Abstract

We describe a micromachining process to allow back-side coupling of an array of single-mode telecommunication fibers to individual superconducting nanowire single photon detectors (SNSPDs). This approach enables a back-illuminated detector structure which separates the optical access and electrical readout on two sides of the chip and thus allows for compact integration of multi-channel detectors. As proof of principle, we show the integration of four detectors on the same silicon chip with two different designs and their performances are compared. In the optimized design, the device shows saturated system detection efficiency of 16% while the dark count rate is less than 20 Hz, all achieved without the use of metal reflectors or distributed Bragg reflectors (DBRs). This back-illumination approach also eliminates the cross-talk between different detection channels.

© 2016 Optical Society of America

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References

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  1. G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
    [Crossref]
  2. C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, “Superconducting nanowire single-photon detectors: Physics and applications,” Supercond. Sci. Technol. 25(6), 063001 (2012).
    [Crossref]
  3. S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
    [Crossref] [PubMed]
  4. F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
    [Crossref]
  5. O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
    [Crossref] [PubMed]
  6. W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
    [Crossref] [PubMed]
  7. L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
    [Crossref]
  8. F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
    [Crossref]
  9. C. Schuck, W. H. P. Pernice, and H. X. Tang, “Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate,” Sci. Rep. 3, 1893 (2013).
    [Crossref] [PubMed]
  10. H. Shibata, K. Shimizu, H. Takesue, and Y. Tokura, “Ultimate low system dark-count rate for superconducting nanowire single-photon detector,” Opt. Lett. 40(14), 3428–3431 (2015).
    [Crossref] [PubMed]
  11. X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
    [Crossref] [PubMed]
  12. Q. Zhao, T. Jia, M. Gu, C. Wan, L. Zhang, W. Xu, L. Kang, J. Chen, and P. Wu, “Counting rate enhancements in superconducting nanowire single-photon detectors with improved readout circuits,” Opt. Lett. 39(7), 1869–1872 (2014).
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    [Crossref]
  14. S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
    [Crossref]
  15. A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
    [Crossref]
  16. R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
    [Crossref]
  17. X. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
    [Crossref] [PubMed]
  18. A. J. Miller, A. E. Lita, B. Calkins, I. Vayshenker, S. M. Gruber, and S. W. Nam, “Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent,” Opt. Express 19(10), 9102–9110 (2011).
    [Crossref] [PubMed]
  19. F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
    [Crossref] [PubMed]
  20. V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
    [Crossref]
  21. R. Murphy, M. Grein, T. Gudmundsen, A. McCaughan, F. Najafi, K. K. Berggren, F. Marsili, and E. Dauler, “Saturated Photon Detection Efficiency in NbN Superconducting Photon Detectors,” in CLEO: 2015, OSA Technical Digest (online) (Optical Society of America, 2015), paper FF2A.3.
    [Crossref]
  22. J. R. Clem and K. K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Phys. Rev. B 84(17), 174510 (2011).
    [Crossref]
  23. F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
    [Crossref]
  24. C. Wang, B. Lichtenwalter, A. Friebel, and H. X. Tang, “A closed-cycle 1K refrigeration cryostat,” Cryogenics 64, 5–9 (2014).
    [Crossref]

2015 (2)

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

H. Shibata, K. Shimizu, H. Takesue, and Y. Tokura, “Ultimate low system dark-count rate for superconducting nanowire single-photon detector,” Opt. Lett. 40(14), 3428–3431 (2015).
[Crossref] [PubMed]

2014 (3)

2013 (6)

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[Crossref]

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate,” Sci. Rep. 3, 1893 (2013).
[Crossref] [PubMed]

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
[Crossref] [PubMed]

2012 (6)

F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
[Crossref]

C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, “Superconducting nanowire single-photon detectors: Physics and applications,” Supercond. Sci. Technol. 25(6), 063001 (2012).
[Crossref]

F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
[Crossref]

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

2011 (3)

J. R. Clem and K. K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Phys. Rev. B 84(17), 174510 (2011).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

A. J. Miller, A. E. Lita, B. Calkins, I. Vayshenker, S. M. Gruber, and S. W. Nam, “Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent,” Opt. Express 19(10), 9102–9110 (2011).
[Crossref] [PubMed]

2009 (1)

2008 (1)

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

2001 (1)

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Baek, B.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

Bellei, F.

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

Benkhaoul, M.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Berggren, K. K.

F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
[Crossref]

F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
[Crossref]

J. R. Clem and K. K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Phys. Rev. B 84(17), 174510 (2011).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

X. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[Crossref] [PubMed]

Bitauld, D.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Cai, H.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

Calkins, B.

Chen, J.

Chen, S.

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Chen, W.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

Cheng, R.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

Chulkova, G.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Clem, J. R.

