Abstract

In order to be reflected or diffracted off a surface structure soft X-rays and hard X-rays need to impinge at grazing angles of incidence onto the surface. In case of a reflection grating of highly symmetric structure with rectangular groove profile these grooves can be oriented parallel to the beam trajectory. In such a symmetric situation the distribution of the diffracted intensity with respect to the plane of incidence is then expected to be symmetric. This is indeed observed with symmetrically oriented diffraction peaks. It can be predicted that for appropriate structure parameters the intensity can be contained mostly in two symmetrically oriented diffraction peaks. This will also be the case for hard X-rays. The diffraction efficiency will be particularly high, when the angle of grazing incidence is chosen in the total reflection regime below the critical angle of the grating coating. These predictions were experimentally verified in this work for hard X-rays with photon energies between 4 keV and 12.4 keV. In the experiment of the order of 30% of the incident intensity was diffracted into the two first orders. This is to be compared to reflectivities of the order of 50% measured at the same coating in an unruled area of the substrate. Consequently the relative structural diffraction efficiency for each first order was about 30%, while ideally it could have been 40%. The presented grating structure will thus be a rather efficient amplitude beam splitter for hard X-rays, e.g. in the coherent beam from a free electron laser. In addition such object could then be used as the first component in Michelson interferometers for the beam characterisation or for introducing a time delay between two coherent beams.

© 2015 Optical Society of America

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References

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2014 (1)

W. Jark, D. Eichert, L. Luehl, and A. Gambitta, “Optimisation of a compact optical system for the beamtransport at the x-ray Fluorescence beamline at Elettra for experiments with small spots,” Proc. SPIE 9207, 92070G (2014).
[Crossref]

2013 (2)

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

2012 (1)

2010 (1)

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

2008 (1)

L. I. Goray, “Grazing incidence off-plane lamellar grating as a beam splitter for a 1-Å free electron laser,” J. Surf. Invest. 2(5), 796–800 (2008).
[Crossref]

2005 (1)

R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
[Crossref]

2004 (1)

L. Poletto, “Time-compensated grazing-incidence monochromator for extreme-ultraviolet and soft X-ray high-order harmonics,” Appl. Phys. B 78(7-8), 1013–1016 (2004).
[Crossref]

1998 (1)

1995 (1)

1993 (1)

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[Crossref]

1992 (1)

W. Jark, “Soft x‐ray monochromator configurations for the ELETTRA undulators: A stigmatic SX700,” Rev. Sci. Instrum. 63(1), 1241–1246 (1992).
[Crossref]

1981 (1)

1978 (1)

1977 (2)

Akre, R.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Arthur, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Bachrach, R. Z.

Beckhoff, B.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

Bhattacharya, A.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

Bionta, R.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Bostedt, C.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Bozek, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Brachmann, A.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Braig, C.

Bucksbaum, P.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Coffee, R.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Davis, J. C.

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[Crossref]

Decker, F.-J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Delvaille, J. P.

Dijkstra, J.

Ding, Y.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Dowell, D.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Eberhardt, W.

R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
[Crossref]

Edstrom, S.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Eichert, D.

W. Jark, D. Eichert, L. Luehl, and A. Gambitta, “Optimisation of a compact optical system for the beamtransport at the x-ray Fluorescence beamline at Elettra for experiments with small spots,” Proc. SPIE 9207, 92070G (2014).
[Crossref]

Emma, P.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Epstein, A.

Fisher, A.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Fliegauf, R.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

Frisch, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Fritzsch, L.

Galayda, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Gambitta, A.

W. Jark, D. Eichert, L. Luehl, and A. Gambitta, “Optimisation of a compact optical system for the beamtransport at the x-ray Fluorescence beamline at Elettra for experiments with small spots,” Proc. SPIE 9207, 92070G (2014).
[Crossref]

Gaylord, T. K.

Gilevich, S.

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Gullikson, E. M.

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Harvey, J. E.

Hastings, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Hatsui, T.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Holfelder, I.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
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J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
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P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Hunter, W. R.

Inubushi, Y.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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Iverson, R.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Källne, E.

Kameshima, T.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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Käsebier, T.

Katayama, T.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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Kley, E.-B.

Kurahashi, N.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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Laubis, C.

Liu, Y.

Loos, H.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
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W. Jark, D. Eichert, L. Luehl, and A. Gambitta, “Optimisation of a compact optical system for the beamtransport at the x-ray Fluorescence beamline at Elettra for experiments with small spots,” Proc. SPIE 9207, 92070G (2014).
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Messerschmidt, M.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Miahnahri, A.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Misawa, K.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
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P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Moharam, M. G.

Müller, M.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
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R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
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Neviere, M.

Noll, T.

R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
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Nuhn, H.-D.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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Obara, Y.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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Ogi, Y.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
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Pile, G.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
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L. Poletto, “Time-compensated grazing-incidence monochromator for extreme-ultraviolet and soft X-ray high-order harmonics,” Appl. Phys. B 78(7-8), 1013–1016 (2004).
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Pollakowski, B.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

Pommet, D. A.

Pontius, N.

R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
[Crossref]

Ratner, D.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Reinhardt, F.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

Rzepiela, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Sato, T.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

Schnopper, H. W.

Scholze, F.

Schultz, D.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Smith, T.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Stefan, P.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Suzuki, T.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

Togashi, T.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

Tompkins, H.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Tono, K.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

Tünnermann, A.

Turner, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Van Speybroeck, L. P.

Vernold, C. L.

Visser, H.

Welch, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Werner, W.

Weser, J.

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

White, W.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Wu, J.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Yabashi, M.

T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

Yocky, G.

