Abstract

Lasers were realized on silicon by flip-chip bonding of indium phosphide (InP) devices containing total internal reflection turning mirrors for surface emission. Light is coupled to the silicon waveguides through surface grating couplers. With this technique, InP lasers were integrated on silicon. Laser cavities were also formed by coupling InP reflective semiconductor optical amplifiers to microring resonator filters and distributed Bragg reflector mirrors. Single-mode continuous wave lasing was demonstrated with a side mode suppression ratio of 30 dB. Up to 2 mW of optical power was coupled to the silicon waveguide. Thermal simulations were also performed to evaluate the low thermal impedance afforded by this architecture and potential for high wall-plug efficiency.

© 2016 Optical Society of America

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2015 (2)

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

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[Crossref]

2014 (7)

N. Hatori, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, Y. Urino, M. Mori, T. Nakamura, and Y. Arakawa, “A Hybrid Integrated Light Source on a Silicon Platform Using a Trident Spot-Size Converter,” J. Lightwave Technol. 32(7), 1329–1336 (2014).
[Crossref]

M. Tang, S. Chen, J. Wu, Q. Jiang, V. G. Dorogan, M. Benamara, Y. I. Mazur, G. J. Salamo, A. Seeds, and H. Liu, “1.3-μm InAs/GaAs quantum-dot lasers monolithically grown on Si substrates using InAlAs/GaAs dislocation filter layers,” Opt. Express 22(10), 11528–11535 (2014).
[Crossref] [PubMed]

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

J. Klamkin, F. Gambini, S. Faralli, A. Malacarne, G. Meloni, G. Berrettini, G. Contestabile, and L. Potì, “A 100-Gb/s noncoherent silicon receiver for PDM-DBPSK/DQPSK signals,” Opt. Express 22(2), 2150–2158 (2014).
[Crossref] [PubMed]

C. R. Doerr, L. Chen, and D. Vermeulen, “Silicon photonics broadband modulation-based isolator,” Opt. Express 22(4), 4493–4498 (2014).
[Crossref] [PubMed]

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

2013 (3)

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

2011 (3)

M. Antelius, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express 19(4), 3592–3598 (2011).
[Crossref] [PubMed]

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2011).
[Crossref]

2010 (3)

J. Liu, X. Sun, R. Camacho-Aguilera, L. C. Kimerling, and J. Michel, “Ge-on-Si laser operating at room temperature,” Opt. Lett. 35(5), 679–681 (2010).
[Crossref] [PubMed]

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

2006 (3)

2005 (1)

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

Aalto, T.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Absil, P.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Accard, A.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Antelius, M.

Arakawa, Y.

Baehr-Jones, T.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Baets, R.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

Baets, R. G.

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

Bailey, R. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Behfar, A.

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference, (2014), pp. 258–259.
[Crossref]

Ben Bakir, B.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Benamara, M.

Berrettini, G.

Bhattacharya, P.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Bordel, D.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Bowers, J. E.

Camacho-Aguilera, R.

Canciamilla, A.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Capretti, A.

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

Chen, L.

Chen, S.

Cohen, O.

Contestabile, G.

Contu, P.

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference, (2014), pp. 258–259.
[Crossref]

de Valicourt, G.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Deptuck, D.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Descos, A.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Deshpande, S.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Doerr, C. R.

Dorogan, V. G.

Drissi, Y.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Duan, G.-H.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Dumon, P.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Fang, A. W.

Faralli, S.

J. Klamkin, F. Gambini, S. Faralli, A. Malacarne, G. Meloni, G. Berrettini, G. Contestabile, and L. Potì, “A 100-Gb/s noncoherent silicon receiver for PDM-DBPSK/DQPSK signals,” Opt. Express 22(2), 2150–2158 (2014).
[Crossref] [PubMed]

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

Fedeli, J.-M.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Fédéli, J.-M.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Ferrari, C.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Fournier, M.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Frost, T.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Fukushima, T.

