Abstract

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system’s performance.

© 2016 Optical Society of America

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References

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    [Crossref] [PubMed]

2015 (2)

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

T. Man, Y. Wan, and D. Wang, “Phase shift steps extraction and phase shift error correction in partially coherent illuminated phase-shifting digital holography,” Appl. Opt. 54(7), 1839–1843 (2015).
[Crossref]

2014 (3)

Y. Lee, Y. Ito, T. Tahara, J. Inoue, P. Xia, Y. Awatsuji, K. Nishio, S. Ura, and O. Matoba, “Single-shot dual-wavelength phase unwrapping in parallel phase-shifting digital holography,” Opt. Lett. 39(8), 2374–2377 (2014).
[Crossref] [PubMed]

A. Doblas, E. Sánchez-Ortiga, M. Martínez-Corral, G. Saavedra, and J. Garcia-Sucerquia, “Accurate single-shot quantitative phase imaging of biological specimens with telecentric digital holographic microscopy,” J. Biomed. Opt. 19(4), 046022 (2014).
[Crossref] [PubMed]

R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
[Crossref]

2013 (1)

2012 (2)

2011 (2)

2008 (5)

B. Rappaz, F. Charrière, C. Depeursinge, P. J. Magistretti, and P. Marquet, “Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium,” Opt. Lett. 33(7), 744–746 (2008).
[Crossref] [PubMed]

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

J. Kühn, T. Colomb, C. Pache, F. Charrière, F. Montfort, E. Cuche, Y. Emery, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy for extended measurement range with enhanced axial resolution,” Proc. SPIE 6861, 68610J (2008).
[Crossref]

B. Kemper, S. Stürwald, C. Remmersmann, P. Langehanenberg, and G. von Bally, “Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces,” Opt. Lasers Eng. 46(7), 499–507 (2008).
[Crossref]

A. Wada, M. Kato, and Y. Ishii, “Large step-height measurements using multiple-wavelength holographic interferometry with tunable laser diodes,” J. Opt. Soc. Am. A 25(12), 3013–3020 (2008).
[Crossref] [PubMed]

2007 (2)

2006 (2)

2004 (1)

Y. Awatsuji, M. Sasada, and T. Kubota, “Parallel quasi-phase-shifting digital holography,” Appl. Phys. Lett. 85(6), 1069–1071 (2004).
[Crossref]

2001 (1)

2000 (3)

1999 (3)

1997 (1)

1996 (2)

E. Cuche, P. Poscio, and C. D. Depeursinge, “Optical tomography at the microscopic scale by means of a numerical low-coherence holographic technique,” Proc. SPIE 2927, 61–66 (1996).
[Crossref]

T. Iwai and T. Asakura, “Speckle reduction in coherent information processing,” Proc. IEEE 84(5), 765–781 (1996).
[Crossref]

Abdul-Rahman, H. S.

Arimoto, H.

Asakura, T.

T. Iwai and T. Asakura, “Speckle reduction in coherent information processing,” Proc. IEEE 84(5), 765–781 (1996).
[Crossref]

Aspert, N.

Awatsuji, Y.

Bevilacqua, F.

Bourquin, S.

Burton, D. R.

Cao, H.

B. Redding, M. A. Choma, and H. Cao, “Speckle-free laser imaging using random laser illumination,” Nat. Photonics 6(6), 355–359 (2012).
[Crossref] [PubMed]

Charrière, F.

Cho, J.

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

Choma, M. A.

B. Redding, M. A. Choma, and H. Cao, “Speckle-free laser imaging using random laser illumination,” Nat. Photonics 6(6), 355–359 (2012).
[Crossref] [PubMed]

Colomb, T.

Cuche, E.

Dan, D.

R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
[Crossref]

J. Min, B. Yao, P. Gao, R. Guo, B. Ma, J. Zheng, M. Lei, S. Yan, D. Dan, T. Duan, Y. Yang, and T. Ye, “Dual-wavelength slightly off-axis digital holographic microscopy,” Appl. Opt. 51(2), 191–196 (2012).
[Crossref] [PubMed]

Depeursinge, C.

