Temporally-stable active precision mount for large optics

Claudia Reinlein; Christoph Damm; Nicolas Lange; Andreas Kamm; Matthias Mohaupt; Aoife Brady; Matthias Goy; Nina Leonhard; Ramona Eberhardt; Uwe Zeitner; Andreas Tünnermann

doi:10.1364/OE.24.013527

Temporally-stable active precision mount for large optics

Claudia Reinlein, Christoph Damm, Nicolas Lange, Andreas Kamm, Matthias Mohaupt, Aoife Brady, Matthias Goy, Nina Leonhard, Ramona Eberhardt, Uwe Zeitner, and Andreas Tünnermann

Optics Express
Vol. 24,
Issue 12,
pp. 13527-13541
(2016)
•https://doi.org/10.1364/OE.24.013527

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Claudia Reinlein, Christoph Damm, Nicolas Lange, Andreas Kamm, Matthias Mohaupt, Aoife Brady, Matthias Goy, Nina Leonhard, Ramona Eberhardt, Uwe Zeitner, and Andreas Tünnermann, "Temporally-stable active precision mount for large optics," Opt. Express 24, 13527-13541 (2016)

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Related Topics
Table of Contents Category
- Geometric Optics and Optical Design
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Aberration compensation (220.1000)
- Optomechanics (220.4880)
- Active or adaptive optics (220.1080)
- Astronomical optics (350.1260)
- Gratings (350.2770)

About this Article
History
- Original Manuscript: April 5, 2016
- Revised Manuscript: May 29, 2016
- Manuscript Accepted: June 1, 2016
- Published: June 10, 2016

Accessible

Open Access

Abstract

We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 × 105 × 9 mm³, and a full mirror of 228 × 210 × 9 mm³. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.

