Abstract

We present a method for fabrication of large arrays of nano-antennas using extreme-ultraviolet (EUV) illumination. A discharge-produced plasma source generating EUV radiation around 10.88 nm wavelength is used for the illumination of a photoresist via a mask in a proximity printing setup. The method of metallic nanoantennas fabrication utilizes a bilayer photoresist and employs a lift-off process. The impact of Fresnel-diffraction of EUV light in the mask on a shape of the nanostructures has been investigated. It is shown how by the use of the same rectangular apertures in the transmission mask, antennas of various shapes can be fabricated. Using Fourier transform infrared spectroscopy, spectra of antennas reflectivity were measured and compared to FDTD simulations demonstrating good agreement.

© 2015 Optical Society of America

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  35. V. Liberman, R. Adato, A. Mertiri, A. A. Yanik, K. Chen, T. H. Jeys, S. Erramilli, and H. Altug, “Angle-and polarization-dependent collective excitation of plasmonic nanoarrays for surface enhanced infrared spectroscopy,” Opt. Express 19(12), 11202–11212 (2011).
    [Crossref] [PubMed]

2015 (1)

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

2014 (5)

S. Zeng, D. Baillargeat, H.-P. Ho, and K.-T. Yong, “Nanomaterials enhanced surface plasmon resonance for biological and chemical sensing applications,” Chem. Soc. Rev. 43(10), 3426–3452 (2014).
[Crossref] [PubMed]

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

S. Schlücker, “Surface-Enhanced Raman Spectroscopy: Concepts and Chemical Applications,” Angew. Chem. Int. Ed. Engl. 53(19), 4756–4795 (2014).
[Crossref] [PubMed]

J. M. Hoffmann, H. Janssen, D. N. Chigrin, and T. Taubner, “Enhanced infrared spectroscopy using small-gap antennas prepared with two-step evaporation nanosphere lithography,” Opt. Express 22(12), 14425–14432 (2014).
[Crossref] [PubMed]

S. Bagheri, H. Giessen, and F. Neubrech, “Large-Area Antenna-Assisted SEIRA Substrates by Laser Interference Lithography,” Adv. Opt. Mater. 2(11), 1050–1056 (2014).
[Crossref]

2013 (7)

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Z. Li, M. Mutlu, and E. Ozbay, “Chiral metamaterials: from optical activity and negative refractive index to asymmetric transmission,” J. Opt. 15(2), 023001 (2013).
[Crossref]

Z. Fang and X. Zhu, “Plasmonics in Nanostructures,” Adv. Mater. 25(28), 3840–3856 (2013).
[Crossref] [PubMed]

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

2012 (4)

Y. Chen and H. Ming, “Review of surface plasmon resonance and localized surface plasmon resonance sensor,” Photonic Sens. 2(1), 37–49 (2012).
[Crossref]

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

K. Chen, R. Adato, and H. Altug, “Dual-Band Perfect Absorber for Multispectral Plasmon-Enhanced Infrared Spectroscopy,” ACS Nano 6(9), 7998–8006 (2012).
[Crossref] [PubMed]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

2011 (3)

J. Zhao, B. Frank, S. Burger, and H. Giessen, “Large-area high-quality plasmonic oligomers fabricated by angle-controlled colloidal nanolithography,” ACS Nano 5(11), 9009–9016 (2011).
[Crossref] [PubMed]

V. Liberman, R. Adato, A. Mertiri, A. A. Yanik, K. Chen, T. H. Jeys, S. Erramilli, and H. Altug, “Angle-and polarization-dependent collective excitation of plasmonic nanoarrays for surface enhanced infrared spectroscopy,” Opt. Express 19(12), 11202–11212 (2011).
[Crossref] [PubMed]

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

2010 (4)

T. G. Mackay, “Negatively refracting chiral metamaterials: a review,” J. Photonics Energy 1, 018003 (2010).
[Crossref]

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater. 9(3), 205–213 (2010).
[Crossref] [PubMed]

2009 (1)

K. Bergmann, S. V. Danylyuk, and L. Juschkin, “Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm,” J. Appl. Phys. 106(7), 073309 (2009).
[Crossref]

2008 (1)

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

2007 (3)

B. Meliorisz, “Simulation of mask proximity printing,” J. Micro/Nanolith, MEMS MOEMS. 6(2), 023006 (2007).
[Crossref]

K. A. Willets and R. P. Van Duyne, “Localized Surface Plasmon Resonance Spectroscopy and Sensing,” Annu. Rev. Phys. Chem. 58(1), 267–297 (2007).
[Crossref] [PubMed]

T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann, “Dr. Litho - a development and research lithography simulator,” Proc. SPIE 6520, 65203F (2007).
[Crossref]

2000 (1)

1987 (1)

J. Melngailis, “Focused Ion-Beam Technology and Applications,” J. Vac. Sci. Technol. B 5(2), 469–495 (1987).
[Crossref]

Adato, R.

