Abstract

A low-loss and high-Q Ta2O5 based micro-ring resonator is presented. The micro-ring resonator and channel waveguide with core area of the 700 by 400 nm2 were fabricated on amorphous Ta2O5 thin films prepared by reactive sputtering at 300°C and post annealing at 650°C for 3 hours. The Ta2O5 micro-ring resonator with a diameter of 200 μm was coupled to the channel waveguide with a coupled Q up to 38,000 at a 0.9 μm coupling gap. By fitting the transmission spectrum of the resonator, the extracted loss coefficient inside the ring cavity and transmission coefficient of TE mode were 8.1dB/cm and 0.9923, leading to the estimated unloaded Q of higher than 44,000. In addition, based on the cut-back method, the propagation loss and the coupling loss of Ta2O5 channel waveguide with an inverse taper were 1.5dB/cm and 3.2 dB, respectively. The proposed Ta2O5 technology offers an unique alternative for fabricating high performance guided wave devices, and may well lead to novel applications in photonic integrated circuits.

© 2015 Optical Society of America

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2015 (1)

2013 (2)

P. Rabiei, J. Ma, S. Khan, J. Chiles, and S. Fathpour, “Submicron optical waveguides and microring resonators fabricated by selective oxidation of tantalum,” Opt. Express 21(6), 6967–6972 (2013).
[Crossref] [PubMed]

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

2012 (2)

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

2010 (2)

A. C. Turner-Foster, M. A. Foster, J. S. Levy, C. B. Poitras, R. Salem, A. L. Gaeta, and M. Lipson, “Ultrashort free-carrier lifetime in low-loss silicon nanowaveguides,” Opt. Express 18(4), 3582–3591 (2010).
[Crossref] [PubMed]

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

2009 (1)

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

2008 (1)

2007 (1)

S. Fathpour, K. M. Tsia, and B. Jalali, “Two-photon photovoltaic effect in silicon,” IEEE J. Quantum Electron. 43(12), 1211–1217 (2007).
[Crossref]

2006 (1)

2005 (1)

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

2004 (3)

2003 (1)

2002 (1)

2001 (1)

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

2000 (1)

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

1999 (1)

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

1992 (1)

K. Inoue and H. Toba, “Wavelength conversion experiment using fiber four-wave mixing,” IEEE Photonics Technol. Lett. 4(1), 69–72 (1992).
[Crossref]

Abe, M.

Ahluwalia, B. S.

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

Almeida, V. R.

Alonso, J. C.

Badding, J. V.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

Baets, R.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Barrios, C. A.

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431(7012), 1081–1084 (2004).
[Crossref] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, M. Lipson, M. A. Foster, D. G. Ouzounov, and A. L. Gaeta, “All-optical switching on a silicon chip,” Opt. Lett. 29(24), 2867–2869 (2004).
[Crossref] [PubMed]

Baumberg, J.

Baumberg, J. J.

Bellutti, P.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Bienstman, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Blasco, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Bogaerts, W.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Brocklesby, W. S.

Cao, X.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Cattaneo, F.

Chaipiboonwong, T.

Charlton, M. D. B.

Chi, B.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Chiles, J.

Chu, A. K.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Chuang, M. J.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Claes, T.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Crespo-Sosa, A.

Daldosso, N.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Dalton, L. R.

Day, T. D.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

De Heyn, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

De Vos, K.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

DeVries, M. J.

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

Du, Q.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Dumon, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Fathpour, S.

Fedeli, J. M.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Finlayson, C.

Foster, M. A.

Franke, E.

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

Frost, F.

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

Gaeta, A. L.

Galán, J. V.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

García-Rupérez, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Garrido, B.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Gautier, P.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Guider, R.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Hashimoto, T.

Healy, N.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

Hellesø, O. G.

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

Hernández, S.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Hsieh, K. Y.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Huang, H. L.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Inoue, K.

K. Inoue and H. Toba, “Wavelength conversion experiment using fiber four-wave mixing,” IEEE Photonics Technol. Lett. 4(1), 69–72 (1992).
[Crossref]

Itoh, M.

Jalali, B.

S. Fathpour, K. M. Tsia, and B. Jalali, “Two-photon photovoltaic effect in silicon,” IEEE J. Quantum Electron. 43(12), 1211–1217 (2007).
[Crossref]

Jasapara, J.

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

Jordana, E.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Khan, S.

Kominato, T.

Kompocholis, C.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Lebour, Y.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Levy, J. S.

Lin, E. K.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Lipson, M.

Liu, T.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

López-Suárez, A.

Lui, A.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Ma, J.

Martí, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Martínez, A.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Mehta, P.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

Melchiorri, M.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Mills, J. D.

Nampoothiri, A. V. V.

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

Netti, C.

Netti, M.

Oliver, A.

Ouzounov, D. G.

Panepucci, R. R.

Pavesi, L.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Peacock, A. C.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

Perney, N.

Perney, N. M. B.

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

Poitras, C. B.

Pucker, G.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Rabiei, P.

Rangel-Rojo, R.

Ristau, D.

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

Rudolph, W.

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

Salem, R.

Sanchis, P.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Sbrana, F.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Schubert, M.

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

Selvaraja, S. K.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Sessions, N. P.