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References

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Publication

E. Oliva, E. Diolaiti, B. Garilli, R. Gratton, D. Lorenzetti, P. Schipani, S. Scuderi, E. Vanzella, M. Cirasuolo, J. Afonso, R. Bender, P. Bonifacio, L. Kaper, L. Vanzi, C. Baffa, A. Bianco, C. Bonoli, F. Bortoletto, P. Bruno, L. Carbonaro, M. Centrone, G. Cresci, V. De Caprio, C. Del Vecchio, P. Di Marcantonio, A. Di Paola, F. D’Alessio, M. D’Alessandro, S. D’Orsi, G. Falcini, D. Ferruzzi, A. Fontana, I. Foppiani, M. Fumana, E. Giani, F. Leone, G. LiCausi, M. Lombini, R. Maiolino, F. Mannucci, L. Marty, L. Miglietta, M. Munari, R. Navarro, L. Origlia, L. Paioro, F. Pedichini, J. Pragt, S. Randich, M. Scodeggio, P. Span, R. Speziali, R. Stuik, A. Tozzi, and F. Vitali, “The design of the moons-vlt spectrometer,” Proc. SPIE 8446, 84464V (2012).
[Crossref]
J. Arns, J. C. Wilson, M. Skrutskie, S. Smee, R. Barkhouser, D. Eisenstein, J. Gunn, F. Hearty, A. Harding, P. Maseman, J. Holtzman, R. Schiavon, B. Gillespie, and S. Majewski, “Development of a large mosaic volume phase holographic (vph) grating for apogee,” Proc. SPIE 7739, 773913 (2010).
[Crossref]
E. Meyer, S. Chen, S. A. Wright, A. M. Moore, J. E. Larkin, L. Simard, J. Marie, E. Mieda, and J. Gordon, “The infrared imaging spectrograph (iris) for tmt: reflective ruled diffraction grating performance testing and discussion,” Proc. SPIE 9147, 91479C (2014).
[Crossref]
A. Szentgyorgyi, A. Frebel, G. Furesz, E. Hertz, T. Norton, J. Bean, H. Bergner, J. Crane, J. Evans, I. Evans, T. Gauron, A. Jordn, S. Park, A. Uomoto, S. Barnes, W. Davis, M. Eisenhower, H. Epps, D. Guzman, K. Mc-Cracken, M. Ordway, D. Plummer, W. Podgorski, and D. Weaver, “The gmt-cfa, carnegie, catolica, chicago large earth finder (g-clef): a general purpose optical echelle spectrograph for the gmt with precision radial velocity capability,” Proc. SPIE 8446, 84461H (2012).
[Crossref]
T. Zhang, M. Yonemura, and Y. Kato, “An array-grating compressor for high-power chirped-pulse amplification lasers,” Opt. Commun. 145, 367–376 (1998).
[Crossref]
J. Qiao, A. Kalb, M. J. Guardalben, G. King, D. Canning, and J. H. Kelly, “Large-aperture grating tiling by interferometry for petawatt chirped-pulse–amplification systems,” Opt. Express 15, 9562–9574 (2007).
[Crossref] [PubMed]
S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]
F. Frassetto, S. Bonora, C. Vozzi, S. Stagira, E. Zanchetta, G. D. Giustina, G. Brusatin, and L. Poletto, “Active-grating monochromator for the spectral selection of ultrashort pulses,” Opt. Express 21, 12996–13004 (2013).
[Crossref] [PubMed]
J. Qiao, J. Papa, and X. Liu, “Spatio-temporal modeling and optimization of a deformable-grating compressor for short high-energy laser pulses,” Opt. Express 23, 25923–25934 (2015).
[Crossref] [PubMed]
L. Noethe, F. Franza, P. Giordano, R. Wilson, O. Citterio, G. Conti, and E. Mattaini, “Active optics ii. results of an experiment with a thin 1 m test mirror,” J. Mod. Opt. 35, 1427–1457 (1988).
[Crossref]
S. Stanghellini, P. Legrand, A. Baty, and T. Hovsepian, “Design and construction of the vlt primary mirror cell: support of the large, thin primary mirror,” Proc. SPIE 2871 2871, 314–325 (1997).
[Crossref]
S. Guisard, L. Noethe, and J. Spyromilio, “Performance of active optics at the vlt,” Proc. SPIE 4003, 154–164 (2000).
[Crossref]
P. Schipani, S. D’Orsi, L. Ferragina, D. Fierro, L. Marty, C. Molfese, and F. Perrotta, “Active optics primary mirror support system for the 2.6m vst telescope,” Appl. Opt. 49, 1234–1241 (2010).
[Crossref] [PubMed]
M. A. Ealey and J. F. Washeba, “Continuous facesheet low voltage deformable mirrors,” Opt. Eng. 29, 1191–1198 (1990).
[Crossref]
A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]
C. Guan, X. Fan, X. Zhang, H. Zhou, J. Mu, L. Xue, K. Wei, H. Xian, C. Rao, Y. Zhang, and N. Ling, “Piezoelectric deformable mirror technologies for astronomy at ioe, cas,” Proc. SPIE 9148, 91480H (2014).
[Crossref]
K. L. Wlodarczyk, E. Bryce, N. Schwartz, M. Strachan, D. Hutson, R. R. J. Maier, D. Atkinson, S. Beard, T. Baillie, P. Parr-Burman, K. Kirk, and D. P. Hand, “Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications,” Rev. Sci. Instrum. 85, 024502 (2014).
[Crossref] [PubMed]
G. Vdovin and M. Loktev, “Deformable mirror with thermal actuators,” Opt. Lett. 27, 677–679 (2002).
[Crossref]
Q. Xue, L. Huang, P. Yan, M. L. Gong, Y. T. Qiu, T. H. Li, Z. X. Feng, and G. F. Jin, “Structure and closed-loop control of a novel compact deformable mirror for wavefront correction in a high power laser system,” Laser Phys. Lett. 10, 045301 (2013).
[Crossref]
Q. Xue, L. Huang, P. Yan, M. L. Gong, Y. T. Qiu, T. H. Li, Z. X. Feng, X. K. Ma, and Y. B. Wang, “Optimized structure parameters of deformable mirrors for wavefront correction in a high power laser system,” Laser Phys. 24, 025002 (2014).
[Crossref]
R. K. Tyson and B. W. Frazier, Field Guide to Adaptive Optics, 2nd. ed. (SPIE, 2012).
[Crossref]
H. Gross, Handbook of Optical Systems, Volume 3: Aberration Theory and Correction of Optical Systems (WILEY-VCH, 2007).

