Z. Han, L. Chen, T. Wulan, and R. Zhu, “The absolute flatness measurements of two aluminum coated mirrors based on the skip flat test,” Optik (Stuttg.) 124(19), 3781–3785 (2013).

M. Vannoni, A. Sordini, and G. Molesini, “Calibration of absolute planarity flats: generalized iterative approach,” Opt. Eng. 51(8), 081510 (2012).

M. Zeuner and S. Kiontke, “Ion beam figuring technology in optics manufacturing,” Optik & Photonik 7(2), 56–58 (2012).

F. Siewert, J. Buchheim, S. Boutet, G. J. Williams, P. A. Montanez, J. Krzywinski, and R. Signorato, “Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry,” Opt. Express 20(4), 4525–4536 (2012).

C. Morin and S. Bouillet, “Absolute calibration of three reference flats based on an iterative algorithm: study and implementation,” Proc. Soc. Photo Opt. Instrum. Eng. 8169, 816915 (2011).

M. Vannoni, A. Sordini, and G. Molesini, “Relaxation time and viscosity of fused silica glass at room temperature,” Eur Phys J E Soft Matter 34(9), 92 (2011).

M. Vannoni, A. Sordini, and G. Molesini, “Long-term deformation at room temperature observed in fused silica,” Opt. Express 18(5), 5114–5123 (2010).

L. Zhang, B. Xuan, and J. Xie, “Combination of skip-flat test with Ritchey-Common test for the large rectangular flat,” Proc. SPIE 7656, 76564W (2010).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

M. Weiser, “Ion beam figuring for lithography optics,” Nucl. Instrum. Methods Phys. Res. B 267(8-9), 1390–1393 (2009).

J. Arkwright, J. Burke, and M. Gross, “A deterministic optical figure correction technique that preserves precision-polished surface quality,” Opt. Express 16(18), 13901–13907 (2008).

M. Vannoni and G. Molesini, “Absolute planarity with three-flat test: an iterative approach with Zernike polynomials,” Opt. Express 16(1), 340–354 (2008).

M. Vannoni and G. Molesini, “Three-flat test with plates in horizontal posture,” Appl. Opt. 47(12), 2133–2145 (2008).

U. Griesmann, Q. Wang, and J. Soons, “Three-flat tests including mounting-induced deformations,” Opt. Eng. 46(9), 093601 (2007).

M. Vannoni and G. Molesini, “Iterative algorithm for three flat test,” Opt. Express 15(11), 6809–6816 (2007).

J. Yellowhair and J. H. Burge, “Analysis of a scanning pentaprism system for measurements of large flat mirrors,” Appl. Opt. 46(35), 8466–8474 (2007).

R. D. Geckeler, “Optimal use of pentaprism in highly accurate deflectometric scanning,” Meas. Sci. Technol. 18(1), 115–125 (2007).

P. C. V. Mallik, C. Zhao, and J. H. Burge, “Measurement of a 2m flat using a pentaprism scanning system,” Opt. Eng. 46, 023602 (2007).

M. Schulz and C. Elster, “Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution,” Opt. Eng. 45(6), 060503 (2006).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

M. F. Küchel, “A new approach to solve the three flat problem,” Optik (Stuttg.) 112(9), 381–391 (2001).

V. Greco and G. Molesini, “Micro-temperature effects on absolute flatness test plates,” Pure Appl. Opt. 7(6), 1341–1346 (1998).

R. E. Parks, L.-Z. Shao, and C. J. Evans, “Pixel-based absolute topography test for three flats,” Appl. Opt. 37(25), 5951–5956 (1998).

A. Schutze, J. Y. Jeong, S. E. Babayan, and J. Park, “The atmospheric-pressure plasma jet: a review and comparison to other plasma sources,” IEEE Trans. Plasma Sci. 26(6), 1685–1694 (1998).

P. Hariharan, “Interferometric testing of optical surfaces: absolute measurements of flatness,” Opt. Eng. 36(9), 2478–2481 (1997).

V. B. Gubin and V. N. Sharonov, “Algorithm for reconstructing the shape of optical surfaces from the results of experimental data,” Sov. J. Opt. Technol. 57, 147–148 (1990).

Y. Mori, K. Yamauchi, and K. Endo, “Elastic emission machining,” Precis. Eng. 9(3), 123–128 (1987).

B. S. Fritz, “Absolute calibration of an optical flat,” Opt. Eng. 23(4), 234379 (1984).

L. Rayleigh, “Interference bands and their applications,” Nature 48(1235), 212–214 (1893).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

A. Schutze, J. Y. Jeong, S. E. Babayan, and J. Park, “The atmospheric-pressure plasma jet: a review and comparison to other plasma sources,” IEEE Trans. Plasma Sci. 26(6), 1685–1694 (1998).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

C. Morin and S. Bouillet, “Absolute calibration of three reference flats based on an iterative algorithm: study and implementation,” Proc. Soc. Photo Opt. Instrum. Eng. 8169, 816915 (2011).

