Abstract

Dielectric metasurfaces are capable of completely manipulating the phase, amplitude, and polarization of light with high spatial resolutions. The emerging design based on high-index and low-loss dielectrics has led to the realization of novel metasurfaces with high transmissions, but these devices usually operate at the limited bandwidth, and are sensitive to the incident polarization. Here, we report the realization of the polarization-independent and high-efficiency silicon metasurfaces spanning the visible wavelengths about 200 nm. The fabricated computer-generated meta-holograms exhibit a 90% diffraction efficiency, which are verified by gradient metasurfaces with measured efficiencies up to 93% at 670 nm, and exceeding 75% at the wavelengths from 600 to 800 nm for the two orthogonally polarized incidences. These dielectric metasurfaces effectively decouple the phase modulation from the polarization states and frequencies for visible light, which hold great potential for novel flat optical devices operating over a broad spectrum.

© 2016 Optical Society of America

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2016 (4)

J. B. Mueller, K. Leosson, and F. Capasso, “Ultracompact metasurface in-line polarimeter,” Optica 3(1), 42–47 (2016).
[Crossref]

S. Jahani and Z. Jacob, “All-dielectric metamaterials,” Nat. Nanotechnol. 11(1), 23–36 (2016).
[Crossref] [PubMed]

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. Yang, and C. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

K. Chong, L. Wang, I. Staude, A. James, J. Dominguez, S. Liu, G. Subramania, M. Decker, D. Neshev, I. Brener, and Y. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

2015 (16)

T. Matsui, S. Yamashita, H. Wado, H. Fujikawa, and H. Iizuka, “Flat grating lens utilizing widely variable transmission-phase via guided-modes,” Opt. Lett. 40(1), 25–28 (2015).
[Crossref] [PubMed]

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

M. Khorasaninejad and F. Capasso, “Broadband multifunctional efficient meta-gratings based on dielectric waveguide phase shifters,” Nano Lett. 15(10), 6709–6715 (2015).
[Crossref] [PubMed]

Z. Li, E. Palacios, S. Butun, and K. Aydin, “Visible-frequency metasurfaces for broadband anomalous reflection and high-efficiency spectrum splitting,” Nano Lett. 15(3), 1615–1621 (2015).
[Crossref] [PubMed]

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. B. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6, 8241 (2015).
[Crossref] [PubMed]

X. Ni, Z. J. Wong, M. Mrejen, Y. Wang, and X. Zhang, “An ultrathin invisibility skin cloak for visible light,” Science 349(6254), 1310–1314 (2015).
[Crossref] [PubMed]

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-hfficiency all-dielectric metasurfaces for ultra-compact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, 7069 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

A. Shaltout, J. Liu, A. Kildishev, and V. Shalaev, “Photonic spin Hall effect in gap–plasmon metasurfaces for on-chip chiroptical spectroscopy,” Optica 2(10), 860–863 (2015).
[Crossref]

W. Luo, S. Xiao, Q. He, S. Sun, and L. Zhou, “Photonic spin Hall effect with nearly 100% efficiency,” Adv. Opt. Mater. 3(8), 1102–1108 (2015).
[Crossref]

2014 (7)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

A. Shaltout, J. Liu, V. M. Shalaev, and A. V. Kildishev, “Optically active metasurface with non-chiral plasmonic nanoantennas,” Nano Lett. 14(8), 4426–4431 (2014).
[Crossref] [PubMed]

D. Fattal, W. V. Sorin, Z. Peng, T. Tran, M. Fiorentino, and R. G. Beausoleil, “Sub-wavelength grating lenses with a twist,” IEEE Photonics Technol. Lett. 26(13), 1375–1378 (2014).
[Crossref]

J. Cheng, D. Ansari-Oghol-Beig, and H. Mosallaei, “Wave manipulation with designer dielectric metasurfaces,” Opt. Lett. 39(21), 6285–6288 (2014).
[Crossref] [PubMed]

W. T. Chen, K. Y. Yang, C. M. Wang, Y. W. Huang, G. Sun, I. D. Chiang, C. Y. Liao, W. L. Hsu, H. T. Lin, S. Sun, L. Zhou, A. Q. Liu, and D. P. Tsai, “High-efficiency broadband meta-hologram with polarization-controlled dual images,” Nano Lett. 14(1), 225–230 (2014).
[Crossref] [PubMed]

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[Crossref] [PubMed]

C. Pfeiffer, N. K. Emani, A. M. Shaltout, A. Boltasseva, V. M. Shalaev, and A. Grbic, “Efficient light bending with isotropic metamaterial Huygens’ surfaces,” Nano Lett. 14(5), 2491–2497 (2014).
[Crossref] [PubMed]