2015 (1)

J. Qiao, J. Papa, and X. Liu, “Spatio-temporal modeling and optimization of a deformable-grating compressor for short high-energy laser pulses,” Opt. Express 23, 25923–25934 (2015).
[Crossref] [PubMed]

2014 (4)

E. Meyer, S. Chen, S. A. Wright, A. M. Moore, J. E. Larkin, L. Simard, J. Marie, E. Mieda, and J. Gordon, “The infrared imaging spectrograph (iris) for tmt: reflective ruled diffraction grating performance testing and discussion,” Proc. SPIE 9147, 91479C (2014).
[Crossref]

C. Guan, X. Fan, X. Zhang, H. Zhou, J. Mu, L. Xue, K. Wei, H. Xian, C. Rao, Y. Zhang, and N. Ling, “Piezoelectric deformable mirror technologies for astronomy at ioe, cas,” Proc. SPIE 9148, 91480H (2014).
[Crossref]

K. L. Wlodarczyk, E. Bryce, N. Schwartz, M. Strachan, D. Hutson, R. R. J. Maier, D. Atkinson, S. Beard, T. Baillie, P. Parr-Burman, K. Kirk, and D. P. Hand, “Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications,” Rev. Sci. Instrum. 85, 024502 (2014).
[Crossref] [PubMed]

Q. Xue, L. Huang, P. Yan, M. L. Gong, Y. T. Qiu, T. H. Li, Z. X. Feng, X. K. Ma, and Y. B. Wang, “Optimized structure parameters of deformable mirrors for wavefront correction in a high power laser system,” Laser Phys. 24, 025002 (2014).
[Crossref]

2013 (3)

Q. Xue, L. Huang, P. Yan, M. L. Gong, Y. T. Qiu, T. H. Li, Z. X. Feng, and G. F. Jin, “Structure and closed-loop control of a novel compact deformable mirror for wavefront correction in a high power laser system,” Laser Phys. Lett. 10, 045301 (2013).
[Crossref]

A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]

F. Frassetto, S. Bonora, C. Vozzi, S. Stagira, E. Zanchetta, G. D. Giustina, G. Brusatin, and L. Poletto, “Active-grating monochromator for the spectral selection of ultrashort pulses,” Opt. Express 21, 12996–13004 (2013).
[Crossref] [PubMed]

2012 (3)

A. Szentgyorgyi, A. Frebel, G. Furesz, E. Hertz, T. Norton, J. Bean, H. Bergner, J. Crane, J. Evans, I. Evans, T. Gauron, A. Jordn, S. Park, A. Uomoto, S. Barnes, W. Davis, M. Eisenhower, H. Epps, D. Guzman, K. Mc-Cracken, M. Ordway, D. Plummer, W. Podgorski, and D. Weaver, “The gmt-cfa, carnegie, catolica, chicago large earth finder (g-clef): a general purpose optical echelle spectrograph for the gmt with precision radial velocity capability,” Proc. SPIE 8446, 84461H (2012).
[Crossref]

E. Oliva, E. Diolaiti, B. Garilli, R. Gratton, D. Lorenzetti, P. Schipani, S. Scuderi, E. Vanzella, M. Cirasuolo, J. Afonso, R. Bender, P. Bonifacio, L. Kaper, L. Vanzi, C. Baffa, A. Bianco, C. Bonoli, F. Bortoletto, P. Bruno, L. Carbonaro, M. Centrone, G. Cresci, V. De Caprio, C. Del Vecchio, P. Di Marcantonio, A. Di Paola, F. D’Alessio, M. D’Alessandro, S. D’Orsi, G. Falcini, D. Ferruzzi, A. Fontana, I. Foppiani, M. Fumana, E. Giani, F. Leone, G. LiCausi, M. Lombini, R. Maiolino, F. Mannucci, L. Marty, L. Miglietta, M. Munari, R. Navarro, L. Origlia, L. Paioro, F. Pedichini, J. Pragt, S. Randich, M. Scodeggio, P. Span, R. Speziali, R. Stuik, A. Tozzi, and F. Vitali, “The design of the moons-vlt spectrometer,” Proc. SPIE 8446, 84464V (2012).
[Crossref]