J. R. Clem and K. K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Phys. Rev. B 84(17), 174510 (2011).
[Crossref]

Csete, M.

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

Dauler, E.

F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
[Crossref]

F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

Dauler, E. A.

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[Crossref]

X. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[Crossref] [PubMed]

Divochiy, A.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Dzardanov, A.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Ferrari, S.

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

Fiore, A.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Friebel, A.

C. Wang, B. Lichtenwalter, A. Friebel, and H. X. Tang, “A closed-cycle 1K refrigeration cryostat,” Cryogenics 64, 5–9 (2014).
[Crossref]

Frucci, G.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

Gaggero, A.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Gerrits, T.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

Gol’tsman, G.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Gol’tsman, G. N.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Goltsman, G. N.

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

Gruber, S. M.

Gu, M.

Hadfield, R. H.

C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, “Superconducting nanowire single-photon detectors: Physics and applications,” Supercond. Sci. Technol. 25(6), 063001 (2012).
[Crossref]

Harrington, S.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

He, Y.

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Herder, C. H.

Hu, X.

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

X. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[Crossref] [PubMed]

Jahanmirinejad, S.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

Jia, T.

Jiang, M.

Kahl, O.

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

Kang, L.

Kaurova, N.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Kerman, A. J.

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[Crossref]

Korneev, A.

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Kovalyuk, V.

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

Lagoudakis, K. G.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Leoni, R.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Lévy, F.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Li, H.

Li, M.

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

Li, T.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

Lichtenwalter, B.

C. Wang, B. Lichtenwalter, A. Friebel, and H. X. Tang, “A closed-cycle 1K refrigeration cryostat,” Cryogenics 64, 5–9 (2014).
[Crossref]

Lipatov, A.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Lita, A. E.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

A. J. Miller, A. E. Lita, B. Calkins, I. Vayshenker, S. M. Gruber, and S. W. Nam, “Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent,” Opt. Express 19(10), 9102–9110 (2011).
[Crossref] [PubMed]

Liu, D.

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Liu, J.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

Liu, X.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[Crossref] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Marsili, F.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Mattioli, F.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Miki, S.

Miller, A. J.

Minaeva, O.

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Mirin, R. P.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

Molnar, R. J.

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[Crossref]

F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

Najafi, F.

F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, and K. K. Berggren, “Afterpulsing and instability in superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(11), 112601 (2012).
[Crossref]

F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, and K. K. Berggren, “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors,” Appl. Phys. Lett. 100(15), 152602 (2012).
[Crossref]

F. Marsili, F. Najafi, E. Dauler, F. Bellei, X. Hu, M. Csete, R. J. Molnar, and K. K. Berggren, “Single-photon detectors based on ultranarrow superconducting nanowires,” Nano Lett. 11(5), 2048–2053 (2011).
[Crossref] [PubMed]

X. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[Crossref] [PubMed]

Nam, S. W.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

A. J. Miller, A. E. Lita, B. Calkins, I. Vayshenker, S. M. Gruber, and S. W. Nam, “Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent,” Opt. Express 19(10), 9102–9110 (2011).
[Crossref] [PubMed]

Natarajan, C. M.

C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, “Superconducting nanowire single-photon detectors: Physics and applications,” Supercond. Sci. Technol. 25(6), 063001 (2012).
[Crossref]

Okunev, O.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Peng, W.

Pernice, W. H. P.

O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, “Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths,” Sci. Rep. 5, 10941 (2015).
[Crossref] [PubMed]

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate,” Sci. Rep. 3, 1893 (2013).
[Crossref] [PubMed]

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

Rosenberg, D.

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[Crossref]

Sahin, D.

S. Jahanmirinejad, G. Frucci, F. Mattioli, D. Sahin, A. Gaggero, R. Leoni, and A. Fiore, “Photon-number resolving detector based on a series array of superconducting nanowires,” Appl. Phys. Lett. 101(7), 072602 (2012).
[Crossref]

Schuck, C.

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate,” Sci. Rep. 3, 1893 (2013).
[Crossref] [PubMed]

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

Seleznev, V.

A. Divochiy, F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, A. Korneev, V. Seleznev, N. Kaurova, O. Minaeva, G. Gol’tsman, K. G. Lagoudakis, M. Benkhaoul, F. Lévy, and A. Fiore, “Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths,” Nat. Photonics 2(5), 302–306 (2008).
[Crossref]

Semenov, A.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Sergienko, A. V.

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

Shaw, M. D.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

Shibata, H.

Shimizu, K.

Smirnov, K.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Sobolewski, R.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Stern, J. A.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

Takesue, H.

Tang, H. X.

