Abstract

In this paper, a novel method to determine the thickness of thin metal film is put forward which uses Surface Plasmon Resonance (SPR) phase detection method. The relations between the metal film thickness and the phases of the transverse magnetic (TM) and transverse electric (TE) polarization of the reflected light are shown in the simulation results. By recording the interference patterns which contain the information of the phase differences in the experiments, the values of thickness are calculated. Both of the theoretical analysis and experimental results indicate that the approach presented is feasible and reliable. Thus, it is possible to use the method of phase detection to determine the thickness of thin metal films within 100nm in SPR prism couplers directly with nanometer resolution.

© 2014 Optical Society of America

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References

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  1. B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983).
    [CrossRef]
  2. R. B. M. Schasfoort and A. J. Tudos, Handbook of Surface Plasmon Resonance (Royal Society of Chemistry, 2008).
  3. R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006).
    [CrossRef]
  4. M. Piliarik, J. Homola, “Surface plasmon resonance (SPR) sensors: approaching their limits?” Opt. Express 17(19), 16505–16517 (2009).
    [CrossRef] [PubMed]
  5. Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
    [CrossRef]
  6. C. Caucheteur, Y. Shevchenko, L.-Y. Shao, M. Wuilpart, J. Albert, “High resolution interrogation of tilted fiber grating SPR sensors from polarization properties measurement,” Opt. Express 19(2), 1656–1664 (2011).
    [CrossRef] [PubMed]
  7. A. Shalabney, I. Abdulhalim, “Figure-of-merit enhancement of surface plasmon resonance sensors in the spectral interrogation,” Opt. Lett. 37(7), 1175–1177 (2012).
    [CrossRef] [PubMed]
  8. K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
    [CrossRef]
  9. A. V. Kabashin, P. I. Nikitin, “Surface-plasmon resonance interferometer for bio- and chemical-sensors,” Opt. Commun. 150(1-6), 5–8 (1998).
    [CrossRef]
  10. A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999).
    [CrossRef]
  11. H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002).
    [CrossRef]
  12. H. P. Ho, W. W. Lam, “Application of differential phase measurement technique to surface plasmon resonance sensors,” Sens. Actuators B Chem. 96(3), 554–559 (2003).
    [CrossRef]
  13. Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
    [CrossRef]
  14. T.-J. Wang, C.-W. Hsieh, “Surface plasmon resonance biosensor based on electro-optically modulated phase detection,” Opt. Lett. 32(19), 2834–2836 (2007).
    [CrossRef] [PubMed]
  15. S. Patskovsky, M. Vallieres, M. Maisonneuve, I. H. Song, M. Meunier, A. V. Kabashin, “Designing efficient zero calibration point for phase-sensitive surface plasmon resonance biosensing,” Opt. Express 17(4), 2255–2263 (2009).
    [CrossRef] [PubMed]
  16. T. Yang, H. P. Ho, “Computational investigation of nanohole array based SPR sensing using phase shift,” Opt. Express 17(13), 11205–11216 (2009).
    [CrossRef] [PubMed]
  17. A. V. Kabashin, S. Patskovsky, A. N. Grigorenko, “Phase and amplitude sensitivities in surface plasmon resonance bio and chemical sensing,” Opt. Express 17(23), 21191–21204 (2009).
    [CrossRef] [PubMed]
  18. Y. H. Huang, H. P. Ho, S. Y. Wu, S. K. Kong, W. W. Wong, P. Shum, “Phase sensitive SPR sensor for wide dynamic range detection,” Opt. Lett. 36(20), 4092–4094 (2011).
    [CrossRef] [PubMed]
  19. H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer-Verlag, 1988).
  20. M. Piliarik and J. Homola, SPR Sensor Instrumentation (Springer-Verlag, 2006).
  21. J. Homola and J. Dostálek, Surface Plasmon Resonance Based Sensors (Springer-Verlag, 2006).
  22. Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003).
    [CrossRef]
  23. J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
    [CrossRef]
  24. J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
    [CrossRef]
  25. C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013).
    [CrossRef]
  26. M. Born and E. Wolf, Principles of Optics 7th ed. (Cambridge University Press, 1999).
  27. J. H. Weaver and H. P. R. Frederikse, Optical Properties of Selected Elements 82 ed. (CRC Press, 2001).