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

2010 (2)

J. Arns, J. C. Wilson, M. Skrutskie, S. Smee, R. Barkhouser, D. Eisenstein, J. Gunn, F. Hearty, A. Harding, P. Maseman, J. Holtzman, R. Schiavon, B. Gillespie, and S. Majewski, “Development of a large mosaic volume phase holographic (vph) grating for apogee,” Proc. SPIE 7739, 773913 (2010).
[Crossref]

P. Schipani, S. D’Orsi, L. Ferragina, D. Fierro, L. Marty, C. Molfese, and F. Perrotta, “Active optics primary mirror support system for the 2.6m vst telescope,” Appl. Opt. 49, 1234–1241 (2010).
[Crossref] [PubMed]

2007 (1)

J. Qiao, A. Kalb, M. J. Guardalben, G. King, D. Canning, and J. H. Kelly, “Large-aperture grating tiling by interferometry for petawatt chirped-pulse–amplification systems,” Opt. Express 15, 9562–9574 (2007).
[Crossref] [PubMed]

2002 (1)

G. Vdovin and M. Loktev, “Deformable mirror with thermal actuators,” Opt. Lett. 27, 677–679 (2002).
[Crossref]

2000 (1)

S. Guisard, L. Noethe, and J. Spyromilio, “Performance of active optics at the vlt,” Proc. SPIE 4003, 154–164 (2000).
[Crossref]

1998 (1)

T. Zhang, M. Yonemura, and Y. Kato, “An array-grating compressor for high-power chirped-pulse amplification lasers,” Opt. Commun. 145, 367–376 (1998).
[Crossref]

1997 (1)

S. Stanghellini, P. Legrand, A. Baty, and T. Hovsepian, “Design and construction of the vlt primary mirror cell: support of the large, thin primary mirror,” Proc. SPIE 2871 2871, 314–325 (1997).
[Crossref]

1990 (1)

M. A. Ealey and J. F. Washeba, “Continuous facesheet low voltage deformable mirrors,” Opt. Eng. 29, 1191–1198 (1990).
[Crossref]

1988 (1)

L. Noethe, F. Franza, P. Giordano, R. Wilson, O. Citterio, G. Conti, and E. Mattaini, “Active optics ii. results of an experiment with a thin 1 m test mirror,” J. Mod. Opt. 35, 1427–1457 (1988).
[Crossref]

Afonso, J.

Arns, J.

Atkinson, D.

Baffa, C.

Baillie, T.

Barkhouser, R.

Barnes, S.

Baty, A.

Bean, J.

Beard, S.

Bender, R.

Bergner, H.

Bianco, A.

Bonifacio, P.

Bonoli, C.

Bonora, S.

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Bortoletto, F.

Bruno, P.

Bruno, T.

A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]

Brusatin, G.

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Bryce, E.

Canning, D.

Carbonaro, L.

Cavaco, J.

A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]

Centrone, M.

Chen, S.

Cirasuolo, M.

Citterio, O.

Conti, G.

Crane, J.

Cresci, G.

D’Alessandro, M.

D’Alessio, F.

D’Orsi, S.

Davis, W.

De Caprio, V.

Del Vecchio, C.

DellaGiustina, G.

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Di Marcantonio, P.

Di Paola, A.

Diolaiti, E.

Ealey, M. A.

M. A. Ealey and J. F. Washeba, “Continuous facesheet low voltage deformable mirrors,” Opt. Eng. 29, 1191–1198 (1990).
[Crossref]

Eisenhower, M.

Eisenstein, D.

Epps, H.

