Abstract

We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.

© 2015 Optical Society of America

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References

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    [Crossref]
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    [Crossref]
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    [Crossref]
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2011 (1)

M. O. Freeman, “MEMS scanned laser head-up display,” Proc. SPIE 7930, 79300G (2011).

2010 (2)

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

2007 (1)

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

2006 (3)

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

2005 (1)

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

2004 (2)

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

V. Milanović, G. A. Matus, and D. T. McCormick, “Gimbal-less monolithic silicon actuators for tip–tilt–piston micromirror applications,” IEEE J. Sel. Top. Quantum Electron. 10(3), 462–471 (2004).
[Crossref]

2003 (1)

U. Krishnamoorthy, D. Lee, and O. Solgaard, “Self-aligned vertical electrostatic combdrives for micromirror actuation,” J. Microelectromech. Syst. 12(4), 458–464 (2003).
[Crossref]

2000 (1)

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Akamatsu, M.

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

Arslan, A.

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

Brown, D.

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

Bu, J.-U.

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Cho, J.-W.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Choi, M.

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Choi, W.-K.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Davis, W. O.

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

Dürr, P.

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Freeman, M. O.

M. O. Freeman, “MEMS scanned laser head-up display,” Proc. SPIE 7930, 79300G (2011).

Gerwig, C.

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

Gokce, S. K.

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

Haase, T.

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Hah, D.

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

Holmström, S.

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

Iijima, T.

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

Jeong, H.-G.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Ji, C.-H.

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Kim, J.-W.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Kim, S.-C.

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Kim, S.-H.

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Ko, Y.-C.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Krishnamoorthy, U.

U. Krishnamoorthy, D. Lee, and O. Solgaard, “Self-aligned vertical electrostatic combdrives for micromirror actuation,” J. Microelectromech. Syst. 12(4), 458–464 (2003).
[Crossref]

Kück, H.

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Kunze, D.

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Lakner, H.

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Lee, D.

U. Krishnamoorthy, D. Lee, and O. Solgaard, “Self-aligned vertical electrostatic combdrives for micromirror actuation,” J. Microelectromech. Syst. 12(4), 458–464 (2003).
[Crossref]

Lee, J.-H.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Lee, S.-H.

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Matus, G. A.

V. Milanović, G. A. Matus, and D. T. McCormick, “Gimbal-less monolithic silicon actuators for tip–tilt–piston micromirror applications,” IEEE J. Sel. Top. Quantum Electron. 10(3), 462–471 (2004).
[Crossref]

McCormick, D. T.

V. Milanović, G. A. Matus, and D. T. McCormick, “Gimbal-less monolithic silicon actuators for tip–tilt–piston micromirror applications,” IEEE J. Sel. Top. Quantum Electron. 10(3), 462–471 (2004).
[Crossref]

Milanovic, V.

V. Milanović, G. A. Matus, and D. T. McCormick, “Gimbal-less monolithic silicon actuators for tip–tilt–piston micromirror applications,” IEEE J. Sel. Top. Quantum Electron. 10(3), 462–471 (2004).
[Crossref]

Montague, T.

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

Mun, Y.-K.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Nam, H.-J.

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

Nguyen, H. D.

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

Patterson, P. R.

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

Sandner, T.

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

Schenk, H.

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Schwarzer, S.

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

Sobe, U.

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

Solgaard, O.

U. Krishnamoorthy, D. Lee, and O. Solgaard, “Self-aligned vertical electrostatic combdrives for micromirror actuation,” J. Microelectromech. Syst. 12(4), 458–464 (2003).
[Crossref]

Song, K.-C.

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

Sprague, R.

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

Tani, M.

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

Toshiyoshi, H.

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

Urey, H.

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

Wildenhain, M.

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

Wöfelschneider, H.

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

Wu, M. C.

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

Yalcinkaya, A. D.

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

Yasuda, Y.

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

Yee, Y.

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Yoo, J.-B.

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

IEEE J. Sel. Top. Quantum Electron. (3)

D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, “Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,” IEEE J. Sel. Top. Quantum Electron. 10(3), 505–513 (2004).
[Crossref]

H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE J. Sel. Top. Quantum Electron. 6(5), 715–722 (2000).
[Crossref]

V. Milanović, G. A. Matus, and D. T. McCormick, “Gimbal-less monolithic silicon actuators for tip–tilt–piston micromirror applications,” IEEE J. Sel. Top. Quantum Electron. 10(3), 462–471 (2004).
[Crossref]

Integr. Ferroelectr. (1)

Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2D-optical micro scanners with PZT thick films,” Integr. Ferroelectr. 80(1), 341–353 (2006).
[Crossref]

J. Microelectromech. Syst. (4)

U. Krishnamoorthy, D. Lee, and O. Solgaard, “Self-aligned vertical electrostatic combdrives for micromirror actuation,” J. Microelectromech. Syst. 12(4), 458–464 (2003).
[Crossref]

