Abstract

Numerous bulk crystalline materials exhibit attractive nonlinear and luminescent properties for classical and quantum optical applications. A chip-scale platform for high quality factor optical nanocavities in these materials will enable new optoelectronic devices and quantum light-matter interfaces. In this article, photonic crystal nanobeam resonators fabricated using focused ion beam milling in bulk insulators, such as rare-earth doped yttrium orthosilicate and yttrium vanadate, are demonstrated. Operation in the visible, near infrared, and telecom wavelengths with quality factors up to 27,000 and optical mode volumes close to one cubic wavelength is measured. These devices enable new nanolasers, on-chip quantum optical memories, single photon sources, and non-linear devices at low photon numbers based on rare-earth ions. The techniques are also applicable to other luminescent centers and crystal.

© 2016 Optical Society of America

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    [Crossref]
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    [Crossref]

2015 (2)

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6, 8206 (2015).
[Crossref] [PubMed]

2014 (2)

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391–1452 (2014).
[Crossref]

2013 (2)

H. Kim, R. Bose, T. C. Shen, G. S. Solomon, and E. Waks, “A quantum logic gate between a solid-state quantum bit and a photon,” Nat. Photonics 7(5), 373–377 (2013).
[Crossref]

F. S. Jamaludin, M. F. Mohd Sabri, and S. M. Said, “Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling,” Microsyst. Technol. 19(12), 1873–1888 (2013).
[Crossref]

2012 (1)

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
[Crossref] [PubMed]

2011 (3)

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13(2), 025018 (2011).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Q. Quan and M. Loncar, “Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities,” Opt. Express 19(19), 18529–18542 (2011).
[Crossref] [PubMed]

2010 (2)

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
[Crossref]

2009 (4)

D. L. McAuslan, J. J. Longdell, and M. J. Sellars, “Strong-coupling cavity QED using rare-earth-metal-ion dopants in monolithic resonators: What you can do with a weak oscillator,” Phys. Rev. A 80(6), 062307 (2009).
[Crossref]

J. L. O’Brien, A. Furusawa, and J. Vučković, “Photonic quantum technologies,” Nat. Photonics 3(12), 687–695 (2009).
[Crossref]

J. Chan, M. Eichenfield, R. Camacho, and O. Painter, “Optical and mechanical design of a “zipper” photonic crystal optomechanical cavity,” Opt. Express 17(5), 3802–3817 (2009).
[Crossref] [PubMed]

J. Tian, W. Yan, Y. Liu, J. Luo, D. Zhang, Z. Li, and M. Qiu, “Optical quality improvement of Si photonic devices fabricated by focused-ion-beam milling,” J. Lightwave Technol. 27(19), 4306–4310 (2009).
[Crossref]

2007 (1)

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

2006 (1)

Y. Tanaka, M. Tymczenko, T. Asano, and S. Noda, “Fabrication of two-dimensional photonic crystal slab point-defect cavity employing local three-dimensional structures,” Jpn. J. Appl. Phys. 45(8A), 6096–6102 (2006).
[Crossref]

2003 (1)

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[Crossref] [PubMed]

2002 (2)

J. Vucković, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(1 Pt 2), 015508 (2002).
[PubMed]

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[Crossref] [PubMed]

2000 (1)

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

1999 (2)

G. Khitrova, H. M. Gibbs, F. Jahnke, M. Kira, and S. W. Koch, “Nonlinear optics of normal-mode-coupling semiconductor microcavities,” Rev. Mod. Phys. 71(5), 1591–1639 (1999).
[Crossref]

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

1997 (1)

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Acosta, V. M.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
[Crossref] [PubMed]

Afzelius, M.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Asano, T.

Y. Tanaka, M. Tymczenko, T. Asano, and S. Noda, “Fabrication of two-dimensional photonic crystal slab point-defect cavity employing local three-dimensional structures,” Jpn. J. Appl. Phys. 45(8A), 6096–6102 (2006).
[Crossref]

Aspelmeyer, M.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391–1452 (2014).
[Crossref]

Ay, F.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Baur, A.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Bayn, I.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13(2), 025018 (2011).
[Crossref]

Beausoleil, R. G.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
[Crossref] [PubMed]

Becher, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Bermel, P.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
[Crossref]

Bose, R.

