Abstract

In this paper we have designed, fabricated and characterized a high efficiency Silicon nitride grating coupler at 1490 nm. Distributed Bragg reflectors as bottom mirrors are employed to improve the coupling efficiency by reflecting the downward traveling light. The peak coupling efficiency obtained is about −2.5 dB and the 1-dB bandwidth is 53 nm. The fabrication process is CMOS-compatible and is ready to be integrated with photonic circuits.

© 2014 Optical Society of America

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  1. W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
    [Crossref]
  2. Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004).
    [Crossref] [PubMed]
  3. S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27(18), 4076–4083 (2009).
    [Crossref]
  4. T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
    [Crossref]
  5. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
    [Crossref]
  6. Q. Fang, J. Song, X. Luo, M. Yu, G. Lo, and Y. Liu, “Mode-size converter with high coupling efficiency and broad bandwidth,” Opt. Express 19(22), 21588–21594 (2011).
    [Crossref] [PubMed]
  7. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
    [Crossref] [PubMed]
  8. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
    [Crossref]
  9. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
    [Crossref]
  10. B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett. 17(9), 1884–1886 (2005).
    [Crossref]
  11. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
    [Crossref]
  12. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
    [Crossref] [PubMed]
  13. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
    [Crossref] [PubMed]
  14. X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
    [Crossref]
  15. M. Antelius, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express 19(4), 3592–3598 (2011).
    [Crossref] [PubMed]
  16. C. Li, H. Zhang, M. Yu, and G. Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21(7), 7868–7874 (2013).
    [Crossref] [PubMed]
  17. G. Maire, L. Vivien, G. Sattler, A. Kaźmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
    [Crossref] [PubMed]
  18. S. C. Mao, S. H. Tao, Y. L. Xu, X. W. Sun, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module,” Opt. Express 16(25), 20809–20816 (2008).
    [Crossref] [PubMed]
  19. M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
    [Crossref]
  20. C. R. Doerr, L. L. Buhl, L. Chen, and N. Dupuis, “Monolithic flexible-grid 1×2 wavelength-selective switch in silicon photonics,” J. Lightwave Technol. 30(4), 473–478 (2012).
    [Crossref]
  21. C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
    [Crossref]
  22. H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
    [Crossref]
  23. H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.
    [Crossref]
  24. W. S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, and J. Burghartz, “Bridging the gap between optical fibers and silicon photonic integrated circuits,” Opt. Express 22(2), 1277–1286 (2014).
    [Crossref] [PubMed]

2014 (2)

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

W. S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, and J. Burghartz, “Bridging the gap between optical fibers and silicon photonic integrated circuits,” Opt. Express 22(2), 1277–1286 (2014).
[Crossref] [PubMed]

2013 (1)

2012 (1)

2011 (2)

2010 (4)

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
[Crossref]

2009 (1)

2008 (2)

2007 (1)

2006 (2)

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

2005 (2)

B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett. 17(9), 1884–1886 (2005).
[Crossref]

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

2004 (2)

2003 (1)

2002 (2)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Absil, P.

Almeida, V. R.

Ang, K.-W.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Antelius, M.

Ayre, M.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

Baets, R.

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27(18), 4076–4083 (2009).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Baets, R. G.

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Beckx, S.

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Bellutti, P.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Berroth, M.

Bienstman, P.

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Bogaerts, W.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27(18), 4076–4083 (2009).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Buhl, L. L.

C. R. Doerr, L. L. Buhl, L. Chen, and N. Dupuis, “Monolithic flexible-grid 1×2 wavelength-selective switch in silicon photonics,” J. Lightwave Technol. 30(4), 473–478 (2012).
[Crossref]

C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
[Crossref]

Burghartz, J.

Butschke, J.

Cassan, E.

Chen, L.

C. R. Doerr, L. L. Buhl, L. Chen, and N. Dupuis, “Monolithic flexible-grid 1×2 wavelength-selective switch in silicon photonics,” J. Lightwave Technol. 30(4), 473–478 (2012).
[Crossref]

C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
[Crossref]

Chen, X.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

Chen, Y.-K.

C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
[Crossref]

Daldosso, N.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

De Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Doerr, C. R.

C. R. Doerr, L. L. Buhl, L. Chen, and N. Dupuis, “Monolithic flexible-grid 1×2 wavelength-selective switch in silicon photonics,” J. Lightwave Technol. 30(4), 473–478 (2012).
[Crossref]

C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
[Crossref]

Dumon, P.

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27(18), 4076–4083 (2009).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Dupuis, N.

Fang, Q.

Q. Fang, J. Song, X. Luo, M. Yu, G. Lo, and Y. Liu, “Mode-size converter with high coupling efficiency and broad bandwidth,” Opt. Express 19(22), 21588–21594 (2011).
[Crossref] [PubMed]

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Fung, C. K. Y.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

Giannone, D.

Griol, A.

Gylfason, K. B.

Hill, D.

Jaenen, P.

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27(18), 4076–4083 (2009).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Jiang, J. H.

B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett. 17(9), 1884–1886 (2005).
[Crossref]

Kazmierczak, A.

Kompocholis, C.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Krauss, T. F.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Kunze, A.

Kwong, D. L.

Kwong, D.-L.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Lepage, G.

Letzkus, F.

Li, C.

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

C. Li, H. Zhang, M. Yu, and G. Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21(7), 7868–7874 (2013).
[Crossref] [PubMed]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

Liow, T.-Y.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Lipson, M.

