Abstract

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with ~100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8–11 keV.

© 2015 Optical Society of America

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References

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2013 (2)

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

2012 (3)

S.-R. Wu, Y. Hwu, and G. Margaritondo, “Hard-X-ray zone plates: recent progress,” Materials (Basel) 5(12), 1752–1773 (2012).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

2011 (1)

2010 (3)

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

Y. Suzuki, A. Takeuchi, H. Takenaka, and I. Okada, “Fabrication and performance test of Fresnel zone plate with 35 nm outermost zone width in hard X-ray region,” X-Ray Opt. Instrum. 2010, 1–6 (2010).
[Crossref]

S. Matsuyama, M. Fujii, and K. Yamauchi, “Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics,” Nucl. Instrum. Methods Phys. Res. A 616(2–3), 241–245 (2010).
[Crossref]

2007 (2)

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

2005 (2)

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

2003 (2)

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

W. Chao, E. Anderson, G. P. Denbeaux, B. Harteneck, J. A. Liddle, D. L. Olynick, A. L. Pearson, F. Salmassi, C. Y. Song, and D. T. Attwood, “20-nm resolution Soft x-ray microscopy demonstrated by use of multilayer test structures,” Opt. Lett. 28(21), 2019–2021 (2003).
[Crossref] [PubMed]

2002 (1)

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028 (2002).
[Crossref]

2001 (1)

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

1996 (1)

1952 (1)

H. Wolter, “Glancing incidence mirror systems as imaging optics for X-rays,” Ann. Phys. 10, 94–114 (1952).
[Crossref]

1948 (1)

Anderson, E.

Aoki, S.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

Attwood, D. T.

Baez, A. V.

Boye, P.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Burghammer, M.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Chao, W.

Chen, T.-Y.

Chen, Y.-T.

Chiu, W. K. S.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Chu, Y. S.

David, C.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Denbeaux, G. P.

Emi, Y.

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

Endo, K.

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Feldkamp, J.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Fujii, M.

S. Matsuyama, M. Fujii, and K. Yamauchi, “Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics,” Nucl. Instrum. Methods Phys. Res. A 616(2–3), 241–245 (2010).
[Crossref]

Harris, W. M.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Harteneck, B.

Hoshino, M.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

Hwu, Y.

Ikeda, N.

Inagaki, K.

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028 (2002).
[Crossref]

Ishikawa, T.

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Ishino, T.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

Iwai, T.

Kato, Y.

Katori, Y.

Kempson, I. M.

Kidani, N.

Kimura, T.

Kino, H.

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

Kirkpatrick, P.

Kodama, R.

Kohmura, Y.

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Küchler, M.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Kurapova, O.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Lee, W.-K.

Lengeler, B.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Liddle, J. A.

Lombardo, J. J.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Margaritondo, G.

Matsuyama, S.

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

S. Matsuyama, M. Fujii, and K. Yamauchi, “Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics,” Nucl. Instrum. Methods Phys. Res. A 616(2–3), 241–245 (2010).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

Mimura, H.

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028 (2002).
[Crossref]

Mori, Y.

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028 (2002).
[Crossref]

Namiki, T.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

Nishino, Y.

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

Ohigashi, T.

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Okada, I.

Y. Suzuki, A. Takeuchi, H. Takenaka, and I. Okada, “Fabrication and performance test of Fresnel zone plate with 35 nm outermost zone width in hard X-ray region,” X-Ray Opt. Instrum. 2010, 1–6 (2010).
[Crossref]

Okada, K.

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Olynick, D. L.

Pan, Y.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Patommel, J.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Pearson, A. L.

Riekel, C.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Saito, A.

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Salmassi, F.

Sano, Y.

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Schroer, C. G.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Song, C. Y.

Souvorov, A.

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Suzuki, Y.

Y. Suzuki, A. Takeuchi, H. Takenaka, and I. Okada, “Fabrication and performance test of Fresnel zone plate with 35 nm outermost zone width in hard X-ray region,” X-Ray Opt. Instrum. 2010, 1–6 (2010).
[Crossref]

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Takano, H.

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Takenaka, H.

Y. Suzuki, A. Takeuchi, H. Takenaka, and I. Okada, “Fabrication and performance test of Fresnel zone plate with 35 nm outermost zone width in hard X-ray region,” X-Ray Opt. Instrum. 2010, 1–6 (2010).
[Crossref]

Takeshi, K.

Takeuchi, A.

Y. Suzuki, A. Takeuchi, H. Takenaka, and I. Okada, “Fabrication and performance test of Fresnel zone plate with 35 nm outermost zone width in hard X-ray region,” X-Ray Opt. Instrum. 2010, 1–6 (2010).
[Crossref]

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Tamasaku, K.

