Abstract

An approach to designing wideband blazed multilayer gratings is introduced and applied to gratings operating at 17–25 nm. We demonstrate single-order operation of broadband multilayer gratings, despite their very wide spectral and angular bandpass, when only one diffraction wave is excited and the diffraction efficiency reaches the reflectivity of a conventional depth-graded multilayer mirror, eliminating overlapping of different-order diffraction waves. The selection principles for the geometrical parameters of gratings are discussed. We formulate a “law of similarity” for wideband gratings that allows us to design gratings with different geometrical parameters but practically the same spectral dependence of the diffraction efficiency.

© 2016 Optical Society of America

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  1. D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
    [Crossref] [PubMed]
  2. M. Prasciolu, A. Haase, F. Scholze, H. N. Chapman, and S. Bajt, “Extended asymmetric-cut multilayer X-ray gratings,” Opt. Express 23(12), 15195–15204 (2015).
    [Crossref] [PubMed]
  3. V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
    [Crossref]
  4. H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
    [Crossref]
  5. R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).
  6. R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
    [Crossref]
  7. J. F. Seely, “Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS),” Proc. SPIE 4138, 174–181 (2000).
    [Crossref]
  8. A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
    [Crossref]
  9. L. Zhang, H. Lin, C. Jin, H. Zhou, and T. Huo, “Broadband multilayer-coated normal incidence blazed grating with approximately 10% diffraction efficiency through the 13-16 nm wavelength region,” Opt. Lett. 34(6), 818–820 (2009).
    [Crossref] [PubMed]
  10. J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
    [Crossref]
  11. M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
    [Crossref]
  12. X. Yang, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Unified analytical theory of single-order soft x-ray multilayer gratings,” J. Opt. Soc. Am. B 32(4), 506–522 (2015).
    [Crossref]
  13. I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, “Design of X-ray supermirrors,” Nucl. Instrum. Methods Phys. Res., Sect. A 460, 424–443 (2001).
  14. A. E. Yakshin, I. V. Kozhevnikov, E. Zoethout, E. Louis, and F. Bijkerk, “Properties of broadband depth-graded multilayer mirrors for EUV optical systems,” Opt. Express 18(7), 6957–6971 (2010).
    [Crossref] [PubMed]
  15. I. V. Kozhevnikov, A. E. Yakshin, and F. Bijkerk, “Wideband multilayer mirrors with minimal layer thicknesses variation,” Opt. Express 23(7), 9276–9283 (2015).
    [Crossref] [PubMed]
  16. http://henke.lbl.gov/optical_constants/getdb2.html
  17. S. Bajt, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
    [Crossref]
  18. D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
    [Crossref]
  19. S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90(2), 1017–1025 (2001).
    [Crossref]
  20. E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
    [Crossref]
  21. R. Petit, Electromagnetic Theory of Gratings, Topics in Current Physics, Vol. 22 (Springer, 1980).
  22. I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime,” Opt. Express 18(15), 16234–16242 (2010).
    [Crossref] [PubMed]
  23. I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Analytic theory of soft x-ray diffraction by Lamellar Multilayer Gratings,” Opt. Express 19(10), 9172–9184 (2011).
    [Crossref] [PubMed]
  24. M. Dominique, A. V. Mitrofanov, J.-F. Hochedez, P. Y. Apel, U. Schühle, F. A. Pudonin, O. L. Orelovich, S. Y. Zuev, D. Bolsée, C. Hermans, and A. BenMoussa, “Track membranes with open pores used as diffractive filters for space-based x-ray and EUV solar observations,” Appl. Opt. 48(5), 834–841 (2009).
    [Crossref] [PubMed]

2015 (3)

2013 (1)

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

2012 (2)

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

2011 (2)

2010 (3)

2009 (2)

2005 (2)

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

2004 (1)

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

2002 (1)

S. Bajt, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[Crossref]

2001 (2)

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90(2), 1017–1025 (2001).
[Crossref]

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, “Design of X-ray supermirrors,” Nucl. Instrum. Methods Phys. Res., Sect. A 460, 424–443 (2001).

2000 (1)

J. F. Seely, “Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS),” Proc. SPIE 4138, 174–181 (2000).
[Crossref]

1994 (1)

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

1991 (1)

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Akin, D. J.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Anderson, E. H.

