Abstract

We propose and experimentally demonstrate fiber-to-chip grating couplers with aligned silicon nitride (Si3N4) and silicon (Si) grating teeth for wide bandwidths and high coupling efficiencies without the use of bottom reflectors. The measured 1-dB bandwidth is a record 80 nm, and the measured peak coupling efficiency is −1.3 dB, which is competitive with the best Si-only grating couplers. The grating couplers are integrated in a Si3N4 on silicon-on-insulator (SOI) integrated optics platform with aligned waveguides in both the Si3N4 and Si, and we demonstrate a 1 × 4 tunable multiplexer/demultiplexer using the Si3N4-on-SOI dual-level grating couplers and thermally-tuned Si microring resonators.

© 2014 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
  21. W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.
  22. Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.
  23. W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).
  24. D. Vermeulen, Y. D. Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, G. Roelkens, “Reflectionless grating couplers for Silicon-on-Insulator photonic integrated circuits,” Opt. Express 20, 22278–22283 (2012).
    [CrossRef] [PubMed]
  25. Y. Li, D. Vermeulen, Y. D. Koninck, G. Yurtsever, G. Roelkens, R. Baets, “Compact grating couplers on silicon-on-insulator with reduced backreflection,” Opt. Lett. 37, 4356–4358 (2012).
    [CrossRef] [PubMed]

2014 (1)

2013 (4)

J. F. Bauters, M. L. Davenport, M. J. R. Heck, J. K. Doylend, A. Chen, A. W. Fang, J. E. Bowers, “Silicon on ultra-low-loss waveguide photonic integration platform,” Opt. Express 21, 544–555 (2013).
[CrossRef] [PubMed]

C. Li, H. Zhang, M. Yu, G.-Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21, 7868–7874 (2013).
[CrossRef] [PubMed]

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
[CrossRef]

2012 (3)

2011 (3)

C. Kopp, E. Augendre, R. Orobtchouk, O. Lemonnier, J.-M. Fedeli, “Enhanced fiber grating coupler integrated by wafer-to-wafer bonding,” J. Lightwave Technol. 29, 1847–1851 (2011).
[CrossRef]

L. Chen, C. R. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

2010 (4)

C. R. Doerr, L. Chen, Y.-K. Chen, L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22, 1461–1463 (2010).
[CrossRef]

L. Chen, C. R. Doerr, Y.-K. Chen, T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22, 1744–1746 (2010).
[CrossRef]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22, 1156–1158 (2010).
[CrossRef]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. V. Thourhout, G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18, 18278–18283 (2010).
[CrossRef] [PubMed]

2009 (1)

2007 (1)

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

2002 (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Abdalla, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Absil, P.

Aroca, R. A.

L. Chen, C. R. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

Augendre, E.

Baehr-Jones, T.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

Baets, R.

D. Vermeulen, Y. D. Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, G. Roelkens, “Reflectionless grating couplers for Silicon-on-Insulator photonic integrated circuits,” Opt. Express 20, 22278–22283 (2012).
[CrossRef] [PubMed]

Y. Li, D. Vermeulen, Y. D. Koninck, G. Yurtsever, G. Roelkens, R. Baets, “Compact grating couplers on silicon-on-insulator with reduced backreflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef] [PubMed]

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Baeyens, Y.

L. Chen, C. R. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

Barwicz, T.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

Bauters, J. F.

Berroth, M.

Bienstman, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Bogaerts, W.

D. Vermeulen, Y. D. Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, G. Roelkens, “Reflectionless grating couplers for Silicon-on-Insulator photonic integrated circuits,” Opt. Express 20, 22278–22283 (2012).
[CrossRef] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. V. Thourhout, G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18, 18278–18283 (2010).
[CrossRef] [PubMed]

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Bowers, J. E.

Buhl, L.

L. Chen, C. R. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

Buhl, L. L.

C. R. Doerr, L. Chen, Y.-K. Chen, L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22, 1461–1463 (2010).
[CrossRef]

Burghartz, J.

Butschke, J.

Chen, A.

Chen, L.

L. Chen, C. R. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

L. Chen, C. R. Doerr, Y.-K. Chen, T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22, 1744–1746 (2010).
[CrossRef]

C. R. Doerr, L. Chen, Y.-K. Chen, L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22, 1461–1463 (2010).
[CrossRef]

Chen, X.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22, 1156–1158 (2010).
[CrossRef]

Chen, Y.-K.

