Abstract

We demonstrate a surface-normal coupled tunable hybrid silicon laser array for the first time using passively-aligned, high-accuracy flip chip bonding. A 2x6 III-V reflective semiconductor optical amplifier (RSOA) array with integrated total internal reflection mirrors is bonded to a CMOS SOI chip with grating couplers and silicon ring reflectors to form a tunable hybrid external-cavity laser array. Waveguide-coupled wall plug efficiency (wcWPE) of 2% and output power of 3 mW has been achieved for all 12 lasers. We further improved the performance by reducing the thickness of metal/dielectric stacks and achieved 10mW output power and 5% wcWPE with the same integration techniques. This non-invasive, one-step back end of the line (BEOL) integration approach provides a promising solution to high density laser sources for future large-scale photonic integrated circuits.

© 2016 Optical Society of America

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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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  11. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
  23. P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference (IEEE, 2014), pp. 258–259.
    [Crossref]
  24. B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.
  25. B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
    [Crossref] [PubMed]
  26. J. H. Lee, D. Y. Lee, J. Bovington, I. Shubin, S. Lin, J. Yao, Y. Luo, S. S. Djordjevic, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Si/III-V hybrid external-cavity laser stabilization using real-time micro-ring monitoring and feedback control,” in Optical Fiber Communication Conference, OSA Technical Digest (Optical Society of America, 2016), paper W2A.21.
    [Crossref]
  27. J. Yao, X. Zheng, I. Shubin, S. Lin, J. H. Lee, Y. Luo, S. S. Djordjevic, J. Bovington, D. Y. Lee, H. D. Thacker, J. E. Cunningham, K. Raj, and A. V. Krishnamoorthy, “A CMOS-compatible low back reflection grating coupler for on-chip laser sources integration,” in Optical Fiber Communication Conference, OSA Technical Digest, (Optical Society of America, 2016), paper W2A.9.
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  28. J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
    [Crossref] [PubMed]

2016 (2)

2015 (2)

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

2014 (2)

2013 (4)

2012 (1)

2011 (2)

2010 (3)

2009 (1)

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

2007 (1)

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

2006 (1)

Abolghasem, P.

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Alon, E.

Amberg, P.

Asghari, M.

Baets, R.

Basak, J.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Behfar, A.

B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
[Crossref] [PubMed]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference (IEEE, 2014), pp. 258–259.
[Crossref]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Biberman, A.

E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. Shah Hosseini, A. Biberman, and M. R. Watts, “An ultralow power athermal silicon modulator,” Nat. Commun. 5, 4008 (2014).
[Crossref] [PubMed]

Bickel, N.

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Bickford, J.

Bijlani, B. J.

Bordel, D.

Bovington, J.

Bower, C.

Bowers, J.

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

Bowers, J. E.

Bowker, J.

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Cardile, P.

Chetrit, Y.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Cohen, O.

Cohen, R.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Contu, P.

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference (IEEE, 2014), pp. 258–259.
[Crossref]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Corbett, B.

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

B. Snyder, B. Corbett, and P. O’Brien, “Hybrid integration of the wavelength-tunable laser with a silicon photonic integrated circuit,” J. Lightwave Technol. 31(24), 3934–3942 (2013).
[Crossref]

Cunningham, J. E.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Power-efficient III-V/silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Davids, P. S.

Dayringer, M.

De Dobbelaere, P.

P. De Dobbelaere, “Light source approach for silicon photonics transceivers,” in Proceedings of European Conference on Optical Communication (IEEE, 2014).

De Groote, A.

Delbeke, D.

DeRose, C. T.

Djordjevic, S. S.

Dong, P.

Duan, G.-H.

Fang, A.

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

Fang, A. W.

Fathololoumi, S.

Fecioru, A. M.

Fedeli, J.-M.

Feng, D.

Fisher, M.

Fong, J.

Fujioka, N.

Gainsley, J.

Ho, R.

Ishizaka, M.

Izhaky, N.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Jany, C.

Jeong, S.-H.

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
[Crossref]

Jones, R.

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[Crossref] [PubMed]

Keyvaninia, S.

Kita, T.

K. Nemoto, T. Kita, and H. Yamada, “Narrow spectral linewidth wavelength tunable laser with Si photonic-wire waveguide ring resonators,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 216–218.
[Crossref]

Klamkin, J.

B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
[Crossref] [PubMed]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference (IEEE, 2014), pp. 258–259.
[Crossref]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Krishnamoorthy, A. V.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Power-efficient III-V/silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Kurahashi, T.

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
[Crossref]

Lamponi, M.

Le Liepvre, A.

Lee, D. C.

Lee, J. H.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

Lelarge, F.

Lexau, J.

Li, G.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Li, J.

Liang, D.

