Abstract

A soft lithographic approach using a modified polyurethane acrylate (PUA) mold for the fabrication of sub-wavelength antireflective structure on polymer film is reported. By introducing an intermediate transferring PUA mold generated by an anodized aluminum oxide membrane, there is no need either to heat nor to deposit metal as a seed layer. Therefore, the most costly and time-consuming master preparation step in the conventional process chain is not a necessity. The soft PUA mold provides a high resolution of 100 nm with an aspect ratio of 1.7 and a conformal contact with the substrate and reduces the pressure needed during the imprinting steps. It is numerically verified that the antireflective film with nanopores has a similar fascinating broadband antireflective effect compared with that of its complementary nanonipple one. In our experiment, the average transmission efficiency of the PET film with dual-side nanopores can be enhanced to 98.7% at normal incidence and 92.5% at an incident angle of 60° over a range of 400~800 nm of the spectrum. The proposed method is simple and cost-effective and the fabricated antireflective polymer film can be mounted on the surfaces of various optical devices for the reduction of Fresnel reflections.

© 2014 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. C. G. Bernhard, W. H. Miller, “A corneal nipple pattern in insect compound eyes,” Acta Physiol. Scand. 56(3), 385–386 (1962).
    [CrossRef] [PubMed]
  2. Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
    [CrossRef] [PubMed]
  3. S. A. Boden, D. M. Bagnall, “Tunable reflection minima of nanostructured antireflective surfaces,” Appl. Phys. Lett. 93(13), 133108 (2008).
    [CrossRef]
  4. B. Päivänranta, T. Saastamoinen, M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
    [CrossRef] [PubMed]
  5. J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
    [CrossRef] [PubMed]
  6. C. H. Sun, B. J. Ho, B. Jiang, P. Jiang, “Biomimetic subwavelength antireflective gratings on GaAs,” Opt. Lett. 33(19), 2224–2226 (2008).
    [CrossRef] [PubMed]
  7. S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
    [CrossRef]
  8. T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
    [CrossRef] [PubMed]
  9. Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
    [CrossRef]
  10. Y. M. Song, H. J. Choi, J. S. Yu, Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
    [CrossRef] [PubMed]
  11. J. W. Leem, Y. Yeh, J. S. Yu, “Enhanced transmittance and hydrophilicity of nanostructured glass substrates with antireflective properties using disordered gold nanopatterns,” Opt. Express 20(4), 4056–4066 (2012).
    [CrossRef] [PubMed]
  12. H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
    [CrossRef]
  13. A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
    [CrossRef]
  14. Y. Kanamori, E. Roy, Y. Chen, “Antireflection sub-wavelength gratings fabricated by spin-coating replication,” Microelectron. Eng. 78, 287–293 (2005).
    [CrossRef]
  15. U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, A. Tünnermann, “Antireflection of transparent polymers by advanced plasma etching procedures,” Opt. Express 15(20), 13108–13113 (2007).
    [CrossRef] [PubMed]
  16. K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
    [CrossRef] [PubMed]
  17. D. S. Kim, D. H. Kim, J. H. Jang, “A nanoscale conical polymethyl methacrylate (PMMA) sub-wavelength structure with a high aspect ratio realized by a stamping method,” Opt. Express 21(7), 8450–8459 (2013).
    [CrossRef] [PubMed]
  18. C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
    [CrossRef]
  19. G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
    [CrossRef] [PubMed]
  20. D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
    [CrossRef]
  21. V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
    [CrossRef]
  22. S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
    [CrossRef]
  23. Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
    [CrossRef]
  24. C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
    [CrossRef]
  25. S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
    [CrossRef]
  26. G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
    [CrossRef] [PubMed]
  27. T. Yanagishita, K. Nishio, H. Masuda, “Antireflection polymer hole array structures by imprinting using metal molds from anodic porous alumina,” Appl. Phys. Express 1(7), 067004 (2008).
    [CrossRef]
  28. M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
    [CrossRef]
  29. L. J. Guo, “Nanoimprint lithography: methods and material requirements,” Adv. Mater. 19(4), 495–513 (2007).
    [CrossRef]
  30. S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
    [CrossRef]
  31. R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
    [CrossRef]
  32. C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
    [CrossRef] [PubMed]

2013 (3)

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

D. S. Kim, D. H. Kim, J. H. Jang, “A nanoscale conical polymethyl methacrylate (PMMA) sub-wavelength structure with a high aspect ratio realized by a stamping method,” Opt. Express 21(7), 8450–8459 (2013).
[CrossRef] [PubMed]

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

2012 (3)