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Ueno, K.

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

van der Hart, A.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Vila-Comamala, J.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Vincze, L.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

Wakioka, T.

Wang, C.-L.

Wang, Y.

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Watanabe, N.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

Wolter, H.

H. Wolter, “Glancing incidence mirror systems as imaging optics for X-rays,” Ann. Phys. 10, 94–114 (1952).
[Crossref]

Wu, S.-R.

S.-R. Wu, Y. Hwu, and G. Margaritondo, “Hard-X-ray zone plates: recent progress,” Materials (Basel) 5(12), 1752–1773 (2012).
[Crossref]

Yabashi, M.

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Yamada, N.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

Yamamura, K.

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

Yamauchi, K.

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution,” Opt. Express 20(9), 10310–10319 (2012).
[Crossref] [PubMed]

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).
[Crossref] [PubMed]

S. Matsuyama, M. Fujii, and K. Yamauchi, “Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics,” Nucl. Instrum. Methods Phys. Res. A 616(2–3), 241–245 (2010).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028 (2002).
[Crossref]

Yokosuka, H.

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Yumoto, H.

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

Ann. Phys. (1)

H. Wolter, “Glancing incidence mirror systems as imaging optics for X-rays,” Ann. Phys. 10, 94–114 (1952).
[Crossref]

Appl. Phys. Lett. (2)

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007).
[Crossref]

J. Opt. Soc. Am. (1)

J. Phys. Conf. Ser. (1)

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors,” J. Phys. Conf. Ser. 463, 012017 (2013).
[Crossref]

J. Synchrotron Radiat. (1)

J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, “Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy,” J. Synchrotron Radiat. 19(5), 705–709 (2012).
[Crossref] [PubMed]

Materials (Basel) (1)

S.-R. Wu, Y. Hwu, and G. Margaritondo, “Hard-X-ray zone plates: recent progress,” Materials (Basel) 5(12), 1752–1773 (2012).
[Crossref]

Nucl. Instrum. Methods Phys. Res. A (2)

S. Matsuyama, M. Fujii, and K. Yamauchi, “Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics,” Nucl. Instrum. Methods Phys. Res. A 616(2–3), 241–245 (2010).
[Crossref]

Y. Kohmura, K. Okada, A. Takeuchi, H. Takano, Y. Suzuki, T. Ishikawa, T. Ohigashi, and H. Yokosuka, “High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments,” Nucl. Instrum. Methods Phys. Res. A 467–468, 881–883 (2001).
[Crossref]

Opt. Express (2)

Opt. Lett. (3)

Proc. SPIE (1)

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Development of achromatic full-field x-ray microscopy with compact imaging mirror system,” Proc. SPIE 8851, 885107 (2013).
[Crossref]

Rev. Sci. Instrum. (4)

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028 (2002).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum. 74(5), 2894 (2003).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum. 76(4), 045102 (2005).
[Crossref]

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum. 78(7), 073706 (2007).
[Crossref] [PubMed]

X-Ray Opt. Instrum. (1)

Y. Suzuki, A. Takeuchi, H. Takenaka, and I. Okada, “Fabrication and performance test of Fresnel zone plate with 35 nm outermost zone width in hard X-ray region,” X-Ray Opt. Instrum. 2010, 1–6 (2010).
[Crossref]

Other (1)

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 1999).

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Figures (5)

Fig. 1
Fig. 1 Measured shapes and residual figure errors on fabricated mirrors.
Fig. 2
Fig. 2 (a) Experimental setup of microscope system, (b) photograph of setup near Advanced KB mirrors, and (c) 3D diagram of mirror manipulator.
Fig. 3
Fig. 3 X-ray image of Siemens star chart. Inner sides of first, second, and third donut-like islands have half-periods of 50, 100, and 200 nm, respectively. Coordinate axes correspond to those in Fig. 2. Experimental conditions: X-ray energy = 9.881 keV, Exposure time = 150 s.
Fig. 4
Fig. 4 (a) Line profiles of image shown in Fig. 3 along the tangential direction and (b) normalized image modulation. “Horizontal” and “Vertical” represent experimental values, and “σ = 0” and “σ = 1” represent calculated profiles.
Fig. 5
Fig. 5 X-ray images taken while X-ray energy was changed from 8 to 11 keV. Coordinate axes correspond to those in Fig. 2. CCD used is ORCA-R2 (pixels = 1344 × 1024, pixel size = 6.45 μm). The exposure times are shown below the images. Bar = 2 μm.

Tables (1)

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Table 1 Parameters of the developed advanced KB mirror optics

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