Abstract

Lithium niobate (LN) microdisk resonators on a LN-silica-LN chip were fabricated using only conventional semiconductor fabrication processes. The quality factor of the LN resonator with a 39.6-μm radius and a 0.5-μm thickness is up to 1.19 × 106, which doubles the record of the quality factor 4.84 × 105 of LN resonators produced by microfabrication methods allowing batch production. Electro-optic modulation with an effective resonance-frequency tuning rate of 3.0 GHz/V was demonstrated in the fabricated LN microdisk resonator.

© 2015 Optical Society of America

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References

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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]

2015 (1)

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

2014 (6)

F. Bo, S. H. Huang, S. K. Ozdemir, G. Zhang, J. Xu, and L. Yang, “Inverted-wedge silica resonators for controlled and stable coupling,” Opt. Lett. 39, 1841–1844 (2014).
[Crossref] [PubMed]

C. Wang, M. J. Burek, Z. Lin, H. A. Atikian, V. Venkataraman, I. C. Huang, P. Stark, and M. Loncar, “Integrated high quality factor lithium niobate microdisk resonators,” Opt. Express 22, 30924–30933 (2014).
[Crossref]

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

2013 (2)

L. He, S. K. Ozdemir, and L. Yang, “Whispering gallery microcavity lasers,” Laser Photonics Rev. 7, 60–82 (2013).
[Crossref]

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

2012 (1)

2011 (2)

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

2010 (5)

P. Dong, S. Liao, H. Liang, W. Qian, X. Wang, R. Shafiiha, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, ”High-speed and “silicon modulator based on a racetrack resonator with a 1 V drive voltage,” Opt. Lett. 35, 3246–3248 (2010).
[Crossref] [PubMed]

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

C. Y. J. Ying, C. L. Sones, A. C. Peacock, F. Johann, E. Soergel, R. W. Eason, M. N. Zervas, and S. Mailis, “Ultra-smooth lithium niobate photonic micro-structures by surface tension reshaping,” Opt. Express 18, 11508–11513 (2010).
[Crossref] [PubMed]

2009 (1)

K. Sasagawa and M. Tsuchiya, “Highly efficient third harmonic generation in a periodically poled MgO:LiNbO3 disk resonator,” Appl. Phys. Express 2, 122401 (2009).
[Crossref]

2007 (3)

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech. 55, 1209–1218 (2007).
[Crossref]

T.-J. Wang, C.-H. Chu, and C.-Y. Lin, “Electro-optically tunable microring resonators on lithium niobate,” Opt. Lett. 32, 2777–2779 (2007).
[Crossref] [PubMed]

2006 (1)

2005 (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

2004 (2)

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, “Nonlinear optics and crystalline whispering gallery mode cavities,” Phys. Rev. Lett. 92, 043903 (2004).
[Crossref] [PubMed]

L. Arizmendi, “Photonic applications of lithium niobate crystals,” Phys. Status Solidi A 201, 253–283 (2004).
[Crossref]

2003 (1)

1998 (1)

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Aiello, A.

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

Andersen, U. L.

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

Arizmendi, L.

L. Arizmendi, “Photonic applications of lithium niobate crystals,” Phys. Status Solidi A 201, 253–283 (2004).
[Crossref]

Asghari, M.

Atikian, H. A.

Bakhru, H.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Beckmann, T.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

Bender, C. M.

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

Bhave, S. A.

R. Wang and S. A. Bhave, “Free-standing high quality factor thin-film lithium niobate micro-photonic disk resonators,” arXiv:1409.6351 (2014).

Bo, F.

Breunig, I.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

Burek, M. J.

Buse, K.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

Cargill, G. S.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Chen, D.-R.

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Chen, W.

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

Cheng, Y.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Chu, C.-H.

Clements, W. R.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Cross, L. E.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Degl’Innocenti, R.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Dong, P.

Eason, R. W.

Elser, D.

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

Fan, S.

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Fang, W.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Fang, Z.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Feng, D.

Furst, J. U.

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

Gianfreda, M.

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Gong, Q.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Guarino, A.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Guenter, P.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Haertle, D.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

He, J.-Y.

He, L.

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

L. He, S. K. Ozdemir, and L. Yang, “Whispering gallery microcavity lasers,” Laser Photonics Rev. 7, 60–82 (2013).
[Crossref]

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Huang, I. C.

Huang, S. H.

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

F. Bo, S. H. Huang, S. K. Ozdemir, G. Zhang, J. Xu, and L. Yang, “Inverted-wedge silica resonators for controlled and stable coupling,” Opt. Lett. 39, 1841–1844 (2014).
[Crossref] [PubMed]

Ilchenko, V. S.

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, “Nonlinear optics and crystalline whispering gallery mode cavities,” Phys. Rev. Lett. 92, 043903 (2004).
[Crossref] [PubMed]

V. S. Ilchenko, A. B. Matsko, A. A. Savchenkov, and L. Maleki, “Low-threshold parametric nonlinear optics with quasi-phase-matched whispering-gallery modes,” J. Opt. Soc. Am. B 20, 1304–1308 (2003).
[Crossref]

Jiang, X. F.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Johann, F.