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

Fulbert, L.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Gale, D.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Gambini, F.

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

J. Klamkin, F. Gambini, S. Faralli, A. Malacarne, G. Meloni, G. Berrettini, G. Contestabile, and L. Potì, “A 100-Gb/s noncoherent silicon receiver for PDM-DBPSK/DQPSK signals,” Opt. Express 22(2), 2150–2158 (2014).
[Crossref] [PubMed]

Gardes, F. Y.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Girard, N.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Gleeson, M. A.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Green, M.

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

Gunn, C.

C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]

Gunn, L. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Gunn, W. G.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Gylfason, K. B.

Hatori, N.

Hazari, A.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Hochberg, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Iqbal, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Ishizaka, M.

Jahangir, S.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Jany, C.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Jiang, Q.

Jones, R.

Kaspar, P.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Keyvaninia, S.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Khanna, A.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Kimerling, L. C.

Kita, T.

Kiyoyama, K.

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

Klamkin, J.

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

J. Klamkin, F. Gambini, S. Faralli, A. Malacarne, G. Meloni, G. Berrettini, G. Contestabile, and L. Potì, “A 100-Gb/s noncoherent silicon receiver for PDM-DBPSK/DQPSK signals,” Opt. Express 22(2), 2150–2158 (2014).
[Crossref] [PubMed]

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference, (2014), pp. 258–259.
[Crossref]

Kobayashi, N.

Koyanagi, M.

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

Lamponi, M.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Le Liepvre, A.

Lee, K. W.

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

Lelarge, F.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Leliepvre, A.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Levaufre, G.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Li, L.

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

Li, Y.

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

Liang, D.

D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2011).
[Crossref]

Liu, H.

Liu, J.

Lo Cascio, D. M. R.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Make, D.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Malacarne, A.

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

J. Klamkin, F. Gambini, S. Faralli, A. Malacarne, G. Meloni, G. Berrettini, G. Contestabile, and L. Potì, “A 100-Gb/s noncoherent silicon receiver for PDM-DBPSK/DQPSK signals,” Opt. Express 22(2), 2150–2158 (2014).
[Crossref] [PubMed]

Martinelli, M.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Mazur, Y. I.

Melloni, A.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Meloni, G.

Menezo, S.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Messaoudene, S.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Michel, J.

Mori, M.

Morichetti, F.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Morrow, A.

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

Nakamura, T.

Namiwaka, M.

Negro, L. D.

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

Noriki, A.

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

O’Brien, P.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Okano, M.

Ooi, B. S.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Paniccia, M. J.

Park, H.

Poti, L.

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

Potì, L.

Pozo, J.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Reed, G. T.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Roelkens, G.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

Salamo, G. J.

Sato, K.

Schremer, A.

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

Seeds, A.

Shimizu, T.

Sohlström, H.

Spaugh, B.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Stagarescu, C.

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference, (2014), pp. 258–259.
[Crossref]

Stark, E.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Sun, X.

Tanaka, T.

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

Tang, M.

Thomson, D. J.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Thourhout, D. V.

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

Tian, B.

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

Tillack, B.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Torregiani, M.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Tybor, F.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

Urino, Y.

Van Thourhout, D.

Vermeulen, D.

Wang, Y.

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

Watanabe, S.

Wu, J.

Xu, J.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

Yamada, H.

Yamamoto, K.

Yamamoto, T.

Yamazaki, H.

Zhao, C.

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Zhao, H.

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

Zimmermann, L.

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (3)

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[Crossref]

H. Zhao, Y. Wang, A. Capretti, L. D. Negro, and J. Klamkin, “Broadband Electroabsorption Modulators Design Based on Epsilon-Near-Zero Indium Tin Oxide,” IEEE J. Sel. Top. Quantum Electron. 21(4), 192–198 (2015).
[Crossref]

G.-H. Duan, C. Jany, A. Leliepvre, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levaufre, N. Girard, F. Lelarge, J.-M. Fedeli, A. Descos, B. Ben Bakir, S. Messaoudene, D. Bordel, S. Menezo, G. de Valicourt, S. Keyvaninia, G. Roelkens, D. V. Thourhout, D. J. Thomson, F. Y. Gardes, and G. T. Reed, “Hybrid III-V on Silicon Lasers for Photonic Integrated Circuits on Silicon,” IEEE J. Sel. Top. Quantum Electron. 20(4), 158 (2014).

