Abstract

We propose a glass interposer containing femtosecond laser-scribed waveguides to interconnect silicon photonic chips. The glass interposer has an insertion loss of about 1.5 dB/cm, and simplifies alignment of silicon photonic chips. Our experiment shows that the insertion loss for the grating coupler/inscribed glass interface was only 0.5 dB higher than the estimated coupling loss of grating coupler to SMF. The 3 dB coupling degradation occurs after 5 µm of in-plane displacement between the laser-inscribed waveguide and the grating coupler.

© 2016 Optical Society of America

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References

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    [Crossref]
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2015 (1)

2014 (3)

2013 (2)

A. Arriola, S. Gross, N. Jovanovic, N. Charles, P. G. Tuthill, S. M. Olaizola, A. Fuerbach, and M. J. Withford, “Low bend loss waveguides enable compact, efficient 3d photonic chips,” Opt. Express 21, 2978–2986 (2013).
[Crossref] [PubMed]

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

2012 (1)

2011 (2)

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

2010 (1)

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

2009 (2)

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

2008 (2)

2006 (1)

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

2004 (1)

2003 (1)

1998 (1)

1997 (1)

D. A. B. Miller, “Physical reasons for optical interconnection,” J. of Optoelectron. 11, 155–168 (1997).

1995 (1)

B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[Crossref] [PubMed]

An, R.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

Arriola, A.

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

A. Arriola, S. Gross, N. Jovanovic, N. Charles, P. G. Tuthill, S. M. Olaizola, A. Fuerbach, and M. J. Withford, “Low bend loss waveguides enable compact, efficient 3d photonic chips,” Opt. Express 21, 2978–2986 (2013).
[Crossref] [PubMed]

Asanovic, K.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Asghari, M.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

Bakir, B. B.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Balthasar, G.

Banan, B.

Barty, A.

Batten, C.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Bergman, K.

M. Petracca, B. Lee, K. Bergman, and L. Carloni, “Design exploration of optical interconnection networks for chip multiprocessors,” IEEE Symposium on High Performance Interconnects, 31–40 (2008).

Berini, P.

Bernab, S.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Block, B.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Bojko, R.

Brod, D. J.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Carloni, L.

M. Petracca, B. Lee, K. Bergman, and L. Carloni, “Design exploration of optical interconnection networks for chip multiprocessors,” IEEE Symposium on High Performance Interconnects, 31–40 (2008).

Cerullo, G.

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S. De Silvestri, and G. Cerullo, “Femtosecond writing of active optical waveguides with astigmatically shaped beams,” J. Opt. Soc. Am. B 20, 1559–1567 (2003).
[Crossref]

Chang, P.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Charles, N.

Chow, E.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

Chrostowski, L.

Crespi, A.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Cunningham, J.

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Cunningham, J. E.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

De Silvestri, S.

Dongre, C.

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

Dou, Y.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

Fedeli, J. M.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Feit, M.

B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[Crossref] [PubMed]

Feng, D.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

Flueckiger, J.

Freude, W.

Fuerbach, A.

Gagné, M.

Galvão, E. F.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Gattass, R. R.

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nature Photonics 2, 219–225 (2008).
[Crossref]

Gong, Q.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

Gross, S.

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

A. Arriola, S. Gross, N. Jovanovic, N. Charles, P. G. Tuthill, S. M. Olaizola, A. Fuerbach, and M. J. Withford, “Low bend loss waveguides enable compact, efficient 3d photonic chips,” Opt. Express 21, 2978–2986 (2013).
[Crossref] [PubMed]

Hai, M. S.

Hillerkuss, D.

Ho, R.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

Holzwarth, C.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Hoyt, J.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Jaeger, N. A. F.

Jordan, M.

Joshi, A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Jovanovic, N.

