Abstract

Recently the 2μm wavelength region has emerged as an exciting prospect for the next generation of telecommunications. In this paper we experimentally characterise silicon based plasma dispersion effect optical modulation and defect based photodetection in the 2-2.5μm wavelength range. It is shown that the effectiveness of the plasma dispersion effect is dramatically increased in this wavelength window as compared to the traditional telecommunications wavelengths of 1.3μm and 1.55μm. Experimental results from the defect based photodetectors show that detection is achieved in the 2-2.5μm wavelength range, however the responsivity is reduced as the wavelength is increased away from 1.55μm.

© 2014 Optical Society of America

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2014 (2)

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, A. Z. Khokhar, C. J. Mitchell, G. T. Reed, G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39(6), 1406–1409 (2014).
[CrossRef] [PubMed]

2013 (7)

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

R. Shankar, I. Bulu, M. Lončar, “Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared,” Appl. Phys. Lett. 102(5), 051108 (2013).
[CrossRef]

M. Nedeljkovic, A. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, D. J. Thomson, F. Y. Gardes, H. M. H. Chong, G. T. Reed, G. Z. Mashanovich, “Silicon photonic devices and platforms for the mid-infrared,” Opt. Mater. Express 3(9), 1205–1214 (2013).
[CrossRef]

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

J. J. Ackert, A. S. Karar, D. J. Paez, P. E. Jessop, J. C. Cartledge, A. P. Knights, “10 Gbps silicon waveguide-integrated infrared avalanche photodiode,” Opt. Express 21(17), 19530–19537 (2013).
[CrossRef] [PubMed]

2012 (5)

2011 (4)

G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E.-J. Teo, Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express 19(8), 7112–7119 (2011).
[CrossRef] [PubMed]

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

L. Alloatti, D. Korn, R. Palmer, D. Hillerkuss, J. Li, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, P. Dumon, R. Baets, C. Koos, W. Freude, J. Leuthold, “42.7 Gbit/s electro-optic modulator in silicon technology,” Opt. Express 19(12), 11841–11851 (2011).
[CrossRef] [PubMed]

M. Nedeljkovic, R. Soref, G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14 um wavelength range,” IEEE Journal of Photonics 3(6), 1171–1180 (2011).
[CrossRef]

2010 (3)

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Z. Sheng, L. Liu, J. Brouckaert, S. He, D. Van Thourhout, “InGaAs PIN photodetectors integrated on silicon-on-insulator waveguides,” Opt. Express 18(2), 1756–1761 (2010).
[CrossRef] [PubMed]

J. K. Doylend, A. P. Knights, B. J. Luff, R. Shafiiha, M. Asghari, R. M. Gwilliam, “Modifying functionality of variable optical attenuator to signal monitoring through defect engineering,” Electron. Lett. 46(3), 234–235 (2010).
[CrossRef]

2009 (1)

2008 (1)

2007 (1)

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

2006 (1)

Y. Liu, C. W. Chow, W. Y. Cheung, H. K. Tsang, “In-line channel power monitor based on helium ion implantation in silicon-on-insulator waveguides,” IEEE Photon. Technol. Lett. 18(17), 1882–1884 (2006).
[CrossRef]

1959 (1)

H. K. Fan, A. K. Ramdas, “Infrared absorption and photoconductivity in irradiated silicon,” J. Appl. Phys. 30(8), 1127–1134 (1959).
[CrossRef]

Ackert, J. J.

Alic, N.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Alloatti, L.

Asghari, M.

Assefa, S.

Baets, R.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

L. Alloatti, D. Korn, R. Palmer, D. Hillerkuss, J. Li, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, P. Dumon, R. Baets, C. Koos, W. Freude, J. Leuthold, “42.7 Gbit/s electro-optic modulator in silicon technology,” Opt. Express 19(12), 11841–11851 (2011).
[CrossRef] [PubMed]

Barklund, A.

Barwicz, T.

Bergman, K.

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

Bijlani, B.

Bogaerts, W.

Boggio, J. M. C.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Bowers, J. E.

Brouckaert, J.

Bulu, I.

R. Shankar, I. Bulu, M. Lončar, “Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared,” Appl. Phys. Lett. 102(5), 051108 (2013).
[CrossRef]

Cartledge, J. C.

Cassan, E.

Cerutti, L.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Chen, C. P.

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

Chen, S.-W.

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

Chen, X.

Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, A. Z. Khokhar, C. J. Mitchell, G. T. Reed, G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39(6), 1406–1409 (2014).
[CrossRef] [PubMed]

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

M. Nedeljkovic, A. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, D. J. Thomson, F. Y. Gardes, H. M. H. Chong, G. T. Reed, G. Z. Mashanovich, “Silicon photonic devices and platforms for the mid-infrared,” Opt. Mater. Express 3(9), 1205–1214 (2013).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. K. Fung, Y. M. Chen, H. K. Tsang, “Focusing subwavelength grating coupler for mid-infrared suspended membrane waveguide,” Opt. Lett. 37(7), 1217–1219 (2012).
[CrossRef] [PubMed]

Chen, Y. M.

Cheng, Z.

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. K. Fung, Y. M. Chen, H. K. Tsang, “Focusing subwavelength grating coupler for mid-infrared suspended membrane waveguide,” Opt. Lett. 37(7), 1217–1219 (2012).
[CrossRef] [PubMed]

Cheung, W. Y.

Y. Liu, C. W. Chow, W. Y. Cheung, H. K. Tsang, “In-line channel power monitor based on helium ion implantation in silicon-on-insulator waveguides,” IEEE Photon. Technol. Lett. 18(17), 1882–1884 (2006).
[CrossRef]

Chong, H. M. H.

Chow, C. W.

Y. Liu, C. W. Chow, W. Y. Cheung, H. K. Tsang, “In-line channel power monitor based on helium ion implantation in silicon-on-insulator waveguides,” IEEE Photon. Technol. Lett. 18(17), 1882–1884 (2006).
[CrossRef]

Crozat, P.

Cunningham, J.

Dave, U.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Deneault, S.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Dinu, R.

Divliansky, I. B.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Doylend, J. K.

J. K. Doylend, A. P. Knights, B. J. Luff, R. Shafiiha, M. Asghari, R. M. Gwilliam, “Modifying functionality of variable optical attenuator to signal monitoring through defect engineering,” Electron. Lett. 46(3), 234–235 (2010).
[CrossRef]

Driscoll, J. B.

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

Dumon, P.

Fan, H. K.

H. K. Fan, A. K. Ramdas, “Infrared absorption and photoconductivity in irradiated silicon,” J. Appl. Phys. 30(8), 1127–1134 (1959).
[CrossRef]

Fedeli, J.

Fédéli, J.-M.

Feng, D.

Fong, J.

Fournier, M.

Freude, W.

Fung, C. K.

Gan, F.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Gardes, F. Y.

M. Nedeljkovic, A. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, D. J. Thomson, F. Y. Gardes, H. M. H. Chong, G. T. Reed, G. Z. Mashanovich, “Silicon photonic devices and platforms for the mid-infrared,” Opt. Mater. Express 3(9), 1205–1214 (2013).
[CrossRef]

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Gencarelli, F.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Geng, B.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Gill, D. M.

Green, W. J.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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Green, W. M. J.

Grein, M. E.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

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B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

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J. K. Doylend, A. P. Knights, B. J. Luff, R. Shafiiha, M. Asghari, R. M. Gwilliam, “Modifying functionality of variable optical attenuator to signal monitoring through defect engineering,” Electron. Lett. 46(3), 234–235 (2010).
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Hattasan, N.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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Healy, N.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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Hsu, S. H.

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Hu, Y.

Jessop, P. E.

Ju, L.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
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M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
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Karar, A. S.

Ke, L.

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
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Khokhar, A. Z.

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Krishnamoorthy, A. V.

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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
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M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
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Leo, F.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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Leuthold, J.

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Li, T.

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M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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Y. Liu, C. W. Chow, W. Y. Cheung, H. K. Tsang, “In-line channel power monitor based on helium ion implantation in silicon-on-insulator waveguides,” IEEE Photon. Technol. Lett. 18(17), 1882–1884 (2006).
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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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D. Feng, S. Liao, H. Liang, J. Fong, B. Bijlani, R. Shafiiha, B. J. Luff, Y. Luo, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High speed GeSi electro-absorption modulator at 1550 nm wavelength on SOI waveguide,” Opt. Express 20(20), 22224–22232 (2012).
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Luo, Y.

Lyszczarz, T. M.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
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M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
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Mashanovich, G. Z.

Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, A. Z. Khokhar, C. J. Mitchell, G. T. Reed, G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39(6), 1406–1409 (2014).
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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Nedeljkovic, A. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, D. J. Thomson, F. Y. Gardes, H. M. H. Chong, G. T. Reed, G. Z. Mashanovich, “Silicon photonic devices and platforms for the mid-infrared,” Opt. Mater. Express 3(9), 1205–1214 (2013).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E.-J. Teo, Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express 19(8), 7112–7119 (2011).
[CrossRef] [PubMed]

M. Nedeljkovic, R. Soref, G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14 um wavelength range,” IEEE Journal of Photonics 3(6), 1171–1180 (2011).
[CrossRef]

Miloševic, M. M.

Mitchell, C. J.

Mookherjea, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
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Moro, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

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G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

Nedeljkovic, M.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

M. Nedeljkovic, A. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, D. J. Thomson, F. Y. Gardes, H. M. H. Chong, G. T. Reed, G. Z. Mashanovich, “Silicon photonic devices and platforms for the mid-infrared,” Opt. Mater. Express 3(9), 1205–1214 (2013).
[CrossRef]

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E.-J. Teo, Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express 19(8), 7112–7119 (2011).
[CrossRef] [PubMed]

M. Nedeljkovic, R. Soref, G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14 um wavelength range,” IEEE Journal of Photonics 3(6), 1171–1180 (2011).
[CrossRef]

Ophir, N.

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

Osgood, R.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Osgood, R. M.

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

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Owens, N.

Paez, D. J.

Palmer, R.

Park, J. S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Pathak, S.

Peacock, A. C.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Penades, J. S.

Peters, J. D.

Polzer, A.

Radic, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
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Rice, P. M.

Rodriguez, J.-B.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Roelkens, G.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

Ryckeboer, E.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

Schulein, R. T.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Shafiiha, R.

D. Feng, S. Liao, H. Liang, J. Fong, B. Bijlani, R. Shafiiha, B. J. Luff, Y. Luo, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High speed GeSi electro-absorption modulator at 1550 nm wavelength on SOI waveguide,” Opt. Express 20(20), 22224–22232 (2012).
[CrossRef] [PubMed]

J. K. Doylend, A. P. Knights, B. J. Luff, R. Shafiiha, M. Asghari, R. M. Gwilliam, “Modifying functionality of variable optical attenuator to signal monitoring through defect engineering,” Electron. Lett. 46(3), 234–235 (2010).
[CrossRef]

Shank, S. M.

Shankar, R.

R. Shankar, I. Bulu, M. Lončar, “Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared,” Appl. Phys. Lett. 102(5), 051108 (2013).
[CrossRef]

Shen, L.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Sheng, Z.

Shimura, Y.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Smith, B. T.

Soler Penades, J.

Soref, R.

M. Nedeljkovic, R. Soref, G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14 um wavelength range,” IEEE Journal of Photonics 3(6), 1171–1180 (2011).
[CrossRef]

Souhan, B.

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
[CrossRef]

Spector, S. J.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Stankovic, S.

Tang, Y.

Teo, E.-J.

Thomson, D. J.

Topuria, T.

Tournié, E.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

Tsang, H. K.

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. K. Fung, Y. M. Chen, H. K. Tsang, “Focusing subwavelength grating coupler for mid-infrared suspended membrane waveguide,” Opt. Lett. 37(7), 1217–1219 (2012).
[CrossRef] [PubMed]

Y. Liu, C. W. Chow, W. Y. Cheung, H. K. Tsang, “In-line channel power monitor based on helium ion implantation in silicon-on-insulator waveguides,” IEEE Photon. Technol. Lett. 18(17), 1882–1884 (2006).
[CrossRef]

Ulin-Avila, E.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Van Camp, M. A.

Van Campenhout, J.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[CrossRef] [PubMed]

Van Thourhout, D.

Verheyen, P.

Vincent, B.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

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Wang, F.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Wang, X.

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

Wieland, J.

Wilson, P.

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

Wong, C. Y.

Xiong, B.

Xu, J.

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

Xu, K.

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. K. Fung, Y. M. Chen, H. K. Tsang, “Focusing subwavelength grating coupler for mid-infrared suspended membrane waveguide,” Opt. Lett. 37(7), 1217–1219 (2012).
[CrossRef] [PubMed]

Yin, X.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Yoon, J. U.

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Yu, H.

Zentgraf, T.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Zhang, X.

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Zheng, D. W.

Zimmermann, H.