IEEE Micro (1)

C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]

IEEE Photonics Technol. Lett. (2)

A. Malacarne, F. Gambini, S. Faralli, J. Klamkin, and L. Poti, “High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects,” IEEE Photonics Technol. Lett. 26(10), 1042–1044 (2014).
[Crossref]

Y. Li, L. Li, B. Tian, G. Roelkens, and R. G. Baets, “Reflectionless Tilted Grating Couplers With Improved Coupling Efficiency Based on a Silicon Overlay,” IEEE Photonics Technol. Lett. 25(13), 1195–1198 (2013).
[Crossref]

IEEE Trans. Electron Dev. (1)

K. W. Lee, A. Noriki, K. Kiyoyama, T. Fukushima, T. Tanaka, and M. Koyanagi, “Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems,” IEEE Trans. Electron Dev. 58(3), 748–757 (2011).
[Crossref]

J. Lightwave Technol. (2)

Nano Lett. (1)

T. Frost, S. Jahangir, E. Stark, S. Deshpande, A. Hazari, C. Zhao, B. S. Ooi, and P. Bhattacharya, “Monolithic Electrically Injected Nanowire Array Edge-Emitting Laser on (001) Silicon,” Nano Lett. 14(8), 4535–4541 (2014).
[Crossref] [PubMed]

Nat. Photonics (1)

D. Liang and J. E. Bowers, “Recent progress in lasers on silicon,” Nat. Photonics 4(8), 511–517 (2011).
[Crossref]

Opt. Express (7)

M. Antelius, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express 19(4), 3592–3598 (2011).
[Crossref] [PubMed]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G.-H. Duan, D. Bordel, and J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[Crossref] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[Crossref] [PubMed]

M. Tang, S. Chen, J. Wu, Q. Jiang, V. G. Dorogan, M. Benamara, Y. I. Mazur, G. J. Salamo, A. Seeds, and H. Liu, “1.3-μm InAs/GaAs quantum-dot lasers monolithically grown on Si substrates using InAlAs/GaAs dislocation filter layers,” Opt. Express 22(10), 11528–11535 (2014).
[Crossref] [PubMed]

J. Klamkin, F. Gambini, S. Faralli, A. Malacarne, G. Meloni, G. Berrettini, G. Contestabile, and L. Potì, “A 100-Gb/s noncoherent silicon receiver for PDM-DBPSK/DQPSK signals,” Opt. Express 22(2), 2150–2158 (2014).
[Crossref] [PubMed]

C. R. Doerr, L. Chen, and D. Vermeulen, “Silicon photonics broadband modulation-based isolator,” Opt. Express 22(4), 4493–4498 (2014).
[Crossref] [PubMed]

Opt. Lett. (1)

Phys. Rev. Lett. (1)

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness Induced Backscattering in Optical Silicon Waveguides,” Phys. Rev. Lett. 104(3), 033902 (2010).
[Crossref] [PubMed]

Proc. SPIE (2)

A. Khanna, Y. Drissi, P. Dumon, R. Baets, P. Absil, J. Pozo, D. M. R. Lo Cascio, M. Fournier, J.-M. Fédéli, L. Fulbert, L. Zimmermann, B. Tillack, T. Aalto, P. O’Brien, D. Deptuck, J. Xu, and D. Gale, “Epixfab: the silicon photonics platform,” Proc. SPIE 8767, 87670H (2013).
[Crossref]

A. Behfar, A. Schremer, M. Green, C. Stagarescu, and A. Morrow, “Horizontal cavity surface-emitting laser (HCSEL) Devices,” Proc. SPIE 5737, 62–69 (2005).
[Crossref]

