D. Chen, J. Schmit, and M. Novak, “Real-time scanner error correction in white light interferometry,” Proc. SPIE 9276, 92760I (2014).

[Crossref]

Y. Xu, L. Ekstrand, and S. Zhang, “Uniaxial 3-D shape measurement with projector defocusing,” Proc. SPIE 81330, 81330M (2011).

[Crossref]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

T. Yoshizawa, T. Shinoda, and Y. Otani, “Uniaxis rangefinder using contrast detection of a projected pattern,” Proc. SPIE 4190, 115–122 (2001).

[Crossref]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40(8), 1653–1660 (2001).

[Crossref]

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

X. Y. Su, L. K. Su, and W. S. Li, “A New Fourier transform profilometry based on modulation measurement,” Proc. SPIE 3749, 438–439 (1999).

[Crossref]

L. K. Su, X. Y. Su, W. S. Li, and L. Q. Xiang, “Application of Modulation Measurement Profilometry to Objects with Surface Holes,” Appl. Opt. 38(7), 1153–1158 (1999).

[Crossref]
[PubMed]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44(3), 519–534 (1997).

[Crossref]

S. Chen, A. W. Palmer, K. T. Grattan, and B. T. Meggitt, “Digital signal-processing techniques for electronically scanned optical-fiber white-light interferometry,” Appl. Opt. 31(28), 6003–6010 (1992).

[Crossref]
[PubMed]

S. S. Chim, G. S. Kino, and G. S. Kino, “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31(14), 2550–2553 (1992).

[Crossref]
[PubMed]

M. Subbarao and N. Gurumoorthy, “Depth recovery from blurred edges,” Proc. IEEE 1988, 498–503 (1988).

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

D. Chen, J. Schmit, and M. Novak, “Real-time scanner error correction in white light interferometry,” Proc. SPIE 9276, 92760I (2014).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44(3), 519–534 (1997).

[Crossref]

Y. Xu, L. Ekstrand, and S. Zhang, “Uniaxial 3-D shape measurement with projector defocusing,” Proc. SPIE 81330, 81330M (2011).

[Crossref]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40(8), 1653–1660 (2001).

[Crossref]

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

M. Subbarao and N. Gurumoorthy, “Depth recovery from blurred edges,” Proc. IEEE 1988, 498–503 (1988).

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry: a phase mapping approach,” Appl. Opt. 24(2), 185–188 (1985).

[Crossref]
[PubMed]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23(18), 3105–3108 (1984).

[Crossref]
[PubMed]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

S. S. Chim, G. S. Kino, and G. S. Kino, “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31(14), 2550–2553 (1992).

[Crossref]
[PubMed]

S. S. Chim, G. S. Kino, and G. S. Kino, “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31(14), 2550–2553 (1992).

[Crossref]
[PubMed]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40(8), 1653–1660 (2001).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

L. K. Su, X. Y. Su, W. S. Li, and L. Q. Xiang, “Application of Modulation Measurement Profilometry to Objects with Surface Holes,” Appl. Opt. 38(7), 1153–1158 (1999).

[Crossref]
[PubMed]

X. Y. Su, L. K. Su, and W. S. Li, “A New Fourier transform profilometry based on modulation measurement,” Proc. SPIE 3749, 438–439 (1999).

[Crossref]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry: a phase mapping approach,” Appl. Opt. 24(2), 185–188 (1985).

[Crossref]
[PubMed]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23(18), 3105–3108 (1984).

[Crossref]
[PubMed]

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

D. Chen, J. Schmit, and M. Novak, “Real-time scanner error correction in white light interferometry,” Proc. SPIE 9276, 92760I (2014).

[Crossref]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

T. Yoshizawa, T. Shinoda, and Y. Otani, “Uniaxis rangefinder using contrast detection of a projected pattern,” Proc. SPIE 4190, 115–122 (2001).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44(3), 519–534 (1997).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44(3), 519–534 (1997).

[Crossref]

D. Chen, J. Schmit, and M. Novak, “Real-time scanner error correction in white light interferometry,” Proc. SPIE 9276, 92760I (2014).

[Crossref]

T. Yoshizawa, T. Shinoda, and Y. Otani, “Uniaxis rangefinder using contrast detection of a projected pattern,” Proc. SPIE 4190, 115–122 (2001).

[Crossref]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry: a phase mapping approach,” Appl. Opt. 24(2), 185–188 (1985).

[Crossref]
[PubMed]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23(18), 3105–3108 (1984).