Liu, Y.

Lo, G.

Lo, G. Q.

Lo, G.-Q.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Lo, P. G.-Q.

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

Lo, S. M. G.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

Lui, A.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Luo, X.

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

Q. Fang, J. Song, X. Luo, M. Yu, G. Lo, and Y. Liu, “Mode-size converter with high coupling efficiency and broad bandwidth,” Opt. Express 19(22), 21588–21594 (2011).
[Crossref] [PubMed]

Maire, G.

Mao, S. C.

Marris-Morini, D.

McNab, S. J.

Melchiorri, M.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Morita, H.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

Nordin, G. P.

B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett. 17(9), 1884–1886 (2005).
[Crossref]

Panepucci, R. R.

Pavesi, L.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Pucker, G.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Roelkens, G.

Sanchez, B.

Sattler, G.

Sbrana, F.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Schrauwen, J.

Selvaraja, S.

Selvaraja, S. K.

Shoji, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

Sohlström, H.

Song, J.

Song, J.-F.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Sun, X. W.

Taillaert, D.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Tao, S. H.

Thourhout, D. V.

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27(18), 4076–4083 (2009).
[Crossref]

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Tsang, H. K.

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

Tsuchizawa, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

Tu, X.

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

Van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Van Laere, F.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

Van Thourhout, D.

Verheyen, P.

Vermeulen, D.

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Vivien, L.

Vlasov, Y. A.

Vogel, W.

Wang, B.

B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett. 17(9), 1884–1886 (2005).
[Crossref]

Watanabe, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

Wiaux, V.

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Wouters, J.

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

Xiong, Y.-Z.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Xu, Y. L.

Yamada, K.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

Yu, M.

Yu, M. B.

Yu, M.-B.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

Zaoui, W. S.

Zhang, H.

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

C. Li, H. Zhang, M. Yu, and G. Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21(7), 7868–7874 (2013).
[Crossref] [PubMed]

Appl. Phys. Lett. (1)

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (1)

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler,” Appl. Phys., A Mater. Sci. Process. 115(1), 79–82 (2014).
[Crossref]

Electron. Lett. (1)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to single mode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

IEEE J. Quantum Electron. (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (2)

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. G. Baets, “Compact wavelength-selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1394–1401 (2006).
[Crossref]

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility and performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[Crossref]

IEEE Photon. Technol. Lett. (3)

C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22(19), 1461–1463 (2010).
[Crossref]

B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett. 17(9), 1884–1886 (2005).
[Crossref]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

J. Lightwave Technol. (3)

Jpn. J. Appl. Phys. (1)

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

Opt. Express (8)

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

M. Antelius, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express 19(4), 3592–3598 (2011).
[Crossref] [PubMed]

Q. Fang, J. Song, X. Luo, M. Yu, G. Lo, and Y. Liu, “Mode-size converter with high coupling efficiency and broad bandwidth,” Opt. Express 19(22), 21588–21594 (2011).
[Crossref] [PubMed]

Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004).
[Crossref] [PubMed]

C. Li, H. Zhang, M. Yu, and G. Q. Lo, “CMOS-compatible high efficiency double-etched apodized waveguide grating coupler,” Opt. Express 21(7), 7868–7874 (2013).
[Crossref] [PubMed]

W. S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, and J. Burghartz, “Bridging the gap between optical fibers and silicon photonic integrated circuits,” Opt. Express 22(2), 1277–1286 (2014).
[Crossref] [PubMed]

G. Maire, L. Vivien, G. Sattler, A. Kaźmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlström, and D. Hill, “High efficiency silicon nitride surface grating couplers,” Opt. Express 16(1), 328–333 (2008).
[Crossref] [PubMed]

S. C. Mao, S. H. Tao, Y. L. Xu, X. W. Sun, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module,” Opt. Express 16(25), 20809–20816 (2008).
[Crossref] [PubMed]

Opt. Lett. (2)

Other (1)

H. Zhang, C. Li, X. Tu, X. Luo, M. Yu, and P. G.-Q. Lo, “High efficiency silicon nitride grating coupler with DBR,” in Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference (OFC/NFOEC) (2014), p. Th1A.4.
[Crossref]

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Figures (4)

Fig. 1
Fig. 1

(a) Schematic of a Si3N4 grating coupler with DBR; (b) reflectivity spectrum of designed DBR. Inset is the light propagating profile of the grating coupler with DBR; (c) reflectivity spectrums v.s. Si film thickness variation when SiO2 film is 257 nm; (d) reflectivity spectrums v.s. SiO2 film thickness variation when Si film is 108 nm.

Fig. 2
Fig. 2

Simulations for coupling loss with respect to (a) period, (b) filling factor, (c) BOX thickness and (d) wavelength. Coupling loss of designed grating coupler without DBR is also shown in (d) (red line).

Fig. 3
Fig. 3

(a) SEM image of a Si3N4 grating coupler. Inset at right corner is the zoom-in view of the indicated area. Scale bar in the inset is 1μm. (b) Cross section view of the device.

Fig. 4
Fig. 4

(a) Coupling loss versus filling factor as a function of period. (b) Coupling loss versus wavelength as a function of filling function at 8°. (c) Coupling loss versus wavelength as a function of tiled angles and simulation result (pink). (d) Coupling loss versus wavelength as a function of tiled angles for a grating coupler without DBR.

Tables (1)

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Table 1 Silicon Nitride grating coupler performance benchmark

Metrics