Kim, W.

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

Krishnamoorthy, A. V.

Kumar, A.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Lassen, M.

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

Lee, C.-A.

Lei, F.

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Leuchs, G.

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

Levy, M.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Li, B. B.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Li, G.

Li, L.

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Liang, H.

Liao, S.

Liertzer, M.

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

Lin, C.-Y.

Lin, J.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Lin, Z.

Linnenbank, H.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

Lipson, M.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Liu, R.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Loncar, M.

Long, G. L.

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Mailis, S.

Maleki, L.

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, “Nonlinear optics and crystalline whispering gallery mode cavities,” Phys. Rev. Lett. 92, 043903 (2004).
[Crossref] [PubMed]

V. S. Ilchenko, A. B. Matsko, A. A. Savchenkov, and L. Maleki, “Low-threshold parametric nonlinear optics with quasi-phase-matched whispering-gallery modes,” J. Opt. Soc. Am. B 20, 1304–1308 (2003).
[Crossref]

Marquardt, C.

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

Matsko, A. B.

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, “Nonlinear optics and crystalline whispering gallery mode cavities,” Phys. Rev. Lett. 92, 043903 (2004).
[Crossref] [PubMed]

V. S. Ilchenko, A. B. Matsko, A. A. Savchenkov, and L. Maleki, “Low-threshold parametric nonlinear optics with quasi-phase-matched whispering-gallery modes,” J. Opt. Soc. Am. B 20, 1304–1308 (2003).
[Crossref]

Monifi, F.

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

Niu, H.

Nori, F.

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Osgood, R. M.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

Oxborrow, M.

M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech. 55, 1209–1218 (2007).
[Crossref]

Ozdemir, S. K.

F. Bo, S. H. Huang, S. K. Ozdemir, G. Zhang, J. Xu, and L. Yang, “Inverted-wedge silica resonators for controlled and stable coupling,” Opt. Lett. 39, 1841–1844 (2014).
[Crossref] [PubMed]

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

L. He, S. K. Ozdemir, and L. Yang, “Whispering gallery microcavity lasers,” Laser Photonics Rev. 7, 60–82 (2013).
[Crossref]

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Peacock, A. C.

Peng, B.

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

Poberaj, G.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Poon, A. W.

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Qian, W.

Qiao, L.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Rezzonico, D.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Rotter, S.

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

Sasagawa, K.

K. Sasagawa and M. Tsuchiya, “Highly efficient third harmonic generation in a periodically poled MgO:LiNbO3 disk resonator,” Appl. Phys. Express 2, 122401 (2009).
[Crossref]

Savchenkov, A. A.

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, “Nonlinear optics and crystalline whispering gallery mode cavities,” Phys. Rev. Lett. 92, 043903 (2004).
[Crossref] [PubMed]

V. S. Ilchenko, A. B. Matsko, A. A. Savchenkov, and L. Maleki, “Low-threshold parametric nonlinear optics with quasi-phase-matched whispering-gallery modes,” J. Opt. Soc. Am. B 20, 1304–1308 (2003).
[Crossref]

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Shafiiha, R.

Shao, L.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Soergel, E.

Sones, C. L.

Song, J.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Stark, P.

Steigerwald, H.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

Strekalov, D. V.

J. U. Furst, D. V. Strekalov, D. Elser, M. Lassen, U. L. Andersen, C. Marquardt, and G. Leuchs, “Naturally phase-matched second-harmonic generation in a whispering-gallery-mode resonator,” Phys. Rev. Lett. 104, 153901 (2010).
[Crossref] [PubMed]

J. U. Furst, D. V. Strekalov, D. Elser, A. Aiello, U. L. Andersen, C. Marquardt, and G. Leuchs, “Low-threshold optical parametric oscillations in a whispering gallery mode resonator,” Phys. Rev. Lett. 105, 263904 (2010).
[Crossref]

Sturman, B.

T. Beckmann, H. Linnenbank, H. Steigerwald, B. Sturman, D. Haertle, K. Buse, and I. Breunig, “Highly tunable low-threshold optical parametric oscillation in radially poled whispering gallery resonators,” Phys. Rev. Lett. 106, 143903 (2011).
[Crossref] [PubMed]

Tsuchiya, M.

K. Sasagawa and M. Tsuchiya, “Highly efficient third harmonic generation in a periodically poled MgO:LiNbO3 disk resonator,” Appl. Phys. Express 2, 122401 (2009).
[Crossref]

Venkataraman, V.

Vollmer, F.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Wang, C.

Wang, M.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Wang, N.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Wang, R.

R. Wang and S. A. Bhave, “Free-standing high quality factor thin-film lithium niobate micro-photonic disk resonators,” arXiv:1409.6351 (2014).

Wang, T.-J.

Wang, W.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Wang, X.

Xiao, Y. F.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Xiao, Y.-F.

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Xu, J.

Xu, Q.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Xu, Y.