H. Kim, R. Bose, T. C. Shen, G. S. Solomon, and E. Waks, “A quantum logic gate between a solid-state quantum bit and a photon,” Nat. Photonics 7(5), 373–377 (2013).
[Crossref]

Burek, M. J.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Camacho, R.

Chan, J.

Chaneliére, T.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Cheng, Y.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Chu, Y.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Cone, R. L.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Dapkus, P. D.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

de Ridder, R. M.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Eichenfield, M.

Fan, S.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Fang, W.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Fang, Z.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Faraon, A.

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6, 8206 (2015).
[Crossref] [PubMed]

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
[Crossref] [PubMed]

Ferrera, J.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Fischer, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Foresi, J. S.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Furusawa, A.

J. L. O’Brien, A. Furusawa, and J. Vučković, “Photonic quantum technologies,” Nat. Photonics 3(12), 687–695 (2009).
[Crossref]

Gadgil, V. J.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Gibbs, H. M.

G. Khitrova, H. M. Gibbs, F. Jahnke, M. Kira, and S. W. Koch, “Nonlinear optics of normal-mode-coupling semiconductor microcavities,” Rev. Mod. Phys. 71(5), 1591–1639 (1999).
[Crossref]

Gsell, S.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Hepp, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Hong, W.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Hopman, W. C. L.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Hu, E.

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Hu, W.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Huang, Z.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
[Crossref] [PubMed]

Ibanescu, M.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
[Crossref]

Imamoglu, A.

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Ippen, E. P.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Jahnke, F.

G. Khitrova, H. M. Gibbs, F. Jahnke, M. Kira, and S. W. Koch, “Nonlinear optics of normal-mode-coupling semiconductor microcavities,” Rev. Mod. Phys. 71(5), 1591–1639 (1999).
[Crossref]

Jamaludin, F. S.

F. S. Jamaludin, M. F. Mohd Sabri, and S. M. Said, “Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling,” Microsyst. Technol. 19(12), 1873–1888 (2013).
[Crossref]

Joannopoulos, J. D.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
[Crossref]

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Johnson, S. G.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
[Crossref]

Kalish, R.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13(2), 025018 (2011).
[Crossref]

Khitrova, G.

G. Khitrova, H. M. Gibbs, F. Jahnke, M. Kira, and S. W. Koch, “Nonlinear optics of normal-mode-coupling semiconductor microcavities,” Rev. Mod. Phys. 71(5), 1591–1639 (1999).
[Crossref]

Kim, H.

H. Kim, R. Bose, T. C. Shen, G. S. Solomon, and E. Waks, “A quantum logic gate between a solid-state quantum bit and a photon,” Nat. Photonics 7(5), 373–377 (2013).
[Crossref]

Kim, I.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

Kimerling, L. C.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Kindem, J. M.

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6, 8206 (2015).
[Crossref] [PubMed]

Kipfstuhl, L.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Kippenberg, T. J.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391–1452 (2014).
[Crossref]

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[Crossref] [PubMed]

Kira, M.

G. Khitrova, H. M. Gibbs, F. Jahnke, M. Kira, and S. W. Koch, “Nonlinear optics of normal-mode-coupling semiconductor microcavities,” Rev. Mod. Phys. 71(5), 1591–1639 (1999).
[Crossref]

Kiraz, A.

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Koch, S. W.

G. Khitrova, H. M. Gibbs, F. Jahnke, M. Kira, and S. W. Koch, “Nonlinear optics of normal-mode-coupling semiconductor microcavities,” Rev. Mod. Phys. 71(5), 1591–1639 (1999).
[Crossref]

Kröll, S.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Kuipers, L.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Lee, R. K.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

Li, Z.

Liddy, M. S. Z.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Lin, J.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Liu, Y.

Loncar, M.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Q. Quan and M. Loncar, “Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities,” Opt. Express 19(19), 18529–18542 (2011).
[Crossref] [PubMed]

J. Vucković, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(1 Pt 2), 015508 (2002).
[PubMed]

Longdell, J. J.

