Abstract

We report the monolithic integration of a 15-channel multiplexer on indium phosphide. It covers the 7.1-to-8.5 µm wavelength range suitable for combining the outputs of several individual lasers. The fabrication is compatible with the growth of active layers, therefore enabling a fully integrate broadband laser source in the mid-infrared spectral range. Channels are accurately spaced in wavelength (97 nm) in good agreement with design.

© 2015 Optical Society of America

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References

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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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2015 (1)

C. Gilles, G. Maisons, B. Simozrag, and M. Carras, “Monolithic coupling of QCLs in evanescent waveguides on InP,” Proc. SPIE 9370, 937002W (2015).

2014 (1)

2013 (5)

S. Khan, J. Chiles, J. Ma, and S. Fathpour, “Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics,” Appl. Phys. Lett. 102(12), 121104 (2013).
[Crossref]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

R. J. Lycett, D. F. G. Gallagher, and V. J. Brulis, “Perfect chirped echelle grating wavelength multiplexor: design and optimization,” IEEE Photonics J. 5(2), 2400123 (2013).
[Crossref]

2012 (2)

M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
[Crossref]

Y. Yao, A. J. Hoffman, and C. F. Gmachl, “Mid-infrared quantum cascade lasers,” Nat. Photonics 6(7), 432–439 (2012).
[Crossref]

2011 (2)

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

F. Li, S. D. Jackson, C. Grillet, E. Magi, D. Hudson, S. J. Madden, Y. Moghe, C. O’Brien, A. Read, S. G. Duvall, P. Atanackovic, B. J. Eggleton, and D. J. Moss, “Low propagation loss silicon-on-sapphire waveguides for the mid-infrared,” Opt. Express 19(16), 15212–15220 (2011).
[Crossref] [PubMed]

2010 (2)

2007 (1)

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

2001 (2)

1997 (1)

J. Faist, C. Gmachl, F. Capasso, C. Sirtori, D. L. Sivco, J. N. Baillargeon, and A. Y. Cho, “Distributed feedback quantum cascade lasers,” Appl. Phys. Lett. 70(20), 2670–2672 (1997).
[Crossref]

1992 (1)

W. Bi and A. Li, “The dispersion of the refractive index of III-V semiconductors,” J. Appl. Phys. 71(6), 2826–2829 (1992).
[Crossref]

1991 (1)

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
[Crossref]

1987 (1)

S. Adachi, “Model dielectric constants of GaP, GaAs, GaSb, InP, InAs, and InSb,” Phys. Rev. B Condens. Matter 35(14), 7454–7463 (1987).
[Crossref] [PubMed]

1985 (1)

R. G. Walker, “Simple and accurate loss measurement technique for semiconductor optical waveguides,” Electron. Lett. 21(13), 581–583 (1985).
[Crossref]

Abell, J.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

Adachi, S.

S. Adachi, “Model dielectric constants of GaP, GaAs, GaSb, InP, InAs, and InSb,” Phys. Rev. B Condens. Matter 35(14), 7454–7463 (1987).
[Crossref] [PubMed]

Atanackovic, P.

Audet, R.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Baillargeon, J. N.

Belkin, M. A.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Ben Masaud, T. M.

M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
[Crossref]

Bewley, W. W.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

Bi, W.

W. Bi and A. Li, “The dispersion of the refractive index of III-V semiconductors,” J. Appl. Phys. 71(6), 2826–2829 (1992).
[Crossref]

Bour, D.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Broekaert, T.

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
[Crossref]

Brulis, V. J.

R. J. Lycett, D. F. G. Gallagher, and V. J. Brulis, “Perfect chirped echelle grating wavelength multiplexor: design and optimization,” IEEE Photonics J. 5(2), 2400123 (2013).
[Crossref]

Canedy, C. L.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

Capasso, F.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

A. A. Kosterev, A. L. Malinovsky, F. K. Tittel, C. Gmachl, F. Capasso, D. L. Sivco, J. N. Baillargeon, A. L. Hutchinson, and A. Y. Cho, “Cavity ringdown spectroscopic detection of nitric oxide with a continuous-wave quantum-cascade laser,” Appl. Opt. 40(30), 5522–5529 (2001).
[Crossref] [PubMed]

J. Faist, C. Gmachl, F. Capasso, C. Sirtori, D. L. Sivco, J. N. Baillargeon, and A. Y. Cho, “Distributed feedback quantum cascade lasers,” Appl. Phys. Lett. 70(20), 2670–2672 (1997).
[Crossref]

Carras, M.

C. Gilles, G. Maisons, B. Simozrag, and M. Carras, “Monolithic coupling of QCLs in evanescent waveguides on InP,” Proc. SPIE 9370, 937002W (2015).

