Abstract

We propose and realize a modified spectral-domain interferometer to measure the physical thickness profile and group refractive index distribution of a large glass substrate simultaneously. The optical layout was modified based on a Mach-Zehnder type interferometer, which was specially adopted to be insensitive to mechanical vibration. According to the measurement results of repeated experiments at a length of 820 mm along the horizontal axis, the standard deviations of the physical thickness and group refractive index were calculated to be 0.173 μm and 3.4 × 10−4, respectively. To verify the insensitivity to vibration, the physical thickness values were monitored at a stationary point while the glass panel was swung at an amplitude exceeding 20 mm. The uncertainty components were evaluated, and the combined measurement uncertainty became 161 nm (k = 1) for a glass panel with a nominal thickness of 0.7 mm.

© 2015 Optical Society of America

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References

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    [Crossref] [PubMed]
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    [Crossref]
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  13. Guide to the expression of uncertainty in measurement, (International Organization for Standardization, 1993).

2014 (3)

2013 (1)

J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305(15), 170–174 (2013).
[Crossref]

2012 (2)

2010 (2)

2009 (1)

D. W. Zhou, T. Gambaryan-Roisman, and P. Stephan, “Measurement of water falling film thickness to flat plate using confocal chromatic sensoring technique,” Exp. Therm. Fluid Sci. 33(2), 273–283 (2009).
[Crossref]

2007 (1)

H. Minami, F. Matsumoto, and S. Suzuki, “Prospects of LCD Panel Fabrication and Inspection Equipment Amid Growing Demand for Increased Size,” Hitachi Rev. 56(3), 63–69 (2007).

2006 (1)

2003 (1)

Chen, L.

Coppola, G.

De Nicola, S.

Eom, T. B.

Ferraro, P.

Gambaryan-Roisman, T.

D. W. Zhou, T. Gambaryan-Roisman, and P. Stephan, “Measurement of water falling film thickness to flat plate using confocal chromatic sensoring technique,” Exp. Therm. Fluid Sci. 33(2), 273–283 (2009).
[Crossref]

Griesmann, U.

Iodice, M.

Jin, J.

Kang, C.-S.

Kim, J. W.

Kim, J.-A.

Maeng, S.

Matsumoto, F.

H. Minami, F. Matsumoto, and S. Suzuki, “Prospects of LCD Panel Fabrication and Inspection Equipment Amid Growing Demand for Increased Size,” Hitachi Rev. 56(3), 63–69 (2007).

Miks, A.

Minami, H.

H. Minami, F. Matsumoto, and S. Suzuki, “Prospects of LCD Panel Fabrication and Inspection Equipment Amid Growing Demand for Increased Size,” Hitachi Rev. 56(3), 63–69 (2007).

Novak, J.

Novak, P.

O, B.

Park, J.

Peterson, J. P.

Peterson, R. B.

Stephan, P.

D. W. Zhou, T. Gambaryan-Roisman, and P. Stephan, “Measurement of water falling film thickness to flat plate using confocal chromatic sensoring technique,” Exp. Therm. Fluid Sci. 33(2), 273–283 (2009).
[Crossref]

Suh, H. S.

Suzuki, S.

H. Minami, F. Matsumoto, and S. Suzuki, “Prospects of LCD Panel Fabrication and Inspection Equipment Amid Growing Demand for Increased Size,” Hitachi Rev. 56(3), 63–69 (2007).

Wang, Q.

Zhou, D. W.

D. W. Zhou, T. Gambaryan-Roisman, and P. Stephan, “Measurement of water falling film thickness to flat plate using confocal chromatic sensoring technique,” Exp. Therm. Fluid Sci. 33(2), 273–283 (2009).
[Crossref]

Appl. Opt. (4)

Exp. Therm. Fluid Sci. (1)

D. W. Zhou, T. Gambaryan-Roisman, and P. Stephan, “Measurement of water falling film thickness to flat plate using confocal chromatic sensoring technique,” Exp. Therm. Fluid Sci. 33(2), 273–283 (2009).
[Crossref]

Hitachi Rev. (1)

H. Minami, F. Matsumoto, and S. Suzuki, “Prospects of LCD Panel Fabrication and Inspection Equipment Amid Growing Demand for Increased Size,” Hitachi Rev. 56(3), 63–69 (2007).

Opt. Commun. (1)

J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305(15), 170–174 (2013).
[Crossref]

Opt. Express (5)

Other (1)

Guide to the expression of uncertainty in measurement, (International Organization for Standardization, 1993).

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Figures (5)

Fig. 1
Fig. 1 Optical layout of interferometer setup for the simultaneous measurement of the physical thickness and group refractive index
Fig. 2
Fig. 2 (a) Schematic diagram of the change in the optical path caused by variations in the sample swing, and (b) thickness variation caused by the swing amplitude, u s
Fig. 3
Fig. 3 (a) Photo of the system used to measure the thickness of a large glass panel, (b) photo of the inside of the interferometer setup, and (c) experimental method to acquire the thickness profile data of a large glass panel
Fig. 4
Fig. 4 Results of ten consecutive measurements of a large glass panel (a) physical thickness profile, (b) group refractive index distribution
Fig. 5
Fig. 5 Repeatable thickness measurement results with (a) no initial swing and (b) a large amount of swing, and (c) optical layout of the sample swing condition

Tables (1)

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Table 1 Uncertainty evaluation of T = 712.262 μm

Equations (11)

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I ( f , L ) = I 0 ( f ) { 1 + cos ( 2 π f L c ) }
OPD 1 = L 2 L 1
OPD 2 ( x ) = 2 N ( x ) T ( x )
OPD 3 ( x ) = { L 2 T ( x ) + N ( x ) T ( x ) } L 1
T ( x ) = OPD 2 ( x ) 2 { OPD 3 ( x ) OPD 1 }
N ( x ) = OPD 2 ( x ) 2 T ( x )
θ = sin 1 ( sin θ N )
T = T ( 1 cos θ )
Δ OPD 2 = 2 N T 2 T sin θ sin θ 2 N T
Δ OPD 3 = N ( T T ) + T ( 1 1 cos θ ) + T sin ( θ θ ) tan θ
Δ T = Δ OPD 2 2 Δ OPD 3

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