André, J.-M.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Apel, P. Y.

Auker, G.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Bajt, S.

M. Prasciolu, A. Haase, F. Scholze, H. N. Chapman, and S. Bajt, “Extended asymmetric-cut multilayer X-ray gratings,” Opt. Express 23(12), 15195–15204 (2015).
[Crossref] [PubMed]

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

S. Bajt, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[Crossref]

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90(2), 1017–1025 (2001).
[Crossref]

Barbee, T. W.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Barchewitz, R.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Barstow, M. A.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Bastiaens, B.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Bastiaens, H. M. J.

Beardsley, S.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Benbalagh, R.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

BenMoussa, A.

Bijkerk, F.

Boerner, P. F.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Boller, K.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Boller, K.-J.

Bolsée, D.

Bookbinder, J. A.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Braun, S.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

Bridou, F.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Brons, C.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Bruijn, M. P.

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Bukreeva, I. N.

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, “Design of X-ray supermirrors,” Nucl. Instrum. Methods Phys. Res., Sect. A 460, 424–443 (2001).

Bush, R. I.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Cabrini, S.

Caldwell, D.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Cambie, R.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref] [PubMed]

Chapman, H. N.

M. Prasciolu, A. Haase, F. Scholze, H. N. Chapman, and S. Bajt, “Extended asymmetric-cut multilayer X-ray gratings,” Opt. Express 23(12), 15195–15204 (2015).
[Crossref] [PubMed]

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Cheimets, P. N.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Chou, C.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Clapp, M.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Conley, R.

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Cruddace, R. G.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Delmotte, F.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Deluca, E. E.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

den Boggende, A. J. F.

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Dhuey, S.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

Dhuey, S. D.

Dominique, M.

Drake, J. F.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Duncan, D. W.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Edwards, C. G.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Fedorenko, A. I.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Filatova, E. O.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Friedlaender, F. M.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Fritz, G. G.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Gates, R.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Gawlitza, P.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

Golub, L.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Goray, L. I.

Gullikson, E. M.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref] [PubMed]

Gummin, M. A.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Gursky, H.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Haase, A.

Hecquet, C.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Hegeman, P.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Heidemann, K. F.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Hermans, C.

Heyman, G. F.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Hochedez, J.-F.

Huang, Q.

Hunter, W. R.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Huo, T.

Hurlburt, N. E.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Huskens, J.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Jérome, A.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Jerram, P.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Jin, C.

Jonnard, P.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Julié, G.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Kang, H. C.

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Katz, N. L.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Kearney, P. A.

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90(2), 1017–1025 (2001).
[Crossref]

Kondratenko, V. V.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Kowalski, M. P.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Kozhevnikov, I.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Kozhevnikov, I. V.

Krishnan, B.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Kushner, G. D.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Lang, J.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Lemen, J. R.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Levashov, V. E.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Levay, M.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Lin, H.

Lindgren, R. W.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Liu, C.

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Louis, E.

Macrander, A. T.

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Marmoret, R.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Maser, J.

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Mathur, D. P.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

McFeaters, E. L.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Meltchakov, E.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Menesguen, Y.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Mitchell, S.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Mitrofanov, A. V.

Mollard, L.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Orelovich, O. L.

Padmore, H. A.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref] [PubMed]

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Park, S.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Podgorski, W. A.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Poltseva, O. V.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Pool, P.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Prasciolu, M.

Pudonin, F. A.

Puik, E. J.

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Ravet-Krill, M.-F.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Rehse, R. A.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Rémond, C.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Rolland, G.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Rossi, S.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Roulliay, M.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Salmassi, F.

Scherrer, P. H.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Scholze, F.

Schrijver, C. J.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Schühle, U.

Seely, J. F.

J. F. Seely, “Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS),” Proc. SPIE 4138, 174–181 (2000).
[Crossref]

Smith, P.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Soufli, R.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Springer, L. A.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Stearns, D. G.

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90(2), 1017–1025 (2001).
[Crossref]

Stephenson, G. B.

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Stern, R. A.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Struk, I. I.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Tarbell, T. D.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Title, A. M.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Troussel, P.

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

van der Meer, R.