K. Chen, R. Adato, and H. Altug, “Dual-Band Perfect Absorber for Multispectral Plasmon-Enhanced Infrared Spectroscopy,” ACS Nano 6(9), 7998–8006 (2012).
[Crossref] [PubMed]

V. Liberman, R. Adato, A. Mertiri, A. A. Yanik, K. Chen, T. H. Jeys, S. Erramilli, and H. Altug, “Angle-and polarization-dependent collective excitation of plasmonic nanoarrays for surface enhanced infrared spectroscopy,” Opt. Express 19(12), 11202–11212 (2011).
[Crossref] [PubMed]

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

Aksu, S.

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

Altug, H.

K. Chen, R. Adato, and H. Altug, “Dual-Band Perfect Absorber for Multispectral Plasmon-Enhanced Infrared Spectroscopy,” ACS Nano 6(9), 7998–8006 (2012).
[Crossref] [PubMed]

V. Liberman, R. Adato, A. Mertiri, A. A. Yanik, K. Chen, T. H. Jeys, S. Erramilli, and H. Altug, “Angle-and polarization-dependent collective excitation of plasmonic nanoarrays for surface enhanced infrared spectroscopy,” Opt. Express 19(12), 11202–11212 (2011).
[Crossref] [PubMed]

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

Ardelean, G.

T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann, “Dr. Litho - a development and research lithography simulator,” Proc. SPIE 6520, 65203F (2007).
[Crossref]

Artar, A.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

Atwater, H. A.

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater. 9(3), 205–213 (2010).
[Crossref] [PubMed]

Ayala-Orozco, C.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Bagheri, S.

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

S. Bagheri, H. Giessen, and F. Neubrech, “Large-Area Antenna-Assisted SEIRA Substrates by Laser Interference Lithography,” Adv. Opt. Mater. 2(11), 1050–1056 (2014).
[Crossref]

Baillargeat, D.

S. Zeng, D. Baillargeat, H.-P. Ho, and K.-T. Yong, “Nanomaterials enhanced surface plasmon resonance for biological and chemical sensing applications,” Chem. Soc. Rev. 43(10), 3426–3452 (2014).
[Crossref] [PubMed]

Bergmann, K.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

K. Bergmann, S. V. Danylyuk, and L. Juschkin, “Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm,” J. Appl. Phys. 106(7), 073309 (2009).
[Crossref]

K. Bergmann, O. Rosier, W. Neff, and R. Lebert, “Pinch-Plasma Radiation Source for Extreme-Ultraviolet Lithography with a Kilohertz Repetition Frequency,” Appl. Opt. 39(22), 3833–3837 (2000).
[Crossref] [PubMed]

Bishnoi, S.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Bochterle, J.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Braun, P. V.

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

Brose, S.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Burger, S.

J. Zhao, B. Frank, S. Burger, and H. Giessen, “Large-area high-quality plasmonic oligomers fabricated by angle-controlled colloidal nanolithography,” ACS Nano 5(11), 9009–9016 (2011).
[Crossref] [PubMed]

Cataldo, S.

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

Cetin, A. E.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

Chang, Y.-C.

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

Charron, H.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Chen, K.

Chen, Y.

Y. Chen and H. Ming, “Review of surface plasmon resonance and localized surface plasmon resonance sensor,” Photonic Sens. 2(1), 37–49 (2012).
[Crossref]

Chigrin, D. N.

Chung, H.-C.

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

Connor, J. H.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

D’Andrea, C.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Danylyuk, S.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Danylyuk, S. V.

K. Bergmann, S. V. Danylyuk, and L. Juschkin, “Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm,” J. Appl. Phys. 106(7), 073309 (2009).
[Crossref]

Di Fabrizio, E.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Dittberner, C.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Enders, D.

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

Erdmann, A.