B. Rappaz, F. Charrière, C. Depeursinge, P. J. Magistretti, and P. Marquet, “Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium,” Opt. Lett. 33(7), 744–746 (2008).
[Crossref] [PubMed]

J. Kühn, T. Colomb, C. Pache, F. Charrière, F. Montfort, E. Cuche, Y. Emery, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy for extended measurement range with enhanced axial resolution,” Proc. SPIE 6861, 68610J (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15(12), 7231–7242 (2007).
[Crossref] [PubMed]

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, “Numerical parametric lens for shifting, magnification, and complete aberration compensation in digital holographic microscopy,” J. Opt. Soc. Am. A 23(12), 3177–3190 (2006).
[Crossref] [PubMed]

E. Cuche, P. Marquet, and C. Depeursinge, “Spatial filtering for zero-order and twin-image elimination in digital off-axis holography,” Appl. Opt. 39(23), 4070–4075 (2000).
[Crossref] [PubMed]

E. Cuche, F. Bevilacqua, and C. Depeursinge, “Digital holography for quantitative phase-contrast imaging,” Opt. Lett. 24(5), 291–293 (1999).
[Crossref] [PubMed]

Depeursinge, C. D.

E. Cuche, P. Poscio, and C. D. Depeursinge, “Optical tomography at the microscopic scale by means of a numerical low-coherence holographic technique,” Proc. SPIE 2927, 61–66 (1996).
[Crossref]

Doblas, A.

A. Doblas, E. Sánchez-Ortiga, M. Martínez-Corral, G. Saavedra, and J. Garcia-Sucerquia, “Accurate single-shot quantitative phase imaging of biological specimens with telecentric digital holographic microscopy,” J. Biomed. Opt. 19(4), 046022 (2014).
[Crossref] [PubMed]

Duan, T.

Dubois, F.

Ekimov, D.

D. Ekimov and A. Makynen, “In-line digital holography for high speed 4D tracking of particles,” in Instrumentation and Measurement Technology Conference (IEEE, 2011), pp. 1–4.
[Crossref]

Emery, Y.

J. Kühn, T. Colomb, C. Pache, F. Charrière, F. Montfort, E. Cuche, Y. Emery, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy for extended measurement range with enhanced axial resolution,” Proc. SPIE 6861, 68610J (2008).
[Crossref]

J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15(12), 7231–7242 (2007).
[Crossref] [PubMed]

Gao, P.

Garcia-Sucerquia, J.

A. Doblas, E. Sánchez-Ortiga, M. Martínez-Corral, G. Saavedra, and J. Garcia-Sucerquia, “Accurate single-shot quantitative phase imaging of biological specimens with telecentric digital holographic microscopy,” J. Biomed. Opt. 19(4), 046022 (2014).
[Crossref] [PubMed]

Gdeisat, M. A.

Guo, R.

R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
[Crossref]

J. Min, B. Yao, P. Gao, R. Guo, B. Ma, J. Zheng, M. Lei, S. Yan, D. Dan, T. Duan, Y. Yang, and T. Ye, “Dual-wavelength slightly off-axis digital holographic microscopy,” Appl. Opt. 51(2), 191–196 (2012).
[Crossref] [PubMed]

Hong, J.

Indebetouw, G.

Inoue, H.

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

Inoue, J.

Ishii, Y.

Ito, Y.

Iwai, T.

T. Iwai and T. Asakura, “Speckle reduction in coherent information processing,” Proc. IEEE 84(5), 765–781 (1996).
[Crossref]

Javidi, B.

Jeon, S.

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

Joannes, L.

Kataoka, T.

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

Kato, M.

Kawakami, T.

Kemper, B.

B. Kemper, S. Stürwald, C. Remmersmann, P. Langehanenberg, and G. von Bally, “Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces,” Opt. Lasers Eng. 46(7), 499–507 (2008).
[Crossref]

Kim, D.

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

Kim, M. K.

Kimoto, Y.

Klysubun, P.

Kubota, T.

Y. Awatsuji, M. Sasada, and T. Kubota, “Parallel quasi-phase-shifting digital holography,” Appl. Phys. Lett. 85(6), 1069–1071 (2004).
[Crossref]

Kühn, J.

Lalor, M. J.

Langehanenberg, P.

B. Kemper, S. Stürwald, C. Remmersmann, P. Langehanenberg, and G. von Bally, “Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces,” Opt. Lasers Eng. 46(7), 499–507 (2008).
[Crossref]

Lee, M.