J. Lin, Y. Xu, Z. Fang, M. Wang, J. Song, N. Wang, L. Qiao, W. Fang, and Y. Cheng, “Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining,” Sci. Rep. 5, 8072 (2015).
[Crossref] [PubMed]

Yang, L.

F. Bo, S. H. Huang, S. K. Ozdemir, G. Zhang, J. Xu, and L. Yang, “Inverted-wedge silica resonators for controlled and stable coupling,” Opt. Lett. 39, 1841–1844 (2014).
[Crossref] [PubMed]

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

L. He, S. K. Ozdemir, and L. Yang, “Whispering gallery microcavity lasers,” Laser Photonics Rev. 7, 60–82 (2013).
[Crossref]

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Yang, X.

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

Yilmaz, H.

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

B. Peng, S. K. Ozdemir, S. Rotter, H. Yilmaz, M. Liertzer, F. Monifi, C. M. Bender, F. Nori, and L. Yang, “Loss-induced suppression and revival of lasing,” Science 346, 328–332 (2014).
[Crossref] [PubMed]

Ying, C. Y. J.

Yu, X. C.

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Zervas, M. N.

Zhang, G.

Zheng, X.

Zhou, L.

Zhu, J.

S. K. Ozdemir, J. Zhu, X. Yang, B. Peng, H. Yilmaz, L. He, F. Monifi, S. H. Huang, G. L. Long, and L. Yang, “Highly sensitive detection of nanoparticles with a self-referenced and self-heterodyned whispering-gallery Raman microlaser,” P. Natl. Acad. Sci. USA. 111, E3836–E3844 (2014).
[Crossref]

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

Adv. Mater. (1)

L. Shao, X. F. Jiang, X. C. Yu, B. B. Li, W. R. Clements, F. Vollmer, W. Wang, Y. F. Xiao, and Q. Gong, “Detection of single nanoparticles and lentiviruses using microcavity resonance broadening,” Adv. Mater. 25, 5616–5620 (2013).
[Crossref] [PubMed]

Appl. Phys. Express (1)

K. Sasagawa and M. Tsuchiya, “Highly efficient third harmonic generation in a periodically poled MgO:LiNbO3 disk resonator,” Appl. Phys. Express 2, 122401 (2009).
[Crossref]

Appl. Phys. Lett. (1)

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett. 73, 2293–2295 (1998).
[Crossref]

IEEE Trans. Microwave Theory Tech. (1)

M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech. 55, 1209–1218 (2007).
[Crossref]

J. Opt. Soc. Am. B (1)

Laser Photonics Rev. (1)

L. He, S. K. Ozdemir, and L. Yang, “Whispering gallery microcavity lasers,” Laser Photonics Rev. 7, 60–82 (2013).
[Crossref]

Nat. Commun. (1)

B. Peng, S. K. Ozdemir, W. Chen, F. Nori, and L. Yang, “What is and what is not electromagnetically induced transparency in whispering-gallery microcavities,” Nat. Commun. 5, 5082 (2014).
[Crossref] [PubMed]

Nat. Nanotechnol. (1)

L. He, S. K. Ozdemir, J. Zhu, W. Kim, and L. Yang, “Detecting single viruses and nanoparticles using whispering gallery microlasers,” Nat. Nanotechnol. 6, 428–432 (2011).
[Crossref] [PubMed]

Nat. Photonics (2)

J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics 4, 46–49 (2010).
[Crossref]

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Guenter, “Electro-optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
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Nat. Phys. (1)

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Figures (4)

Fig. 1
Fig. 1 Structure of LNOI wafer and the schematic diagram of the process to fabricate LN microdisk resonators. PR: photoresist; HF: hydrofluoric acid.
Fig. 2
Fig. 2 Microscope images of a LN microdisk resonator with an external radius of 39.6 μm. (a) Optical microscope image showing the top view of the LN microdisk. (b) and (c): Scanning electron microscope images showing the oblique views of the whole and the edge (labeled by the red square) of the LN microdisk, respectively.
Fig. 3
Fig. 3 Transmission spectra and the measured Q factors. (a) and (b): Normalized transmission spectra with one and two dips showing Q factors of 7.78 × 105 and 1.19 × 106, respectively. (c) Histogram showing the statistic result of 16 LN resonators from two samples fabricated in a batch. Mean () and standard deviation (σ) of Q factors are 7.82 × 105 and 2.63 × 105, respectively. (d) Broad band transmission spectrum showing free spectrum ranges and the assigned modes. All the efficiently coupled modes are TEm,n modes, where m and n indicate the radial and azimuthal mode numbers.
Fig. 4
Fig. 4 Electro-optic modulation in LN resonators. (a) Normalized transmission measured when −4kV (black curve) and +4kV (red curve) voltage were applied across the parallel-plate capacitor, in which the LN chip was adhered on top of the bottom ITO glass of the capacitor. (b) The shift of resonance wavelength of the LN resonator with a radius 39.6 μm with respect to the effective voltage applied across the LN microdisk resonator. The tuning rate of resonance frequency is 3.0 GHz/V.

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