T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann, “Dr. Litho - a development and research lithography simulator,” Proc. SPIE 6520, 65203F (2007).
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Fang, Z.

Z. Fang and X. Zhu, “Plasmonics in Nanostructures,” Adv. Mater. 25(28), 3840–3856 (2013).
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Fazio, B.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Frank, B.

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

J. Zhao, B. Frank, S. Burger, and H. Giessen, “Large-area high-quality plasmonic oligomers fabricated by angle-controlled colloidal nanolithography,” ACS Nano 5(11), 9009–9016 (2011).
[Crossref] [PubMed]

Fühner, T.

T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann, “Dr. Litho - a development and research lithography simulator,” Proc. SPIE 6520, 65203F (2007).
[Crossref]

Giessen, H.

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

S. Bagheri, H. Giessen, and F. Neubrech, “Large-Area Antenna-Assisted SEIRA Substrates by Laser Interference Lithography,” Adv. Opt. Mater. 2(11), 1050–1056 (2014).
[Crossref]

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

J. Zhao, B. Frank, S. Burger, and H. Giessen, “Large-area high-quality plasmonic oligomers fabricated by angle-controlled colloidal nanolithography,” ACS Nano 5(11), 9009–9016 (2011).
[Crossref] [PubMed]

Gissibl, T.

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

Grady, N. K.

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

Grützmacher, D.

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Gucciardi, P. G.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Guo, T.-F.

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

Halas, N.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Halas, N. J.

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

Hartung, A.

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

Ho, H.-P.

S. Zeng, D. Baillargeat, H.-P. Ho, and K.-T. Yong, “Nanomaterials enhanced surface plasmon resonance for biological and chemical sensing applications,” Chem. Soc. Rev. 43(10), 3426–3452 (2014).
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Hoffmann, J. M.

J. M. Hoffmann, H. Janssen, D. N. Chigrin, and T. Taubner, “Enhanced infrared spectroscopy using small-gap antennas prepared with two-step evaporation nanosphere lithography,” Opt. Express 22(12), 14425–14432 (2014).
[Crossref] [PubMed]

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

Huang, M.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
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Huck, C.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Janssen, H.

Jeys, T. H.

Joshi, A.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Juschkin, L.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

K. Bergmann, S. V. Danylyuk, and L. Juschkin, “Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm,” J. Appl. Phys. 106(7), 073309 (2009).
[Crossref]

Khanikaev, A.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

Kim, H.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

Kundu, J.

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

Lal, S.

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

Lamy de La Chapelle, M.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Lassiter, J. B.

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

Law, S.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

Lebert, R.

Levin, C. S.

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

Li, Z.

Z. Li, M. Mutlu, and E. Ozbay, “Chiral metamaterials: from optical activity and negative refractive index to asymmetric transmission,” J. Opt. 15(2), 023001 (2013).
[Crossref]

Liberman, V.

Loosen, P.

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Lu, S.-C.

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
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Mackay, T. G.

T. G. Mackay, “Negatively refracting chiral metamaterials: a review,” J. Photonics Energy 1, 018003 (2010).
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Maragò, O. M.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Maß, T. W. W.

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
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B. Meliorisz, “Simulation of mask proximity printing,” J. Micro/Nanolith, MEMS MOEMS. 6(2), 023006 (2007).
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Melngailis, J.

J. Melngailis, “Focused Ion-Beam Technology and Applications,” J. Vac. Sci. Technol. B 5(2), 469–495 (1987).
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Mertiri, A.

Messina, E.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Ming, H.

Y. Chen and H. Ming, “Review of surface plasmon resonance and localized surface plasmon resonance sensor,” Photonic Sens. 2(1), 37–49 (2012).
[Crossref]

Mitchell, T.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Moers, J.

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Mousavi, S. H.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

Mutlu, M.

Z. Li, M. Mutlu, and E. Ozbay, “Chiral metamaterials: from optical activity and negative refractive index to asymmetric transmission,” J. Opt. 15(2), 023001 (2013).
[Crossref]

Nagao, T.

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

Nanda, S.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Neff, W.

Neubrech, F.

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

S. Bagheri, H. Giessen, and F. Neubrech, “Large-Area Antenna-Assisted SEIRA Substrates by Laser Interference Lithography,” Adv. Opt. Mater. 2(11), 1050–1056 (2014).
[Crossref]

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

Ozbay, E.