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

Liao, L.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Lin, S.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

Liu, A.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Liu, F.

Luff, B. J.

Luo, Y.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Make, D.

Mekis, A.

Moghadam, H. F.

Morito, K.

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
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Nemoto, K.

K. Nemoto, T. Kita, and H. Yamada, “Narrow spectral linewidth wavelength tunable laser with Si photonic-wire waveguide ring resonators,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 216–218.
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Nguyen, H.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

O’Brien, P.

Pakeltis, G.

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

Paniccia, M.

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Paniccia, M. J.

Park, H.

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[Crossref] [PubMed]

Patil, D.

Pinguet, T.

Pinna, S.

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Qian, W.

Raj, K.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Ristic, S.

B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
[Crossref] [PubMed]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Robert, C.

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

Roelkens, G.

Rogers, J. A.

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

Rubin, D.

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

Seddighian, P.

Sekiguchi, S.

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
[Crossref]

Shafiiha, R.

Shah Hosseini, E.

E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. Shah Hosseini, A. Biberman, and M. R. Watts, “An ultralow power athermal silicon modulator,” Nat. Commun. 5, 4008 (2014).
[Crossref] [PubMed]

Sheng, X.

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

Shi, J.

Shubin, I.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Snyder, B.

Song, B.

B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
[Crossref] [PubMed]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Sorace-Agaskar, C. M.

E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. Shah Hosseini, A. Biberman, and M. R. Watts, “An ultralow power athermal silicon modulator,” Nat. Commun. 5, 4008 (2014).
[Crossref] [PubMed]

Stagarescu, C.

B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
[Crossref] [PubMed]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference (IEEE, 2014), pp. 258–259.
[Crossref]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

Starbuck, A. L.

Subramanian, A. Z.

Sun, J.

E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. Shah Hosseini, A. Biberman, and M. R. Watts, “An ultralow power athermal silicon modulator,” Nat. Commun. 5, 4008 (2014).
[Crossref] [PubMed]

Tanaka, S.

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
[Crossref]

Tanaka, Y.

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
[Crossref]

Thacker, H.

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Thacker, H. D.

Timurdogan, E.

E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. Shah Hosseini, A. Biberman, and M. R. Watts, “An ultralow power athermal silicon modulator,” Nat. Commun. 5, 4008 (2014).
[Crossref] [PubMed]

Trotter, D. C.

Van Thourhout, D.

Wang, S.

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

Watts, M. R.

Yamada, H.

K. Nemoto, T. Kita, and H. Yamada, “Narrow spectral linewidth wavelength tunable laser with Si photonic-wire waveguide ring resonators,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 216–218.
[Crossref]

Yao, J.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Zheng, X.

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J. H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Efficient WDM laser sources towards terabyte/s silicon photonic interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Power-efficient III-V/silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

Zilkie, A. J.

Zortman, W. A.

Electron. Lett. (1)

L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high-speed applications,” Electron. Lett. 43(22), 1196 (2007).
[Crossref]

J. Lightwave Technol. (3)

Laser Photonics Rev. (1)

X. Sheng, C. Robert, S. Wang, G. Pakeltis, B. Corbett, and J. A. Rogers, “Transfer printing of fully formed thin-film microscale GaAs lasers on silicon with a thermally conductive interface material,” Laser Photonics Rev. 9(4), L17–L22 (2015).
[Crossref]

Nat. Commun. (1)

E. Timurdogan, C. M. Sorace-Agaskar, J. Sun, E. Shah Hosseini, A. Biberman, and M. R. Watts, “An ultralow power athermal silicon modulator,” Nat. Commun. 5, 4008 (2014).
[Crossref] [PubMed]

Opt. Express (12)

C. T. DeRose, D. C. Trotter, W. A. Zortman, A. L. Starbuck, M. Fisher, M. R. Watts, and P. S. Davids, “Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current,” Opt. Express 19(25), 24897–24904 (2011).
[Crossref] [PubMed]

X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express 18(1), 204–211 (2010).
[Crossref] [PubMed]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19(6), 5172–5186 (2011).
[Crossref] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[Crossref] [PubMed]

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

J. H. Lee, J. Bovington, I. Shubin, Y. Luo, J. Yao, S. Lin, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Demonstration of 12.2% wall plug efficiency in uncooled single mode external-cavity tunable Si/III-V hybrid laser,” Opt. Express 23(9), 12079–12088 (2015).
[Crossref] [PubMed]

J. H. Lee, I. Shubin, J. Yao, J. Bickford, Y. Luo, S. Lin, S. S. Djordjevic, H. D. Thacker, J. E. Cunningham, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “High power and widely tunable Si hybrid external-cavity laser for power efficient Si photonics WDM links,” Opt. Express 22(7), 7678–7685 (2014).
[Crossref] [PubMed]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Power-efficient III-V/silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[Crossref] [PubMed]