2013 (2)

K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
[CrossRef]

C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013).
[CrossRef]

2012 (2)

A. Shalabney, I. Abdulhalim, “Figure-of-merit enhancement of surface plasmon resonance sensors in the spectral interrogation,” Opt. Lett. 37(7), 1175–1177 (2012).
[CrossRef] [PubMed]

Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
[CrossRef]

2011 (3)

2010 (1)

Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
[CrossRef]

2009 (4)

2008 (1)

J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
[CrossRef]

2007 (1)

2006 (1)

R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006).
[CrossRef]

2003 (2)

H. P. Ho, W. W. Lam, “Application of differential phase measurement technique to surface plasmon resonance sensors,” Sens. Actuators B Chem. 96(3), 554–559 (2003).
[CrossRef]

Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003).
[CrossRef]

2002 (1)

H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002).
[CrossRef]

1999 (1)

A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999).
[CrossRef]

1998 (1)

A. V. Kabashin, P. I. Nikitin, “Surface-plasmon resonance interferometer for bio- and chemical-sensors,” Opt. Commun. 150(1-6), 5–8 (1998).
[CrossRef]

1983 (1)

B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983).
[CrossRef]

Abdulhalim, I.

Albert, J.

Cao, Z. Q.

J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
[CrossRef]

Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003).
[CrossRef]

Caucheteur, C.

Chen, G.

J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
[CrossRef]

Ding, Y.

Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003).
[CrossRef]

Geng, Z. X.

Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
[CrossRef]

Grigorenko, A. N.

Gu, J. H.

J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
[CrossRef]

Ho, H. P.

Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
[CrossRef]

Y. H. Huang, H. P. Ho, S. Y. Wu, S. K. Kong, W. W. Wong, P. Shum, “Phase sensitive SPR sensor for wide dynamic range detection,” Opt. Lett. 36(20), 4092–4094 (2011).
[CrossRef] [PubMed]

T. Yang, H. P. Ho, “Computational investigation of nanohole array based SPR sensing using phase shift,” Opt. Express 17(13), 11205–11216 (2009).
[CrossRef] [PubMed]

H. P. Ho, W. W. Lam, “Application of differential phase measurement technique to surface plasmon resonance sensors,” Sens. Actuators B Chem. 96(3), 554–559 (2003).
[CrossRef]

H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002).
[CrossRef]

Homola, J.

Hsieh, C.-W.

Huang, Y. H.

Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
[CrossRef]

Y. H. Huang, H. P. Ho, S. Y. Wu, S. K. Kong, W. W. Wong, P. Shum, “Phase sensitive SPR sensor for wide dynamic range detection,” Opt. Lett. 36(20), 4092–4094 (2011).
[CrossRef] [PubMed]

Kabashin, A. V.

Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
[CrossRef]

S. Patskovsky, M. Vallieres, M. Maisonneuve, I. H. Song, M. Meunier, A. V. Kabashin, “Designing efficient zero calibration point for phase-sensitive surface plasmon resonance biosensing,” Opt. Express 17(4), 2255–2263 (2009).
[CrossRef] [PubMed]

A. V. Kabashin, S. Patskovsky, A. N. Grigorenko, “Phase and amplitude sensitivities in surface plasmon resonance bio and chemical sensing,” Opt. Express 17(23), 21191–21204 (2009).
[CrossRef] [PubMed]

A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999).
[CrossRef]

A. V. Kabashin, P. I. Nikitin, “Surface-plasmon resonance interferometer for bio- and chemical-sensors,” Opt. Commun. 150(1-6), 5–8 (1998).
[CrossRef]

Kochergin, V. E.

A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999).
[CrossRef]

Kong, S. K.

Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
[CrossRef]

Y. H. Huang, H. P. Ho, S. Y. Wu, S. K. Kong, W. W. Wong, P. Shum, “Phase sensitive SPR sensor for wide dynamic range detection,” Opt. Lett. 36(20), 4092–4094 (2011).
[CrossRef] [PubMed]

Lam, W. W.

H. P. Ho, W. W. Lam, “Application of differential phase measurement technique to surface plasmon resonance sensors,” Sens. Actuators B Chem. 96(3), 554–559 (2003).
[CrossRef]

H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002).
[CrossRef]

Levy, R.

R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006).
[CrossRef]

Li, Q.

Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
[CrossRef]

Li, T. T.

C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013).
[CrossRef]

J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
[CrossRef]

Li, Z. H.

Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
[CrossRef]

Liedberg, B.

B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983).
[CrossRef]

Liu, C.

C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013).
[CrossRef]

J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
[CrossRef]

Liu, Q. G.

C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013).
[CrossRef]

J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
[CrossRef]

Liu, S. Y.

J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
[CrossRef]

Lunström, I.

B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983).
[CrossRef]

Maisonneuve, M.

Meunier, M.

Murukeshan, V. M.

K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
[CrossRef]

Nikitin, P. I.

A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999).
[CrossRef]

A. V. Kabashin, P. I. Nikitin, “Surface-plasmon resonance interferometer for bio- and chemical-sensors,” Opt. Commun. 150(1-6), 5–8 (1998).
[CrossRef]

Nylander, C.