L. Chen, C. R. Doerr, Y.-K. Chen, T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22, 1744–1746 (2010).
[CrossRef]

C. R. Doerr, L. Chen, Y.-K. Chen, L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22, 1461–1463 (2010).
[CrossRef]

Chu, T.

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
[CrossRef]

Claes, T.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

Daele, P. V.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Davenport, M. L.

De Dobbelaere, P.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

De Dobbelaere, P. M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Doerr, C. R.

L. Chen, C. R. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

L. Chen, C. R. Doerr, Y.-K. Chen, T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22, 1744–1746 (2010).
[CrossRef]

C. R. Doerr, L. Chen, Y.-K. Chen, L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22, 1461–1463 (2010).
[CrossRef]

Doylend, J. K.

Dumon, P.

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Fang, A. W.

Fedeli, J.-M.

Foltz, D.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Fung, C. K. Y.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22, 1156–1158 (2010).
[CrossRef]

Furuhashi, H.

Galland, C.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

Gloeckner, S.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

He, L.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

Heck, M. J. R.

Hochberg, M.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

Hovey, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Huang, Y.

Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

Ishimura, T.

Jackson, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Koninck, Y. D.

Kopp, C.

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Kunze, A.

Laere, F. V.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

Lambert, E.

Lemonnier, O.

Lepage, G.

Letzkus, F.

Li, C.

C. Li, H. Zhang, M. Yu, G.-Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21, 7868–7874 (2013).
[CrossRef] [PubMed]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22, 1156–1158 (2010).
[CrossRef]

H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.

Li, Y.

Liang, D.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

Liang, Y.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Lim, A. E.-J.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

Liow, T.-Y.

L. Chen, C. R. Doerr, Y.-K. Chen, T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22, 1744–1746 (2010).
[CrossRef]

Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.

Liu, Y.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

Lo, G.-Q.

L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg, “A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography,” IEEE Photon. Technol. Lett. 25, 1358–1361 (2013).
[CrossRef]

C. Li, H. Zhang, M. Yu, G.-Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21, 7868–7874 (2013).
[CrossRef] [PubMed]

H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.

Lo, S. M. G.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22, 1156–1158 (2010).
[CrossRef]

Luo, X.

H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.

Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.

Mack, M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Masini, G.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Mekis, A.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Mesel, K. D.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Mikkelsen, J. C.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Narasimha, A.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

O’Faolain, L.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

Ohshima, A.

Orobtchouk, R.

Peterson, M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Pinguet, T.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Poon, J. K. S.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

Roelkens, G.

Rosa, M. F.

Sacher, W. D.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

Sahni, S.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quant. Elect. 17, 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Schaekers, M.

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Scheerlinck, S.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

Schrauwen, J.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

Selvaraja, S.

Selvaraja, S. K.

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Sharp, M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Shiraishi, K.

Sleeckx, E.

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Song, J.

Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.

Sun, J.-H.

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
[CrossRef]

Sun, P.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Sun, W.-M.

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
[CrossRef]

Taillaert, D.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Talyor, B. J. F.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

Tan, D.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Tang, Y.

Z. Wang, Y. Tang, L. Wosinski, “High efficiency grating couplers for silicon-on-insulator photonic circuits,” in European Conference and Exhibition on Optical Communication (ECOC) (2010), p. P2.06.

Thourhout, D. V.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. V. Thourhout, G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18, 18278–18283 (2010).
[CrossRef] [PubMed]

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photon. Technol. Lett. 19, 1919–1921 (2007).
[CrossRef]

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. V. Thourhout, R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in CLEO: 2009 (Optical Society of America, 2009), p. CTuC6.

Tsai, C.

Tsang, H. K.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22, 1156–1158 (2010).
[CrossRef]

Tsuchiya, H.

Tu, X.

H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.

Verheyen, P.

Vermeulen, D.

Verslegers, L.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quant. Elect. 38, 949–955 (2002).
[CrossRef]

Vogel, W.

Wang, Z.

Z. Wang, Y. Tang, L. Wosinski, “High efficiency grating couplers for silicon-on-insulator photonic circuits,” in European Conference and Exhibition on Optical Communication (ECOC) (2010), p. P2.06.

Welch, B. P.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Wosinski, L.