A. De Groote, P. Cardile, A. Z. Subramanian, A. M. Fecioru, C. Bower, D. Delbeke, R. Baets, and G. Roelkens, “Transfer-printing-based integration of single-mode waveguide-coupled III-V-on-silicon broadband light emitters,” Opt. Express 24(13), 13754–13762 (2016).
[Crossref] [PubMed]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III-V- CMOS SOI hybrid external-cavity laser,” Opt. Express 21(26), 32425–32431 (2013).
[Crossref] [PubMed]

B. Song, C. Stagarescu, S. Ristic, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” Opt. Express 24(10), 10435–10444 (2016).
[Crossref] [PubMed]

J. E. Cunningham, I. Shubin, X. Zheng, T. Pinguet, A. Mekis, Y. Luo, H. Thacker, G. Li, J. Yao, K. Raj, and A. V. Krishnamoorthy, “Highly-efficient thermally-tuned resonant optical filters,” Opt. Express 18(18), 19055–19063 (2010).
[Crossref] [PubMed]

Opt. Photonics News (1)

J. Bowers, D. Liang, A. Fang, H. Park, R. Jones, and M. Paniccia, “Hybrid silicon lasers,” Opt. Photonics News 21, 28–33 (2009).

Other (9)

P. De Dobbelaere, “Light source approach for silicon photonics transceivers,” in Proceedings of European Conference on Optical Communication (IEEE, 2014).

G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “40 Gb/s thermally tunable CMOS ring modulator,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 1–3.
[Crossref]

K. Nemoto, T. Kita, and H. Yamada, “Narrow spectral linewidth wavelength tunable laser with Si photonic-wire waveguide ring resonators,” in Proceedings of The 9th International Conference on Group IV Photonics (IEEE, 2012), pp. 216–218.
[Crossref]

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, and K. Morito, “Highly-efficient, low-noise Si hybrid laser using flip-chip bonded SOA,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2012), pp. 12–13.
[Crossref]

S. Lin, S. S. Djordjevic, J. E. Cunningham, I. Shubin, Y. Luo, J. Yao, G. Li, H. Thacker, J. H. Lee, K. Raj, X. Zheng, and A. V. Krishnamoorthy, “Vertical-coupled high-efficiency tunable III/V- CMOS SOI hybrid external-cavity laser,” in Proceedings of IEEE Optical Interconnects Conference, (IEEE, 2014), pp. 79–80.

J. H. Lee, D. Y. Lee, J. Bovington, I. Shubin, S. Lin, J. Yao, Y. Luo, S. S. Djordjevic, J. E. Cunningham, K. Raj, A. V. Krishnamoorthy, and X. Zheng, “Si/III-V hybrid external-cavity laser stabilization using real-time micro-ring monitoring and feedback control,” in Optical Fiber Communication Conference, OSA Technical Digest (Optical Society of America, 2016), paper W2A.21.
[Crossref]

J. Yao, X. Zheng, I. Shubin, S. Lin, J. H. Lee, Y. Luo, S. S. Djordjevic, J. Bovington, D. Y. Lee, H. D. Thacker, J. E. Cunningham, K. Raj, and A. V. Krishnamoorthy, “A CMOS-compatible low back reflection grating coupler for on-chip laser sources integration,” in Optical Fiber Communication Conference, OSA Technical Digest, (Optical Society of America, 2016), paper W2A.9.
[Crossref]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference (IEEE, 2014), pp. 258–259.
[Crossref]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communication (IEEE, 2015), pp. 1–3.

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Figures (7)

Fig. 1
Fig. 1

(a) Side view schematic diagram of the surface-normal coupled hybrid laser, (b) microscope image of the integrated 2x6 hybrid external cavity laser array.

Fig. 2
Fig. 2

(a) Microscope image of the III-V chip containing a 2x6 RSOA array (will update later), (b) SEM image of the cross section near the facet mirror in the ROSA.

Fig. 3
Fig. 3

(a) Microscope image of the CMOS SOI chip with a 2x6 ring reflector circuit array, (b) schematic diagram of the ring reflector design on the SOI chip.

Fig. 4
Fig. 4

Measured lasing spectrum, L-I-V curves and wcWPE of all six channels in the (a-c) top row and (d-f) bottom row.

Fig. 5
Fig. 5

Lasing spectra at different tuning power for (a) top row, (b) bottom row.

Fig. 6
Fig. 6

Simulated III-V to SOI coupling loss versus gap size for different MFDs.

Fig. 7
Fig. 7

(a) Microscope image of the bonded laser array, (b) measured L-I-V curves and (c) wcWPE for the 1x4 channel laser array.

Metrics