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

J. W. Leem, Y. Yeh, J. S. Yu, “Enhanced transmittance and hydrophilicity of nanostructured glass substrates with antireflective properties using disordered gold nanopatterns,” Opt. Express 20(4), 4056–4066 (2012).
[CrossRef] [PubMed]

2011 (2)

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

2010 (3)

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Y. M. Song, H. J. Choi, J. S. Yu, Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
[CrossRef] [PubMed]

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

2009 (5)

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

B. Päivänranta, T. Saastamoinen, M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

2008 (7)

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

T. Yanagishita, K. Nishio, H. Masuda, “Antireflection polymer hole array structures by imprinting using metal molds from anodic porous alumina,” Appl. Phys. Express 1(7), 067004 (2008).
[CrossRef]

C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
[CrossRef]

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

S. A. Boden, D. M. Bagnall, “Tunable reflection minima of nanostructured antireflective surfaces,” Appl. Phys. Lett. 93(13), 133108 (2008).
[CrossRef]

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

C. H. Sun, B. J. Ho, B. Jiang, P. Jiang, “Biomimetic subwavelength antireflective gratings on GaAs,” Opt. Lett. 33(19), 2224–2226 (2008).
[CrossRef] [PubMed]

2007 (3)

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, A. Tünnermann, “Antireflection of transparent polymers by advanced plasma etching procedures,” Opt. Express 15(20), 13108–13113 (2007).
[CrossRef] [PubMed]

L. J. Guo, “Nanoimprint lithography: methods and material requirements,” Adv. Mater. 19(4), 495–513 (2007).
[CrossRef]

2006 (1)

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

2005 (2)

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
[CrossRef]

Y. Kanamori, E. Roy, Y. Chen, “Antireflection sub-wavelength gratings fabricated by spin-coating replication,” Microelectron. Eng. 78, 287–293 (2005).
[CrossRef]

2003 (1)

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

1996 (1)

S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

1962 (1)

C. G. Bernhard, W. H. Miller, “A corneal nipple pattern in insect compound eyes,” Acta Physiol. Scand. 56(3), 385–386 (1962).
[CrossRef] [PubMed]

Algra, R. E.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Allsopp, D. W. E.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Auzelyte, V.

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

Bagnall, D. M.

S. A. Boden, D. M. Bagnall, “Tunable reflection minima of nanostructured antireflective surfaces,” Appl. Phys. Lett. 93(13), 133108 (2008).
[CrossRef]

Bakkers, E. P.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Bernhard, C. G.

C. G. Bernhard, W. H. Miller, “A corneal nipple pattern in insect compound eyes,” Acta Physiol. Scand. 56(3), 385–386 (1962).
[CrossRef] [PubMed]

Boden, S. A.

S. A. Boden, D. M. Bagnall, “Tunable reflection minima of nanostructured antireflective surfaces,” Appl. Phys. Lett. 93(13), 133108 (2008).
[CrossRef]

Bowen, C. R.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Brugger, J.

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

Brunner, R.

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

Burghoorn, M.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Buskens, P.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Cadarso, V. J.

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

Chang, F. Y.

C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
[CrossRef]

Chang, Y. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chattopadhyay, S.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, C. F.

C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
[CrossRef]

Chen, K. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, L. C.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, Y.

Y. Kanamori, E. Roy, Y. Chen, “Antireflection sub-wavelength gratings fabricated by spin-coating replication,” Microelectron. Eng. 78, 287–293 (2005).
[CrossRef]

Choi, H. J.

Choi, K.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Choi, K. W.

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

Chou, C. P.

C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
[CrossRef]

Chou, S. Y.

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

Chu, S. Z.

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

Cui, Y.

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

de Riet, J.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Deng, Y.

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

DeSimone, J. M.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Diedenhofen, S. L.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Dinachali, S. S.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Ding, G.

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

Dong, H. P.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Euliss, L. E.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Fan, S. H.

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

Flauraud, V.

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

Ganesh, V. A.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Gao, H.

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

Ge, H. X.

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

Guo, J. R.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Guo, L. J.

L. J. Guo, “Nanoimprint lithography: methods and material requirements,” Adv. Mater. 19(4), 495–513 (2007).
[CrossRef]

Hartsuiker, A.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

He, A. Y.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Helgert, M.

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

Henderson, K. J.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Ho, B. J.

Holmes, N. H.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Hong, S. H.

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

Hou, W.

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

Hsu, C. H.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Hsu, C. M.

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

Hsu, Y. K.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Huang, Y. F.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Hubbard, G.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Hwang, J. Y.

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

Hwangbo, C. K.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Immink, G.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Inoue, S.

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

Isogai, M.

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

Jang, J. H.