Evans, I.

Evans, J.

Ezzo, K. M.

A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]

Falcini, G.

Fan, X.

Feng, Z. X.

Ferragina, L.

Ferruzzi, D.

Fierro, D.

Fontana, A.

Foppiani, I.

Franza, F.

Frassetto, F.

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Frazier, B. W.

R. K. Tyson and B. W. Frazier, Field Guide to Adaptive Optics, 2nd. ed. (SPIE, 2012).
[Crossref]

Frebel, A.

Fumana, M.

Furesz, G.

Garilli, B.

Gauron, T.

Giani, E.

Gillespie, B.

Giordano, P.

Giustina, G. D.

Gong, M. L.

Gordon, J.

Gratton, R.

Gross, H.

H. Gross, Handbook of Optical Systems, Volume 3: Aberration Theory and Correction of Optical Systems (WILEY-VCH, 2007).

Guan, C.

Guardalben, M. J.

Guisard, S.

S. Guisard, L. Noethe, and J. Spyromilio, “Performance of active optics at the vlt,” Proc. SPIE 4003, 154–164 (2000).
[Crossref]

Gunn, J.

Guzman, D.

Hand, D. P.

Harding, A.

Hearty, F.

Hertz, E.

Holtzman, J.

Hovsepian, T.

Huang, L.

Hutson, D.

Jin, G. F.

Jordn, A.

Kalb, A.

Kaper, L.

Kato, Y.

T. Zhang, M. Yonemura, and Y. Kato, “An array-grating compressor for high-power chirped-pulse amplification lasers,” Opt. Commun. 145, 367–376 (1998).
[Crossref]

Kelly, J. H.

King, G.

Kirk, K.

Larkin, J. E.

Legrand, P.

Leone, F.

Li, T. H.

LiCausi, G.

Ling, N.

Liu, X.

Loktev, M.

G. Vdovin and M. Loktev, “Deformable mirror with thermal actuators,” Opt. Lett. 27, 677–679 (2002).
[Crossref]

Lombini, M.

Lorenzetti, D.

Ma, X. K.

Maier, R. R. J.

Maiolino, R.

Majewski, S.

Mannucci, F.

Marie, J.

Marty, L.

Maseman, P.

Mattaini, E.

Mc-Cracken, K.

Meyer, E.

Mieda, E.

Miglietta, L.

Molfese, C.

Moore, A. M.

Mu, J.

Munari, M.

Navarro, R.

Noethe, L.

S. Guisard, L. Noethe, and J. Spyromilio, “Performance of active optics at the vlt,” Proc. SPIE 4003, 154–164 (2000).
[Crossref]

Norton, T.

Oliva, E.

Ordway, M.

Origlia, L.

Paioro, L.

Papa, J.

Park, S.

Parr-Burman, P.

Pedichini, F.

Perrotta, F.

Plummer, D.

Podgorski, W.

Poletto, L.

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Pragt, J.

Qiao, J.

Qiu, Y. T.

Randich, S.

Rao, C.

Schiavon, R.

Schipani, P.

Schwartz, N.

Scodeggio, M.

Scuderi, S.

Simard, L.

Skrutskie, M.

Smee, S.

Span, P.

Speziali, R.

Spyromilio, J.

S. Guisard, L. Noethe, and J. Spyromilio, “Performance of active optics at the vlt,” Proc. SPIE 4003, 154–164 (2000).
[Crossref]

Stagira, S.

Stanghellini, S.

Strachan, M.

Stuik, R.

Szentgyorgyi, A.

Tozzi, A.

Tyson, R. K.

R. K. Tyson and B. W. Frazier, Field Guide to Adaptive Optics, 2nd. ed. (SPIE, 2012).
[Crossref]

Uomoto, A.

Vanzella, E.

Vanzi, L.

Vdovin, G.

G. Vdovin and M. Loktev, “Deformable mirror with thermal actuators,” Opt. Lett. 27, 677–679 (2002).
[Crossref]

Vitali, F.

Vozzi, C.

Wang, Y. B.