A. Arslan, D. Brown, W. O. Davis, S. Holmström, S. K. Gokce, and H. Urey, “Comb-actuated resonant torsional microscanner with mechanical amplification,” J. Microelectromech. Syst. 19(4), 936–943 (2010).
[Crossref]

C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic two-dimensional scanner using radial magnetic field,” J. Microelectromech. Syst. 16(4), 989–996 (2007).
[Crossref]

A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006).
[Crossref]

J. Micromech. Microeng. (1)

C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic scanning micromirror with diaphragm mirror plate and diamond shaped reinforcement frame,” J. Micromech. Microeng. 16(5), 1033–1039 (2006).
[Crossref]

Proc. SPIE (3)

M. O. Freeman, “MEMS scanned laser head-up display,” Proc. SPIE 7930, 79300G (2011).

T. Sandner, M. Wildenhain, C. Gerwig, H. Schenk, S. Schwarzer, and H. Wöfelschneider, “Large aperture MEMS scanner module for 3D distance measurement,” Proc. SPIE 7594, 75940D (2010).

Y.-C. Ko, J.-W. Cho, Y.-K. Mun, H.-G. Jeong, W.-K. Choi, J.-H. Lee, J.-W. Kim, J.-B. Yoo, and J.-H. Lee, “Eye-type scanning mirror with dual vertical combs for laser display,” Proc. SPIE 5721, 14–22 (2005).

Other (5)

M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, “A 2D-optical scanner actuated by PZT film deposited by arc discharged reactive ion-plating (ADRIP) method,” in Proceedings of IEEE/LEOS International Conference on Optical MEMS (IEEE/LEOS, 2004), pp. 188–189.

J. T. Nee, R. A. Conant, M. R. Hart, R. S. Muller, and K. Y. Lau, “Stretched-film micromirrors for improved optical flatness,” in Technical Digest of IEEE International Conference on MEMS (IEEE, 2000), pp. 704–709.
[Crossref]

W. O. Davis, R. Sprague, and J. Miller, “MEMS-based pico projector display,” in Proceedings of IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (IEEE/LEOS, 2008), pp. 31–32.
[Crossref]

M. Yoda, K. Isamoto, C. Chong, H. Ito, A. Murata, and H. Toshiyoshi, “Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism,” in Proceedings of IEEE/LEOS International Conference on Optical MEMS and Their Applications (IEEE/LEOS, 2005), oral B2.
[Crossref]

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Figures (14)

Fig. 1
Fig. 1 Schematics of the designed scanning micromirror: (a) front-side, (b) backside.
Fig. 2
Fig. 2 Schematics of the coil geometry actuation mechanism: (a) coil geometry, (b) directions of applied magnetic field, driving current, and corresponding torque on each axis.
Fig. 3
Fig. 3 Schematics of the magnet design and simulation results: (a) magnet assembly, (b) 3-D FEA result (arrows indicate the magnetization direction of the magnets), (c) relative position of the silicon die and magnet assembly, (d) 2-D FEA result, (e) 2-D simulated magnetic field intensity and torque component at various 400, 500, and 600μm gaps.
Fig. 4
Fig. 4 Modal analysis result: (a) 1st mode 463Hz, (b) 3rd mode 3,743Hz, (c) 7th mode 14,693Hz, (d) 8th mode 20,875Hz.
Fig. 5
Fig. 5 Harmonic analysis results: (a) simulated model and measurement points, (b) frequency response, (c) magnified view of the frequency response near 8th mode.
Fig. 6
Fig. 6 Dynamic deformation of the mirror at driving frequency of 21kHz and mechanical scan angle of ± 7.7° (simulation result): (a) perspective view (model without rim), (b) top view (model without rim), (c) perspective view (model with rim), (d) top view (model with rim).
Fig. 7
Fig. 7 Cross-sectional view of the scanning micromirror along line AA’ in Fig. 1(b).
Fig. 8
Fig. 8 SEM images of the fabricated micromirror: (a) bottom side, (b) top side (torsion beams for horizontal scan), (c) top side (torsion beams for vertical scan).
Fig. 9
Fig. 9 Magnet assembly and fabricated microscanner package: (a) magnet assembly, (b) schematics of the packaged device, (c) fabricated scanning micromirror package.
Fig. 10
Fig. 10 Schematics of the frequency response measurement setup.
Fig. 11
Fig. 11 Frequency response of the mirror (horizontal scan): (a) bode plot for horizontal scan at various input voltages, (b) variation of horizontal resonant frequency at various input voltages.
Fig. 12
Fig. 12 Schematics of the deflection angle measurement setup.
Fig. 13
Fig. 13 Angular deflection of the mirror: (a) horizontal scan, (b) vertical scan.
Fig. 14
Fig. 14 Scanned pattern on the screen: (a) horizontal scan, (b) vertical scan, (c) biaxial scan.

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