Jen, Y. J.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Jiang, B.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

C. H. Sun, B. J. Ho, B. Jiang, P. Jiang, “Biomimetic subwavelength antireflective gratings on GaAs,” Opt. Lett. 33(19), 2224–2226 (2008).
[CrossRef] [PubMed]

Jiang, K.

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

Jiang, P.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

C. H. Sun, B. J. Ho, B. Jiang, P. Jiang, “Biomimetic subwavelength antireflective gratings on GaAs,” Opt. Lett. 33(19), 2224–2226 (2008).
[CrossRef] [PubMed]

Kaiser, N.

U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, A. Tünnermann, “Antireflection of transparent polymers by advanced plasma etching procedures,” Opt. Express 15(20), 13108–13113 (2007).
[CrossRef] [PubMed]

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
[CrossRef]

Kaless, A.

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
[CrossRef]

Kanamori, Y.

Y. Kanamori, E. Roy, Y. Chen, “Antireflection sub-wavelength gratings fabricated by spin-coating replication,” Microelectron. Eng. 78, 287–293 (2005).
[CrossRef]

Katsuta, Y.

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

Kiefer, T.

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

Kim, D. H.

Kim, D. S.

Ko, D. H.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Krauss, P. R.

S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

Kuittinen, M.

B. Päivänranta, T. Saastamoinen, M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Law, J.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Lee, C. S.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Lee, H.

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

Lee, H. C.

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

Lee, H. S.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Lee, Y. T.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Y. M. Song, H. J. Choi, J. S. Yu, Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
[CrossRef] [PubMed]

Leem, J. W.

Leitel, R.

Li, Y.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Lin, F.

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

Linn, N. C.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

Liu, T. A.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Liu, W.

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

Liu, Z.

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

Lo, H. C.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Lohmüller, T.

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

Lopez, R.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Masuda, H.

T. Yanagishita, K. Nishio, H. Masuda, “Antireflection polymer hole array structures by imprinting using metal molds from anodic porous alumina,” Appl. Phys. Express 1(7), 067004 (2008).
[CrossRef]

Melsen, D. R.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Miller, W. H.

C. G. Bernhard, W. H. Miller, “A corneal nipple pattern in insect compound eyes,” Acta Physiol. Scand. 56(3), 385–386 (1962).
[CrossRef] [PubMed]

Min, W. L.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

Mu, S.

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

Munzert, P.

U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, A. Tünnermann, “Antireflection of transparent polymers by advanced plasma etching procedures,” Opt. Express 15(20), 13108–13113 (2007).
[CrossRef] [PubMed]

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
[CrossRef]

Muskens, O. L.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Nasir, M. E.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Nishio, K.

T. Yanagishita, K. Nishio, H. Masuda, “Antireflection polymer hole array structures by imprinting using metal molds from anodic porous alumina,” Appl. Phys. Express 1(7), 067004 (2008).
[CrossRef]

Päivänranta, B.

B. Päivänranta, T. Saastamoinen, M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Pan, C. L.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Park, S. H.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Parsons, K. P.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Peng, C. Y.

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Qi, H.

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

Ramakrishna, S.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Ran, C.

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

Raut, H. K.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Renstrom, P. J.

S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

Rivas, J. G.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Roy, E.

Y. Kanamori, E. Roy, Y. Chen, “Antireflection sub-wavelength gratings fabricated by spin-coating replication,” Microelectron. Eng. 78, 287–293 (2005).
[CrossRef]

Saastamoinen, T.

B. Päivänranta, T. Saastamoinen, M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

Sabik, S.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Saifullah, M. S.

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

Samulski, E. T.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Satka, A.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Schulz, U.

U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, A. Tünnermann, “Antireflection of transparent polymers by advanced plasma etching procedures,” Opt. Express 15(20), 13108–13113 (2007).
[CrossRef] [PubMed]

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
[CrossRef]

Shields, P.

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Song, Y. M.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Y. M. Song, H. J. Choi, J. S. Yu, Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
[CrossRef] [PubMed]

Spatz, J. P.

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

Sun, C. H.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

C. H. Sun, B. J. Ho, B. Jiang, P. Jiang, “Biomimetic subwavelength antireflective gratings on GaAs,” Opt. Lett. 33(19), 2224–2226 (2008).
[CrossRef] [PubMed]

Sun, Z. Q.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Sundermann, M.

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

Ting, C. J.

C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
[CrossRef]

Tumbleston, J. R.

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Tünnermann, A.

Vecchi, G.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Vos, W. L.

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

Vroon, Z.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Wada, K.

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

Wang, Z. H.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Wendling, I.

Wu, W.

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

Xie, G.

