Abstract

We demonstrate fabrication of a microtoroid resonator of a high-quality (high-Q) factor using femtosecond laser three-dimensional (3D) micromachining. A fiber taper is reliably assembled to the microtoroid using CO2 laser welding. Specifically, we achieve a high-Q-factor of 2.12 × 106 in the microresonator-fiber assembly by optimizing the contact position between the fiber taper and the microtoroid.

© 2015 Optical Society of America

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References

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  1. K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
    [Crossref] [PubMed]
  2. T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
    [Crossref] [PubMed]
  3. P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
    [Crossref] [PubMed]
  4. T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
    [Crossref] [PubMed]
  5. F. Vollmer and S. Arnold, “Whispering-gallery-mode biosensing: label-free detection down to single molecules,” Nat. Methods 5(7), 591–596 (2008).
    [Crossref] [PubMed]
  6. B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
    [Crossref]
  7. L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
    [Crossref]
  8. A. Serpengüzel, S. Arnold, and G. Griffel, “Excitation of resonances of microspheres on an optical fiber,” Opt. Lett. 20(7), 654–656 (1995).
    [Crossref] [PubMed]
  9. M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
    [Crossref] [PubMed]
  10. Y. S. Park, A. K. Cook, and H. Wang, “Cavity QED with diamond nanocrystals and silica microspheres,” Nano Lett. 6(9), 2075–2079 (2006).
    [Crossref] [PubMed]
  11. J. Song, J. Lin, J. Tang, Y. Liao, F. He, Z. Wang, L. Qiao, K. Sugioka, and Y. Cheng, “Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining,” Opt. Express 22(12), 14792–14802 (2014).
    [Crossref] [PubMed]
  12. J. Lin, S. Yu, Y. Ma, W. Fang, F. He, L. Qiao, L. Tong, Y. Cheng, and Z. Xu, “On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing,” Opt. Express 20(9), 10212–10217 (2012).
    [PubMed]
  13. J. Lin, Y. Xu, J. Song, B. Zeng, F. He, H. Xu, K. Sugioka, W. Fang, and Y. Cheng, “Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining,” Opt. Lett. 38(9), 1458–1460 (2013).
    [Crossref] [PubMed]
  14. K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
    [Crossref]
  15. X. Du, S. Vincent, M. Faucher, M. J. Picard, and T. Lu, “Generalized full-vector multi-mode matching analysis of whispering gallery microcavities,” Opt. Express 22(11), 13507–13514 (2014).
    [Crossref] [PubMed]
  16. J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
    [Crossref]
  17. T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
    [Crossref] [PubMed]
  18. T. Carmon and K. J. Vahala, “Visible continuous emission from a silica microphotonic device by third-harmonic generation,” Nat. Phys. 3(6), 430–435 (2007).
    [Crossref]
  19. J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
    [Crossref] [PubMed]
  20. J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
    [Crossref]

2015 (2)

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

2014 (4)

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

X. Du, S. Vincent, M. Faucher, M. J. Picard, and T. Lu, “Generalized full-vector multi-mode matching analysis of whispering gallery microcavities,” Opt. Express 22(11), 13507–13514 (2014).
[Crossref] [PubMed]

J. Song, J. Lin, J. Tang, Y. Liao, F. He, Z. Wang, L. Qiao, K. Sugioka, and Y. Cheng, “Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining,” Opt. Express 22(12), 14792–14802 (2014).
[Crossref] [PubMed]

2013 (2)

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

J. Lin, Y. Xu, J. Song, B. Zeng, F. He, H. Xu, K. Sugioka, W. Fang, and Y. Cheng, “Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining,” Opt. Lett. 38(9), 1458–1460 (2013).
[Crossref] [PubMed]

2012 (1)

2011 (1)

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

2010 (1)

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

2008 (2)

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[Crossref] [PubMed]

F. Vollmer and S. Arnold, “Whispering-gallery-mode biosensing: label-free detection down to single molecules,” Nat. Methods 5(7), 591–596 (2008).
[Crossref] [PubMed]

2007 (2)

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Carmon and K. J. Vahala, “Visible continuous emission from a silica microphotonic device by third-harmonic generation,” Nat. Phys. 3(6), 430–435 (2007).
[Crossref]

2006 (2)

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Y. S. Park, A. K. Cook, and H. Wang, “Cavity QED with diamond nanocrystals and silica microspheres,” Nano Lett. 6(9), 2075–2079 (2006).
[Crossref] [PubMed]

2003 (1)

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[Crossref] [PubMed]

2000 (1)

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[Crossref] [PubMed]

1995 (1)

Aoki, T.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Arcizet, O.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Arnold, S.