Varniere, F.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

Verhoeven, J.

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Vinogradov, A. V.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Voronov, D. L.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref] [PubMed]

Vratzov, B.

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Waltham, N.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Wang, Z.

Warwick, T.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref] [PubMed]

Windt, D. L.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Wolfson, C. J.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Wood, K. S.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Wuelser, J.-P.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Yakshin, A. E.

Yanari, C.

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Yang, X.

Yashchuk, V. V.

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref] [PubMed]

Yentis, D. J.

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Yulin, S. A.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Zeijlemaker, H.

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

Zhang, L.

Zhou, H.

Ziegler, E.

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, “Design of X-ray supermirrors,” Nucl. Instrum. Methods Phys. Res., Sect. A 460, 424–443 (2001).

Zoethout, E.

Zubarev, E. N.

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Zuev, S. Y.

AIP Adv. (1)

R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, “High-efficiency diffractive x-ray optics from sectioned multilayers,” Appl. Phys. Lett. 86(15), 151109 (2005).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (1)

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[Crossref]

J. Appl. Phys. (2)

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, and H. A. Padmore, “Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering,” J. Appl. Phys. 111(9), 093521 (2012).
[Crossref]

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90(2), 1017–1025 (2001).
[Crossref]

J. Opt. Soc. Am. B (1)

Nucl. Instrum. Methods Phys. Res., Sect. A (2)

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, “Design of X-ray supermirrors,” Nucl. Instrum. Methods Phys. Res., Sect. A 460, 424–443 (2001).

R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods Phys. Res., Sect. A 541, 590–597 (2005).

Opt. Commun. (1)

V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, S. A. Yulin, I. I. Struk, and A. V. Vinogradov, “High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating,” Opt. Commun. 109(1-2), 1–4 (1994).
[Crossref]

Opt. Eng. (1)

S. Bajt, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[Crossref]

Opt. Express (6)

Opt. Lett. (1)

Proc. SPIE (3)

J. F. Seely, “Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS),” Proc. SPIE 4138, 174–181 (2000).
[Crossref]

A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijlemaker, E. J. Puik, and H. A. Padmore, “A broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” Proc. SPIE 1345, 189–197 (1991).
[Crossref]

M. P. Kowalski, R. G. Cruddace, K. S. Wood, D. J. Yentis, H. Gursky, T. W. Barbee, G. G. Fritz, W. R. Hunter, K. F. Heidemann, and M. A. Barstow, “Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX,” Proc. SPIE 5168, 21–30 (2004).
[Crossref]

Sol. Phys. (1)

J. R. Lemen, A. M. Title, D. J. Akin, P. F. Boerner, C. Chou, J. F. Drake, D. W. Duncan, C. G. Edwards, F. M. Friedlaender, G. F. Heyman, N. E. Hurlburt, N. L. Katz, G. D. Kushner, M. Levay, R. W. Lindgren, D. P. Mathur, E. L. McFeaters, S. Mitchell, R. A. Rehse, C. J. Schrijver, L. A. Springer, R. A. Stern, T. D. Tarbell, J.-P. Wuelser, C. J. Wolfson, C. Yanari, J. A. Bookbinder, P. N. Cheimets, D. Caldwell, E. E. Deluca, R. Gates, L. Golub, S. Park, W. A. Podgorski, R. I. Bush, P. H. Scherrer, M. A. Gummin, P. Smith, G. Auker, P. Jerram, P. Pool, R. Soufli, D. L. Windt, S. Beardsley, M. Clapp, J. Lang, and N. Waltham, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 17–40 (2012).
[Crossref]

Other (2)

http://henke.lbl.gov/optical_constants/getdb2.html

R. Petit, Electromagnetic Theory of Gratings, Topics in Current Physics, Vol. 22 (Springer, 1980).

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Figures (11)