Z. Han, L. Chen, T. Wulan, and R. Zhu, “The absolute flatness measurements of two aluminum coated mirrors based on the skip flat test,” Optik (Stuttg.) 124(19), 3781–3785 (2013).

M. Schulz and C. Elster, “Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution,” Opt. Eng. 45(6), 060503 (2006).

Y. Mori, K. Yamauchi, and K. Endo, “Elastic emission machining,” Precis. Eng. 9(3), 123–128 (1987).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

B. S. Fritz, “Absolute calibration of an optical flat,” Opt. Eng. 23(4), 234379 (1984).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

R. D. Geckeler, “Optimal use of pentaprism in highly accurate deflectometric scanning,” Meas. Sci. Technol. 18(1), 115–125 (2007).

V. Greco, R. Tronconi, C. Del Vecchio, M. Trivi, and G. Molesini, “Absolute measurement of planarity with Fritz’s method: uncertainty evaluation,” Appl. Opt. 38(10), 2018–2027 (1999).

V. Greco and G. Molesini, “Micro-temperature effects on absolute flatness test plates,” Pure Appl. Opt. 7(6), 1341–1346 (1998).

U. Griesmann, Q. Wang, and J. Soons, “Three-flat tests including mounting-induced deformations,” Opt. Eng. 46(9), 093601 (2007).

V. B. Gubin and V. N. Sharonov, “Algorithm for reconstructing the shape of optical surfaces from the results of experimental data,” Sov. J. Opt. Technol. 57, 147–148 (1990).

Z. Han, L. Chen, T. Wulan, and R. Zhu, “The absolute flatness measurements of two aluminum coated mirrors based on the skip flat test,” Optik (Stuttg.) 124(19), 3781–3785 (2013).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

P. Hariharan, “Interferometric testing of optical surfaces: absolute measurements of flatness,” Opt. Eng. 36(9), 2478–2481 (1997).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

A. Schutze, J. Y. Jeong, S. E. Babayan, and J. Park, “The atmospheric-pressure plasma jet: a review and comparison to other plasma sources,” IEEE Trans. Plasma Sci. 26(6), 1685–1694 (1998).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

M. Zeuner and S. Kiontke, “Ion beam figuring technology in optics manufacturing,” Optik & Photonik 7(2), 56–58 (2012).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

M. F. Küchel, “A new approach to solve the three flat problem,” Optik (Stuttg.) 112(9), 381–391 (2001).

P. C. V. Mallik, C. Zhao, and J. H. Burge, “Measurement of a 2m flat using a pentaprism scanning system,” Opt. Eng. 46, 023602 (2007).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

M. Vannoni, A. Sordini, and G. Molesini, “Calibration of absolute planarity flats: generalized iterative approach,” Opt. Eng. 51(8), 081510 (2012).

M. Vannoni, A. Sordini, and G. Molesini, “Relaxation time and viscosity of fused silica glass at room temperature,” Eur Phys J E Soft Matter 34(9), 92 (2011).

M. Vannoni, A. Sordini, and G. Molesini, “Long-term deformation at room temperature observed in fused silica,” Opt. Express 18(5), 5114–5123 (2010).

M. Vannoni and G. Molesini, “Three-flat test with plates in horizontal posture,” Appl. Opt. 47(12), 2133–2145 (2008).

M. Vannoni and G. Molesini, “Absolute planarity with three-flat test: an iterative approach with Zernike polynomials,” Opt. Express 16(1), 340–354 (2008).

M. Vannoni and G. Molesini, “Iterative algorithm for three flat test,” Opt. Express 15(11), 6809–6816 (2007).

V. Greco, R. Tronconi, C. Del Vecchio, M. Trivi, and G. Molesini, “Absolute measurement of planarity with Fritz’s method: uncertainty evaluation,” Appl. Opt. 38(10), 2018–2027 (1999).

V. Greco and G. Molesini, “Micro-temperature effects on absolute flatness test plates,” Pure Appl. Opt. 7(6), 1341–1346 (1998).

Y. Mori, K. Yamauchi, and K. Endo, “Elastic emission machining,” Precis. Eng. 9(3), 123–128 (1987).

C. Morin and S. Bouillet, “Absolute calibration of three reference flats based on an iterative algorithm: study and implementation,” Proc. Soc. Photo Opt. Instrum. Eng. 8169, 816915 (2011).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

A. Schutze, J. Y. Jeong, S. E. Babayan, and J. Park, “The atmospheric-pressure plasma jet: a review and comparison to other plasma sources,” IEEE Trans. Plasma Sci. 26(6), 1685–1694 (1998).

