Coded aperture detector: an image sensor with sub 20-nm pixel resolution

Ryan Miyakawa; Rafael Mayer; Antoine Wojdyla; Nicolas Vannier; Ian Lesser; Shifrah Aron-Dine; Patrick Naulleau

doi:10.1364/OE.22.019803

Coded aperture detector: an image sensor with sub 20-nm pixel resolution

Ryan Miyakawa, Rafael Mayer, Antoine Wojdyla, Nicolas Vannier, Ian Lesser, Shifrah Aron-Dine, and Patrick Naulleau

Optics Express
Vol. 22,
Issue 16,
pp. 19803-19809
(2014)
•https://doi.org/10.1364/OE.22.019803

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Ryan Miyakawa, Rafael Mayer, Antoine Wojdyla, Nicolas Vannier, Ian Lesser, Shifrah Aron-Dine, and Patrick Naulleau, "Coded aperture detector: an image sensor with sub 20-nm pixel resolution," Opt. Express 22, 19803-19809 (2014)

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Related Topics
Table of Contents Category
- Imaging Systems
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Apertures (110.1220)
- Computational imaging (110.1758)

About this Article
History
- Original Manuscript: May 23, 2014
- Revised Manuscript: June 25, 2014
- Manuscript Accepted: July 1, 2014
- Published: August 8, 2014

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Open Access

Abstract

We describe the coded aperture detector, a novel image sensor based on uniformly redundant arrays (URAs) with customizable pixel size, resolution, and operating photon energy regime. In this sensor, a coded aperture is scanned laterally at the image plane of an optical system, and the transmitted intensity is measured by a photodiode. The image intensity is then digitally reconstructed using a simple convolution. We present results from a proof-of-principle optical prototype, demonstrating high-fidelity image sensing comparable to a CCD. A 20-nm half-pitch URA fabricated by the Center for X-ray Optics (CXRO) nano-fabrication laboratory is presented that is suitable for high-resolution image sensing at EUV and soft X-ray wavelengths.

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References

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Publication

C. Wagner, J. Bacelar, N. Harned, E. Loopstra, S. Hendriks, I. de Jong, P. Kuerz, L. Levasier, M. van de Kerkhof, M. Lowisch, H. Meiling, D. Ockwell, R. Peeters, E. van Setten, J. Stoeldraijer, S. Young, J. Zimmerman, and R. Kool, “EUV lithography at chipmakers has started: performance validation of ASML’s NXE:3100,” Proc. SPIE 7969, 79691F (April, 2011).
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[Crossref]
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[Crossref]
J. L. Culhane, L. K. Harra, A. M. James, K. Al-Janabi, L. J. Bradley, R. A. Chaudry, K. Rees, J. A. Tandy, P. Thomas, M. C. R. Whillock, B. Winter, G. A. Doschek, C. M. Korendyke, C. M. Brown, S. Myers, J. Mariska, J. Seely, J. Lang, B. J. Kent, B. M. Shaughnessy, P. R. Young, G. M. Simnett, C. M. Castelli, S. Mahmoud, H. Mapson-Menard, B. J. Probyn, R. J. Thomas, J. Davila, K. Dere, D. Windt, J. Shea, R. Hagood, R. Moye, H. Hara, T. Watanabe, K. Matsuzaki, T. Kosugi, V. Hansteen., and Wikstol., “The EUV imaging spectrometer for Hinode,” Sol. Phys. 243(1) 19–61 (2007).
[Crossref]
D. Tichenor, A. W. Replogle, S. H. Lee, W. Ballard, A. Leung, G. Kubiak, L. Klebanoff, J. Graham, S. J. Goldsmith, M. K. Jefferson, J. Wronosky, T. Smith, T. Johnson, H. Shields, L. Hale, H. Chapman, J. Taylor, D. Sweeney, J. Folta, G. Sommargren, K. Goldberg, P. Naulleau, D. T. Attwood, and E. Gullikson, “Performance upgrades in the EUV engineering test stand,” Proc. SPIE4688 (July2002)
R. Accorsi, F. Gasparini, and R. C. Lanza., “A coded aperture for high-resolution nuclear medicine planar imaging with a conventional Anger camera: experimental results,” IEEE Trans. Nucl. Sci. 48(6) 2411–2417 (2001).
[Crossref]
S. Eisebitt, “X-ray holography: the hole story,” Nature Photon. 2529–530 (2008).
[Crossref]
S. R. Gottesman and E. E. Fenimore, “New family of binary arrays for coded aperture imaging,” Appl. Opt. 28(20) 4344–4352 (1989).
[Crossref] [PubMed]

2011 (1)