Other (5)

E. Marchena, T. Creazzo, S. B. Krasulick, P. Yu, D. Van Orden, J. Y. Spann, C. C. Blivin, J. M. Dallesasse, P. Varangis, R. J. Stone, and A. Mizrahi, “Integrated Tunable CMOS Laser for Si Photonics,” Optical Fiber Communication Conference/National Fiber Optic Engineers Conference, OSA Technical Digest (online) (Optical Society of America, 2013), paper PDP5C.7.
[Crossref]

C. R. Doerr, L. Chen, D. Vermeulen, T. Nielsen, S. Azemati, S. Stulz, G. McBrien, X. Xu, B. Mikkelsen, M. Givehchi, C. Rasmussen, and S. Y. Park, “Single-chip silicon photonics 100-Gb/s coherent transceiver,” in Optical Fiber Communication Conference Postdeadline Papers (Optical Society of America, 2014), paper Th5C.1.

D. Feng, J. Luff, S. Jatar, and M. Asghari, “Micron-scale Silicon Photonic Devices and Circuits,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2014), paper Th4C.1.
[Crossref]

P. Contu, C. Stagarescu, A. Behfar, and J. Klamkin, “3D integrated silicon photonic external cavity laser (SPECL),” in Proceedings of IEEE Photonics Conference, (2014), pp. 258–259.
[Crossref]

B. Song, P. Contu, C. Stagarescu, S. Pinna, P. Abolghasem, S. Ristic, N. Bickel, J. Bowker, A. Behfar, and J. Klamkin, “3D integrated hybrid silicon laser,” in European Conference on Optical Communications, (2015), paper We2.5.5.

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Figures (10)

Fig. 1
Fig. 1

Schematic of 3D integrated hybrid silicon laser.

Fig. 2
Fig. 2

Sideview schematic illustrating design details for 3D integration with vertical coupling.

Fig. 3
Fig. 3

Mode evolution and coupling. (a) Optical pulse propagating in the InP waveguide. (b) Total internal reflection at the turning mirror. (c) Light exiting the InP chip and propagating toward the silicon chip. (d) Coupling into the silicon waveguide through the surface grating.

Fig. 4
Fig. 4

Coupling efficiency as a function of (a) wavelength and grating period (for fill factor = 0.6, α = 48°, YRSOA = 2 µm, XRSOA = −0.5 µm), (b) wavelength and fill factor (for period = 635 nm, α = 48°, YRSOA = 2 µm, XRSOA = −0.5 µm), (c) wavelength and turning mirror angle (for period = 635 nm, fill factor = 0.6, YRSOA = 2 µm, XRSOA = −0.5 µm), (d) horizontal and vertical position of the RSOA with respect to the grating (XRSOA and YRSOA) (for period = 635 nm, fill factor = 0.6, α = 48°).

Fig. 5
Fig. 5

3D FDTD simulation results showing the coupling efficiency as a function of wavelength for baseline.

Fig. 6
Fig. 6

(a) Topview microscope image of a 3D integrated hybrid laser. (b) Tilted planview image of a bonded RSOA chip on silicon. (c) Close up of bonded chips.

Fig. 7
Fig. 7

IV characteristics for 3D integrated laser and standalone InP RSOA.

Fig. 8
Fig. 8

(a) Lasing spectra at two different current levels near threshold and (b) LIV characteristic for for the 3D integrated laser with microring resonator filter and DBR mirror.

Fig. 9
Fig. 9

(a) Topview schematic of SPECL with microring filter (top) and without microring filter (bottom). Spectrum of SPECL (b) with microring filter and (c) without microring filter.

Fig. 10
Fig. 10

Simulated thermal profile for (a) InP active structure bonded to a SiO2 layer on a silicon substrate and for (b) InP active structure bonded directly to silicon substrate.

Tables (1)

Tables Icon

Table 1 Grating Coupler Designs

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