Z. Wang, Y. Tang, L. Wosinski, “High efficiency grating couplers for silicon-on-insulator photonic circuits,” in European Conference and Exhibition on Optical Communication (ECOC) (2010), p. P2.06.

Xiao, X.

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
[CrossRef]

Yoda, H.

Yokoyama, K.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

Yu, J.-Z.

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
[CrossRef]

Yu, M.

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Yu, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Photonics Conference (IPC), 2012 IEEE (2012), pp. 356–357.

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C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
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C. Li, H. Zhang, M. Yu, G.-Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21, 7868–7874 (2013).
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H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.

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C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
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Chin. Phys. Lett. (1)

C. Zhang, J.-H. Sun, X. Xiao, W.-M. Sun, X.-J. Zhang, T. Chu, J.-Z. Yu, Y.-D. Yu, “High efficiency grating coupler for coupling between single-mode fiber and SOI waveguides,” Chin. Phys. Lett. 30, 014207 (2013).
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W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Si3N4-on-SOI polarization rotator-splitter based on TM0-TE1 mode conversion,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.3.

Y. Huang, X. Luo, J. Song, T.-Y. Liow, G.-Q. Lo, “Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.1.

W. D. Sacher, Y. Huang, D. Liang, T. Barwicz, J. C. Mikkelsen, B. J. F. Talyor, G.-Q. Lo, J. K. S. Poon, “Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform,” Opt. Express, submitted (2014).

H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.

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Figures (8)

Fig. 1
Fig. 1

Comparison of our Si3N4-on-SOI dual-level grating coupler experimental result with previously published Si and Si3N4 grating coupler demonstrations (coupling efficiencies and 1-dB bandwidths). The numbers next to the markers are the references.

Fig. 2
Fig. 2

(a) Perspective schematic of the Si3N4-on-SOI dual-level grating coupler. (b) Schematic of the waveguide cross-sections in the Si3N4-on-SOI integrated optics platform. (c) Cross-section schematic of the grating coupler and an input/output optical fiber. The following parameters of each grating period are listed: Si3N4 grating tooth width (wSi3N4), Si grating tooth width (wSi), gap between Si3N4 teeth (g), and the offset between Si3N4 and Si teeth (L).

Fig. 3
Fig. 3

(a) Simulated coupling efficiency versus wavelength for the apodized and uniform grating couplers. (b) Simulated directionality (D) versus variations in the offsets between the Si3N4 and Si teeth from their apodized values (ΔL). ΔL = 0 nm corresponds to the optimized grating in Fig. 2(c).

Fig. 4
Fig. 4

Simulated coupling efficiency versus wavelength with ±50 nm variations in the offsets between the Si3N4 and Si grating teeth from their apodized values (ΔL).

Fig. 5
Fig. 5

(a) Optical micrograph of the fabricated Si3N4-on-SOI dual-level grating coupler. (b) Scanning electron microscope (SEM) image of the Si grating teeth during fabrication (i.e., after Si etching but before deposition of the SiO2 spacer layer between the Si and Si3N4). (c) SEM image of the Si3N4 grating teeth during fabrication (i.e., after Si3N4 etching but before the SiO2 top cladding deposition).

Fig. 6
Fig. 6

Measured and simulated coupling efficiency versus wavelength for the Si3N4-on-SOI dual-level grating coupler in Fig. 5.

Fig. 7
Fig. 7

(a) Optical micrograph of the 1 × 4 tunable multiplexer/demultiplexer. “GC” refers to a Si3N4-on-SOI dual-level grating coupler, and “Ring” refers to a Si add-drop microring with thermal tuning via a TiN heater. (b) Schematic of a Si microring resonator in the multiplexer/demultiplexer without the TiN and contact metals. The microring is connected to Si bus waveguides and the drop port is connected to a grating coupler.

Fig. 8
Fig. 8

Fiber-to-fiber transmission measurements for the 1 × 4 tunable multiplexer/demultiplexer in Fig. 7. (a) Thru port spectra before and after thermal tuning (i.e., transmission from GCin to GCthru). (b) Drop port spectra of Rings 1 to 4 after thermal tuning (i.e., transmission from GCin to GC1 – GC4). “GC” refers to a grating coupler and “Ring” refers to a Si microring; the nomenclature is defined in Fig. 7(a).

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