[Crossref]
[PubMed]

L. K. Su, X. Y. Su, W. S. Li, and L. Q. Xiang, “Application of Modulation Measurement Profilometry to Objects with Surface Holes,” Appl. Opt. 38(7), 1153–1158 (1999).

[Crossref]
[PubMed]

X. Y. Su, L. K. Su, and W. S. Li, “A New Fourier transform profilometry based on modulation measurement,” Proc. SPIE 3749, 438–439 (1999).

[Crossref]

X. Y. Su, L. K. Su, and W. S. Li, “A New Fourier transform profilometry based on modulation measurement,” Proc. SPIE 3749, 438–439 (1999).

[Crossref]

L. K. Su, X. Y. Su, W. S. Li, and L. Q. Xiang, “Application of Modulation Measurement Profilometry to Objects with Surface Holes,” Appl. Opt. 38(7), 1153–1158 (1999).

[Crossref]
[PubMed]

M. Subbarao and N. Gurumoorthy, “Depth recovery from blurred edges,” Proc. IEEE 1988, 498–503 (1988).

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

M. Takeda and K. Mutoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 22(24), 3977–3982 (1983).

[Crossref]
[PubMed]

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40(8), 1653–1660 (2001).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40(8), 1653–1660 (2001).

[Crossref]

Y. Xu, L. Ekstrand, and S. Zhang, “Uniaxial 3-D shape measurement with projector defocusing,” Proc. SPIE 81330, 81330M (2011).

[Crossref]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

T. Yoshizawa, T. Shinoda, and Y. Otani, “Uniaxis rangefinder using contrast detection of a projected pattern,” Proc. SPIE 4190, 115–122 (2001).

[Crossref]

Y. Xu, L. Ekstrand, and S. Zhang, “Uniaxial 3-D shape measurement with projector defocusing,” Proc. SPIE 81330, 81330M (2011).

[Crossref]

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23(18), 3105–3108 (1984).

[Crossref]
[PubMed]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry: a phase mapping approach,” Appl. Opt. 24(2), 185–188 (1985).

[Crossref]
[PubMed]

M. Takeda and K. Mutoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 22(24), 3977–3982 (1983).

[Crossref]
[PubMed]

L. K. Su, X. Y. Su, W. S. Li, and L. Q. Xiang, “Application of Modulation Measurement Profilometry to Objects with Surface Holes,” Appl. Opt. 38(7), 1153–1158 (1999).

[Crossref]
[PubMed]

S. Chen, A. W. Palmer, K. T. Grattan, and B. T. Meggitt, “Digital signal-processing techniques for electronically scanned optical-fiber white-light interferometry,” Appl. Opt. 31(28), 6003–6010 (1992).

[Crossref]
[PubMed]

S. S. Chim, G. S. Kino, and G. S. Kino, “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31(14), 2550–2553 (1992).

[Crossref]
[PubMed]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44(3), 519–534 (1997).

[Crossref]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40(8), 1653–1660 (2001).

[Crossref]

M. Takeda, T. Aoki, Y. Miyamoto, H. Tanaka, R. W. Gu, and Z. B. Zhang, “Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection,” Opt. Eng. 39(1), 61–68 (2000).

[Crossref]

M. Subbarao and N. Gurumoorthy, “Depth recovery from blurred edges,” Proc. IEEE 1988, 498–503 (1988).

D. Chen, J. Schmit, and M. Novak, “Real-time scanner error correction in white light interferometry,” Proc. SPIE 9276, 92760I (2014).

[Crossref]

T. Yoshizawa, T. Shinoda, and Y. Otani, “Uniaxis rangefinder using contrast detection of a projected pattern,” Proc. SPIE 4190, 115–122 (2001).

[Crossref]

Y. Mizutani, R. Kuwano, Y. Otani, N. Umeda, and T. Yoshizawa, “Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens,” Proc. SPIE 600, 60000J (2005).

[Crossref]

Y. Otani, F. Kobayashi, Y. Mizutani, S. Watanabe, M. Harada, and T. Yoshizawa, “Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter,” Proc. SPIE 7790, 77900A (2010).

[Crossref]

Y. Xu, L. Ekstrand, and S. Zhang, “Uniaxial 3-D shape measurement with projector defocusing,” Proc. SPIE 81330, 81330M (2011).

[Crossref]

X. Y. Su, L. K. Su, and W. S. Li, “A New Fourier transform profilometry based on modulation measurement,” Proc. SPIE 3749, 438–439 (1999).

[Crossref]

(Conference Proceedings) Authors: Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 92760I (13 November 2014); doi: .

[Crossref]