Abstract

We demonstrate an optical technique for large field of view quantitative phase imaging of reflective samples. It relies on a common-path interferometric design, which ensures high stability without the need for active stabilization. The technique provides single-shot, full-field and robust measurement of nanoscale topography of large samples. Further, the inherent stability allows reliable measurement of the temporally varying phase retardation of the liquid crystal cells, and thus enables real-time characterization of spatial light modulators. The technique’s application potential is validated through experimental results.

© 2014 Optical Society of America

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2013

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

J. C. Wyant, “Computerized interferometric surface measurements,” Appl. Opt. 52, 1–8 (2013).
[CrossRef] [PubMed]

2012

C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Optically monitoring and controlling nanoscale topography during semiconductor etching,” Light: Science & Applications 1, e30 (2012).

2011

D. M. Sykora, M. L. Holmes, “Dynamic measurements using a Fizeau interferometer,” Proc. SPIE 8082, 80821R (2011).
[CrossRef]

2010

R. Wang, D. Li, M. Hu, J. Tian, “Phase calibration of spatial light modulators by heterodyne interferometry,” Proc. SPIE 7848, 78481F (2010).
[CrossRef]

2009

2007

P. Ferraro, C. D. Core, L. Miccio, S. Grilli, S. D. Nicola, A. Finizio, G. Coppola, “Phase map retrieval in digital holography: avoiding the undersampling effect by a lateral shear approach,” Opt. Lett. 32, 2233–2235 (2007).
[CrossRef] [PubMed]

H. Zhang, J. Zhang, L. Wu, “Evaluation of phase-only liquid crystal spatial light modulator for phase modulation performance using a Twyman-Green interferometer,” Meas. Sci. Technol. 18, 1724–1728 (2007).
[CrossRef]

2006

2005

2004

2003

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

1998

1997

J. E. Castle, P. A. Zhdan, “Characterization of surface topography by SEM and SFM: Problems and solutions,” J. Phys. D: Appl. Phys. 30, 722–740 (1997).
[CrossRef]

D. J. Whitehouse, “Surface metrology,” Meas. Sci. Technol. 8, 955–972 (1997).
[CrossRef]

1994

1993

1981

Abeles, J. H.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Adesida, I.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Ambs, P.

Arbabi, A.

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Optically monitoring and controlling nanoscale topography during semiconductor etching,” Light: Science & Applications 1, e30 (2012).

Bae, J. W.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Bennett, J. M.

Beversluis, M. R.

Bhaduri, B.

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

Cao, Z.

Castle, J. E.

J. E. Castle, P. A. Zhdan, “Characterization of surface topography by SEM and SFM: Problems and solutions,” J. Phys. D: Appl. Phys. 30, 722–740 (1997).
[CrossRef]

Cho, D. J.

Cohn, R. W.

Cooper, J.

Coppola, G.

Core, C. D.

Courtial, J.

Dancy, J. H.

Dasari, R. R.

de Groot, P.

L. Deck, P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994).
[CrossRef] [PubMed]

D. M. Sykora, P. de Groot, “Instantaneous interferometry: Another view,” International Optical Design Conference and Optical Fabrication and testing, OMA1 (2010).

Deck, L.

Deck, L. L.

L. L. Deck, “Environmentally friendly interferometry,” Proc. SPIE 5532, 159–169 (2004).
[CrossRef]

Donner, J. T.

Edwards, C.

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Optically monitoring and controlling nanoscale topography during semiconductor etching,” Light: Science & Applications 1, e30 (2012).

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

Feld, M. S.

Ferraro, P.

Finizio, A.

Ghiglia, D. C.

D. C. Ghiglia, M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software(Wiley-Interscience, 1998).

Godard, L. L.

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

Goddard, L. L.

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Optically monitoring and controlling nanoscale topography during semiconductor etching,” Light: Science & Applications 1, e30 (2012).

Grilli, S.

Holmes, M. L.

D. M. Sykora, M. L. Holmes, “Dynamic measurements using a Fizeau interferometer,” Proc. SPIE 8082, 80821R (2011).
[CrossRef]

Hu, L.