C. Wagner, J. Bacelar, N. Harned, E. Loopstra, S. Hendriks, I. de Jong, P. Kuerz, L. Levasier, M. van de Kerkhof, M. Lowisch, H. Meiling, D. Ockwell, R. Peeters, E. van Setten, J. Stoeldraijer, S. Young, J. Zimmerman, and R. Kool, “EUV lithography at chipmakers has started: performance validation of ASML’s NXE:3100,” Proc. SPIE 7969, 79691F (April, 2011).
[Crossref]

2008 (1)

S. Eisebitt, “X-ray holography: the hole story,” Nature Photon. 2529–530 (2008).
[Crossref]

2007 (2)

R. Hain, C. J. Kushler, and C Tropea., “Comparison of CCD, CMOS and intensified cameras,” Exp. Fluids 42(3) 403–411 (2007).
[Crossref]

J. L. Culhane, L. K. Harra, A. M. James, K. Al-Janabi, L. J. Bradley, R. A. Chaudry, K. Rees, J. A. Tandy, P. Thomas, M. C. R. Whillock, B. Winter, G. A. Doschek, C. M. Korendyke, C. M. Brown, S. Myers, J. Mariska, J. Seely, J. Lang, B. J. Kent, B. M. Shaughnessy, P. R. Young, G. M. Simnett, C. M. Castelli, S. Mahmoud, H. Mapson-Menard, B. J. Probyn, R. J. Thomas, J. Davila, K. Dere, D. Windt, J. Shea, R. Hagood, R. Moye, H. Hara, T. Watanabe, K. Matsuzaki, T. Kosugi, V. Hansteen., and Wikstol., “The EUV imaging spectrometer for Hinode,” Sol. Phys. 243(1) 19–61 (2007).
[Crossref]

2002 (1)

D. Tichenor, A. W. Replogle, S. H. Lee, W. Ballard, A. Leung, G. Kubiak, L. Klebanoff, J. Graham, S. J. Goldsmith, M. K. Jefferson, J. Wronosky, T. Smith, T. Johnson, H. Shields, L. Hale, H. Chapman, J. Taylor, D. Sweeney, J. Folta, G. Sommargren, K. Goldberg, P. Naulleau, D. T. Attwood, and E. Gullikson, “Performance upgrades in the EUV engineering test stand,” Proc. SPIE4688 (July2002)

2001 (1)

R. Accorsi, F. Gasparini, and R. C. Lanza., “A coded aperture for high-resolution nuclear medicine planar imaging with a conventional Anger camera: experimental results,” IEEE Trans. Nucl. Sci. 48(6) 2411–2417 (2001).
[Crossref]

1989 (1)

S. R. Gottesman and E. E. Fenimore, “New family of binary arrays for coded aperture imaging,” Appl. Opt. 28(20) 4344–4352 (1989).
[Crossref] [PubMed]

Accorsi, R.

Al-Janabi, K.

Attwood, D. T.

Bacelar, J.

Ballard, W.

Bradley, L. J.

Brown, C. M.

Castelli, C. M.

Chapman, H.

Chaudry, R. A.

Culhane, J. L.

Davila, J.

de Jong, I.

Dere, K.

Doschek, G. A.

Eisebitt, S.

S. Eisebitt, “X-ray holography: the hole story,” Nature Photon. 2529–530 (2008).
[Crossref]

Fenimore, E. E.

S. R. Gottesman and E. E. Fenimore, “New family of binary arrays for coded aperture imaging,” Appl. Opt. 28(20) 4344–4352 (1989).
[Crossref] [PubMed]

Fleig, J.

P. E. Murphy, J. Fleig, G. Forbes, and M. Tricard., “High precision metrology of domes and aspheric optics,” Proc. SPIE5786 (May2005)
[Crossref]

Folta, J.

Forbes, G.

P. E. Murphy, J. Fleig, G. Forbes, and M. Tricard., “High precision metrology of domes and aspheric optics,” Proc. SPIE5786 (May2005)
[Crossref]

Gasparini, F.

Goldberg, K.

Goldsmith, S. J.

Gottesman, S. R.

S. R. Gottesman and E. E. Fenimore, “New family of binary arrays for coded aperture imaging,” Appl. Opt. 28(20) 4344–4352 (1989).
[Crossref] [PubMed]

Graham, J.

Gullikson, E.

Hagood, R.

Hain, R.

R. Hain, C. J. Kushler, and C Tropea., “Comparison of CCD, CMOS and intensified cameras,” Exp. Fluids 42(3) 403–411 (2007).
[Crossref]

Hale, L.

Hansteen., V.

Hara, H.

Harned, N.

Harra, L. K.

Hendriks, S.

James, A. M.

Jefferson, M. K.

Johnson, T.

