Abstract

A highly efficient silicon (Si) hybrid external cavity laser with a wavelength tunable ring reflector is fabricated on a complementary metal-oxide semiconductor (CMOS)-compatible Si-on-insulator (SOI) platform and experimental results with high output power are demonstrated. A III-V semiconductor gain chip is edge-coupled into a SOI cavity chip through a SiNx spot size converter and Si grating couplers are incorporated to enable wafer-scale characterization. The laser output power reaches 20 mW and the highest wall-plug efficiency of 7.8% is measured at 17.3 mW in un-cooled condition. The laser wavelength tuning ranges are 8 nm for the single ring reflector cavity and 35 nm for the vernier ring reflector cavity, respectively. The Si hybrid laser is a promising light source for energy-efficient Si CMOS photonic links.

© 2014 Optical Society of America

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2013 (2)

2012 (3)

2011 (2)

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

2010 (3)

2009 (3)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

L. Vivien, J. Osmond, J.-M. Fédéli, D. Marris-Morini, P. Crozat, J.-F. Damlencourt, E. Cassan, Y. Lecunff, S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009).
[CrossRef] [PubMed]

2008 (1)

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

2006 (2)

2005 (1)

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Amberg, P.

Asghari, M.

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Beals, M.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Bernadis, S.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Bickford, J.

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Bijlani, B. J.

Bordel, D.

Bovington, J.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Bowers, J. E.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

Cassan, E.

Chen, H.-W.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Cheng, J.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Chu, T.

Cohen, O.

Crozat, P.

Cunningham, J.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Cunningham, J. E.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Damlencourt, J.-F.

Djordjevic, S. S.

Dong, P.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Duan, G. H.

Ezaki, M.

Fang, A. W.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

Fathololoumi, S.

Fathpour, S.

Fedeli, J.-M.

Fédéli, J.-M.

Feng, D.

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Feng, N.-N.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Fong, J.

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Fujioka, N.

Fukuda, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Furuyama, H.

Ho, R.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Iizuka, N.

Ishizaka, M.

Itabashi, S.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Jacob-Mitos, M.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Jalali, B.

Jany, C.

Jeong, S.-H.

Jones, R.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

Keyvaninia, S.

Kimerling, L. C.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Kobayashi, K.

Koch, B. R.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Kojima, A.

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Krishnamoorthy, A. V.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Kung, C.-C.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Kurahashi, T.

Lamponi, M.

Laval, S.

Le Liepvre, A.

Lecunff, Y.

Lee, D. C.

Lee, J.-H.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Lelarge, F.

Lexau, J.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Li, G.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Liang, D.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Liang, H.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Liao, L.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Liao, S.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Lin, S.

Liu, F.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

Liu, J.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Luff, B. J.

Luo, Y.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Make, D.

Marris-Morini, D.

Mekis, A.

Michel, J.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Morita, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Morito, K.

Nakamura, K.

Ohira, K.

Osmond, J.

Paniccia, M. J.

Park, H.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

Pinckney, N.

Pinguet, T.

Pomerence, A.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Qian, W.

Raj, K.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Roelkens, G.

Schwetman, H.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Seddighian, P.

Sekiguchi, S.

Shafiiha, R.

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Shi, J.

Shibata, H.

Shoji, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Shubin, I.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Sung, R.

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Sysak, M. N.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Takahashi, J.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Takahashi, M.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Tamechika, E.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Tanaka, S.

Tanaka, Y.

Tang, Y.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Thacker, H.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Thacker, H. D.

Tsuchizawa, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Uemura, H.

Van Thourhout, D.

Vivien, L.

Watanabe, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Wong, K.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

Yamada, K.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

Yao, J.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Yoshida, H.

Zheng, D.

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

Zheng, X.

X. Zheng, S. Lin, Y. Luo, J. Yao, G. Li, S. S. Djordjevic, J.-H. Lee, H. D. Thacker, I. Shubin, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Efficient WDM Laser Sources Towards Terabyte/s Silicon Photonic Interconnects,” J. Lightwave Technol. 31(24), 4142–4154 (2013).
[CrossRef]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

Zilkie, A. J.

