fidelity of triggered entangled photons from single quantum dots,” New J. Phys. 8(2), 29 (2006).
[Crossref]

Phys. Rev. B (1)

Q. Q. Wang, A. Muller, P. Bianucci, E. Rossi, Q. K. Xue, T. Takagahara, C. Piermarocchi, A. H. MacDonald, and C. K. Shih, “Decoherence processes during optical manipulation of excitonic qubits in semiconductor quantum dots,” Phys. Rev. B 72(5), 035306 (2005).
[Crossref]

Phys. Rev. Lett. (4)

H. S. Nguyen, G. Sallen, C. Voisin, P. Roussignol, C. Diederichs, and G. Cassabois, “Optically gated resonant emission of single quantum dots,” Phys. Rev. Lett. 108(5), 057401 (2012).
[Crossref] [PubMed]

S. Ates, S. M. Ulrich, S. Reitzenstein, A. Löffler, A. Forchel, and P. Michler, “Post-selected indistinguishable photons from the resonance fluorescence of a single quantum dot in a microcavity,” Phys. Rev. Lett. 103(16), 167402 (2009).
[Crossref] [PubMed]

H. Kamada, H. Gotoh, J. Temmyo, T. Takagahara, and H. Ando, “Exciton rabi oscillation in a single quantum dot,” Phys. Rev. Lett. 87(4), 246401 (2001).
[Crossref] [PubMed]

N. Akopian, N. H. Lindner, E. Poem, Y. Berlatzky, J. Avron, D. Gershoni, B. D. Gerardot, and P. M. Petroff, “Entangled photon pairs from semiconductor quantum dots,” Phys. Rev. Lett. 96(4), 130501 (2006).
[Crossref] [PubMed]

Phys. Rev. X (1)

A. Laucht, S. Pütz, T. Günthner, N. Hauke, R. Saive, S. Frédérick, M. Bichler, M.-C. Amann, A. W. Holleitner, M. Kaniber, and J. J. Finley, “A waveguide-coupled on-chip single-photon source,” Phys. Rev. X 2(7), 011014 (2012).

Sci. Rep. (1)

G. Reithmaier, S. Lichtmannecker, T. Reichert, P. Hasch, K. Müller, M. Bichler, R. Gross, and J. J. Finley, “On-chip time resolved detection of quantum dot emission using integrated superconducting single photon detectors,” Sci. Rep. 3, 1901 (2013).
[Crossref] [PubMed]

Science (5)

A. Peruzzo, P. Shadbolt, N. Brunner, S. Popescu, and J. L. O’Brien, “A quantum delayed-choice experiment,” Science 338(6107), 634–637 (2012).
[Crossref] [PubMed]

J. B. Spring, B. J. Metcalf, P. C. Humphreys, W. S. Kolthammer, X.-M. Jin, M. Barbieri, A. Datta, N. Thomas-Peter, N. K. Langford, D. Kundys, J. C. Gates, B. J. Smith, P. G. R. Smith, and I. A. Walmsley, “Boson sampling on a photonic chip,” Science 339(6121), 798–801 (2013).
[Crossref]

J. Carolan, C. Harrold, C. Sparrow, E. Martín-López, N. J. Russell, J. W. Silverstone, P. J. Shadbolt, N. Matsuda, M. Oguma, M. Itoh, G. D. Marshall, M. G. Thompson, J. C. F. Matthews, T. Hashimoto, J. L. O’Brien, and A. Laing, “Universal linear optics,” Science 349(6249), 711–716 (2015).
[Crossref] [PubMed]

A. Politi, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’Brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref] [PubMed]

A. Politi, J. C. F. Matthews, and J. L. O’Brien, “Shor’s quantum factoring algorithm on a photonic chip,” Science 325(5945), 1221 (2009).
[Crossref] [PubMed]

Semicond. Sci. Tech. (1)

M. Benyoucef and J. P. Reithmaier, “Direct growth of III–V quantum dots on silicon substrates: structural and optical properties,” Semicond. Sci. Tech. 28(9), 094004 (2013).
[Crossref]

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Figures (3)

Fig. 1
Fig. 1 (a): Cross-section SEM picture of a BS similar to the one used in the measurements. It can be seen that the WGs are not completely separated. (b): Excitation scheme: QDs are excited from the top, behind the coupling region; the emitted light propagates along the WG, splits inside the coupler and can be collected from both output arms simultaneously. (c): Spectra collected from the output arms under non-resonant pulsed excitation at 800 nm. The emission line at 878.25 nm shows the desired 50/50 splitting ratio. The second emission line originates from another QD nearby.
Fig. 2
Fig. 2 (a–c): Temporal and spectral width of the three different laser pulses used in this work for the resonant excitation of the QDs. All curves are fitted with a Gaussian lineshape. (d–f): Spectra of triggered resonance fluorescence of QD 1 under pulsed excitation for laser linewidths shown in (a–c); the QD is located in arm 2 and the light is detected at the output of arm 1. The data points are fitted with a double Gaussian lineshape. (g–i): Integrated QD intensity as a function of the square root of the excitation laser power, for the pulse widths shown in (a–c). The data are plotted with (squares) and without (triangles) laser background subtraction. The data shown in (i) were fitted numerically considering the optical Bloch equations.
Fig. 3
Fig. 3 Left: Sketch of the setup detection path. Right: Cross-correlation measurement of the QD emission between both detection arms via resonant excitation of the QD under pulsed excitation. The numbers are normalized coincidence values for a ±3 ns binning.

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