Lee, Y.

Legros, J.-C.

Lei, M.

R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
[Crossref]

J. Min, B. Yao, P. Gao, R. Guo, B. Ma, J. Zheng, M. Lei, S. Yan, D. Dan, T. Duan, Y. Yang, and T. Ye, “Dual-wavelength slightly off-axis digital holographic microscopy,” Appl. Opt. 51(2), 191–196 (2012).
[Crossref] [PubMed]

Lilley, F.

Lim, G.

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

Ma, B.

Magistretti, P. J.

Makynen, A.

D. Ekimov and A. Makynen, “In-line digital holography for high speed 4D tracking of particles,” in Instrumentation and Measurement Technology Conference (IEEE, 2011), pp. 1–4.
[Crossref]

Man, T.

Marian, A.

Marquet, P.

Martínez-Corral, M.

A. Doblas, E. Sánchez-Ortiga, M. Martínez-Corral, G. Saavedra, and J. Garcia-Sucerquia, “Accurate single-shot quantitative phase imaging of biological specimens with telecentric digital holographic microscopy,” J. Biomed. Opt. 19(4), 046022 (2014).
[Crossref] [PubMed]

Matoba, O.

Matsuura, T.

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

Min, J.

R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
[Crossref]

J. Min, B. Yao, P. Gao, R. Guo, B. Ma, J. Zheng, M. Lei, S. Yan, D. Dan, T. Duan, Y. Yang, and T. Ye, “Dual-wavelength slightly off-axis digital holographic microscopy,” Appl. Opt. 51(2), 191–196 (2012).
[Crossref] [PubMed]

Montfort, F.

Moore, C. J.

Nakano, M.

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

Nishio, K.

Ohzu, H.

Okagaki, S.

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

Oshikane, Y.

T. Matsuura, S. Okagaki, Y. Oshikane, H. Inoue, M. Nakano, and T. Kataoka, “Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography,” Surf. Interface Anal. 40(6–7), 1028–1032 (2008).
[Crossref]

Osten, W.

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39(1), 79–85 (2000).
[Crossref]

Ozcan, A.

Pache, C.

J. Kühn, T. Colomb, C. Pache, F. Charrière, F. Montfort, E. Cuche, Y. Emery, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy for extended measurement range with enhanced axial resolution,” Proc. SPIE 6861, 68610J (2008).
[Crossref]

Park, N.-C.

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

Park, Y.

D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
[Crossref]

Parshall, D.

Poscio, P.

E. Cuche, P. Poscio, and C. D. Depeursinge, “Optical tomography at the microscopic scale by means of a numerical low-coherence holographic technique,” Proc. SPIE 2927, 61–66 (1996).
[Crossref]

Rappaz, B.

Redding, B.

B. Redding, M. A. Choma, and H. Cao, “Speckle-free laser imaging using random laser illumination,” Nat. Photonics 6(6), 355–359 (2012).
[Crossref] [PubMed]

Remmersmann, C.

B. Kemper, S. Stürwald, C. Remmersmann, P. Langehanenberg, and G. von Bally, “Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces,” Opt. Lasers Eng. 46(7), 499–507 (2008).
[Crossref]

Saavedra, G.

A. Doblas, E. Sánchez-Ortiga, M. Martínez-Corral, G. Saavedra, and J. Garcia-Sucerquia, “Accurate single-shot quantitative phase imaging of biological specimens with telecentric digital holographic microscopy,” J. Biomed. Opt. 19(4), 046022 (2014).
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Sánchez-Ortiga, E.

A. Doblas, E. Sánchez-Ortiga, M. Martínez-Corral, G. Saavedra, and J. Garcia-Sucerquia, “Accurate single-shot quantitative phase imaging of biological specimens with telecentric digital holographic microscopy,” J. Biomed. Opt. 19(4), 046022 (2014).
[Crossref] [PubMed]

Sasada, M.