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

A. Arriola, S. Gross, N. Jovanovic, N. Charles, P. G. Tuthill, S. M. Olaizola, A. Fuerbach, and M. J. Withford, “Low bend loss waveguides enable compact, efficient 3d photonic chips,” Opt. Express 21, 2978–2986 (2013).
[Crossref] [PubMed]

Ju, J. J.

Kartner, F.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Kashyap, R.

Kern, A.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Khilo, A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Kim, J. T.

Koos, C.

Kopp, C.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Krishnamoorthy, A.

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Krishnamoorthy, A. V.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

Kung, C.-C.

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

Lapointe, J.

Laporta, P.

Lee, B.

M. Petracca, B. Lee, K. Bergman, and L. Carloni, “Design exploration of optical interconnection networks for chip multiprocessors,” IEEE Symposium on High Performance Interconnects, 31–40 (2008).

Lee, D. C.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

Lee, M.-H.

Leuthold, J.

Lexau, J.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

Li, G.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Li, H.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Li, M.-J.

Li, Y.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

Liang, H.

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

Liao, J.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Liboiron-Ladouceur, O.

Lindenmann, N.

Liu, D.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

Luo, Y.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Maiorino, E.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Marangoni, M.

Mataloni, P.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Mazur, E.

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nature Photonics 2, 219–225 (2008).
[Crossref]

McNab, S.

Meany, T.

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

Miller, D. A. B.

D. A. B. Miller, “Physical reasons for optical interconnection,” J. of Optoelectron. 11, 155–168 (1997).

Mitchell, J. G.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

Mohammed, E.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Moss, B.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Nolli, D.

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

Nugent, K.

Olaizola, S. M.

Orcutt, J.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Orobtchouk, R.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Osellame, R.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S. De Silvestri, and G. Cerullo, “Femtosecond writing of active optical waveguides with astigmatically shaped beams,” J. Opt. Soc. Am. B 20, 1559–1567 (2003).
[Crossref]

Paganin, D.

Palermo, S.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Park, S.

Park, S. K.

Perry, M.

B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[Crossref] [PubMed]

Petracca, M.

M. Petracca, B. Lee, K. Bergman, and L. Carloni, “Design exploration of optical interconnection networks for chip multiprocessors,” IEEE Symposium on High Performance Interconnects, 31–40 (2008).

Pinguet, T.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

Polli, D.

Pollnau, M.

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

Popovic, M.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Porte, H.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Raj, K.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Ram, R.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Ramponi, R.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S. De Silvestri, and G. Cerullo, “Femtosecond writing of active optical waveguides with astigmatically shaped beams,” J. Opt. Soc. Am. B 20, 1559–1567 (2003).
[Crossref]

Reshotko, M.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Roberts, A.

Rubenchik, A.

B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[Crossref] [PubMed]

Schmogrow, R.

Schrank, F.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Sciarrino, F.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Shi, W.

Shore, B.

B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[Crossref] [PubMed]

Shubin, I.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Simons, J.

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

Smith, H. I.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Spagnolo, N.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Steel, M.

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

Stojanovic, V.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, H. Li, H. I. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-dram networks with monolithic silicon photonics,” IEEE Symposium on High Performance Interconnects, 21–30 (2008).

Stuart, B.

B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[Crossref] [PubMed]

su Kim, M.

Taccheo, S.

Tekin, T.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Thacker, H.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Tuthill, P. G.

van den Vlekkert, H.

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

Vazquez, R. M.

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

Vitelli, C.

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

Vlasov, Y.

Wang, X.

Wang, Y.

Withford, M. J.

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

A. Arriola, S. Gross, N. Jovanovic, N. Charles, P. G. Tuthill, S. M. Olaizola, A. Fuerbach, and M. J. Withford, “Low bend loss waveguides enable compact, efficient 3d photonic chips,” Opt. Express 21, 2978–2986 (2013).
[Crossref] [PubMed]

Yang, H.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

Yao, J.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Young, I.

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

Yun, H.

Zheng, X.