Hu, M.

R. Wang, D. Li, M. Hu, J. Tian, “Phase calibration of spatial light modulators by heterodyne interferometry,” Proc. SPIE 7848, 78481F (2010).
[CrossRef]

Huntley, J. M.

Ikeda, T.

Jang, J. H.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Jordan, P.

Kwakernaak, M.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Lepore, A.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Li, D.

R. Wang, D. Li, M. Hu, J. Tian, “Phase calibration of spatial light modulators by heterodyne interferometry,” Proc. SPIE 7848, 78481F (2010).
[CrossRef]

L. Hu, L. Xuan, Y. Liu, Z. Cao, D. Li, Q. Mu, “Phase-only liquid crystal spatial light modulator for wavefront correction with high precision,” Opt. Express 12, 6403–6409 (2004).
[CrossRef] [PubMed]

Liu, Y.

Miccio, L.

Millan, M. S.

Morris, G. M.

Mu, Q.

Nicola, S. D.

Novotny, L.

Oton, J.

Padgett, M.

Perez-Cabre, E.

Pham, H.

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

Piestun, R.

Popescu, G.

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Optically monitoring and controlling nanoscale topography during semiconductor etching,” Light: Science & Applications 1, e30 (2012).

G. Popescu, T. Ikeda, R. R. Dasari, M. S. Feld, “Diffraction phase microscopy for quantifying cell structure and dynamics,” Opt. Lett. 31, 775–777 (2006).
[CrossRef] [PubMed]

T. Ikeda, G. Popescu, R. R. Dasari, M. S. Feld, “Hilbert phase microscopy for investigating fast dynamics in transparent systems,” Opt. Lett. 30, 1165–1167 (2005).
[CrossRef] [PubMed]

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

Pritt, M. D.

D. C. Ghiglia, M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software(Wiley-Interscience, 1998).

Rommel, S. L.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Saldner, H.

Schonbrun, E.

Selvanathan, D.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Stranick, S. J.

Sykora, D. M.

D. M. Sykora, M. L. Holmes, “Dynamic measurements using a Fizeau interferometer,” Proc. SPIE 8082, 80821R (2011).
[CrossRef]

D. M. Sykora, P. de Groot, “Instantaneous interferometry: Another view,” International Optical Design Conference and Optical Fabrication and testing, OMA1 (2010).

Thurman, S. T.

Tian, J.

R. Wang, D. Li, M. Hu, J. Tian, “Phase calibration of spatial light modulators by heterodyne interferometry,” Proc. SPIE 7848, 78481F (2010).
[CrossRef]

Wang, R.

R. Wang, D. Li, M. Hu, J. Tian, “Phase calibration of spatial light modulators by heterodyne interferometry,” Proc. SPIE 7848, 78481F (2010).
[CrossRef]

Whitehouse, D. J.

D. J. Whitehouse, “Surface metrology,” Meas. Sci. Technol. 8, 955–972 (1997).
[CrossRef]

Wu, L.

H. Zhang, J. Zhang, L. Wu, “Evaluation of phase-only liquid crystal spatial light modulator for phase modulation performance using a Twyman-Green interferometer,” Meas. Sci. Technol. 18, 1724–1728 (2007).
[CrossRef]

Wulff, K.

Wyant, J. C.

Xuan, L.

Xun, X.

Zhang, H.

H. Zhang, J. Zhang, L. Wu, “Evaluation of phase-only liquid crystal spatial light modulator for phase modulation performance using a Twyman-Green interferometer,” Meas. Sci. Technol. 18, 1724–1728 (2007).
[CrossRef]

Zhang, J.

H. Zhang, J. Zhang, L. Wu, “Evaluation of phase-only liquid crystal spatial light modulator for phase modulation performance using a Twyman-Green interferometer,” Meas. Sci. Technol. 18, 1724–1728 (2007).
[CrossRef]

Zhao, W.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

Zhdan, P. A.

J. E. Castle, P. A. Zhdan, “Characterization of surface topography by SEM and SFM: Problems and solutions,” J. Phys. D: Appl. Phys. 30, 722–740 (1997).
[CrossRef]

Zhou, R.