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

Spano, R.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Starke, K.

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

Steier, W. H.

Su, Y.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Subramanian, A. Z.

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

Suhailin, F. H.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

Tai, C.-Y.

Tamayo-Rivera, L.

Toba, H.

K. Inoue and H. Toba, “Wavelength conversion experiment using fiber four-wave mixing,” IEEE Photonics Technol. Lett. 4(1), 69–72 (1992).
[Crossref]

Torres-Torres, C.

Trimble, C. L.

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

Tsia, K. M.

S. Fathpour, K. M. Tsia, and B. Jalali, “Two-photon photovoltaic effect in silicon,” IEEE J. Quantum Electron. 43(12), 1211–1217 (2007).
[Crossref]

Turner-Foster, A. C.

Van Thourhout, D.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Van Vaerenbergh, T.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Vukovic, N.

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

Wang, C. W.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Wang, X.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Wilkinson, J.

Wilkinson, J. S.

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

Woollam, J. A.

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

Yu, Y. C.

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

Zhang, C.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol. 20(11), 1968–1975 (2002).
[Crossref]

Zhang, J.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Zhao, Y.

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

Zoorob, M. E.

Appl. Phys. Lett. (1)

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

IEEE J. Quantum Electron. (1)

S. Fathpour, K. M. Tsia, and B. Jalali, “Two-photon photovoltaic effect in silicon,” IEEE J. Quantum Electron. 43(12), 1211–1217 (2007).
[Crossref]

IEEE Photonics Technol. Lett. (2)

K. Inoue and H. Toba, “Wavelength conversion experiment using fiber four-wave mixing,” IEEE Photonics Technol. Lett. 4(1), 69–72 (1992).
[Crossref]

B. S. Ahluwalia, A. Z. Subramanian, O. G. Hellesø, N. M. B. Perney, N. P. Sessions, and J. S. Wilkinson, “Fabrication of submicrometer high refractive index Tantalum Pentoxide waveguides for optical propulsion of microparticles,” IEEE Photonics Technol. Lett. 21(19), 1408–1410 (2009).
[Crossref]

J. Appl. Phys. (1)

E. Franke, C. L. Trimble, M. J. DeVries, J. A. Woollam, M. Schubert, and F. Frost, “Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry,” J. Appl. Phys. 88(9), 5166–5174 (2000).
[Crossref]

J. Electroanal. Chem. (1)

Y. Zhao, Q. Du, X. Cao, B. Chi, J. Zhang, C. Zhang, T. Liu, X. Wang, and Y. Su, “Electronic structure and electrocatalytic activity of cerium-doped tantalum oxide,” J. Electroanal. Chem. 681, 139–143 (2012).
[Crossref]

J. Electron. Mater. (1)

A. K. Chu, M. J. Chuang, K. Y. Hsieh, H. L. Huang, Y. C. Yu, C. W. Wang, and E. K. Lin, “Microstructure and corrosion resistance of room-temperature RF sputtered Ta2O5 Thin Films,” J. Electron. Mater. 28(12), 1457–1460 (1999).
[Crossref]

J. Lightwave Technol. (2)

Laser Photonics Rev. (1)

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Nano Lett. (1)

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Martí, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett. 10(4), 1506–1511 (2010).
[Crossref] [PubMed]

Nature (1)

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431(7012), 1081–1084 (2004).
[Crossref] [PubMed]

Opt. Express (4)

Opt. Lett. (3)

Phys. Rev. B (1)

J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, and K. Starke, “Femtosecond laser pulse induced breakdown in dielectric thin films,” Phys. Rev. B 63(4), 045117 (2001).
[Crossref]

Sci. Rep. (1)

N. Vukovic, N. Healy, F. H. Suhailin, P. Mehta, T. D. Day, J. V. Badding, and A. C. Peacock, “Ultrafast optical control using the Kerr nonlinearity in hydrogenated amorphous silicon microcylindrical resonators,” Sci. Rep. 3, 2885 (2013).
[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

(a) The XRD spectra of Ta2O5 with different annealing time. (b) The diffraction pattern of Ta2O5 film without and with annealing. (c) The cross-sectional HRTEM image of Ta2O5 with annealing time of 3 hours.

Fig. 2
Fig. 2

(a) The SEM top-view images of Ta2O5 with different annealing time. (b) The n-k data of Ta2O5 with annealing time of 3 hours.

Fig. 3
Fig. 3

(a) The waveguide illustrations and SEM images of Ta2O5 channel waveguide end facet with and without inverse taper structure. (b) The insertion losses of Ta2O5 channel waveguide with different waveguide lengths.

Fig. 4
Fig. 4

(a) The top-view image of the Ta2O5 based micro-ring resonator, and (b) the zoom-in image of the directional coupler with gap of 900 nm. (c) The normalized transmission spectrum of the Ta2O5 based micro-ring resonator. (d) The simulated transmission spectrum with corresponding fitting parameters of the Ta2O5 based micro-ring resonator.

Equations (1)

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T( λ )=1 [ 1exp( α r L ) ][ 1 t 2 ] [ 1texp( α r L 2 ) ] 2 +4texp( α r L 2 ) sin 2 ( π n g L λ ) ,

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