D. L. McAuslan, J. J. Longdell, and M. J. Sellars, “Strong-coupling cavity QED using rare-earth-metal-ion dopants in monolithic resonators: What you can do with a weak oscillator,” Phys. Rev. A 80(6), 062307 (2009).
[Crossref]

Lukin, M. D.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

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Mabuchi, H.

J. Vucković, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(1 Pt 2), 015508 (2002).
[PubMed]

Marquardt, F.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391–1452 (2014).
[Crossref]

McAuslan, D. L.

D. L. McAuslan, J. J. Longdell, and M. J. Sellars, “Strong-coupling cavity QED using rare-earth-metal-ion dopants in monolithic resonators: What you can do with a weak oscillator,” Phys. Rev. A 80(6), 062307 (2009).
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Meesala, S.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

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I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13(2), 025018 (2011).
[Crossref]

Michler, P.

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Miyazono, E.

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6, 8206 (2015).
[Crossref] [PubMed]

Mohd Sabri, M. F.

F. S. Jamaludin, M. F. Mohd Sabri, and S. M. Said, “Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling,” Microsyst. Technol. 19(12), 1873–1888 (2013).
[Crossref]

Moiseev, S. A.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Mücklich, F.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Neu, E.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Noda, S.

Y. Tanaka, M. Tymczenko, T. Asano, and S. Noda, “Fabrication of two-dimensional photonic crystal slab point-defect cavity employing local three-dimensional structures,” Jpn. J. Appl. Phys. 45(8A), 6096–6102 (2006).
[Crossref]

O’Brien, J. D.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

O’Brien, J. L.

J. L. O’Brien, A. Furusawa, and J. Vučković, “Photonic quantum technologies,” Nat. Photonics 3(12), 687–695 (2009).
[Crossref]

Oskooi, A. F.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
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Painter, O.

J. Chan, M. Eichenfield, R. Camacho, and O. Painter, “Optical and mechanical design of a “zipper” photonic crystal optomechanical cavity,” Opt. Express 17(5), 3802–3817 (2009).
[Crossref] [PubMed]

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

Patel, P.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Pauly, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Petroff, P. M.

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Pollnau, M.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, “Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon,” Nanotechnology 18(19), 195305 (2007).
[Crossref]

Qiao, L.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Qiu, M.

Quan, Q.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Q. Quan and M. Loncar, “Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities,” Opt. Express 19(19), 18529–18542 (2011).
[Crossref] [PubMed]

Riedrich-Möller, J.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Rochman, J.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref] [PubMed]

Roundy, D.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, “MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun. 181(3), 687–702 (2010).
[Crossref]

Said, S. M.

F. S. Jamaludin, M. F. Mohd Sabri, and S. M. Said, “Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling,” Microsyst. Technol. 19(12), 1873–1888 (2013).
[Crossref]

Salzman, J.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13(2), 025018 (2011).
[Crossref]

Santori, C.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
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Scherer, A.

J. Vucković, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(1 Pt 2), 015508 (2002).
[PubMed]

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

Schoenfeld, W. V.

P. Michler, A. Kiraz, C. Becher, W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoğlu, “A quantum dot single-photon turnstile device,” Science 290(5500), 2282–2285 (2000).
[Crossref] [PubMed]

Schreck, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Sellars, M.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Sellars, M. J.

D. L. McAuslan, J. J. Longdell, and M. J. Sellars, “Strong-coupling cavity QED using rare-earth-metal-ion dopants in monolithic resonators: What you can do with a weak oscillator,” Phys. Rev. A 80(6), 062307 (2009).
[Crossref]

Shen, T. C.

H. Kim, R. Bose, T. C. Shen, G. S. Solomon, and E. Waks, “A quantum logic gate between a solid-state quantum bit and a photon,” Nat. Photonics 7(5), 373–377 (2013).
[Crossref]

Smith, H. I.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Solomon, G. S.