2013 (6)

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

X. Yin, Z. Ye, J. Rho, Y. Wang, and X. Zhang, “Photonic spin Hall effect at metasurfaces,” Science 339(6126), 1405–1407 (2013).
[Crossref] [PubMed]

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4, 2807 (2013).
[Crossref]

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K.-W. Cheah, C.-W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4, 2808 (2013).
[Crossref]

2012 (7)

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[Crossref] [PubMed]

S. Sun, Q. He, S. Xiao, Q. Xu, X. Li, and L. Zhou, “Gradient-index meta-surfaces as a bridge linking propagating waves and surface waves,” Nat. Mater. 11(5), 426–431 (2012).
[Crossref] [PubMed]

X. Ni, N. K. Emani, A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Broadband light bending with plasmonic nanoantennas,” Science 335(6067), 427(2012).
[Crossref] [PubMed]

L. Huang, X. Chen, H. Mühlenbernd, G. Li, B. Bai, Q. Tan, G. Jin, T. Zentgraf, and S. Zhang, “Dispersionless phase discontinuities for controlling light propagation,” Nano Lett. 12(11), 5750–5755 (2012).
[Crossref] [PubMed]

X. Chen, L. Huang, H. Mühlenbernd, G. Li, B. Bai, Q. Tan, G. Jin, C. W. Qiu, S. Zhang, and T. Zentgraf, “Dual-polarity plasmonic metalens for visible light,” Nat. Commun. 3, 1198 (2012).
[Crossref] [PubMed]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

W. Liu, A. E. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Broadband unidirectional scattering by magneto-electric core-shell nanoparticles,” ACS Nano 6(6), 5489–5497 (2012).
[Crossref] [PubMed]

2011 (4)

A. García-Etxarri, R. Gómez-Medina, L. S. Froufe-Pérez, C. López, L. Chantada, F. Scheffold, J. Aizpurua, M. Nieto-Vesperinas, and J. J. Sáenz, “Strong magnetic response of submicron silicon particles in the infrared,” Opt. Express 19(6), 4815–4826 (2011).
[Crossref] [PubMed]

A. B. Evlyukhin, C. Reinhardt, and B. N. Chichkov, “Multipole light scattering by nonspherical nanoparticles in the discrete dipole approximation,” Phys. Rev. B 84(23), 235429 (2011).
[Crossref]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J. P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

Z. Peng, D. A. Fattal, A. Faraon, M. Fiorentino, J. Li, and R. G. Beausoleil, “Reflective silicon binary diffraction grating for visible wavelengths,” Opt. Lett. 36(8), 1515–1517 (2011).
[Crossref] [PubMed]

2010 (2)

H. J. Hyvärinen, P. Karvinen, and J. Turunen, “Polarization insensitive resonance-domain blazed binary gratings,” Opt. Express 18(13), 13444–13450 (2010).
[Crossref] [PubMed]

D. Fattal, J. Li, Z. Peng, M. Fiorentino, and R. G. Beausoleil, “Flat dielectric grating reflectors with focusing abilities,” Nat. Photonics 4(7), 466–470 (2010).
[Crossref]

2002 (1)

1999 (1)

1972 (1)

R. W. Gerchberg and W. O. Saxton, “A practical algorithm for the determination of the phase from image and diffraction plane pictures,” Optik (Stuttg.) 35, 237–246 (1972).

Aieta, F.

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J. P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

Aizpurua, J.

Ansari-Oghol-Beig, D.

Arbabi, A.

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, 7069 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Astilean, S.

Aydin, K.

Z. Li, E. Palacios, S. Butun, and K. Aydin, “Visible-frequency metasurfaces for broadband anomalous reflection and high-efficiency spectrum splitting,” Nano Lett. 15(3), 1615–1621 (2015).
[Crossref] [PubMed]

Azad, A. K.

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

Bagheri, M.

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, 7069 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Bai, B.

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K.-W. Cheah, C.-W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4, 2808 (2013).
[Crossref]

X. Chen, L. Huang, H. Mühlenbernd, G. Li, B. Bai, Q. Tan, G. Jin, C. W. Qiu, S. Zhang, and T. Zentgraf, “Dual-polarity plasmonic metalens for visible light,” Nat. Commun. 3, 1198 (2012).
[Crossref] [PubMed]

L. Huang, X. Chen, H. Mühlenbernd, G. Li, B. Bai, Q. Tan, G. Jin, T. Zentgraf, and S. Zhang, “Dispersionless phase discontinuities for controlling light propagation,” Nano Lett. 12(11), 5750–5755 (2012).
[Crossref] [PubMed]

Ball, A. J.

