F. Qibo, Z. Bin, C. Cunxing, K. Cuifang, Z. Yusheng, and Y. Fenglin, “Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide,” Opt. Express 21(22), 25805–25819 (2013).
[Crossref]
[PubMed]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
K. H. Chen, H. S. Chiu, J. H. Chen, and Y. C. Chen, “An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry,” Measurement 45(6), 1510–1514 (2012).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
J. Y. Lin, K. H. Chen, and J. H. Chen, “Measurement of small displacement based on surface plasmon resonance heterodyne interferometry,” Opt. Lasers Eng. 49(7), 811–815 (2011).
[Crossref]
H. L. Hsieh, J. C. Chen, G. Lerondel, and J. Y. Lee, “Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer,” Opt. Express 19(10), 9770–9782 (2011).
[Crossref]
[PubMed]
A. Kimura, W. Gao, Y. Arai, and Z. Lijiang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng. 34(1), 145–155 (2010).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
S. F. Wang, M. H. Chiu, W. W. Chen, F. H. Kao, and R. S. Chang, “Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry,” Appl. Opt. 48(13), 2566–2573 (2009).
[Crossref]
[PubMed]
K. H. Chen, J. H. Chen, C. H. Cheng, and T. H. Yang, “Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry,” Opt. Eng. 48(4), 043606 (2009).
[Crossref]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]
J. S. Oh, E. D. Bae, T. Keem, and S. W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry,” Int. J. Mach. Tools Manuf. 46(14), 1748–1752 (2006).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
O. Sasaki, C. Togashi, and T. Suzuki, “Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer,” Opt. Eng. 42(4), 1132–1136 (2003).
[Crossref]
F. C. Demarest, “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,” Meas. Sci. Technol. 9(7), 1024–1030 (1998).
[Crossref]
D. C. Su, M. H. Chiu, and C. D. Chen, “A heterodyne interferometer using an electro-optic modulator for measuring small displacements,” J. Opt. 27(1), 19–23 (1996).
[Crossref]
A. Teimel, “Technology and applications of grating interferometers in high-precision measurement,” Precis. Eng. 14(3), 147–154 (1992).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
A. Kimura, W. Gao, Y. Arai, and Z. Lijiang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng. 34(1), 145–155 (2010).
[Crossref]
J. S. Oh, E. D. Bae, T. Keem, and S. W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry,” Int. J. Mach. Tools Manuf. 46(14), 1748–1752 (2006).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
D. C. Su, M. H. Chiu, and C. D. Chen, “A heterodyne interferometer using an electro-optic modulator for measuring small displacements,” J. Opt. 27(1), 19–23 (1996).
[Crossref]
K. H. Chen, H. S. Chiu, J. H. Chen, and Y. C. Chen, “An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry,” Measurement 45(6), 1510–1514 (2012).
[Crossref]
J. Y. Lin, K. H. Chen, and J. H. Chen, “Measurement of small displacement based on surface plasmon resonance heterodyne interferometry,” Opt. Lasers Eng. 49(7), 811–815 (2011).
[Crossref]
K. H. Chen, J. H. Chen, C. H. Cheng, and T. H. Yang, “Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry,” Opt. Eng. 48(4), 043606 (2009).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
K. H. Chen, H. S. Chiu, J. H. Chen, and Y. C. Chen, “An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry,” Measurement 45(6), 1510–1514 (2012).
[Crossref]
J. Y. Lin, K. H. Chen, and J. H. Chen, “Measurement of small displacement based on surface plasmon resonance heterodyne interferometry,” Opt. Lasers Eng. 49(7), 811–815 (2011).
[Crossref]
K. H. Chen, J. H. Chen, C. H. Cheng, and T. H. Yang, “Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry,” Opt. Eng. 48(4), 043606 (2009).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
K. H. Chen, H. S. Chiu, J. H. Chen, and Y. C. Chen, “An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry,” Measurement 45(6), 1510–1514 (2012).
[Crossref]
K. H. Chen, J. H. Chen, C. H. Cheng, and T. H. Yang, “Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry,” Opt. Eng. 48(4), 043606 (2009).
[Crossref]
K. H. Chen, H. S. Chiu, J. H. Chen, and Y. C. Chen, “An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry,” Measurement 45(6), 1510–1514 (2012).
[Crossref]
S. F. Wang, M. H. Chiu, W. W. Chen, F. H. Kao, and R. S. Chang, “Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry,” Appl. Opt. 48(13), 2566–2573 (2009).
[Crossref]
[PubMed]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]
D. C. Su, M. H. Chiu, and C. D. Chen, “A heterodyne interferometer using an electro-optic modulator for measuring small displacements,” J. Opt. 27(1), 19–23 (1996).
[Crossref]
F. C. Demarest, “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,” Meas. Sci. Technol. 9(7), 1024–1030 (1998).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
A. Kimura, W. Gao, Y. Arai, and Z. Lijiang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng. 34(1), 145–155 (2010).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
J. S. Oh, E. D. Bae, T. Keem, and S. W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry,” Int. J. Mach. Tools Manuf. 46(14), 1748–1752 (2006).
[Crossref]
J. S. Oh, E. D. Bae, T. Keem, and S. W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry,” Int. J. Mach. Tools Manuf. 46(14), 1748–1752 (2006).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
A. Kimura, W. Gao, Y. Arai, and Z. Lijiang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng. 34(1), 145–155 (2010).