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

Yakimets, I.

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Yanagishita, T.

T. Yanagishita, K. Nishio, H. Masuda, “Antireflection polymer hole array structures by imprinting using metal molds from anodic porous alumina,” Appl. Phys. Express 1(7), 067004 (2008).
[CrossRef]

Yang, B.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Yang, H.

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

Yasumori, A.

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

Yeh, Y.

Yu, J. S.

Yu, Z.

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

Yu, Z. N.

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

Zhang, G.

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

Zhang, J.

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

Zhang, J. H.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Zhang, R.

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

Zhu, J.

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

Zhu, S. J.

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

Zhu, Y.

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

Acta Physiol. Scand. (1)

C. G. Bernhard, W. H. Miller, “A corneal nipple pattern in insect compound eyes,” Acta Physiol. Scand. 56(3), 385–386 (1962).
[CrossRef] [PubMed]

Adv. Mater. (3)

S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. P. Bakkers, W. L. Vos, J. G. Rivas, “Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods,” Adv. Mater. 21(9), 973–978 (2009).
[CrossRef]

K. Choi, S. H. Park, Y. M. Song, Y. T. Lee, C. K. Hwangbo, H. Yang, H. S. Lee, “Nano-tailoring the surface structure for the monolithic high-performance antireflection polymer film,” Adv. Mater. 22(33), 3713–3718 (2010).
[CrossRef] [PubMed]

L. J. Guo, “Nanoimprint lithography: methods and material requirements,” Adv. Mater. 19(4), 495–513 (2007).
[CrossRef]

Appl. Phys. Express (1)

T. Yanagishita, K. Nishio, H. Masuda, “Antireflection polymer hole array structures by imprinting using metal molds from anodic porous alumina,” Appl. Phys. Express 1(7), 067004 (2008).
[CrossRef]

Appl. Phys. Lett. (1)

S. A. Boden, D. M. Bagnall, “Tunable reflection minima of nanostructured antireflective surfaces,” Appl. Phys. Lett. 93(13), 133108 (2008).
[CrossRef]

Appl. Surf. Sci. (1)

R. Zhang, K. Jiang, Y. Zhu, H. Qi, G. Ding, “Ultrasound-assisted anodization of aluminum in oxalic acid,” Appl. Surf. Sci. 258(1), 586–589 (2011).
[CrossRef]

Energy Environ. Sci. (1)

H. K. Raut, S. S. Dinachali, A. Y. He, V. A. Ganesh, M. S. Saifullah, J. Law, S. Ramakrishna, “Robust and durable polyhedral oligomeric silsesquioxane-based anti-reflective nanostructures with broadband quasi-omnidirectional properties,” Energy Environ. Sci. 6(6), 1929–1937 (2013).
[CrossRef]

J. Electrochem. Soc. (1)

S. Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, “Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization,” J. Electrochem. Soc. 153(9), B384 (2006).
[CrossRef]

J. Mater. Chem. (1)

Y. Li, J. H. Zhang, S. J. Zhu, H. P. Dong, Z. H. Wang, Z. Q. Sun, J. R. Guo, B. Yang, “Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings,” J. Mater. Chem. 19(13), 1806–1810 (2009).
[CrossRef]

J. Micromech. Microeng. (1)

C. J. Ting, F. Y. Chang, C. F. Chen, C. P. Chou, “Fabrication of an antireflective polymer optical film with subwavlength structures using a roll-to-roll micro-replication process,” J. Micromech. Microeng. 18(7), 075001 (2008).
[CrossRef]

J. Vac. Sci. Technol. B (2)

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, B. Jiang, “Large-scale assembly of periodic nanostructures with metastable square lattices,” J. Vac. Sci. Technol. B 27(3), 1043–1047 (2009).
[CrossRef]

Z. N. Yu, H. Gao, W. Wu, H. X. Ge, S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprinting lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003).
[CrossRef]

Langmuir (1)

C. Ran, G. Ding, W. Liu, Y. Deng, W. Hou, “Wetting on nanoporous alumina surface: transition between Wenzel and Cassie states controlled by surface structure,” Langmuir 24(18), 9952–9955 (2008).
[CrossRef] [PubMed]

Materials (1)

M. Burghoorn, D. R. Melsen, J. de Riet, S. Sabik, Z. Vroon, I. Yakimets, P. Buskens, “Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nanoimprint lithography,” Materials 6(9), 3710–3726 (2013).
[CrossRef]

Microelectron. Eng. (3)

S. H. Hong, J. Y. Hwang, H. Lee, H. C. Lee, K. W. Choi, “UV nanoimprint using flexible polymer template and substrate,” Microelectron. Eng. 86(3), 295–298 (2009).
[CrossRef]