F. Vollmer and S. Arnold, “Whispering-gallery-mode biosensing: label-free detection down to single molecules,” Nat. Methods 5(7), 591–596 (2008).
[Crossref] [PubMed]

A. Serpengüzel, S. Arnold, and G. Griffel, “Excitation of resonances of microspheres on an optical fiber,” Opt. Lett. 20(7), 654–656 (1995).
[Crossref] [PubMed]

Bender, C. M.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Bowen, W. P.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Cai, M.

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[Crossref] [PubMed]

Carmon, T.

T. Carmon and K. J. Vahala, “Visible continuous emission from a silica microphotonic device by third-harmonic generation,” Nat. Phys. 3(6), 430–435 (2007).
[Crossref]

Chang, L.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Chen, D. R.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Chen, T.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Cheng, Y.

Cohoon, G. A.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

Cook, A. K.

Y. S. Park, A. K. Cook, and H. Wang, “Cavity QED with diamond nanocrystals and silica microspheres,” Nano Lett. 6(9), 2075–2079 (2006).
[Crossref] [PubMed]

Dayan, B.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Del’Haye, P.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Du, X.

Fan, S.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Fang, W.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

J. Lin, Y. Xu, J. Song, B. Zeng, F. He, H. Xu, K. Sugioka, W. Fang, and Y. Cheng, “Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining,” Opt. Lett. 38(9), 1458–1460 (2013).
[Crossref] [PubMed]

J. Lin, S. Yu, Y. Ma, W. Fang, F. He, L. Qiao, L. Tong, Y. Cheng, and Z. Xu, “On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing,” Opt. Express 20(9), 10212–10217 (2012).
[PubMed]

Fang, Z.

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Faucher, M.

Flagan, R. C.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Fraser, S. E.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Gianfreda, M.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Griffel, G.

He, F.

He, L.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Herchak, S.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Holzwarth, R.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Hua, S.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Jiang, L.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Jiang, X.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Kieu, K.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

Kim, J.-H.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Kimble, H. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Kippenberg, T. J.

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Lee, H.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Lei, F.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Li, G.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Li, L.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Liao, Y.

Lin, J.

Long, G. L.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Lu, T.

X. Du, S. Vincent, M. Faucher, M. J. Picard, and T. Lu, “Generalized full-vector multi-mode matching analysis of whispering gallery microcavities,” Opt. Express 22(11), 13507–13514 (2014).
[Crossref] [PubMed]

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Ma, Y.

Mansuripur, M.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

Monifi, F.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Nori, F.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Norwood, R. A.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

Ozdemir, S. K.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Özdemir, S. K.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Painter, O.

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[Crossref] [PubMed]

Park, Y. S.

Y. S. Park, A. K. Cook, and H. Wang, “Cavity QED with diamond nanocrystals and silica microspheres,” Nano Lett. 6(9), 2075–2079 (2006).
[Crossref] [PubMed]

Parkins, A. S.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Peng, B.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

Picard, M. J.

Qiao, L.

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

J. Song, J. Lin, J. Tang, Y. Liao, F. He, Z. Wang, L. Qiao, K. Sugioka, and Y. Cheng, “Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining,” Opt. Express 22(12), 14792–14802 (2014).
[Crossref] [PubMed]

J. Lin, S. Yu, Y. Ma, W. Fang, F. He, L. Qiao, L. Tong, Y. Cheng, and Z. Xu, “On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing,” Opt. Express 20(9), 10212–10217 (2012).
[PubMed]

Schliesser, A.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Serpengüzel, A.

Song, J.

Sugioka, K.

Tada, K.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

Tang, J.

Tong, L.

Vahala, K.

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Vahala, K. J.

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[Crossref] [PubMed]

T. Carmon and K. J. Vahala, “Visible continuous emission from a silica microphotonic device by third-harmonic generation,” Nat. Phys. 3(6), 430–435 (2007).
[Crossref]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[Crossref] [PubMed]

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[Crossref] [PubMed]

Vincent, S.

Vollmer, F.

F. Vollmer and S. Arnold, “Whispering-gallery-mode biosensing: label-free detection down to single molecules,” Nat. Methods 5(7), 591–596 (2008).
[Crossref] [PubMed]

Wang, G.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Wang, H.