H. Kim, R. Bose, T. C. Shen, G. S. Solomon, and E. Waks, “A quantum logic gate between a solid-state quantum bit and a photon,” Nat. Photonics 7(5), 373–377 (2013).
[Crossref]

Song, J.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Spillane, S. M.

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[Crossref] [PubMed]

Steinmeyer, G.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Tanaka, Y.

Y. Tanaka, M. Tymczenko, T. Asano, and S. Noda, “Fabrication of two-dimensional photonic crystal slab point-defect cavity employing local three-dimensional structures,” Jpn. J. Appl. Phys. 45(8A), 6096–6102 (2006).
[Crossref]

Thoen, E. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Tian, J.

Tittel, W.

W. Tittel, M. Afzelius, T. Chaneliére, R. L. Cone, S. Kröll, S. A. Moiseev, and M. Sellars, “Photon-echo quantum memory in solid state systems,” Laser Photonics Rev. 4(2), 244–267 (2010).
[Crossref]

Tymczenko, M.

Y. Tanaka, M. Tymczenko, T. Asano, and S. Noda, “Fabrication of two-dimensional photonic crystal slab point-defect cavity employing local three-dimensional structures,” Jpn. J. Appl. Phys. 45(8A), 6096–6102 (2006).
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Vahala, K. J.

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[Crossref] [PubMed]

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold Raman laser using a spherical dielectric microcavity,” Nature 415(6872), 621–623 (2002).
[Crossref] [PubMed]

Villeneuve, P. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).

Vuckovic, J.

J. L. O’Brien, A. Furusawa, and J. Vučković, “Photonic quantum technologies,” Nat. Photonics 3(12), 687–695 (2009).
[Crossref]

J. Vucković, M. Loncar, H. Mabuchi, and A. Scherer, “Design of photonic crystal microcavities for cavity QED,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(1 Pt 2), 015508 (2002).
[PubMed]

Waks, E.

H. Kim, R. Bose, T. C. Shen, G. S. Solomon, and E. Waks, “A quantum logic gate between a solid-state quantum bit and a photon,” Nat. Photonics 7(5), 373–377 (2013).
[Crossref]

Wandt, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Wang, M.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Wang, N.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Wolff, S.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2011).
[Crossref] [PubMed]

Xu, Y.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Yan, W.

Yariv, A.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[Crossref] [PubMed]

Zhang, D.

Zhang, L.

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[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

Schematic of the triangular nanobeam resonator. The zoom-in view shows the photonic crystal structure of the optical lattices labeled with relevant design parameters.

Fig. 2
Fig. 2

Scanning electron microscope images of the fabricated nanobeam resonators. (a) Devices for different spectrum range with identical structure features but different global scaling factors. (b) The fabricated device in YVO crystal, which has the same geometric structures as devices in YSO. The side-view in (c) shows the non-vertical sidewalls due to FIB beam divergence, which can be improved by varying the ion beam voltage and current. The top-view in (d) reveals the grooves on a thin support beam. The triangular cross-section of the beam is seen in (e).

Fig. 3
Fig. 3

Nanobeam resonators in the YSO crystal. (a-c) Top, side and cross-section views of the simulated mode profiles of the TE-mode resonance. (d) Typical TE broadband transmission spectrum of a YSO nanobeam resonators showing a resonance in the photonic bandgap. Inset shows the transmission measurement scheme in which broadband super-continuum light vertically couples into the nanobeam from one end and is collected from the other end. (e) Resonance close to the target 605 nm atomic transition of Pr3+ ions. (f) Resonance close to the 883 nm transition of Nd3+ ions. (g) Resonance close to the 1536 nm transition of Er3+ ions.

Fig. 4
Fig. 4

Nanobeam resonators in the YVO crystal. (a-c) Top, side and cross-section views of the simulated mode profiles of the TM-mode resonance. (d) Typical TM broadband transmission spectrum of YVO nanobeam resonators showing a resonance in the photonic bandgap. (e) Resonance close to the target 880 nm atomic transition of Nd3+ ions. (f) Resonance close to the target 1064 nm lasing transition of Nd3+ ions.

Tables (1)

Tables Icon

Table 1 Summary of parameters for nanobeam resonators fabricated in YSO and YVO crystals.

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