L. Rayleigh, “Interference bands and their applications,” Nature 48(1235), 212–214 (1893).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

M. Schulz and C. Elster, “Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution,” Opt. Eng. 45(6), 060503 (2006).

A. Schutze, J. Y. Jeong, S. E. Babayan, and J. Park, “The atmospheric-pressure plasma jet: a review and comparison to other plasma sources,” IEEE Trans. Plasma Sci. 26(6), 1685–1694 (1998).

V. B. Gubin and V. N. Sharonov, “Algorithm for reconstructing the shape of optical surfaces from the results of experimental data,” Sov. J. Opt. Technol. 57, 147–148 (1990).

U. Griesmann, Q. Wang, and J. Soons, “Three-flat tests including mounting-induced deformations,” Opt. Eng. 46(9), 093601 (2007).

M. Vannoni, A. Sordini, and G. Molesini, “Calibration of absolute planarity flats: generalized iterative approach,” Opt. Eng. 51(8), 081510 (2012).

M. Vannoni, A. Sordini, and G. Molesini, “Relaxation time and viscosity of fused silica glass at room temperature,” Eur Phys J E Soft Matter 34(9), 92 (2011).

M. Vannoni, A. Sordini, and G. Molesini, “Long-term deformation at room temperature observed in fused silica,” Opt. Express 18(5), 5114–5123 (2010).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

M. Vannoni, A. Sordini, and G. Molesini, “Calibration of absolute planarity flats: generalized iterative approach,” Opt. Eng. 51(8), 081510 (2012).

M. Vannoni, A. Sordini, and G. Molesini, “Relaxation time and viscosity of fused silica glass at room temperature,” Eur Phys J E Soft Matter 34(9), 92 (2011).

M. Vannoni, A. Sordini, and G. Molesini, “Long-term deformation at room temperature observed in fused silica,” Opt. Express 18(5), 5114–5123 (2010).

M. Vannoni and G. Molesini, “Absolute planarity with three-flat test: an iterative approach with Zernike polynomials,” Opt. Express 16(1), 340–354 (2008).

M. Vannoni and G. Molesini, “Three-flat test with plates in horizontal posture,” Appl. Opt. 47(12), 2133–2145 (2008).

M. Vannoni and G. Molesini, “Iterative algorithm for three flat test,” Opt. Express 15(11), 6809–6816 (2007).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

U. Griesmann, Q. Wang, and J. Soons, “Three-flat tests including mounting-induced deformations,” Opt. Eng. 46(9), 093601 (2007).

M. Weiser, “Ion beam figuring for lithography optics,” Nucl. Instrum. Methods Phys. Res. B 267(8-9), 1390–1393 (2009).

Z. Han, L. Chen, T. Wulan, and R. Zhu, “The absolute flatness measurements of two aluminum coated mirrors based on the skip flat test,” Optik (Stuttg.) 124(19), 3781–3785 (2013).

L. Zhang, B. Xuan, and J. Xie, “Combination of skip-flat test with Ritchey-Common test for the large rectangular flat,” Proc. SPIE 7656, 76564W (2010).

L. Zhang, B. Xuan, and J. Xie, “Combination of skip-flat test with Ritchey-Common test for the large rectangular flat,” Proc. SPIE 7656, 76564W (2010).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

Y. Mori, K. Yamauchi, and K. Endo, “Elastic emission machining,” Precis. Eng. 9(3), 123–128 (1987).

M. Zeuner and S. Kiontke, “Ion beam figuring technology in optics manufacturing,” Optik & Photonik 7(2), 56–58 (2012).

L. Zhang, B. Xuan, and J. Xie, “Combination of skip-flat test with Ritchey-Common test for the large rectangular flat,” Proc. SPIE 7656, 76564W (2010).

P. C. V. Mallik, C. Zhao, and J. H. Burge, “Measurement of a 2m flat using a pentaprism scanning system,” Opt. Eng. 46, 023602 (2007).

Z. Han, L. Chen, T. Wulan, and R. Zhu, “The absolute flatness measurements of two aluminum coated mirrors based on the skip flat test,” Optik (Stuttg.) 124(19), 3781–3785 (2013).

J. Yellowhair and J. H. Burge, “Analysis of a scanning pentaprism system for measurements of large flat mirrors,” Appl. Opt. 46(35), 8466–8474 (2007).

R. E. Parks, L.-Z. Shao, and C. J. Evans, “Pixel-based absolute topography test for three flats,” Appl. Opt. 37(25), 5951–5956 (1998).

V. Greco, R. Tronconi, C. Del Vecchio, M. Trivi, and G. Molesini, “Absolute measurement of planarity with Fritz’s method: uncertainty evaluation,” Appl. Opt. 38(10), 2018–2027 (1999).