B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983).
[CrossRef]

Patskovsky, S.

Peled, A.

R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006).
[CrossRef]

Piliarik, M.

Ramya, B.

K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
[CrossRef]

Ruschin, S.

R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006).
[CrossRef]

Sathiyamoorthy, K.

K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
[CrossRef]

Shalabney, A.

Shao, L.-Y.

Shen, Q. S.

J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
[CrossRef]

Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003).
[CrossRef]

Shevchenko, Y.

Shum, P.

Song, I. H.

Sun, X. W.

K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
[CrossRef]

Vallieres, M.

Wang, T.-J.

Wang, W.

Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
[CrossRef]

Wong, W. W.

Wu, S. Y.

Y. H. Huang, H. P. Ho, S. Y. Wu, S. K. Kong, W. W. Wong, P. Shum, “Phase sensitive SPR sensor for wide dynamic range detection,” Opt. Lett. 36(20), 4092–4094 (2011).
[CrossRef] [PubMed]

H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002).
[CrossRef]

Wuilpart, M.

Xin, J. D.

J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
[CrossRef]

Yang, T.

Adv. Mater. Res. (1)

J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011).
[CrossRef]

Ann. Phys. (1)

Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012).
[CrossRef]

J. Phys. D Appl. Phys. (1)

J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008).
[CrossRef]

Key Eng. Mater. (1)

C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013).
[CrossRef]

Opt. Commun. (1)

A. V. Kabashin, P. I. Nikitin, “Surface-plasmon resonance interferometer for bio- and chemical-sensors,” Opt. Commun. 150(1-6), 5–8 (1998).
[CrossRef]

Opt. Express (5)

Opt. Lett. (3)

Opt. Quantum Electron. (1)

Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003).
[CrossRef]

Rev. Sci. Instrum. (1)

H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002).
[CrossRef]

Sci. China Inf. Sci. (1)

Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010).
[CrossRef]

Sens. Actuators A Phys. (1)

K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013).
[CrossRef]

Sens. Actuators B Chem. (4)

B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983).
[CrossRef]

H. P. Ho, W. W. Lam, “Application of differential phase measurement technique to surface plasmon resonance sensors,” Sens. Actuators B Chem. 96(3), 554–559 (2003).
[CrossRef]

A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999).
[CrossRef]

R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006).
[CrossRef]

Other (6)

H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer-Verlag, 1988).

M. Piliarik and J. Homola, SPR Sensor Instrumentation (Springer-Verlag, 2006).

J. Homola and J. Dostálek, Surface Plasmon Resonance Based Sensors (Springer-Verlag, 2006).

R. B. M. Schasfoort and A. J. Tudos, Handbook of Surface Plasmon Resonance (Royal Society of Chemistry, 2008).

M. Born and E. Wolf, Principles of Optics 7th ed. (Cambridge University Press, 1999).

J. H. Weaver and H. P. R. Frederikse, Optical Properties of Selected Elements 82 ed. (CRC Press, 2001).

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Figures (8)

Fig. 1
Fig. 1

Kretschmann-Raether configuration of ATR method.

Fig. 2
Fig. 2

Phase as a function of the metal film thickness for TM and TE polarization Configuration: BK7 glass (np = 1.51), gold film (εm = – 10.6 + i0.81 [27]), air (na = 1), λ = 632.8 nm, θSPR = 43.9°.

Fig. 3
Fig. 3

Phase difference of TM and TE polarization as a function of the metal film thickness.

Fig. 4
Fig. 4

Schematic diagram of the experimental setup.

Fig. 5
Fig. 5

Schematic diagram of the interference pattern.

Fig. 6
Fig. 6

Typical images of interference pattern in reference substrate (a), gold film (b) and transition (c) region.

Fig. 7
Fig. 7

Step height of gold film on the silicon chip measured by AFM.

Fig. 8
Fig. 8

Error bar of three experiments.

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

2π λ n p sin θ SPR = k x =Re( β )=Re( 2π λ ε m n a 2 ε m + n a 2 )
sin θ SPR = Re( ε m n a 2 ε m + n a 2 ) n p
r pma =| r pma | e iϕ = r pm + r ma e 2i k mz d 1+ r pm r ma e 2i k mz d
ϕ=arg( r pma )= tan 1 ( r ma ( 1 r pm 2 )sin( 2 k mz d ) r pm ( 1+ r ma 2 )+ r ma ( 1+ r pm 2 )cos( 2 k mz d ) )
Δϕ( d )= ϕ TM ( d ) ϕ TE ( d )
I= I 1 + I 2 +2 I 1 I 2 cos[ 2π λ ΔS+Δϕ( d ) ]
x 2 x 1 x 3 x 1 = Δϕ( d )Δϕ( 0 ) 2π

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