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, 7069 (2015).
[Crossref] [PubMed]

Beausoleil, R. G.

D. Fattal, W. V. Sorin, Z. Peng, T. Tran, M. Fiorentino, and R. G. Beausoleil, “Sub-wavelength grating lenses with a twist,” IEEE Photonics Technol. Lett. 26(13), 1375–1378 (2014).
[Crossref]

Z. Peng, D. A. Fattal, A. Faraon, M. Fiorentino, J. Li, and R. G. Beausoleil, “Reflective silicon binary diffraction grating for visible wavelengths,” Opt. Lett. 36(8), 1515–1517 (2011).
[Crossref] [PubMed]

D. Fattal, J. Li, Z. Peng, M. Fiorentino, and R. G. Beausoleil, “Flat dielectric grating reflectors with focusing abilities,” Nat. Photonics 4(7), 466–470 (2010).
[Crossref]

Biener, G.

Boltasseva, A.

C. Pfeiffer, N. K. Emani, A. M. Shaltout, A. Boltasseva, V. M. Shalaev, and A. Grbic, “Efficient light bending with isotropic metamaterial Huygens’ surfaces,” Nano Lett. 14(5), 2491–2497 (2014).
[Crossref] [PubMed]

X. Ni, N. K. Emani, A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Broadband light bending with plasmonic nanoantennas,” Science 335(6067), 427(2012).
[Crossref] [PubMed]

Bomzon, Z.

Brener, I.

K. Chong, L. Wang, I. Staude, A. James, J. Dominguez, S. Liu, G. Subramania, M. Decker, D. Neshev, I. Brener, and Y. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Brongersma, M. L.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[Crossref] [PubMed]

Butun, S.

Z. Li, E. Palacios, S. Butun, and K. Aydin, “Visible-frequency metasurfaces for broadband anomalous reflection and high-efficiency spectrum splitting,” Nano Lett. 15(3), 1615–1621 (2015).
[Crossref] [PubMed]

Cambril, E.

Campione, S.

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Capasso, F.

J. B. Mueller, K. Leosson, and F. Capasso, “Ultracompact metasurface in-line polarimeter,” Optica 3(1), 42–47 (2016).
[Crossref]

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

M. Khorasaninejad and F. Capasso, “Broadband multifunctional efficient meta-gratings based on dielectric waveguide phase shifters,” Nano Lett. 15(10), 6709–6715 (2015).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J. P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

Chan, K.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. B. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6, 8241 (2015).
[Crossref] [PubMed]

Chantada, L.

Chavel, P.

Cheah, K. W.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. B. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6, 8241 (2015).
[Crossref] [PubMed]

Cheah, K.-W.

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K.-W. Cheah, C.-W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4, 2808 (2013).
[Crossref]

Chen, H. T.

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

Chen, M.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. B. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6, 8241 (2015).
[Crossref] [PubMed]

Chen, S.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. B. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6, 8241 (2015).
[Crossref] [PubMed]

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K.-W. Cheah, C.-W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4, 2808 (2013).
[Crossref]

Chen, W. T.

W. T. Chen, K. Y. Yang, C. M. Wang, Y. W. Huang, G. Sun, I. D. Chiang, C. Y. Liao, W. L. Hsu, H. T. Lin, S. Sun, L. Zhou, A. Q. Liu, and D. P. Tsai, “High-efficiency broadband meta-hologram with polarization-controlled dual images,” Nano Lett. 14(1), 225–230 (2014).
[Crossref] [PubMed]

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[Crossref] [PubMed]

Chen, X.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. B. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6, 8241 (2015).
[Crossref] [PubMed]

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K.-W. Cheah, C.-W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4, 2808 (2013).
[Crossref]

L. Huang, X. Chen, H. Mühlenbernd, G. Li, B. Bai, Q. Tan, G. Jin, T. Zentgraf, and S. Zhang, “Dispersionless phase discontinuities for controlling light propagation,” Nano Lett. 12(11), 5750–5755 (2012).
[Crossref] [PubMed]

X. Chen, L. Huang, H. Mühlenbernd, G. Li, B. Bai, Q. Tan, G. Jin, C. W. Qiu, S. Zhang, and T. Zentgraf, “Dual-polarity plasmonic metalens for visible light,” Nat. Commun. 3, 1198 (2012).
[Crossref] [PubMed]

Cheng, J.

