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Printing of metallic 3D micro-objects by laser induced forward transfer

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Abstract

Digital printing of 3D metal micro-structures by laser induced forward transfer under ambient conditions is reviewed. Recent progress has allowed drop on demand transfer of molten, femto-liter, metal droplets with a high jetting directionality. Such small volume droplets solidify instantly, on a nanosecond time scale, as they touch the substrate. This fast solidification limits their lateral spreading and allows the fabrication of high aspect ratio and complex 3D metal structures. Several examples of micron-scale resolution metal objects printed using this method are presented and discussed.

© 2016 Optical Society of America

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Corrections

3 February 2016: A correction was made to the author affiliations.


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Supplementary Material (2)

NameDescription
Visualization 1: MP4 (937 KB)      LIFT printed cone 3D topography different angles view
Visualization 2: MP4 (1084 KB)      Plasma under high voltage

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Figures (13)

Fig. 1
Fig. 1 (a) A sketch of the donor which consists of a transparent substrate coated with a thin metal layer to be printed; At first a focused laser pulse is absorbed in the metal layer leading to local heating; (b) the resulting pressure at the interface provide the conditions for the transfer of part of the layer material “Flyer”; (c) Transferred pixel landing on the receiver.
Fig. 2
Fig. 2 LIFT with a dynamic release layer (DRL) the explosion of which provides the driving force of the material transfer.
Fig. 3
Fig. 3 Schematic of LIFT of fluids: (a) the laser pulse evaporates the solvent and a gas bubble is formed; (b) the bubble radius increases until its pressure equals the ambient pressure; (c) the bubble collapses and a droplet separates from the jet filament.
Fig. 4
Fig. 4 (a) A 5x5 matrix arrays of NP ink droplet printed by LIFT; (b) Changing droplet deposit morphology as function of the pulse energy (the metal ink solvent is glycerol).
Fig. 5
Fig. 5 A schematic description of the holes which form in the metal donor layer and HAZ range.
Fig. 6
Fig. 6 (a) A binary image of the shapes to be printed; (c-e) Printing plan indicated by a color code of dots (see texts). (c) Kcell = 5, which amounts to 25 donor steps (indicated by 25 different colors); (d) Kcell = 3; (e) Kcell = 2 (for which the print plan is composed of 4 color only; (b) 3D measurement of a printed structure for which Kcell = 10.
Fig. 7
Fig. 7 (a) 3D CAD model; (b) 2D Slice presentation of the object (19 layers) each denoted by a specific color; (c) and (d) 3D map presentations of the printed object (Visualization 1); (e) Line scan across the tip; (e) SEM image of LIFT printed cone (the base is 250µm wide and the cone height is 60 µm)
Fig. 8
Fig. 8 (a) SEM image of an array of LIFT printed copper metal pillars (7x10 pillars) with width of 9µm and height of 106µm ; (b) zoom in on (a)
Fig. 9
Fig. 9 A printed. interdigitated, high aspect ratio, copper structure: (a) 3D optical microscopy image ; (b) An SEM image of the 4 by 4 digit structure; (c) Zoom in on (b).
Fig. 10
Fig. 10 (a) The experimental setup for driving the ID structure with high voltage using micro-probes under an optical microscope (the microscope objective can be seen at the upper middle part). The inset at the bottom left depicts the ID structure image (bright field image). (a) Setup arrangement before applying high voltage; (b) With voltage on (V = 300V, 1kHz) a bright blue emission can be seen (inset and Visualization 2).
Fig. 11
Fig. 11 (a) SEM image of LIFT printed gold deposit on a Nitinol metal part; (b) A zoom in on (a).
Fig. 12
Fig. 12 (a) 3D measurement of the printed “gear”; (b) An SEM image of the same structure.
Fig. 13
Fig. 13 (a) An SEM image of a copper logo printed at the bottom of a blind via; (b) The same SEM image taken at a tilted angle of 30°; (c) a 3D microscope measurement.
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