Z. Li, M. Mutlu, and E. Ozbay, “Chiral metamaterials: from optical activity and negative refractive index to asymmetric transmission,” J. Opt. 15(2), 023001 (2013).
[Crossref]

Panaitov, G.

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Podolskiy, V.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
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Polman, A.

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater. 9(3), 205–213 (2010).
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Pucci, A.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

Richter, J.

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

Rosier, O.

Schiff, R.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
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S. Schlücker, “Surface-Enhanced Raman Spectroscopy: Concepts and Chemical Applications,” Angew. Chem. Int. Ed. Engl. 53(19), 4756–4795 (2014).
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Schnattinger, T.

T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann, “Dr. Litho - a development and research lithography simulator,” Proc. SPIE 6520, 65203F (2007).
[Crossref]

Shea, M.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Shvets, G.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

Taubner, T.

J. M. Hoffmann, H. Janssen, D. N. Chigrin, and T. Taubner, “Enhanced infrared spectroscopy using small-gap antennas prepared with two-step evaporation nanosphere lithography,” Opt. Express 22(12), 14425–14432 (2014).
[Crossref] [PubMed]

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
[Crossref]

Toma, A.

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

Trellenkamp, S.

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

Tsai, T.-D.

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

Urban, A.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Urban, C.

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

Van Duyne, R. P.

K. A. Willets and R. P. Van Duyne, “Localized Surface Plasmon Resonance Spectroscopy and Sensing,” Annu. Rev. Phys. Chem. 58(1), 267–297 (2007).
[Crossref] [PubMed]

Wang, S.-M.

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

Wasserman, D.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

Weber, D.

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

Weber, K.

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

Weiss, T.

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

Willets, K. A.

K. A. Willets and R. P. Van Duyne, “Localized Surface Plasmon Resonance Spectroscopy and Sensing,” Annu. Rev. Phys. Chem. 58(1), 267–297 (2007).
[Crossref] [PubMed]

Yanik, A. A.

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
[Crossref] [PubMed]

V. Liberman, R. Adato, A. Mertiri, A. A. Yanik, K. Chen, T. H. Jeys, S. Erramilli, and H. Altug, “Angle-and polarization-dependent collective excitation of plasmonic nanoarrays for surface enhanced infrared spectroscopy,” Opt. Express 19(12), 11202–11212 (2011).
[Crossref] [PubMed]

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

Yin, X.

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

Yong, K.-T.

S. Zeng, D. Baillargeat, H.-P. Ho, and K.-T. Yong, “Nanomaterials enhanced surface plasmon resonance for biological and chemical sensing applications,” Chem. Soc. Rev. 43(10), 3426–3452 (2014).
[Crossref] [PubMed]

Zeng, S.

S. Zeng, D. Baillargeat, H.-P. Ho, and K.-T. Yong, “Nanomaterials enhanced surface plasmon resonance for biological and chemical sensing applications,” Chem. Soc. Rev. 43(10), 3426–3452 (2014).
[Crossref] [PubMed]

Zhang, C.

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

Zhao, J.

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

J. Zhao, B. Frank, S. Burger, and H. Giessen, “Large-area high-quality plasmonic oligomers fabricated by angle-controlled colloidal nanolithography,” ACS Nano 5(11), 9009–9016 (2011).
[Crossref] [PubMed]

Zhu, X.

Z. Fang and X. Zhu, “Plasmonics in Nanostructures,” Adv. Mater. 25(28), 3840–3856 (2013).
[Crossref] [PubMed]

ACS Nano (4)

J. Zhao, B. Frank, S. Burger, and H. Giessen, “Large-area high-quality plasmonic oligomers fabricated by angle-controlled colloidal nanolithography,” ACS Nano 5(11), 9009–9016 (2011).
[Crossref] [PubMed]

K. Chen, R. Adato, and H. Altug, “Dual-Band Perfect Absorber for Multispectral Plasmon-Enhanced Infrared Spectroscopy,” ACS Nano 6(9), 7998–8006 (2012).
[Crossref] [PubMed]

S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, and H. Giessen, “Hole-Mask Colloidal Nanolithography for Large-Area Low-Cost Metamaterials and Antenna-Assisted Surface-Enhanced Infrared Absorption Substrates,” ACS Nano 6(1), 979–985 (2012).
[Crossref] [PubMed]