Chiang, I. D.

W. T. Chen, K. Y. Yang, C. M. Wang, Y. W. Huang, G. Sun, I. D. Chiang, C. Y. Liao, W. L. Hsu, H. T. Lin, S. Sun, L. Zhou, A. Q. Liu, and D. P. Tsai, “High-efficiency broadband meta-hologram with polarization-controlled dual images,” Nano Lett. 14(1), 225–230 (2014).
[Crossref] [PubMed]

Chichkov, B. N.

A. B. Evlyukhin, C. Reinhardt, and B. N. Chichkov, “Multipole light scattering by nonspherical nanoparticles in the discrete dipole approximation,” Phys. Rev. B 84(23), 235429 (2011).
[Crossref]

Chong, K.

K. Chong, L. Wang, I. Staude, A. James, J. Dominguez, S. Liu, G. Subramania, M. Decker, D. Neshev, I. Brener, and Y. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

Chong, K. E.

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Chowdhury, D. R.

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

Dalvit, D. A. R.

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

Decker, M.

K. Chong, L. Wang, I. Staude, A. James, J. Dominguez, S. Liu, G. Subramania, M. Decker, D. Neshev, I. Brener, and Y. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Dominguez, J.

K. Chong, L. Wang, I. Staude, A. James, J. Dominguez, S. Liu, G. Subramania, M. Decker, D. Neshev, I. Brener, and Y. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Dong, Z.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. Yang, and C. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

Emani, N. K.

C. Pfeiffer, N. K. Emani, A. M. Shaltout, A. Boltasseva, V. M. Shalaev, and A. Grbic, “Efficient light bending with isotropic metamaterial Huygens’ surfaces,” Nano Lett. 14(5), 2491–2497 (2014).
[Crossref] [PubMed]

X. Ni, N. K. Emani, A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Broadband light bending with plasmonic nanoantennas,” Science 335(6067), 427(2012).
[Crossref] [PubMed]

Evlyukhin, A. B.

A. B. Evlyukhin, C. Reinhardt, and B. N. Chichkov, “Multipole light scattering by nonspherical nanoparticles in the discrete dipole approximation,” Phys. Rev. B 84(23), 235429 (2011).
[Crossref]

Falkner, M.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

Fan, P.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[Crossref] [PubMed]

Faraon, A.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, 7069 (2015).
[Crossref] [PubMed]

Z. Peng, D. A. Fattal, A. Faraon, M. Fiorentino, J. Li, and R. G. Beausoleil, “Reflective silicon binary diffraction grating for visible wavelengths,” Opt. Lett. 36(8), 1515–1517 (2011).
[Crossref] [PubMed]

Fattal, D.

D. Fattal, W. V. Sorin, Z. Peng, T. Tran, M. Fiorentino, and R. G. Beausoleil, “Sub-wavelength grating lenses with a twist,” IEEE Photonics Technol. Lett. 26(13), 1375–1378 (2014).
[Crossref]

D. Fattal, J. Li, Z. Peng, M. Fiorentino, and R. G. Beausoleil, “Flat dielectric grating reflectors with focusing abilities,” Nat. Photonics 4(7), 466–470 (2010).
[Crossref]

Fattal, D. A.

Fiorentino, M.

D. Fattal, W. V. Sorin, Z. Peng, T. Tran, M. Fiorentino, and R. G. Beausoleil, “Sub-wavelength grating lenses with a twist,” IEEE Photonics Technol. Lett. 26(13), 1375–1378 (2014).
[Crossref]

Z. Peng, D. A. Fattal, A. Faraon, M. Fiorentino, J. Li, and R. G. Beausoleil, “Reflective silicon binary diffraction grating for visible wavelengths,” Opt. Lett. 36(8), 1515–1517 (2011).
[Crossref] [PubMed]

D. Fattal, J. Li, Z. Peng, M. Fiorentino, and R. G. Beausoleil, “Flat dielectric grating reflectors with focusing abilities,” Nat. Photonics 4(7), 466–470 (2010).
[Crossref]

Fofang, N. T.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Froufe-Pérez, L. S.

Fu, Y. H.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4, 1527 (2013).
[Crossref] [PubMed]

Fujikawa, H.

Gaburro, Z.

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J. P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

García-Etxarri, A.

Genevet, P.

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J. P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

Gerchberg, R. W.

R. W. Gerchberg and W. O. Saxton, “A practical algorithm for the determination of the phase from image and diffraction plane pictures,” Optik (Stuttg.) 35, 237–246 (1972).

Gómez-Medina, R.