Fig. 1
Fig. 1 Sketch illustrating diffraction of EUV radiation from a multilayer coated blazed grating.
Fig. 2
Fig. 2 Depth distribution of layer thicknesses in multilayer structures M1 to M4. B4C and SiC barrier layers of the fixed thickness are not shown in the figure. Parameter Q in Eq. (1) is equal to 1 nm−2 for M1 and M2, 2 nm−2 for M3, and 0 for M4. Bi-layer number is counted from top of mirror. The gray scattered points in M1 are for the multilayer designed to reflect unpolarized radiation.
Fig. 3
Fig. 3 Reflectivity of wideband MMs versus radiation wavelength. Chemical composition and layer thickness distributions of the multilayer structures are described in the text and shown in Fig. 2. Dashed vertical lines show the working spectral interval considered in MM optimization.
Fig. 4
Fig. 4 Upper row: Diffraction efficiency of different orders versus radiation wavelength for two gratings of the same period and anti-blaze angle but different blaze angles. Vertical dashed lines indicate the working spectral range. The dotted curve shows the −1st order diffraction efficiency of the grating with same parameters as the grating G2 but designed for operation with unpolarized radiation. The reflectivity of an M1 mirror at a 10° incident angle is also shown (MM). Lower row: Intervals of diffraction angles with respect to vertical axis for different diffraction orders at wavelengths between 17 and 32 nm.
Fig. 5
Fig. 5 Diffraction efficiency of different orders versus radiation wavelength for grating G9, which has the same blaze angle and anti-blaze angle as G2, but half the period. Vertical dashed lines indicate the working spectral range. The reflectivity of an M1 mirror at a 10° incident angle is also shown (MM).
Fig. 6
Fig. 6 Diffraction efficiency of different orders versus radiation wavelength for two gratings of the same period and anti-blaze angle but different blaze angles. Vertical dashed lines indicate the working spectral range. The reflectivity of an M1 mirror at a 10° incident angle is also shown (MM). For comparison, the −1st order diffraction efficiency for gratings with the same blaze and anti-blaze angles but slightly different periods (D = 461 nm in the left graph and D = 353 nm in the right graph) are shown as dotted curves.
Fig. 7
Fig. 7 Upper row: Diffraction efficiency of different orders versus the radiation wavelength for two gratings of the same period and anti-blaze angle, but different blaze angles. Vertical dashed lines indicate the working spectral range. The reflectivity of an M1 mirror at a 10° incident angle is also shown (MM). Lower row: Intervals of diffraction angles with respect to the vertical axis for different diffraction orders at wavelengths between 17 and 32 nm.
Fig. 8
Fig. 8 Upper graph: Diffraction efficiency of different orders versus the radiation wavelength for the grating G10, which has half the period and twice the blaze angle of G2 so that Eq. (2) is fulfilled. Vertical dashed lines indicate the working spectral range. The reflectivity of an M1 mirror at a 10° incident angle is also shown (MM). Lower graph: Intervals of diffraction angles with respect to the vertical axis for different diffraction orders at wavelengths between 17 and 32 nm.
Fig. 9
Fig. 9 Diffraction efficiency of the −1st order versus radiation wavelength for gratings covered with M4. The grating period and anti-blaze angle are fixed, and the blaze angle is varied slightly. Vertical dashed lines indicate the working spectral range. The reflectivity of an M4 mirror at a 10° incident angle is also shown (MM).
Fig. 10
Fig. 10 Diffraction efficiency of different orders versus radiation wavelength for two gratings with the same geometrical parameters, but different multilayer coatings: M2 (G11) or M3 (G12). Vertical dashed lines indicate the working spectral range. The reflectivity of M2 and M3 mirrors at a 10° incident angle is also shown (MM).
Fig. 11
Fig. 11 Diffraction efficiency of different orders versus radiation wavelength for two gratings (G7 and G8) with the same period and blaze angle but different anti-blaze angles. Vertical dashed lines indicate the working spectral range. The reflectivity of an M1 mirror at a 10° incident angle is also shown (MM). For comparison, dotted curves show the −1st order diffraction efficiency for gratings with the same anti-blaze angles but half the period (D = 200 nm) and twice the blaze angle (α = 3°).

Tables (1)

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Table 1 Parameters of multilayer coated blazed gratings discussed in the text.

Equations (2)

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MF = λ min λ max [ R ( λ ; d 1 , d 2 , ) R 0 ( λ ) ] 2 + Q j [ ( d j + 1 A d j A ) 2 + ( d j + 1 S d j S ) 2 ] ,
d e f f = D sin α / ( n ) 10.47 nm,

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