M. Vannoni and G. Molesini, “Three-flat test with plates in horizontal posture,” Appl. Opt. 47(12), 2133–2145 (2008).

M. Vannoni, A. Sordini, and G. Molesini, “Relaxation time and viscosity of fused silica glass at room temperature,” Eur Phys J E Soft Matter 34(9), 92 (2011).

A. Schutze, J. Y. Jeong, S. E. Babayan, and J. Park, “The atmospheric-pressure plasma jet: a review and comparison to other plasma sources,” IEEE Trans. Plasma Sci. 26(6), 1685–1694 (1998).

R. D. Geckeler, “Optimal use of pentaprism in highly accurate deflectometric scanning,” Meas. Sci. Technol. 18(1), 115–125 (2007).

L. Rayleigh, “Interference bands and their applications,” Nature 48(1235), 212–214 (1893).

T. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook,” Nucl. Instrum. Meth. A 616(2-3), 147–156 (2010).

M. Weiser, “Ion beam figuring for lithography optics,” Nucl. Instrum. Methods Phys. Res. B 267(8-9), 1390–1393 (2009).

M. Schulz and C. Elster, “Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution,” Opt. Eng. 45(6), 060503 (2006).

B. S. Fritz, “Absolute calibration of an optical flat,” Opt. Eng. 23(4), 234379 (1984).

P. C. V. Mallik, C. Zhao, and J. H. Burge, “Measurement of a 2m flat using a pentaprism scanning system,” Opt. Eng. 46, 023602 (2007).

U. Griesmann, Q. Wang, and J. Soons, “Three-flat tests including mounting-induced deformations,” Opt. Eng. 46(9), 093601 (2007).

P. Hariharan, “Interferometric testing of optical surfaces: absolute measurements of flatness,” Opt. Eng. 36(9), 2478–2481 (1997).

M. Vannoni, A. Sordini, and G. Molesini, “Calibration of absolute planarity flats: generalized iterative approach,” Opt. Eng. 51(8), 081510 (2012).

M. Vannoni, A. Sordini, and G. Molesini, “Long-term deformation at room temperature observed in fused silica,” Opt. Express 18(5), 5114–5123 (2010).

M. Vannoni and G. Molesini, “Iterative algorithm for three flat test,” Opt. Express 15(11), 6809–6816 (2007).

M. Vannoni and G. Molesini, “Absolute planarity with three-flat test: an iterative approach with Zernike polynomials,” Opt. Express 16(1), 340–354 (2008).

F. Siewert, J. Buchheim, S. Boutet, G. J. Williams, P. A. Montanez, J. Krzywinski, and R. Signorato, “Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry,” Opt. Express 20(4), 4525–4536 (2012).

J. Arkwright, J. Burke, and M. Gross, “A deterministic optical figure correction technique that preserves precision-polished surface quality,” Opt. Express 16(18), 13901–13907 (2008).

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett. 35(21), 3583–3585 (2010).

M. Zeuner and S. Kiontke, “Ion beam figuring technology in optics manufacturing,” Optik & Photonik 7(2), 56–58 (2012).

M. F. Küchel, “A new approach to solve the three flat problem,” Optik (Stuttg.) 112(9), 381–391 (2001).

Z. Han, L. Chen, T. Wulan, and R. Zhu, “The absolute flatness measurements of two aluminum coated mirrors based on the skip flat test,” Optik (Stuttg.) 124(19), 3781–3785 (2013).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

Y. Mori, K. Yamauchi, and K. Endo, “Elastic emission machining,” Precis. Eng. 9(3), 123–128 (1987).

C. Morin and S. Bouillet, “Absolute calibration of three reference flats based on an iterative algorithm: study and implementation,” Proc. Soc. Photo Opt. Instrum. Eng. 8169, 816915 (2011).

L. Zhang, B. Xuan, and J. Xie, “Combination of skip-flat test with Ritchey-Common test for the large rectangular flat,” Proc. SPIE 7656, 76564W (2010).

V. Greco and G. Molesini, “Micro-temperature effects on absolute flatness test plates,” Pure Appl. Opt. 7(6), 1341–1346 (1998).

V. B. Gubin and V. N. Sharonov, “Algorithm for reconstructing the shape of optical surfaces from the results of experimental data,” Sov. J. Opt. Technol. 57, 147–148 (1990).

D. Malacara, “Twyman-Green interferometer,” in Optical Shop Testing, third edn., D. Malacara ed., (Wiley and Sons, Hoboken 2007), pp. 78–79.

J. Ojeda-Castañeda, “Foucault, wire and phase modulation tests,” in Optical Shop Testing, third edn., D. Malacara ed., (Wiley and Sons, Hoboken 2007), pp. 310–312.