C. D’Andrea, J. Bochterle, A. Toma, C. Huck, F. Neubrech, E. Messina, B. Fazio, O. M. Maragò, E. Di Fabrizio, M. Lamy de La Chapelle, P. G. Gucciardi, and A. Pucci, “Optical nanoantennas for multiband surface-enhanced infrared and raman spectroscopy,” ACS Nano 7(4), 3522–3531 (2013).
[Crossref] [PubMed]

ACS Photonics (1)

S. Bagheri, K. Weber, T. Gissibl, T. Weiss, F. Neubrech, and H. Giessen, “Fabrication of Square-Centimeter Plasmonic Nanoantenna Arrays by Femtosecond Direct Laser Writing Lithography: Effects of Collective Excitations on SEIRA Enhancement,” ACS Photonics 2(6), 779–786 (2015).
[Crossref]

Adv. Mater. (1)

Z. Fang and X. Zhu, “Plasmonics in Nanostructures,” Adv. Mater. 25(28), 3840–3856 (2013).
[Crossref] [PubMed]

Adv. Opt. Mater. (1)

S. Bagheri, H. Giessen, and F. Neubrech, “Large-Area Antenna-Assisted SEIRA Substrates by Laser Interference Lithography,” Adv. Opt. Mater. 2(11), 1050–1056 (2014).
[Crossref]

Angew. Chem. Int. Ed. Engl. (1)

S. Schlücker, “Surface-Enhanced Raman Spectroscopy: Concepts and Chemical Applications,” Angew. Chem. Int. Ed. Engl. 53(19), 4756–4795 (2014).
[Crossref] [PubMed]

Annu. Rev. Phys. Chem. (1)

K. A. Willets and R. P. Van Duyne, “Localized Surface Plasmon Resonance Spectroscopy and Sensing,” Annu. Rev. Phys. Chem. 58(1), 267–297 (2007).
[Crossref] [PubMed]

Appl. Opt. (1)

Chem. Soc. Rev. (2)

S. Zeng, D. Baillargeat, H.-P. Ho, and K.-T. Yong, “Nanomaterials enhanced surface plasmon resonance for biological and chemical sensing applications,” Chem. Soc. Rev. 43(10), 3426–3452 (2014).
[Crossref] [PubMed]

S. Lal, N. K. Grady, J. Kundu, C. S. Levin, J. B. Lassiter, and N. J. Halas, “Tailoring plasmonic substrates for surface enhanced spectroscopies,” Chem. Soc. Rev. 37(5), 898–911 (2008).
[Crossref] [PubMed]

J. Appl. Phys. (1)

K. Bergmann, S. V. Danylyuk, and L. Juschkin, “Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm,” J. Appl. Phys. 106(7), 073309 (2009).
[Crossref]

J. Control. Release (1)

C. Ayala-Orozco, C. Urban, S. Bishnoi, A. Urban, H. Charron, T. Mitchell, M. Shea, S. Nanda, R. Schiff, N. Halas, and A. Joshi, “Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors,” J. Control. Release 191, 90–97 (2014).
[Crossref] [PubMed]

J. Micro/Nanolith, MEMS MOEMS. (1)

B. Meliorisz, “Simulation of mask proximity printing,” J. Micro/Nanolith, MEMS MOEMS. 6(2), 023006 (2007).
[Crossref]

J. Opt. (1)

Z. Li, M. Mutlu, and E. Ozbay, “Chiral metamaterials: from optical activity and negative refractive index to asymmetric transmission,” J. Opt. 15(2), 023001 (2013).
[Crossref]

J. Photonics Energy (1)

T. G. Mackay, “Negatively refracting chiral metamaterials: a review,” J. Photonics Energy 1, 018003 (2010).
[Crossref]

J. Phys. Chem. C (2)

J. M. Hoffmann, X. Yin, J. Richter, A. Hartung, T. W. W. Maß, and T. Taubner, “Low-Cost Infrared Resonant Structures for Surface-Enhanced Infrared Absorption Spectroscopy in the Fingerprint Region from 3 to 13 μm,” J. Phys. Chem. C 117(21), 11311–11316 (2013).
[Crossref]

F. Neubrech, D. Weber, D. Enders, T. Nagao, and A. Pucci, “Antenna Sensing of Surface Phonon Polaritons,” J. Phys. Chem. C 114(16), 7299–7301 (2010).
[Crossref]

