F. Qibo, Z. Bin, C. Cunxing, K. Cuifang, Z. Yusheng, and Y. Fenglin, “Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide,” Opt. Express 21(22), 25805–25819 (2013).

[Crossref]
[PubMed]

G. Zamiela and M. Dobosz, “Corner cube reflector lateral displacement evaluation simultaneously with interferometer length measurement,” Opt. Laser Technol. 50, 118–124 (2013).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift,” Int. J. Prec. Eng. Manufact. 9, 26–31 (2008).

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

P. L. Teoh, B. Shirinzadeh, C. W. Foong, and G. Alici, “The measurement uncertainties in the laser interferometry-based sensing and tracking technique,” Measurement 32(2), 135–150 (2002).

[Crossref]

J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng. 26(1), 99–104 (2002).

[Crossref]

J. S. Chen, T. W. Kou, and S. H. Chiou, “Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer,” Precis. Eng. 26(1), 99–104 (2002).

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

K. C. Fan and M. J. Chen, “6-Degree-of-freedom measurement system for the accuracy of X-Y stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machine,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors,” J. Eng. Ind. 114, 362–389 (1992).

Agilent Technologies and Optics and Laser Heads for Laser-Interferometer Positioning Systems,” 5964–6190 (2000).

P. L. Teoh, B. Shirinzadeh, C. W. Foong, and G. Alici, “The measurement uncertainties in the laser interferometry-based sensing and tracking technique,” Measurement 32(2), 135–150 (2002).

[Crossref]

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng. 26(1), 99–104 (2002).

[Crossref]

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

J. S. Chen, T. W. Kou, and S. H. Chiou, “Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer,” Precis. Eng. 26(1), 99–104 (2002).

K. C. Fan and M. J. Chen, “6-Degree-of-freedom measurement system for the accuracy of X-Y stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

J. S. Chen, T. W. Kou, and S. H. Chiou, “Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer,” Precis. Eng. 26(1), 99–104 (2002).

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

G. Zamiela and M. Dobosz, “Corner cube reflector lateral displacement evaluation simultaneously with interferometer length measurement,” Opt. Laser Technol. 50, 118–124 (2013).

[Crossref]

K. C. Fan and M. J. Chen, “6-Degree-of-freedom measurement system for the accuracy of X-Y stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift,” Int. J. Prec. Eng. Manufact. 9, 26–31 (2008).

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

P. L. Teoh, B. Shirinzadeh, C. W. Foong, and G. Alici, “The measurement uncertainties in the laser interferometry-based sensing and tracking technique,” Measurement 32(2), 135–150 (2002).

[Crossref]

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machine,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors,” J. Eng. Ind. 114, 362–389 (1992).

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng. 26(1), 99–104 (2002).

[Crossref]

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng. 26(1), 99–104 (2002).

[Crossref]

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

J. S. Chen, T. W. Kou, and S. H. Chiou, “Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer,” Precis. Eng. 26(1), 99–104 (2002).

Q. Feng, B. Zhang, and C. Kuang, “Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift,” Int. J. Prec. Eng. Manufact. 9, 26–31 (2008).

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng. 26(1), 99–104 (2002).

[Crossref]

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machine,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors,” J. Eng. Ind. 114, 362–389 (1992).

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

P. L. Teoh, B. Shirinzadeh, C. W. Foong, and G. Alici, “The measurement uncertainties in the laser interferometry-based sensing and tracking technique,” Measurement 32(2), 135–150 (2002).

[Crossref]

P. L. Teoh, B. Shirinzadeh, C. W. Foong, and G. Alici, “The measurement uncertainties in the laser interferometry-based sensing and tracking technique,” Measurement 32(2), 135–150 (2002).

[Crossref]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors,” J. Eng. Ind. 114, 362–389 (1992).

G. Zamiela and M. Dobosz, “Corner cube reflector lateral displacement evaluation simultaneously with interferometer length measurement,” Opt. Laser Technol. 50, 118–124 (2013).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift,” Int. J. Prec. Eng. Manufact. 9, 26–31 (2008).

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machine,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM Geometrical error measurement using fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37(5), 579–590 (1997).

[Crossref]

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift,” Int. J. Prec. Eng. Manufact. 9, 26–31 (2008).

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors,” J. Eng. Ind. 114, 362–389 (1992).

P. L. Teoh, B. Shirinzadeh, C. W. Foong, and G. Alici, “The measurement uncertainties in the laser interferometry-based sensing and tracking technique,” Measurement 32(2), 135–150 (2002).

[Crossref]

G. Zamiela and M. Dobosz, “Corner cube reflector lateral displacement evaluation simultaneously with interferometer length measurement,” Opt. Laser Technol. 50, 118–124 (2013).

[Crossref]

W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng. 30(1), 96–103 (2006).

[Crossref]

K. C. Fan and M. J. Chen, “6-Degree-of-freedom measurement system for the accuracy of X-Y stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng. 26(1), 99–104 (2002).

[Crossref]

J. S. Chen, T. W. Kou, and S. H. Chiou, “Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer,” Precis. Eng. 26(1), 99–104 (2002).

J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensor. Actuat. A 125(1), 100–108 (2005).

Renishaw plc Laser System Manual, Reference Section (2007), version 2.1.

Renishaw plc Laser System Manual, Linear measurement (2007), version 2.1.

Agilent Technologies and Optics and Laser Heads for Laser-Interferometer Positioning Systems,” 5964–6190 (2000).

Automated Precision Inc, “XD LASER,” http://www.apisensor.com/index.php/products-en/machine-tool-calibration-en/xd-laser-en .

Agilent Laser and Optics User’s Manual; 2007, Volume I.