[Crossref]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
A. Kimura, W. Gao, Y. Arai, and Z. Lijiang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng. 34(1), 145–155 (2010).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
J. Y. Lin, K. H. Chen, and J. H. Chen, “Measurement of small displacement based on surface plasmon resonance heterodyne interferometry,” Opt. Lasers Eng. 49(7), 811–815 (2011).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
J. S. Oh, E. D. Bae, T. Keem, and S. W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry,” Int. J. Mach. Tools Manuf. 46(14), 1748–1752 (2006).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
O. Sasaki, C. Togashi, and T. Suzuki, “Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer,” Opt. Eng. 42(4), 1132–1136 (2003).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]
D. C. Su, M. H. Chiu, and C. D. Chen, “A heterodyne interferometer using an electro-optic modulator for measuring small displacements,” J. Opt. 27(1), 19–23 (1996).
[Crossref]
O. Sasaki, C. Togashi, and T. Suzuki, “Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer,” Opt. Eng. 42(4), 1132–1136 (2003).
[Crossref]
A. Teimel, “Technology and applications of grating interferometers in high-precision measurement,” Precis. Eng. 14(3), 147–154 (1992).
[Crossref]
O. Sasaki, C. Togashi, and T. Suzuki, “Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer,” Opt. Eng. 42(4), 1132–1136 (2003).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
K. H. Chen, J. H. Chen, C. H. Cheng, and T. H. Yang, “Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry,” Opt. Eng. 48(4), 043606 (2009).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
C. M. Wu, “Heterodyne interferometric system with subnanometer accuracy for measurement of straightness,” Appl. Opt. 43(19), 3812–3816 (2004).
[Crossref]
[PubMed]
W. T. Estler, “High-accuracy displacement interferometry in air,” Appl. Opt. 24(6), 808–815 (1985).
[Crossref]
[PubMed]
M. Nevièvre, E. Popov, B. Bojhkov, L. Tsonev, and S. Tonchev, “High-accuracy translation-rotation encoder with two gratings in a Littrow mount,” Appl. Opt. 38(1), 67–76 (1999).
[Crossref]
[PubMed]
S. F. Wang, M. H. Chiu, W. W. Chen, F. H. Kao, and R. S. Chang, “Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry,” Appl. Opt. 48(13), 2566–2573 (2009).
[Crossref]
[PubMed]
J. S. Oh, E. D. Bae, T. Keem, and S. W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry,” Int. J. Mach. Tools Manuf. 46(14), 1748–1752 (2006).
[Crossref]
D. C. Su, M. H. Chiu, and C. D. Chen, “A heterodyne interferometer using an electro-optic modulator for measuring small displacements,” J. Opt. 27(1), 19–23 (1996).
[Crossref]
W. Gao, Y. Saito, H. Muto, Y. Arai, and Y. Shimizu, “A three-axis autocollimator for detection of angular error motions of a precision stage,” Manuf. Technol. 60(1), 515–518 (2011).
[Crossref]
Q. Chen, D. Lin, J. Wu, J. Yan, and C. Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser,” Meas. Sci. Technol. 16(10), 2030–2037 (2005).
[Crossref]
F. C. Demarest, “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,” Meas. Sci. Technol. 9(7), 1024–1030 (1998).
[Crossref]
K. H. Chen, H. S. Chiu, J. H. Chen, and Y. C. Chen, “An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry,” Measurement 45(6), 1510–1514 (2012).
[Crossref]
K. Chen, J. H. Chen, S. H. Lu, W. Y. Chang, and C. C. Wu, “Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer,” Opt. Commun. 282(9), 1837–1840 (2009).
[Crossref]
O. Sasaki, C. Togashi, and T. Suzuki, “Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer,” Opt. Eng. 42(4), 1132–1136 (2003).
[Crossref]
K. H. Chen, J. H. Chen, C. H. Cheng, and T. H. Yang, “Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry,” Opt. Eng. 48(4), 043606 (2009).
[Crossref]
F. Qibo, Z. Bin, C. Cunxing, K. Cuifang, Z. Yusheng, and Y. Fenglin, “Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide,” Opt. Express 21(22), 25805–25819 (2013).
[Crossref]
[PubMed]
H. L. Hsieh, J. C. Chen, G. Lerondel, and J. Y. Lee, “Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer,” Opt. Express 19(10), 9770–9782 (2011).
[Crossref]
[PubMed]
J. Y. Lin, K. H. Chen, and J. H. Chen, “Measurement of small displacement based on surface plasmon resonance heterodyne interferometry,” Opt. Lasers Eng. 49(7), 811–815 (2011).
[Crossref]
A. Teimel, “Technology and applications of grating interferometers in high-precision measurement,” Precis. Eng. 14(3), 147–154 (1992).
[Crossref]
A. Kimura, W. Gao, Y. Arai, and Z. Lijiang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng. 34(1), 145–155 (2010).
[Crossref]
A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36(4), 576–585 (2012).
[Crossref]
X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).
[Crossref]
M. H. Chiu, B. Y. Shih, C. W. Lai, L. H. Shyu, and T. H. Wu, “Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor,” Sens, Actuator A-Phys. 141(1), 217–223 (2008).
[Crossref]