J. Vac. Sci. Technol. B (2)

S. Danylyuk, H. Kim, S. Brose, C. Dittberner, P. Loosen, T. Taubner, K. Bergmann, and L. Juschkin, “Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays,” J. Vac. Sci. Technol. B 31(2), 021602 (2013).
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J. Melngailis, “Focused Ion-Beam Technology and Applications,” J. Vac. Sci. Technol. B 5(2), 469–495 (1987).
[Crossref]

Nano Lett. (1)

S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy,” Nano Lett. 10(7), 2511–2518 (2010).
[Crossref] [PubMed]

Nanophotonics (1)

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

Nat. Mater. (1)

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater. 9(3), 205–213 (2010).
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Opt. Express (2)

Photonic Sens. (1)

Y. Chen and H. Ming, “Review of surface plasmon resonance and localized surface plasmon resonance sensor,” Photonic Sens. 2(1), 37–49 (2012).
[Crossref]

Proc. Natl. Acad. Sci. U.S.A. (1)

A. A. Yanik, A. E. Cetin, M. Huang, A. Artar, S. H. Mousavi, A. Khanikaev, J. H. Connor, G. Shvets, and H. Altug, “Seeing protein monolayers with naked eye through plasmonic Fano resonances,” Proc. Natl. Acad. Sci. U.S.A. 108(29), 11784–11789 (2011).
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Proc. SPIE (1)

T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann, “Dr. Litho - a development and research lithography simulator,” Proc. SPIE 6520, 65203F (2007).
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Sci. Rep. (1)

Y.-C. Chang, S.-C. Lu, H.-C. Chung, S.-M. Wang, T.-D. Tsai, and T.-F. Guo, “High-Throughput Nanofabrication of Infrared and Chiral Metamaterials using Nanospherical-Lens Lithography,” Sci. Rep. 3, 3339 (2013).
[Crossref] [PubMed]

Thin Solid Films (1)

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, S. Trellenkamp, P. Loosen, and D. Grützmacher, “Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography,” Thin Solid Films 520(15), 5080–5085 (2012).
[Crossref]

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Allresist GmbH, Product Datasheets, http://www.allresist.de/produkte/ .

J. Pankert, K. Bergmann, R. Wester, J. Klein, W. Neff, O. Rosier, S. Seiwert, S. Smith, S. Probst, D. Vaudrevange, G. Siemons, J. Apetz, J. Jonkers, M. Loeken, T. Krücken, and P. Zink, “Hollow-Cathode-Triggered Plasma Pinch Discharge,” in EUV Sources for Lithography, V. Bakshi, ed. (SPIE press, 2005).

G. R. Brewer, “Electron-beam technology in microelectronic fabrication,” Academic Press: New York, (1980)

R. F. Aroca, “Surface-Enhanced Vibrational Spectroscopy,” Wiley (2006).

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Figures (4)

Fig. 1
Fig. 1 Schematics and photograph of the lithography tool used for illumination. The EUV source operates at a wavelength of 10.88 nm, illuminating the photoresist through a mask containing the antenna design. The proximity gap can be tuned in the range of few micrometers to several tens of micrometers.

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Fig. 2
Fig. 2 Structure formation using circular and equilateral triangular apertures: In (a) and (d), schematics of the mask with diameter or length and period of the apertures is shown. In (b) and (c), SEM images of the wafer structures emerging from circular apertures with 16 min and 22 min exposure time, respectively. In (e) and (f), SEM images of the structures emerging from equilateral triangular apertures with 16 min and 20 min exposure time, respectively. All scale bars correspond to a length of 5 µm.

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Fig. 3
Fig. 3 Structure formation using rod-shaped apertures: In (a), a schematic of the mask with length, width and period of the rectangular apertures is shown. The width of the apertures is 0.23 µm and the length, period and illumination time varies as indicated. Simulated intensity distributions are shown in (b) with 10 µm and in (c) with 6 µm distance to the aperture plane, respectively. In (d) - (f), SEM images of the metallic structures are presented. The insets show the results of the thresholded simulations. (b) corresponds to (d) and (e) with different thresholds and (c) corresponds to (f). All scale bars correspond to a length of 500 nm.

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Fig. 4
Fig. 4 Measured (a)-(c) and calculated (d)-(f) reflection spectra of the structures shown in Fig. 3 (d)-(f).The structure outlines are indicated above and the coloured arrows relate the spectra to the used polarisation directions. Red spectra correspond to a polarisation along the long axis and black dashed spectra to a polarisation along the short axis of the antennas, respectively.

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