Appl. Phys. Lett. (1)

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
[CrossRef]

IEEE J. Sel. Top. Quant. (2)

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, J. E. Bowers, “Device and integration technology for silicon photonic transmitters,” IEEE J. Sel. Top. Quant. 17(3), 671–688 (2011).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quant. 11(1), 232–240 (2005).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “A 2 pJ/bit(on-chip) 10 Gbps digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett. 24(14), 1260–1262 (2012).
[CrossRef]

J. Lightwave Technol. (3)

Nat. Photonics (1)

J. Liu, M. Beals, A. Pomerence, S. Bernadis, R. Sung, J. Cheng, L. C. Kimerling, J. Michel, “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulator,” Nat. Photonics 2(7), 433–437 (2008).
[CrossRef]

Opt. Express (8)

L. Vivien, J. Osmond, J.-M. Fédéli, D. Marris-Morini, P. Crozat, J.-F. Damlencourt, E. Cassan, Y. Lecunff, S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009).
[CrossRef] [PubMed]

X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express 18(3), 3059–3070 (2010).
[CrossRef] [PubMed]

K. Ohira, K. Kobayashi, N. Iizuka, H. Yoshida, M. Ezaki, H. Uemura, A. Kojima, K. Nakamura, H. Furuyama, H. Shibata, “On-chip optical interconnection by using integrated III-V laser diode and photodetector with silicon waveguide,” Opt. Express 18(15), 15440–15447 (2010).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[CrossRef] [PubMed]

A. J. Zilkie, P. Seddighian, B. J. Bijlani, W. Qian, D. C. Lee, S. Fathololoumi, J. Fong, R. Shafiiha, D. Feng, B. J. Luff, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, M. Asghari, “Power-efficient III-V/Silicon external cavity DBR lasers,” Opt. Express 20(21), 23456–23462 (2012).
[CrossRef] [PubMed]

S. Tanaka, S.-H. Jeong, S. Sekiguchi, T. Kurahashi, Y. Tanaka, K. Morito, “High-output-power, single-wavelength silicon hybrid laser using precise flip-chip bonding technology,” Opt. Express 20(27), 28057–28069 (2012).
[CrossRef] [PubMed]

S. Keyvaninia, G. Roelkens, D. Van Thourhout, C. Jany, M. Lamponi, A. Le Liepvre, F. Lelarge, D. Make, G. H. Duan, D. Bordel, J.-M. Fedeli, “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser,” Opt. Express 21(3), 3784–3792 (2013).
[CrossRef] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14(20), 9203–9210 (2006).
[CrossRef] [PubMed]

Proc. IEEE (1)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Other (1)

J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J.-H. Lee, J. Bickford, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating coupler” in Proceedings of IEEE Optical Interconnects Conference (Santa Fe, NM, 2013) pp. 31–32.
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Edge-coupled Si hybrid external cavity laser: (a) A schematic view of the hybrid laser. Inset shows a photograph of the experimental setup of the edge-coupled RSOA and SOI chip. Optical micrograph of (b) the fiber GC and (c) the single ring reflector with integrated metal micro-heater (c). SEM images of (d) SiNx SSC, (e) the slab taper section, and (f) 5-μm-radius single ring resonator.

Fig. 2
Fig. 2

(a) Simulation results for the mode conversion loss of 3 × 3 μm SiNx SSC with the corresponding refractive index of the dielectric overcladding. (b) Mode propagation profile with our optimized SiNx SSC design where 300 nm SOI WG mode is converted to 3 μm SiNx WG mode.

Fig. 3
Fig. 3

(a) Optical micrograph of the vernier ring reflector with integrated micro-heaters. (b) SEM image of the vernier ring. The width of the ring waveguide is 480 nm and the common bus waveguide (300 nm width) is located between two ring resonators.

Fig. 4
Fig. 4

L-I-V curve of edge-coupled hybrid laser. Blue and red curve are L-I and I-V curves correspondingly (a). Extracted experimental WPE (b).

Fig. 5
Fig. 5

Linewidth measurement of edge-coupled hybrid laser.

Fig. 6
Fig. 6

Measured lasing wavelength tuning results. (a) Laser spectrum with different tuning power. (b) Peak lasing wavelength as a function of the micro-heater power.

Fig. 7
Fig. 7

Tuning of the lasing wavelength with the vernier ring reflector. The table shows color coded electrical tuning powers on the vernier rings (two micro-heaters: MH1, MH2).

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