V. Auzelyte, V. Flauraud, V. J. Cadarso, T. Kiefer, J. Brugger, “Biomimetic soft lithography on curved nanostructured surfaces,” Microelectron. Eng. 97, 269–271 (2012).
[CrossRef]

Y. Kanamori, E. Roy, Y. Chen, “Antireflection sub-wavelength gratings fabricated by spin-coating replication,” Microelectron. Eng. 78, 287–293 (2005).
[CrossRef]

Nano Lett. (2)

T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008).
[CrossRef] [PubMed]

J. Zhu, C. M. Hsu, Z. Yu, S. H. Fan, Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett. 10(6), 1979–1984 (2010).
[CrossRef] [PubMed]

Nanotechnology (3)

B. Päivänranta, T. Saastamoinen, M. Kuittinen, “A wide-angle antireflection surface for the visible spectrum,” Nanotechnology 20(37), 375301 (2009).
[CrossRef] [PubMed]

G. Xie, G. Zhang, F. Lin, J. Zhang, Z. Liu, S. Mu, “The fabrication of subwavelength anti-reflective nanostructures using a bio-template,” Nanotechnology 19(9), 095605 (2008).
[CrossRef] [PubMed]

G. Hubbard, M. E. Nasir, P. Shields, C. R. Bowen, A. Satka, K. P. Parsons, N. H. Holmes, D. W. E. Allsopp, “Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina,” Nanotechnology 23(15), 155302 (2012).
[CrossRef] [PubMed]

Nat. Nanotechnol. (1)

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007).
[CrossRef] [PubMed]

Opt. Express (4)

Opt. Lett. (1)

Science (1)

S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

Soft Matter (1)

D. H. Ko, J. R. Tumbleston, K. J. Henderson, L. E. Euliss, J. M. DeSimone, R. Lopez, E. T. Samulski, “Biomimetic microlens array with antireflective “moth-eye”surface,” Soft Matter 7(14), 6404–6407 (2011).
[CrossRef]

Surf. Coat. Tech. (1)

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 200(1), 58–61 (2005).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (9)

Fig. 1
Fig. 1

Schematic of the steps involved in the fabrication of SWS-based AR film by using soft lithographic approach. The original AAO template is fabricated by a well-known two-step anodization process, through which a nanopore array is formed on the surface. Then the UV-curable PUA is heated and drop-dispensed on a ñexible PET ðlm to form a soft mold by imprinting. The soft PUA mold is placed and extruded on a dispersed UV-curable resin on a substrate (such as PET) followed by UV exposure and demolding. This can produce AR film with nanopore structures on both sides.

Fig. 2
Fig. 2

Goniometer images for 1uL droplets with apparent contact angles of PUA on the surface of the AAO template (a) before surface treatment; (b) after surface treatment.

Fig. 3
Fig. 3

SEM images of side view of (a) the AAO membrane with a pore array; (b) the PUA soft mold with a nipple array; (c) the replicated sub-wavelength dimensional nanopore structure on UV resin. The insets are the corresponding SEM images under top view.

Fig. 4
Fig. 4

SEM images of nanopore arrays. They show that nanopore arrays well duplicated to (a) a particle-related and (b) a line-related defect area with the flexibility of the PUA mold.

Fig. 5
Fig. 5

Contour plots of the calculated transmission efficiency of a 100μm-thick PET film with dual-side SWSs: (a) Nanopores; (b) Nanonipples. In both cases, the separation is 100nm; the top (a) and base (b) diameter is 80nm respectively. The shapes of both SWSs are with parabola, and a six-fold hexagonal symmetry is used. The white dotted line in (a) denotes the depth of 170nm in nanopores.

Fig. 6
Fig. 6

The relationship between the refractive index of PET and the wavelength spectrum. The imaginary part of the refractive index of PET is assumed to be 0.

Fig. 7
Fig. 7

Measured angle-dependent transmission spectra of the PET film with flat bare surface (black), a single-side pore array (green), a single-side nipple array(gray), a dual-side pore array (red) and a dual-side nipple array (orange) at incident angle of 0°, 15°, 30°, 45°, 60°.

Fig. 8
Fig. 8

(a) The AR effect of the PET film with a nanopore array on both sides. (b) Picture of the soft PUA mold with a nanopillar array on one side and the fabricated sample with a nanopore array on both sides.

Fig. 9
Fig. 9

SEM images of AR structures for the durability test of the PUA mold after: a) 10 times; b) 20 times; c) 30 times; d) 50 times imprinting. There are no apparent differences or variations between these images.

Metrics