C. Wang, B. Lichtenwalter, A. Friebel, and H. X. Tang, “A closed-cycle 1K refrigeration cryostat,” Cryogenics 64, 5–9 (2014).
[Crossref]

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate,” Sci. Rep. 3, 1893 (2013).
[Crossref] [PubMed]

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nat. Commun. 3, 1325 (2012).
[Crossref] [PubMed]

Tanner, M. G.

C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, “Superconducting nanowire single-photon detectors: Physics and applications,” Supercond. Sci. Technol. 25(6), 063001 (2012).
[Crossref]

Terai, H.

Tokura, Y.

Vayshenker, I.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

A. J. Miller, A. E. Lita, B. Calkins, I. Vayshenker, S. M. Gruber, and S. W. Nam, “Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent,” Opt. Express 19(10), 9102–9110 (2011).
[Crossref] [PubMed]

Verma, V. B.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[Crossref]

V. B. Verma, F. Marsili, S. Harrington, A. E. Lita, R. P. Mirin, and S. W. Nam, “A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector,” Appl. Phys. Lett. 101(25), 251114 (2012).
[Crossref]

Voronov, B.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Wan, C.

Wang, C.

C. Wang, B. Lichtenwalter, A. Friebel, and H. X. Tang, “A closed-cycle 1K refrigeration cryostat,” Cryogenics 64, 5–9 (2014).
[Crossref]

Wang, Z.

White, J. E.

Williams, C.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705 (2001).
[Crossref]

Wong, F. N. C.

Wu, P.

Xie, X.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[Crossref] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Xu, W.

Xu, Z.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

Yamashita, T.

Yang, X.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[Crossref] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Yin, H.

R. Cheng, H. Yin, J. Liu, T. Li, H. Cai, Z. Xu, and W. Chen, “Photon-Number-Resolving Detector Based on Superconducting Serial Nanowires,” IEEE Trans. Appl. Supercond. 23(1), 2200309 (2013).
[Crossref]

You, L.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[Crossref] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
[Crossref]

Zhang, L.

Q. Zhao, T. Jia, M. Gu, C. Wan, L. Zhang, W. Xu, L. Kang, J. Chen, and P. Wu, “Counting rate enhancements in superconducting nanowire single-photon detectors with improved readout circuits,” Opt. Lett. 39(7), 1869–1872 (2014).
[Crossref] [PubMed]

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L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
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Zhang, W.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
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L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
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L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Adv. 3(7), 072135 (2013).
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Figures (4)

Fig. 1
Fig. 1 The process flow of back-illuminated superconducting nanowire detectors. See text for details on individual fabrication steps.
Fig. 2
Fig. 2 (a) Cross-sectional sketch of the nanowire detector with self-alignment structure (not to scale). (b) Top-view optical micrograph of the detector area with a laser spot illuminated from the backside fiber. The light rectangle is Si3N4/Si membrane with the nanowire detector at its center. (c) Photograph of fiber-coupled multi-detector package. Four fibers are connectorized with matched detectors on a single chip. (d) Optical micrograph of the detector chip. (e,f) SEM images of a series-2-SNAP and higher magnification image taken at the corner of the active nanowire detector area. The diameter of detection area is 10 μm.
Fig. 3
Fig. 3 (a) SDE as a function of normalized bias current IBias / ISW. The best detector (series-2-SNAP) shows a saturated SDE of 16% with the DCR lower than 20 Hz, while the other three detectors demonstrate SDE of 12% (series-2-SNAP) and 5-8% (standard SNSPDs), respectively. The switching currents ISW of the four detectors are 18.6 μA, 18.0 μA (series-2-SNAPs) and 8.1 μA, 7.0 μA (standard SNSPDs), respectively. (b) DCR as a function of IBias / ISW. The two curves measured separately with and without light sent to neighbor detector overlaps perfectly, indicating non-measurable cross-talk between the two adjacent detectors. The avalanche current of the series-2-SNAP IAV is indicated by the red arrow. (c) Averaged output pulses from the series-2-SNAP and the standard SNSPD. The decay time constants are extracted from exponential fitting. (d) Histogram data obtained from the jitter measurement (empty circles) and corresponding Gaussian fit (solid line). The double-arrows indicate full width at half maximum (FWHM) obtained from the fits. The series-2-SNAP and the standard SNSPD are biased at 16 μA and 8 μA, respectively.
Fig. 4
Fig. 4 (a) SDE of series-2-SNAPs recorded at each cool-down. (b) Cross-sectional sketch of the nanowire detector embedded within optical cavity with self-alignment structure (not to scale). (c) Simulation results for the nanowire absorption efficiency as a function of the variation in the Si residue thickness. The red solid curve represents the efficiency of the design with optical cavity integrated, while the blue one is for the fabricated detectors in this work without cavity. The corresponding dashed lines represent the efficiency with the Si residue layer completely removed for each case of design. The simulation is done using COMSOL Multiphysics with the refractive indices provided by [3].

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