G. Maisons, P. Gorrotxategi Carbajo, M. Carras, and D. Romanini, “Optical-feedback cavity-enhanced absorption spectroscopy with a quantum cascade laser,” Opt. Lett. 35(21), 3607–3609 (2010).
[Crossref] [PubMed]

Cerrina, F.

Chapman, D.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Chen, X.

Chiles, J.

S. Khan, J. Chiles, J. Ma, and S. Fathpour, “Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics,” Appl. Phys. Lett. 102(12), 121104 (2013).
[Crossref]

Cho, A. Y.

Choi, W. Y.

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
[Crossref]

Chong, H. M. H.

M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
[Crossref]

Corzine, S.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Diehl, L.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Duvall, S. G.

Eggleton, B. J.

Emerson, N. G.

M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
[Crossref]

Faist, J.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

J. Faist, C. Gmachl, F. Capasso, C. Sirtori, D. L. Sivco, J. N. Baillargeon, and A. Y. Cho, “Distributed feedback quantum cascade lasers,” Appl. Phys. Lett. 70(20), 2670–2672 (1997).
[Crossref]

Fathpour, S.

S. Khan, J. Chiles, J. Ma, and S. Fathpour, “Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics,” Appl. Phys. Lett. 102(12), 121104 (2013).
[Crossref]

Fonstad, C.

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
[Crossref]

Gallagher, D. F. G.

R. J. Lycett, D. F. G. Gallagher, and V. J. Brulis, “Perfect chirped echelle grating wavelength multiplexor: design and optimization,” IEEE Photonics J. 5(2), 2400123 (2013).
[Crossref]

Gilles, C.

C. Gilles, G. Maisons, B. Simozrag, and M. Carras, “Monolithic coupling of QCLs in evanescent waveguides on InP,” Proc. SPIE 9370, 937002W (2015).

Gmachl, C.

Gmachl, C. F.

Y. Yao, A. J. Hoffman, and C. F. Gmachl, “Mid-infrared quantum cascade lasers,” Nat. Photonics 6(7), 432–439 (2012).
[Crossref]

Gorrotxategi Carbajo, P.

Grillet, C.

Hoffman, A. J.

Y. Yao, A. J. Hoffman, and C. F. Gmachl, “Mid-infrared quantum cascade lasers,” Nat. Photonics 6(7), 432–439 (2012).
[Crossref]

Höfler, G.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Hu, Y.

Hudson, D.

Hutchinson, A. L.

Jabenransary, E.

M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
[Crossref]

Jackson, S. D.

Jones, V.

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
[Crossref]

Khan, S.

S. Khan, J. Chiles, J. Ma, and S. Fathpour, “Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics,” Appl. Phys. Lett. 102(12), 121104 (2013).
[Crossref]

Khokhar, A. Z.

Kim, C. S.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

Kim, M.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

Kimerling, L. C.

Kosterev, A. A.

Kuyken, B.

Lee, B. G.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Lee, K. K.

Lepage, G.

Li, A.

W. Bi and A. Li, “The dispersion of the refractive index of III-V semiconductors,” J. Appl. Phys. 71(6), 2826–2829 (1992).
[Crossref]

Li, F.

Li, T.

Lim, D. R.

Lindle, J. R.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

Loo, R.

A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
[Crossref]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

Lycett, R. J.

R. J. Lycett, D. F. G. Gallagher, and V. J. Brulis, “Perfect chirped echelle grating wavelength multiplexor: design and optimization,” IEEE Photonics J. 5(2), 2400123 (2013).
[Crossref]

Ma, J.

S. Khan, J. Chiles, J. Ma, and S. Fathpour, “Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics,” Appl. Phys. Lett. 102(12), 121104 (2013).
[Crossref]

MacArthur, J.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
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Magi, E.

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C. Gilles, G. Maisons, B. Simozrag, and M. Carras, “Monolithic coupling of QCLs in evanescent waveguides on InP,” Proc. SPIE 9370, 937002W (2015).

G. Maisons, P. Gorrotxategi Carbajo, M. Carras, and D. Romanini, “Optical-feedback cavity-enhanced absorption spectroscopy with a quantum cascade laser,” Opt. Lett. 35(21), 3607–3609 (2010).
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A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
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M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
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Malinovsky, A. L.

Mashanovich, G. Z.

Merritt, C. D.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
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Meyer, J. R.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
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M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
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Moghe, Y.

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Muneeb, M.

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
[Crossref]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

Napoleone, A.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
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Nedeljkovic, M.

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
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M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
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O’Brien, C.

Oakley, D. C.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Pathak, S.

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

Penades, J. S.

Peng, L. H.

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
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Pflügl, C.

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

Read, A.

Reed, G. T.

Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, A. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39(6), 1406–1409 (2014).
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M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
[Crossref]

Roelkens, G.