Y. S. Park, A. K. Cook, and H. Wang, “Cavity QED with diamond nanocrystals and silica microspheres,” Nano Lett. 6(9), 2075–2079 (2006).
[Crossref] [PubMed]

Wang, M.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

Wang, N.

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Wang, Z.

Wen, J.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Wilcut, E.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Wilken, T.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Xiao, M.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Xiao, Y. F.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Xu, H.

Xu, Y.

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Song, B. Zeng, F. He, H. Xu, K. Sugioka, W. Fang, and Y. Cheng, “Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining,” Opt. Lett. 38(9), 1458–1460 (2013).
[Crossref] [PubMed]

Xu, Z.

Yang, C.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

Yang, L.

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Yu, S.

Zeng, B.

Zhu, J.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

IEEE Photonics Technol. Lett. (1)

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, “Fabrication of high-Q microresonators using femtosecond laser micromachining,” IEEE Photonics Technol. Lett. 25(5), 430–433 (2013).
[Crossref]

Nano Lett. (1)

Y. S. Park, A. K. Cook, and H. Wang, “Cavity QED with diamond nanocrystals and silica microspheres,” Nano Lett. 6(9), 2075–2079 (2006).
[Crossref] [PubMed]

Nat. Methods (1)

F. Vollmer and S. Arnold, “Whispering-gallery-mode biosensing: label-free detection down to single molecules,” Nat. Methods 5(7), 591–596 (2008).
[Crossref] [PubMed]

Nat. Photonics (2)

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8(7), 524–529 (2014).
[Crossref]

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4(1), 46–49 (2010).
[Crossref]

Nat. Phys. (2)

B. Peng, Ş. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10(5), 394–398 (2014).
[Crossref]

T. Carmon and K. J. Vahala, “Visible continuous emission from a silica microphotonic device by third-harmonic generation,” Nat. Phys. 3(6), 430–435 (2007).
[Crossref]

Nature (3)

K. J. Vahala, “Optical microcavities,” Nature 424(6950), 839–846 (2003).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature 443(7112), 671–674 (2006).
[Crossref] [PubMed]

Opt. Express (3)

Opt. Lett. (2)

Phys. Rev. Lett. (1)

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85(1), 74–77 (2000).
[Crossref] [PubMed]

Proc. Natl. Acad. Sci. U.S.A. (1)

T. Lu, H. Lee, T. Chen, S. Herchak, J.-H. Kim, S. E. Fraser, R. C. Flagan, and K. Vahala, “High sensitivity nanoparticle detection using optical microcavities,” Proc. Natl. Acad. Sci. U.S.A. 108(15), 5976–5979 (2011).
[Crossref] [PubMed]

Sci. China-Phys. (1)

J. Lin, Y. Xu, Z. Fang, M. Wang, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Second harmonic generation in a high-Q lithium niobate micro-resonator fabricated by femtosecond laser micromachining,” Sci. China-Phys. 58(11), 114209 (2015).
[Crossref]

Sci. Rep. (1)

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Science (1)

T. J. Kippenberg and K. J. Vahala, “Cavity optomechanics: back-action at the mesoscale,” Science 321(5893), 1172–1176 (2008).
[Crossref] [PubMed]

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Figures (5)

Fig. 1
Fig. 1 Schematic illustration of fabrication of a microresonator using femtosecond laser direct writing onto which a fiber taper is assembled by CO2 laser welding.
Fig. 2
Fig. 2 (a) The geometric configuration of the fiber taper and the microtoroid in the critical coupling condition (Left: sideview; right: top view). (b) The transmission spectrum of the microtoroid. (c) The Lorentzian curve fitting (red curve) showing a Q-factor of 2.55 × 106.
Fig. 3
Fig. 3 (a) The geometric configuration of the fiber in direct contact with the microtoroid. (b) The transmission spectrum of the microtoroid. (c) The Lorentzian curve fitting (red curve) showing a Q-factor of 2.64 × 105.
Fig. 4
Fig. 4 (a) The geometric configuration of the fiber taper in direct contact with the micro toroid after the optimization of the contact position. (b) The transmission spectrum of the microtoroid. (c) The Lorentzian curve fitting (red curve) showing a Q-factor of 2.24 × 106.
Fig. 5
Fig. 5 (a) The tansmission spectrum of the fabricated MFA. (b) The Lorentzian curve fitting (red curve) showing a Q-factor of 2.12 × 106. (c) Shifting of the resonant peak after the CO2 laser welding. (d) Optical micrograph of the integrated MFA. Inset: side view of the MFA.

Equations (1)

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Δ λ FSR λ 0 2 nπD ,

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