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. Cunningham, and A. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” IEEE Conference on Group IV Photonics, 383–385 (2011).

Zimmermann, L.

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

Appl. Phys. A (2)

T. Meany, S. Gross, N. Jovanovic, A. Arriola, M. Steel, and M. J. Withford, “Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nm,” Appl. Phys. A 114, 113–118 (2014).
[Crossref]

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, “Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing,” Appl. Phys. A 84, 257–260 (2006).
[Crossref]

IEEE J. Quantum Electron. (2)

J. E. Cunningham, A. V. Krishnamoorthy, R. Ho, I. Shubin, H. Thacker, J. Lexau, D. C. Lee, D. Feng, E. Chow, Y. Luo, X. Zheng, G. Li, J. Yao, T. Pinguet, K. Raj, M. Asghari, and J. G. Mitchell, “Integration and packaging of a macrochip with silicon nanophotonic links,” IEEE J. Quantum Electron. 17, 546–558 (2011).
[Crossref]

A. V. Krishnamoorthy, J. E. Cunningham, X. Zheng, I. Shubin, J. Simons, D. Feng, H. Liang, C.-C. Kung, and M. Asghari, “Optical proximity communication with passively aligned silicon photonic chips,” IEEE J. Quantum Electron. 45, 409–414 (2009).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

C. Kopp, S. Bernab, B. B. Bakir, J. M. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging,” IEEE J. Sel. Top. Quantum Electron.,  17, 498–509 (2011).
[Crossref]

IEEE J. Solid-State Circuits (1)

I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko, and P. Chang, “Optical i/o technology for tera-scale computing,” IEEE J. Solid-State Circuits 45, 235–248 (2010).
[Crossref]

J. of Optoelectron. (1)

D. A. B. Miller, “Physical reasons for optical interconnection,” J. of Optoelectron. 11, 155–168 (1997).

J. Opt. Soc. Am. B (1)

Lab on a Chip (1)

R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab on a Chip 9, 91–96 (2009).
[Crossref] [PubMed]

Nature Photonics (2)

A. Crespi, R. Osellame, R. Ramponi, D. J. Brod, E. F. Galvão, N. Spagnolo, C. Vitelli, E. Maiorino, P. Mataloni, and F. Sciarrino, “Integrated multimode interferometers with arbitrary designs for photonic boson sampling,” Nature Photonics 7, 545–549 (2013).
[Crossref]

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nature Photonics 2, 219–225 (2008).
[Crossref]

Opt. Express (7)

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Figures (9)

Fig. 1
Fig. 1 Densely interconnected optical chips using laser-scribed waveguides in a glass interposer.
Fig. 2
Fig. 2 a) Microscope image of the cross section of the input endface of the sample (waveguide 1 is not shown because of a limited field of view). Close-up images of the cross section and longitudinal section of b) waveguide 3 and c) waveguide 1. ∆n : refractive index contrast between the waveguide and bulk glass. MFD : Calculated mode field diameter of the waveguide at λ = 1550 nm.
Fig. 3
Fig. 3 Schematic diagram showing the coupling interface between the glass interposer and the silicon photonic chip.
Fig. 4
Fig. 4 Schematic representation of the polishing jig.
Fig. 5
Fig. 5 The three measurement steps of (a) glass interposer test, (b) silicon photonic chip test, and (c) coupling test between the silicon photonic and the glass interposer. PC: polarization controller.
Fig. 6
Fig. 6 The experimental set-up. a) photo of the coupling set-up. A microscope slide is used to hold the glass interposer. (b) schematic view.
Fig. 7
Fig. 7 Insertion loss of the glass interposer waveguides.
Fig. 8
Fig. 8 Transmission spectra of the system composed of the silicon photonic chip coupled to the glass interposer.
Fig. 9
Fig. 9 Coupling tolerance measurement between WG1 and WG2 of the glass interposer and the silicon photonic grating coupler measured in two directions of x and y.

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