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
[Crossref]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

Romanini, D.

Ryckeboer, E.

Shimura, Y.

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
[Crossref]

Shin, J.

Simozrag, B.

C. Gilles, G. Maisons, B. Simozrag, and M. Carras, “Monolithic coupling of QCLs in evanescent waveguides on InP,” Proc. SPIE 9370, 937002W (2015).

Sirtori, C.

J. Faist, C. Gmachl, F. Capasso, C. Sirtori, D. L. Sivco, J. N. Baillargeon, and A. Y. Cho, “Distributed feedback quantum cascade lasers,” Appl. Phys. Lett. 70(20), 2670–2672 (1997).
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Sivco, D. L.

Soref, R.

R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics 4(8), 495–497 (2010).
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Thomson, D. J.

Tittel, F. K.

Van Campenhout, J.

A. Malik, M. Muneeb, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared,” Appl. Phys. Lett. 103(16), 161119 (2013).
[Crossref]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photonics Technol. Lett. 25(18), 1805–1808 (2013).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

Verheyen, P.

Vurgaftman, I.

I. Vurgaftman, W. W. Bewley, C. L. Canedy, C. S. Kim, M. Kim, C. D. Merritt, J. Abell, J. R. Lindle, and J. R. Meyer, “Rebalancing of internally generated carriers for mid-infrared interband cascade lasers with very low power consumption,” Nat. Commun. 2, 585 (2011).
[Crossref] [PubMed]

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R. G. Walker, “Simple and accurate loss measurement technique for semiconductor optical waveguides,” Electron. Lett. 21(13), 581–583 (1985).
[Crossref]

Yao, Y.

Y. Yao, A. J. Hoffman, and C. F. Gmachl, “Mid-infrared quantum cascade lasers,” Nat. Photonics 6(7), 432–439 (2012).
[Crossref]

Appl. Opt. (1)

Appl. Phys. Lett. (6)

L. H. Peng, T. Broekaert, W. Y. Choi, C. Fonstad, and V. Jones, “Defect activated infrared multiphonon excitation in iron-doped semi-insulating indium phosphide,” Appl. Phys. Lett. 59(5), 564–566 (1991).
[Crossref]

J. Faist, C. Gmachl, F. Capasso, C. Sirtori, D. L. Sivco, J. N. Baillargeon, and A. Y. Cho, “Distributed feedback quantum cascade lasers,” Appl. Phys. Lett. 70(20), 2670–2672 (1997).
[Crossref]

B. G. Lee, M. A. Belkin, R. Audet, J. MacArthur, L. Diehl, C. Pflügl, F. Capasso, D. C. Oakley, D. Chapman, A. Napoleone, D. Bour, S. Corzine, G. Höfler, and J. Faist, “Widely tunable single-mode quantum cascade laser source for mid-infrared spectroscopy,” Appl. Phys. Lett. 91(23), 231101 (2007).
[Crossref]

M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jabenransary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012).
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Y. Yao, A. J. Hoffman, and C. F. Gmachl, “Mid-infrared quantum cascade lasers,” Nat. Photonics 6(7), 432–439 (2012).
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C. Gilles, G. Maisons, B. Simozrag, and M. Carras, “Monolithic coupling of QCLs in evanescent waveguides on InP,” Proc. SPIE 9370, 937002W (2015).

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Figures (8)

Fig. 1
Fig. 1 Figures of merit and simulated spectral response of the multiplexer channels for quasi-transverse magnetic light.
Fig. 2
Fig. 2 Scanning electron microscopy images of (a) 15-to-5 Rowland circle grating multiplexer, (b) zoom on the flat gold-coated grating facets in which light diffracts and focuses, and (c) zoom on the output waveguides from the free propagation region.
Fig. 3
Fig. 3 Experimental setup to test a multiplexer sample.
Fig. 4
Fig. 4 Intensity maxima through channel six (blue triangles) for a complete tuning of the external cavity to plot the envelope function (blue solid line) of the wavelength channel.
Fig. 5
Fig. 5 Spectral responses of the thirteen out of fifteen multiplexer input channels for TE polarized light.
Fig. 6
Fig. 6 Spectral responses of the twelve out of fifteen multiplexer input channels for TM polarized light. Inset: comparison between the experimental central wavelengths and expected values over the input waveguide array.
Fig. 7
Fig. 7 Comparison of the spectral response between experimentation (j = 6, solid line) and simulation for three adjacent channels (j = 5, j = 6 and j = 7, dotted lined).
Fig. 8
Fig. 8 Images captured by the QWIP camera of the scattered light from the multiplexer waveguides. The wavelength of the coupled light is (a) 7.83 µm, (b) 8.13 µm and (c) 8.40 µm.

Equations (1)

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T j i ) = 10 log( P out j i ) P ref i ) ).

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