Dielectric multilayer beam splitter with differential phase shift on transmission and reflection for division-of-amplitude photopolarimeter (DOAP) was presented for the first time to our knowledge. The optimal parameters for the beam splitter are Tp = 78.9%, Ts = 21.1% and Δr − Δt = π/2 at 532nm at an angle of incidence of 45°. Multilayer anti-reflection coating with low phase shift was applied to reduce the backside reflection. Different design strategies that can achieve all optimal targets at the wavelength were tested. Two design methods were presented to optimize the differential phase shift. The samples were prepared by ion beam sputtering (IBS). The experimental results show good agreement with those of the design. The ellipsometric parameters of samples were measured in reflection (ψr, Δr) = (26.5°, 135.1°) and (28.2°, 133.5°), as well as in transmission (ψt, Δt) = (62.5°, 46.1°) and (63.5°, 46°) at 532.6nm. The normalized determinant of instrument matrix to evaluate the performance of samples is respectively 0.998 and 0.991 at 532.6nm.
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