Y. Awatsuji, M. Sasada, and T. Kubota, “Parallel quasi-phase-shifting digital holography,” Appl. Phys. Lett. 85(6), 1069–1071 (2004).
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B. Kemper, S. Stürwald, C. Remmersmann, P. Langehanenberg, and G. von Bally, “Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces,” Opt. Lasers Eng. 46(7), 499–507 (2008).
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C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39(1), 79–85 (2000).
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[Crossref]

J. Min, B. Yao, P. Gao, R. Guo, B. Ma, J. Zheng, M. Lei, S. Yan, D. Dan, T. Duan, Y. Yang, and T. Ye, “Dual-wavelength slightly off-axis digital holographic microscopy,” Appl. Opt. 51(2), 191–196 (2012).
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R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
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R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
[Crossref]

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R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
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M. Yokota, T. Kawakami, Y. Kimoto, and I. Yamaguchi, “Drying process in a solvent-based paint analyzed by phase-shifting digital holography and an estimation of time for tack free,” Appl. Opt. 50(30), 5834–5841 (2011).
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Biomed. Opt. Express (1)

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J. Opt. (1)

R. Guo, B. Yao, J. Min, M. Zhou, X. Yu, M. Lei, S. Yan, Y. Yang, and D. Dan, “LED-based digital holographic microscopy with slightly off-axis interferometry,” J. Opt. 16(12), 125408 (2014).
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D. Kim, S. Jeon, J. Cho, G. Lim, N.-C. Park, and Y. Park, “Three dimensional measurement of micro-optical components using digital holography and pattern recognition,” Jpn. J. Appl. Phys. 54(9S), 09ME01 (2015).
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Opt. Express (1)

Opt. Lasers Eng. (1)

B. Kemper, S. Stürwald, C. Remmersmann, P. Langehanenberg, and G. von Bally, “Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces,” Opt. Lasers Eng. 46(7), 499–507 (2008).
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Figures (5)

Fig. 1
Fig. 1 Optical configuration of the proposed system using an LED as single low-coherence light source. The four-step phase-shifting method is implemented for better image quality. LED: light-emitting diode; BF: bandpass filter; OBJ: object; PZT: piezoelectric transducer; CCD: charge-coupled device; and PC: computer.
Fig. 2
Fig. 2 Normalized wavelength distributions of the light sources unfiltered and filtered by bandpass filters.
Fig. 3
Fig. 3 Holographic reconstruction results using an LED with filters of (a) 620 nm and (b) 640 nm. The cross-section graphs are derived from the red lines in the phase images.
Fig. 4
Fig. 4 Dual-wavelength reconstruction process using the proposed system. Quality-enhanced phase profiles by aberration compensation with (a) 620 nm and (b) 640 nm, respectively. Combined profile (c) using the results from (a) and (b). (d) The area within the red square in (c) enlarged. (e) ~(g) Cross-section profiles of the red lines in (c). The line widths of the regions are (e) 100 µm, (f) 50 µm, and (g) 1 mm, respectively.
Fig. 5
Fig. 5 (a) Comparison of the measurement data between the result from probe profileometer (Bruker DektakXT) and the proposed system. The compared area is the same region of Fig. 4(g). (b) The zoomed profiles from the dashed square in Fig. 5(a).

Tables (1)

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Table 1 Optical Properties of the Utilized Light Sources

Equations (7)

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I λ k (x,y)=|O+R | 2 =|O | 2 +|R | 2 +O R * + O * R,
h= ΛΔϕ 4π = Λ( ϕ λ 1 ϕ λ 2 ) 4π ,
Λ= λ 1 λ 2 | λ 1 λ 2 | .
O λ k (x,y)=|O|exp(iϕ),
|O|= 1 4|R| I λ k (x,y;0) I λ k (x,y;π) cos(ϕ) ,
ϕ= tan 1 I λ k (x,y;3π/2) I λ k (x,y;π/2) I λ k (x,y;0) I λ k (x,y;π) ,
h λ k ={ ΛΔϕ 2π λ k λ k 2 + ϕ i 4ϕ λ k if| h ΛΔϕ 2π λ k λ k 2 + ϕ i 4ϕ λ k |<| h ΛΔϕ 2π λ k λ k 2 + ϕ i 4ϕ λ k | ΛΔϕ 2π λ k λ k 2 + ϕ i 4ϕ λ k if| h ΛΔϕ 2π λ k λ k 2 + ϕ i 4ϕ λ k |>| h ΛΔϕ 2π λ k λ k 2 + ϕ i 4ϕ λ k | ,

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