Y. Kim, K. Hibino, N. Sugita, and M. Mitsuishi, “Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer,” Opt. Lasers Eng. 51(10), 1173–1178 (2013).
[Crossref]
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4(4), 507–515 (1997).
[Crossref]
H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955–960 (1980).
T. Young, “Experimental Demonstration of the General Law of the Interference of Light,” Philos. Trans. R. Soc. Lond. 94, 1804 (1804).
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4(4), 507–515 (1997).
[Crossref]
Y. Kim, K. Hibino, N. Sugita, and M. Mitsuishi, “Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer,” Opt. Lasers Eng. 51(10), 1173–1178 (2013).
[Crossref]
K. Hibino, B. F. Oreb, P. S. Fairman, and J. Burke, “Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer,” Appl. Opt. 43(6), 1241–1249 (2004).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
Y. Kim, K. Hibino, N. Sugita, and M. Mitsuishi, “Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer,” Opt. Lasers Eng. 51(10), 1173–1178 (2013).
[Crossref]
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
Y. Kim, K. Hibino, N. Sugita, and M. Mitsuishi, “Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer,” Opt. Lasers Eng. 51(10), 1173–1178 (2013).
[Crossref]
H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955–960 (1980).
M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4(4), 507–515 (1997).
[Crossref]
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4(4), 507–515 (1997).
[Crossref]
Y. Kim, K. Hibino, N. Sugita, and M. Mitsuishi, “Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer,” Opt. Lasers Eng. 51(10), 1173–1178 (2013).
[Crossref]
M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4(4), 507–515 (1997).
[Crossref]
H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955–960 (1980).
T. Young, “Experimental Demonstration of the General Law of the Interference of Light,” Philos. Trans. R. Soc. Lond. 94, 1804 (1804).
V. Bodlaj and E. Klement, “Remote measurement of distance and thickness using a deflected laser beam,” Appl. Opt. 15(6), 1432–1436 (1976).
[Crossref]
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T. Fukano and I. Yamaguchi, “Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope,” Appl. Opt. 38(19), 4065–4073 (1999).
[Crossref]
[PubMed]
J. Räsänen and K. E. Peiponen, “On-line measurement of the thickness and optical quality of float glass with a sensor based on a diffractive element,” Appl. Opt. 40(28), 5034–5039 (2001).
[Crossref]
[PubMed]
K. Hibino, B. F. Oreb, P. S. Fairman, and J. Burke, “Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer,” Appl. Opt. 43(6), 1241–1249 (2004).
[Crossref]
[PubMed]
C.-H. Liu and Z.-H. Li, “Application of the astigmatic method to the thickness measurement of glass substrates,” Appl. Opt. 47(21), 3968–3972 (2008).
[Crossref]
[PubMed]
H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955–960 (1980).
Y. Kim, K. Hibino, N. Sugita, and M. Mitsuishi, “Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer,” Opt. Lasers Eng. 51(10), 1173–1178 (2013).
[Crossref]
M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4(4), 507–515 (1997).
[Crossref]
T. Young, “Experimental Demonstration of the General Law of the Interference of Light,” Philos. Trans. R. Soc. Lond. 94, 1804 (1804).
V. Protopopov, S. Cho, K. Kim, S. Lee, H. Kim, and D. Kim, “Heterodyne double-channel polarimeter for mapping birefringence and thickness of flat glass panels,” Rev. Sci. Instrum. 77(5), 053107 (2006).
[Crossref]
V. Protopopov, S. Cho, K. Kim, S. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78(7), 076101 (2007).
[Crossref]
[PubMed]
ISO 16610–21:2011, Geometrical product specifications (GPS)–Filtration–Part 21: Linear profile filters: Gaussian filters (2011).
ISO 4287:1997, Geometrical Product Specifications (GPS) – Surface texture: Profile method – Terms, definitions and surface texture parameters (1997).