Kent, B. J.

Klebanoff, L.

Kool, R.

Korendyke, C. M.

Kosugi, T.

Kubiak, G.

Kuerz, P.

Kushler, C. J.

R. Hain, C. J. Kushler, and C Tropea., “Comparison of CCD, CMOS and intensified cameras,” Exp. Fluids 42(3) 403–411 (2007).
[Crossref]

Lang, J.

Lanza., R. C.

Lee, S. H.

Leung, A.

Levasier, L.

Loopstra, E.

Lowisch, M.

Mahmoud, S.

Mapson-Menard, H.

Mariska, J.

Matsuzaki, K.

Meiling, H.

Moye, R.

Murphy, P. E.

P. E. Murphy, J. Fleig, G. Forbes, and M. Tricard., “High precision metrology of domes and aspheric optics,” Proc. SPIE5786 (May2005)
[Crossref]

Myers, S.

Naulleau, P.

Ockwell, D.

Peeters, R.

Probyn, B. J.

Rees, K.

Replogle, A. W.

Seely, J.

Shaughnessy, B. M.

Shea, J.

Shields, H.

Simnett, G. M.

Smith, T.

Sommargren, G.

Stoeldraijer, J.

Sweeney, D.

Tandy, J. A.

Taylor, J.

Thomas, P.

Thomas, R. J.

Tichenor, D.

Tricard., M.

P. E. Murphy, J. Fleig, G. Forbes, and M. Tricard., “High precision metrology of domes and aspheric optics,” Proc. SPIE5786 (May2005)
[Crossref]

Tropea., C

R. Hain, C. J. Kushler, and C Tropea., “Comparison of CCD, CMOS and intensified cameras,” Exp. Fluids 42(3) 403–411 (2007).
[Crossref]

van de Kerkhof, M.

van Setten, E.

Wagner, C.

Watanabe, T.

Whillock, M. C. R.

Wikstol.,

Windt, D.

Winter, B.

Wronosky, J.

Young, P. R.

Young, S.

Zimmerman, J.

Appl. Opt. (1)

S. R. Gottesman and E. E. Fenimore, “New family of binary arrays for coded aperture imaging,” Appl. Opt. 28(20) 4344–4352 (1989).
[Crossref] [PubMed]

Exp. Fluids (1)

R. Hain, C. J. Kushler, and C Tropea., “Comparison of CCD, CMOS and intensified cameras,” Exp. Fluids 42(3) 403–411 (2007).
[Crossref]

IEEE Trans. Nucl. Sci. (1)

Nature Photon. (1)

S. Eisebitt, “X-ray holography: the hole story,” Nature Photon. 2529–530 (2008).
[Crossref]

Proc. SPIE (2)

Sol. Phys. (1)

Other (1)

P. E. Murphy, J. Fleig, G. Forbes, and M. Tricard., “High precision metrology of domes and aspheric optics,” Proc. SPIE5786 (May2005)
[Crossref]

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Fig. 1 SEM image of a URA fabricated at the Center for X-ray Optics demonstrating 20-nm resolution. The pattern consists of a 80-nm gold absorber on a silicon nitride membrane

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Fig. 2 Schematic of visible light prototype.

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Fig. 3 (a)–(b) Pictures of the object patterns taken through an optical microscope, (c)–(d) Signal captured on the diode, and (e)–(f) Reconstructed images after processing.

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Tables (1)

Table 1 Estimation of PSF widths.

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Equations (7)

Equations on this page are rendered with MathJax. Learn more.

i (x, y) = (a * t) (x, y)

(u \otimes u^{'}) (x, y) = δ (x, y)

u_{T} (x, y) = u (x mod N, y mod N)

\begin{array}{l} i (x, y) & = (a * u_{T}) (x, y) \\ = (a \otimes u) (x, y) \end{array}

\begin{array}{l} (i \otimes u^{'}) (x, y) & = [(a \otimes u) \otimes u^{'}] (x, y) \\ = [a \otimes (u \otimes u^{'})] (x, y) \\ = [a \otimes δ] (x, y) \\ = a (x, y) \end{array}

PSF (x, y, σ_{x}, σ_{y}) = A exp {- (\frac{x^{2}}{2 σ_{x}^{2}} - \frac{y^{2}}{2 σ_{y}^{2}})}

E (σ_{x}, σ_{y}) = \sum_{x, y} {| (i_{ideal} * PSF) (x, y, σ_{x}, σ_{y}) - i_{measured} (x, y) |}^{2}

Object	PSF FWHM (x,y)	Normalized residual error
Sudoku Puzzle	(2.06 px, 2.10 px)	0.007
Berkeley Lab Logo	(1.58 px, 1.32 px)	0.003