Gonzales, E.

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Other (2)

M. Khorasaninejad, A. Ambrosio, P. Kanhaiya, and F. Capasso, “Dispersion-compensated meta-holograms based on detour phase,” http://arxiv.org/abs/1601.01415 .

A. Arbabi and A. Faraon, “Fundamental limits of ultrathin metasurfaces,” http://arxiv.org/abs/1411.2537 .

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Figures (6)

Fig. 1
Fig. 1

Schematic of a meta-hologram. An array of amorphous silicon nano-resonators is arranged on a quartz substrate and the beam is normally incident along z-axis. The image is the experimental result under the illumination of 700 nm x – polarized light.

Fig. 2
Fig. 2

Numerical simulations of the phase delay and the amplitude of the transmission light through an infinite metasurface as a function of the size of meta-atoms. The red solid line, the blue dash line, the yellow solid line and the gray dash line represent the phase delay of x - polarization, the phase delay of y – polarization, the amplitude of x - polarization, and the amplitude of y - polarization, respectively. The amplitude is normalized to the intensity of incident light. (a, b) Meta-atoms have a square cross section with a square lattice and a rectangular (d1 = 1.1d, d2 = 0.9d) lattice, respectively. The length a ranges from 50 nm to 160 nm, and the lattice constant, d = 300 nm. (c, d) Meta-atoms have a regular triangle cross section with a hexagonal lattice and a square lattice, respectively. The length a ranges from 50 nm to 240 nm, and the lattice constant, d = 200√3 nm.

Fig. 3
Fig. 3

Near field distribution in the silicon posts. The diameters of the post are 120 nm (a, b) and 165 nm (c, d). The wavelength of the x - polarized incident light is 650 nm. The color of the images and the black arrows in (a, c) represent the magnitude of the magnetic field along y – axis and the electric field in xz plane, respectively; and in (b, d) represent the magnitude of the electric field along x – axis and the magnetic field in yz plane, respectively.

Fig. 4
Fig. 4

The broad bandwidth of the metasurface. (a, b) Numerical simulations of phase delay and amplitude of transmission light with an infinite metasurface as a function of wavelength from 550 nm to 800 nm and the length of meta-atoms from 50 nm to 250 nm. The dashed black lines represent the equiphase lines of π and 3π, respectively. (c, d) the phase delay and the amplitude of transmission light through the six chosen meta-atoms at wavelength of 600 nm (blue circle), 650 nm (orange square), 700 nm (gray diamond) and 750 nm (yellow triangle).

Fig. 5
Fig. 5

Computer-generated meta-holograms. (a) The target image to generate using the metasurface. (b) The calculated phase mask for the target image. (c) The scanning electronic microscope (SEM) images of the fabricated sample (local view). The photographs of the generated holograms with (d, e) x – polarized and y – polarized incident red lights (700 nm), (f, g) x – polarized and y – polarized incident red lights (633 nm), (h, i) x – polarized and y – polarized incident green lights (532 nm), and (j, k) x – polarized and y – polarized incident green lights (473nm), respectively. The measured diffraction efficiency, related to the signal to noise ratio, is defined as the ratio between the power of the target image field and the sum power of all transmitted light. The absolute imaging efficiency is defined as the ratio between the power of the target image field and that of the incident light.

Fig. 6
Fig. 6

Simulations and Experimental results of gradient metasurface. (a) Top-view and titled-view SEM images of the sample. The dimensions of the six chosen meta-atoms are 110 nm, 120 nm, 135 nm, 150 nm, 170 nm and 210 nm, respectively. (b) Photographs of the transmission light distribution at the wavelength of 550 nm to 710 nm. (c) The simulated near field distributions of gradient metasurface under the x – polarized and (d) y – polarized illuminations. The units of the legends are arbitrary. (e) The simulated far field distributions of gradient metasurface under the x – polarized and (f) y – polarized illuminations. The wavelength of the incident light is 650 nm in (c)-(f). (g) Measured and simulated diffraction efficiency (defined as the ratio of the power of anomalous refraction beam ( + 1 order) and the sum power of the + 1, 0, and −1 orders transmission light) spectra from 550 nm to 800 nm with x - and y -polarized incident light, respectively. (h) Measured and simulated transmittance (defined as the ratio of the power of anomalous refraction beam and the power of incident beam) spectra from 550 nm to 800 nm with x - and y -polarized incident light, respectively.

Tables (1)

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Table 1 Important parameters of recent reported meta-holograms.

Equations (1)

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E 2π n (z)= E R (z)|R+ E L (z) e i4π n |L

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