Washeba, J. F.

M. A. Ealey and J. F. Washeba, “Continuous facesheet low voltage deformable mirrors,” Opt. Eng. 29, 1191–1198 (1990).
[Crossref]

Weaver, D.

Wei, K.

Wilson, J. C.

Wilson, R.

Wirth, A.

A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]

Wlodarczyk, K. L.

Wright, S. A.

Xian, H.

Xue, L.

Xue, Q.

Yan, P.

Yonemura, M.

T. Zhang, M. Yonemura, and Y. Kato, “An array-grating compressor for high-power chirped-pulse amplification lasers,” Opt. Commun. 145, 367–376 (1998).
[Crossref]

Zanchetta, E.

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Zhang, T.

T. Zhang, M. Yonemura, and Y. Kato, “An array-grating compressor for high-power chirped-pulse amplification lasers,” Opt. Commun. 145, 367–376 (1998).
[Crossref]

Zhang, X.

Zhang, Y.

Zhou, H.

Appl. Opt. (1)

J. Mod. Opt. (1)

Laser Phys. (1)

Laser Phys. Lett. (1)

Opt. Commun. (1)

T. Zhang, M. Yonemura, and Y. Kato, “An array-grating compressor for high-power chirped-pulse amplification lasers,” Opt. Commun. 145, 367–376 (1998).
[Crossref]

Opt. Eng. (1)

M. A. Ealey and J. F. Washeba, “Continuous facesheet low voltage deformable mirrors,” Opt. Eng. 29, 1191–1198 (1990).
[Crossref]

Opt. Express (3)

Opt. Lett. (1)

G. Vdovin and M. Loktev, “Deformable mirror with thermal actuators,” Opt. Lett. 27, 677–679 (2002).
[Crossref]

Proc. SPIE (7)

S. Guisard, L. Noethe, and J. Spyromilio, “Performance of active optics at the vlt,” Proc. SPIE 4003, 154–164 (2000).
[Crossref]

A. Wirth, J. Cavaco, T. Bruno, and K. M. Ezzo, “Deformable mirror technologies at aoa xinetics,” Proc. SPIE 8780, 87800M (2013).
[Crossref]

Proc. SPIE 2871 (1)

Rev. Sci. Instrum. (2)

S. Bonora, F. Frassetto, E. Zanchetta, G. DellaGiustina, G. Brusatin, and L. Poletto, “Active diffraction gratings: Development and tests,” Rev. Sci. Instrum. 83, 123106 (2012).
[Crossref]

Other (2)

R. K. Tyson and B. W. Frazier, Field Guide to Adaptive Optics, 2nd. ed. (SPIE, 2012).
[Crossref]

H. Gross, Handbook of Optical Systems, Volume 3: Aberration Theory and Correction of Optical Systems (WILEY-VCH, 2007).

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Fig. 1 Simulated actuator influence function for (a) 5, (b) 10 and (c) 15 mm substrate thickness per newton axial load and different pitches between actuators. The deformation takes a Gaussian shape. Further, with increasing substrate thickness decreases the deformation, and larger pitches enable larger deformations. The application requires actuator influence functions with 10nm/N PtV.

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Fig. 2 (a) Actuator layout of the full mirror with 8 × 10 actuators in a hexagonal-type layout (x = 10.25 mm, y = 13.75 mm, Δx = 25.5 mm, Δy = 19.75 mm, d = 6 mm). (b) Cross-sectional view of the actuation mechanism with two adjected micrometer screws that are used to deform a substrate.

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Fig. 3 Diagram of the force at the tappet over the stroke s. The point 1 refers to point eight of the assembly routine. If the actuator is pushed, the force increases along line 2a or 2b. If an actuator is pulled in the direction of the base plate, the force on the tappet decreases. The intersection of lines 3a and 3b refers to balanced forces of the flat spring and the mirror. The screw loses its connection.

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Fig. 4 Picture of the manufactured sample mirror: (a)115 × 110 × 9 mm³ quarter mirror, and (b) 228 × 210 × 9 mm³ full mirror with its mount.