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

Appl. Opt.

Appl. Phys. Lett.

J. H. Jang, W. Zhao, J. W. Bae, D. Selvanathan, S. L. Rommel, I. Adesida, A. Lepore, M. Kwakernaak, J. H. Abeles, “Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope,” Appl. Phys. Lett. 83, 4116–4118 (2003).
[CrossRef]

J. Phys. D: Appl. Phys.

J. E. Castle, P. A. Zhdan, “Characterization of surface topography by SEM and SFM: Problems and solutions,” J. Phys. D: Appl. Phys. 30, 722–740 (1997).
[CrossRef]

Light: Science & Applications

C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Optically monitoring and controlling nanoscale topography during semiconductor etching,” Light: Science & Applications 1, e30 (2012).

Meas. Sci. Technol.

H. Zhang, J. Zhang, L. Wu, “Evaluation of phase-only liquid crystal spatial light modulator for phase modulation performance using a Twyman-Green interferometer,” Meas. Sci. Technol. 18, 1724–1728 (2007).
[CrossRef]

D. J. Whitehouse, “Surface metrology,” Meas. Sci. Technol. 8, 955–972 (1997).
[CrossRef]

Nano Lett.

R. Zhou, C. Edwards, A. Arbabi, G. Popescu, L. L. Goddard, “Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy,” Nano Lett. 13, 3716–3721 (2013).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

Proc. SPIE

D. M. Sykora, M. L. Holmes, “Dynamic measurements using a Fizeau interferometer,” Proc. SPIE 8082, 80821R (2011).
[CrossRef]

R. Wang, D. Li, M. Hu, J. Tian, “Phase calibration of spatial light modulators by heterodyne interferometry,” Proc. SPIE 7848, 78481F (2010).
[CrossRef]

L. L. Deck, “Environmentally friendly interferometry,” Proc. SPIE 5532, 159–169 (2004).
[CrossRef]

Other

D. M. Sykora, P. de Groot, “Instantaneous interferometry: Another view,” International Optical Design Conference and Optical Fabrication and testing, OMA1 (2010).

B. Bhaduri, C. Edwards, R. Zhou, H. Pham, L. L. Godard, G. Popescu, “Diffraction phase microscopy: principles and applications in materials and life sciences,” Adv. Opt. Photon. (accepted)

D. C. Ghiglia, M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software(Wiley-Interscience, 1998).

Supplementary Material (1)

» Media 1: AVI (2878 KB)     

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Figures (4)

Fig. 1
Fig. 1

Wide-field QPI setup. FC: Fiber Coupler, CL:Collimator lens, P:Polarizer, BS:Beam Splitter, L1–L4:Lenses with 400 mm focal length, L2–L3:Lenses with 75 mm focal length, FP1:Fourier Plane of lens L1, IP:Image Plane, FP2:Fourier Plane of lens L3, M:Mirror.

Fig. 2
Fig. 2

(a) Temporal standard deviation σt (x, y) of noise in nm. (b) Histogram of σt. (c) Spatial standard deviation σs(t).

Fig. 3
Fig. 3

Recorded interferograms for the (a) surface with features and (c) planar surface. For regions marked with white boxes in (a) and (c), the fringes are shown in (b) and (d). (e) Estimated height map in nm. (f) Histogram of height.

Fig. 4
Fig. 4

(a) Projected pattern on SLM. (b) Recorded interferogram. Measured phase retardation in radians at (c) t = 0, GS=0, (d) t = 2.5, GS=100, (e) t = 3.75, GS=150, (f) t = 5, GS=200, and (g) t = 6.25 seconds, GS=250 (see Media 1). (h) Temporally varying mean phase retardation.

Equations (2)

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I ( x , y ) = | U s ( x , y ) | 2 + | U 1 | 2 + 2 | U s ( x , y ) | | U 1 | cos [ β 0 x + ϕ ( x , y ) ]
ϕ ( x , y , t ) = 4 π λ Δ n ( x , y , t ) d

Metrics