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Appl. Opt. (4)

Appl. Phys. B (1)

L. Poletto, “Time-compensated grazing-incidence monochromator for extreme-ultraviolet and soft X-ray high-order harmonics,” Appl. Phys. B 78(7-8), 1013–1016 (2004).
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T. Katayama, Y. Inubushi, Y. Obara, T. Sato, T. Togashi, K. Tono, T. Hatsui, T. Kameshima, A. Bhattacharya, Y. Ogi, N. Kurahashi, K. Misawa, T. Suzuki, and M. Yabashi, “Femtosecond x-ray absorption spectroscopy with hard x-ray free electron laser,” Appl. Phys. Lett. 103(13), 131105 (2013).
[Crossref]

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B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[Crossref]

J. Opt. Soc. Am. (1)

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L. I. Goray, “Grazing incidence off-plane lamellar grating as a beam splitter for a 1-Å free electron laser,” J. Surf. Invest. 2(5), 796–800 (2008).
[Crossref]

Nat. Photonics (1)

P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, Ph. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics 4(9), 641–647 (2010).
[Crossref]

Opt. Express (1)

Proc. SPIE (2)

R. Mitzner, M. Neeb, T. Noll, N. Pontius, and W. Eberhardt, “An x-ray autocorrelator and delay line for the VUV-FEL at TTF/DESY,” Proc. SPIE 5920, 59200D (2005).
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W. Jark, D. Eichert, L. Luehl, and A. Gambitta, “Optimisation of a compact optical system for the beamtransport at the x-ray Fluorescence beamline at Elettra for experiments with small spots,” Proc. SPIE 9207, 92070G (2014).
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[Crossref]

J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser, “A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies,” Rev. Sci. Instrum. 84(4), 045106 (2013).
[Crossref] [PubMed]

Other (2)

M. Hutley, Diffraction Gratings (Techniques of Physics), (Academic Press, 1982).

The Center for X-ray Optics database: http://henke.lbl.gov/optical_constants/mirror2.html .

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Figures (7)

Fig. 1
Fig. 1 Orientation of a grating with grooves of rectangular profile for horizontal beam deflection in the extreme off-plane configuration. The inset at upper left presents the properties of the grating, in which rectangular bars of width a are separated in a structure with periodicity p by grooves of depth d. The drawing is not made to scale. The incident beam A arrives from the left and is diffracted to the right symmetrically around the plane of incidence as indicated by the two rays B and C. All diffraction peaks of different order will line up on half circles. The opening angle, under which such half circle is seen from the center of the grating, is identical for all sources, which are positioned on a half circle with identical opening angle upstream of the grating. The inset at right shows the dimensions of the tested grating. The angle of grazing incidence is denoted by θ. The two borders of 9 mm x 50 mm remained unetched and were coated completely like the ruled area. The shaded area represents the maximum footprint that the grating can accommodate for θ>0.46° in the horizontal direction.
Fig. 2
Fig. 2 Dependence of the structural efficiencies τm on the ratio a/p of the grating structure for the orders with indices 0≤|m|≤ 3.
Fig. 3
Fig. 3 CCD images of the distribution of the diffracted intensity taken for 4 keV photon energy and for an angle of grazing incidence of θ = 0.64°, when the grating is perfectly aligned in the extreme off-plane orientation (center image), and when it is rotated by |ϕ| = 0.5° around the surface normal (yaw degree of freedom) in both directions away from this condition. The white scale bars in the central plot measure 0.5 mm in length. The grating diffracted the beam to the right. The colour coding refers to a linear intensity scale. The images in the left column cover the entire intensity range, while in the right column the gain for the intensity was increased 10 fold in order to reveal weaker peaks.
Fig. 4
Fig. 4 Specular reflectivities R depending on angle of grazing incidence θ (displayed linearly at left and logarithmically at right) measured in θ-2θ scans for a photon energy of 6 keV from the border of the substrate (red symbols) and from the grating structure, when aligned perfectly in the extreme off-plane orientation (black symbols).
Fig. 5
Fig. 5 Multi-exposure CCD image of the distribution of the diffracted intensity for a photon energy of 4 keV taken, when the grating is perfectly aligned in the extreme off-plane orientation and the angle of grazing incidence is scanned in steps of 0.04° starting at left at an angle of θ = 0.36°. The white scale bar measures 0.5 mm in length. The colour coding refers to a linear scale. The upper image covers the entire intensity range, while in the lower image the gain for the intensity was increased 10 fold. The distribution of the intensity into orders with indices −6≤m≤6, as labelled, is displayed.
Fig. 6
Fig. 6 Left: Calculated structural efficiencies according to Eqs. (3) and (4) depending on the angle of grazing incidence θ for a grating with rectangular grooves and with a ratio a/p = 0.45. c1 = 1 is assumed. Right: Experimental structural efficiencies for the single orders derived from the total diffracted intensities for a photon energy of 4 keV.
Fig. 7
Fig. 7 The normalized total diffracted intensity is presented as a black line depending on angle of grazing incidence θ for the grating in the off-plane orientation and for a photon energy of 4 keV. The red circles present the results for the angles, which were chosen for the exposures as reported in Fig. 5. For comparison also the ideal theoretical reflectivity for a thick gold mirror is presented as a blue line, while the green line refers to a Ni coating. The latter results were calculated by use of [16].

Equations (9)

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ϕ m =m λ p
η m =R τ m
τ m = ( sin mπa p mπ ) 2 ( 1+ c 1 2 2 c 1 c 2 ) m0
τ 0 = ( a p ) 2 + ( 1 a p ) 2 c 1 2 +2 a p ( 1 a p ) c 1 c 2 m=0
τ m = ( sin mπa p mπ ) 2 2( 1 c 2 )
c 2 =cos( 2πOPD λ )
OPD= λ 2 =2dsinθ2dθ
d> λ 4 θ crit
m= m= τ m = 1

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