Zlatanovic, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Appl. Phys. Lett. (1)

R. Shankar, I. Bulu, M. Lončar, “Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared,” Appl. Phys. Lett. 102(5), 051108 (2013).
[CrossRef]

Electron. Lett. (1)

J. K. Doylend, A. P. Knights, B. J. Luff, R. Shafiiha, M. Asghari, R. M. Gwilliam, “Modifying functionality of variable optical attenuator to signal monitoring through defect engineering,” Electron. Lett. 46(3), 234–235 (2010).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, C. Hu, B. Kuyken, F. Leo, A. Malik, M. Muneeb, E. Ryckeboer, Z. Hens, R. Baets, Y. Shimura, F. Gencarelli, B. Vincent, R. Loo, J. Van Campenhout, L. Cerutti, J.-B. Rodriguez, E. Tournié, X. Chen, M. Nedeljkovic, G. Z. Mashanovich, L. Shen, N. Healy, A. C. Peacock, X. Liu, R. Osgood, W. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8201511 (2014).
[CrossRef]

IEEE Journal of Photonics (1)

M. Nedeljkovic, R. Soref, G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14 um wavelength range,” IEEE Journal of Photonics 3(6), 1171–1180 (2011).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kaertner, T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with high responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett. 19(3), 152–154 (2007).
[CrossRef]

Y. Liu, C. W. Chow, W. Y. Cheung, H. K. Tsang, “In-line channel power monitor based on helium ion implantation in silicon-on-insulator waveguides,” IEEE Photon. Technol. Lett. 18(17), 1882–1884 (2006).
[CrossRef]

B. Souhan, C. P. Chen, R. R. Grote, J. B. Driscoll, N. Ophir, K. Bergman, R. M. Osgood, “Error-free operation of an all-silicon waveguide photodiode at 1.9 μm,” IEEE Photon. Technol. Lett. 25(21), 2031–2034 (2013).
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H. K. Fan, A. K. Ramdas, “Infrared absorption and photoconductivity in irradiated silicon,” J. Appl. Phys. 30(8), 1127–1134 (1959).
[CrossRef]

J. Lightwave Technol. (1)

Nanophotonics (1)

G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, D. J. Thomson, L. Ke, P. Wilson, S.-W. Chen, S. H. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 0(0), 1–18 (2013).
[CrossRef]

Nat. Photonics (2)

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, J. Xu, “High responsivity graphene/silicon heterostructure waveguide photodetectors,” Nat. Photonics 7(11), 888–891 (2013).
[CrossRef]

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Nature (1)

M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang, X. Zhang, “A graphene-based broadband optical modulator,” Nature 474(7349), 64–67 (2011).
[CrossRef] [PubMed]

Opt. Express (10)

L. Alloatti, D. Korn, R. Palmer, D. Hillerkuss, J. Li, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, P. Dumon, R. Baets, C. Koos, W. Freude, J. Leuthold, “42.7 Gbit/s electro-optic modulator in silicon technology,” Opt. Express 19(12), 11841–11851 (2011).
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M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, G. Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
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G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E.-J. Teo, Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express 19(8), 7112–7119 (2011).
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D. Feng, S. Liao, H. Liang, J. Fong, B. Bijlani, R. Shafiiha, B. J. Luff, Y. Luo, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High speed GeSi electro-absorption modulator at 1550 nm wavelength on SOI waveguide,” Opt. Express 20(20), 22224–22232 (2012).
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Opt. Mater. Express (1)

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A. Narasimha, S. Abdalla, C. Bradbury, A. Clark, J. Clymore, J. Coyne, A. Dahl, S. Gloeckner, A. Gruenberg, D. Guckenberger, S. Gutierrez, M. Harrison, D. Kucharski, K. Leap, R. LeBlanc, Y. Liang, M. Mack, D. Martinez, G. Masini, A. Mekis, R. Menigoz, C. Ogden, M. Peterson, T. Pinguet, J. Redman, J. Rodriguez, S. Sahni, M. Sharp, T. J. Sleboda, D. Song, Y. Wang, B. Welch, J. Witzens, W. Xu, K. Yokoyama, and P. De Dobbelaere, “An ultra low power CMOS photonics technology platform for H/S optoelectronic transceivers at less than $1 per Gbps,” Proceedings of Optical Fibre Conference 2010 OMV4, 1–3 (2010).
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Figures (2)

Fig. 1
Fig. 1

Schematic of setup with device layout (a). Responsivity versus wavelength for the detector with boron implantation dose of (b) 1x1012.cm−2, (c) 5x1012.cm−2, and (d) 1x1013.cm−2.

Fig. 2
Fig. 2

Normalised transmission versus drive current at 1.31µm, 1.55µm, 2µm and 2.5µm.

Metrics