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Fig. 5 Interferometric measurements of the WFE for the 115 × 105 × 9 mm³ quarter mirror; (a) WFE mirror substrate before bonding 545 nm PtV and 62 nm rms, (b) mirror substrate after gluing with the actuator device assembly WFE 545 nm PtV and 72 nm rms, (c) best flat WFE 288 nm PtV and 19 nm rms, (d) best flat of the masked substrate WFE 138 nm PtV and 10 nm rms.

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Fig. 6 Long-time measurements of the stability of the surface shape of the 115 × 105 × 9 mm³ quarter mirror: (a) in horizontal position a figure of (24±3) nm rms (squares), and in (b) vertical position (24±4) nm rms (squares) is measured.

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Fig. 7 Interferometric measurement of the mirror’s WFE (a) before manual correction and (b) after manual correction with only 45 steps. The quality of the surface was improved from 740 nm PtV and 136 nm rms to 157 nm PtV and 22 nm rms.

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Fig. 8 The diagram shows the change in the rms=(27±2) nm (triangle) and PtV=(324±20) nm values (circles) evaluated over the whole mirror surface. Individual measurement results are drawn over the days, with several measurements potentially on a single day at the beginning of the long-term measurement time frame and longer intervals between them with ongoing time. The temperatures T=(19.6±0.2)°C (squares) remain stable over the measurement period.

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Fig. 9 Exemplary actuator influence functions for eight actuators that were measured on the full mirror. The overlaying actuator position are marked with crosses.

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Fig. 10 Exemplary fitting routine for actuator [5/4]: (a) normalized measured actuator influence function with neighbouring actuators marked with a circle, (b) best Gaussian fit with its circular mask, and (c) difference plot between (a) and (b).

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Tables (1)

Table 1 Characteristics of the measured actuator influence functions samples. The first three columns characterize the actuator influence function itself, then the coupling to the neighbouring actuator and the rms deviation of the Gaussian fit is shown in percentage.

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Equations (7)

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F_{Res} = F_{V} + F_{M}

F_{Res} = c_{V} s + c_{M} (s - s_{0}) .

F_{Res} (push) = c_{V} s_{0} + a (c_{V *} + c_{M})

F_{Res} (pull) = c_{V} s_{0} - a (c_{V *} + c_{M}) .

G (x, y) = A e^{- (\frac{{(x - x_{0})}^{2}}{σ_{x}^{2}} + \frac{{(y - y_{0})}^{2}}{σ_{y}^{2}})} .

1 / D = v = 12 / D,

0.005 = v = 0.057 .

Actuator	PtV	rms	Coupling to neighbouring actuator in %	Δfit
[1,2]	167nm	17nm	[1/1]=57 [1/3]=58 [2/1]=32 [2/2]=43 [2/3]=27	6%
[1,4]	108nm	11nm	[1/3]=49 [1/5]=60 [2/3]=27 [2/4]=47 [2/5]=21	4%
[2,2]	66nm	8nm	[1/2]=78 [2/1]=54 [3/2]=61 [3/3]=50 [1/1]=42 [1/3]=59	9%
[3,3]	82nm	7nm	[2/2]=47 [3/2]=47 [4/2]=42 [4/3]=60 [3/4]=49 [2/3]=62	7%
[4,5]	82nm	10nm	[3/5]=60 [4/4]=50 [5/5]=64 [5/6]=50 [4/6]=48 [3/6]=42	8%
[5,4]	58nm	7nm	[4/3]=38 [5/3]=42 [6/3]=41 [6/4]=52 [5/5]=43 [4/4]=50	4%
[5,7]	68nm	8nm	[4/6]=54 [5/6]=58 [6/6]=50 [6/7]=62 [5/8]=53 [4/7]=63	9%
[7,6]	90nm	12nm	[6/5]=48 [7/5]=53 [8/5]=45 [8/6]=56 [7/7]=52 [6/6]=63	8%
[1,8]	523nm	52nm	[1/7]=42 [2/7]=23 [2/8]=54	3%