Abstract

We present here the fabrication of subwavelength GaN membrane grating with a double-side process. Controllable GaN membrane thickness is achieved by backside thinning technique, which is essential to realize guided-mode resonant GaN grating in the visible range. Subwavelength GaN grating can serve as an optical resonator and accommodate surface-normal emission coupling. The measured photoluminescence (PL) spectra are sensitive to the parameters and shapes of GaN gratings. Both numerical simulation and reflectivity measurement are in consistent with the PL experimental results. This work opens a promising way to embed GaN-based photon emitter inside subwavelength grating to further produce a surface emitting device with a single layer GaN grating.

© 2014 Optical Society of America

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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]

2013

T. T. Wu, S. H. Wu, T. C. Lu, S. C. Wang, “GaN-based high contrast grating surface-emitting lasers,” Appl. Phys. Lett. 102(8), 081111 (2013).
[CrossRef]

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

2012

D. Chen, J. Han, “High reflectance membrane-based distributed Bragg reflectors for GaN photonics,” Appl. Phys. Lett. 101(22), 221104 (2012).
[CrossRef]

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

C. J. Chang-Hasnain, W. J. Yang, “High-contrast gratings for integrated optoelectronics,” Adv. Opt. Photonics 4(3), 379–440 (2012).
[CrossRef]

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

J. H. Ryu, H. Y. Kim, H. K. Kim, Y. S. Katharria, N. Han, J. H. Kang, Y. J. Park, M. Han, B. D. Ryu, K. B. Ko, E. K. Suh, C. H. Hong, “High performance of InGaN light-emitting diodes by air-gap/GaN distributed Bragg reflectors,” Opt. Express 20(9), 9999–10003 (2012).
[CrossRef] [PubMed]

T. T. Wu, Y. C. Syu, S. H. Wu, W. T. Chen, T. C. Lu, S. C. Wang, H. P. Chiang, D. P. Tsai, “Sub-wavelength GaN-based membrane high contrast grating reflectors,” Opt. Express 20(18), 20551–20557 (2012).
[CrossRef] [PubMed]

R. Magnusson, “Spectrally dense comb-like filters fashioned with thick guided-mode resonant gratings,” Opt. Lett. 37(18), 3792–3794 (2012).
[CrossRef] [PubMed]

U. Dharanipathy, N. Vico Triviño, C. Yan, Z. Diao, J.-F. Carlin, N. Grandjean, R. Houdré, “Near-infrared characterization of gallium nitride photonic-crystal waveguides and cavities,” Opt. Lett. 37(22), 4588–4590 (2012).
[CrossRef] [PubMed]

2011

2010

2009

J. Lee, S. Ahn, H. Chang, J. Kim, Y. Park, H. Jeon, “Polarization-dependent GaN surface grating reflector for short wavelength applications,” Opt. Express 17(25), 22535–22542 (2009).
[CrossRef] [PubMed]

J. Kim, D. Kim, J. Lee, H. Jeon, Y. Park, Y.-S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett. 95(2), 021102 (2009).
[CrossRef]

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

2008

2006

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Aharonovich, I.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Ahn, S.

Al-Naib, I. A. I.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Arakawa, Y.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Arita, M.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Atlasov, K. A.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Baumberg, J.

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

Baumberg, J. J.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Bellanger, M.

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

Bousquet, V.

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

Butte, R.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Carlin, J. F.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Carlin, J.-F.

Castiglia, A.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Chang, H.

Chang, J. Y.

Chang-Hasnain, C. J.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

C. J. Chang-Hasnain, W. J. Yang, “High-contrast gratings for integrated optoelectronics,” Adv. Opt. Photonics 4(3), 379–440 (2012).
[CrossRef]

Y. Zhou, M. Moewe, J. Kern, M. C. Y. Huang, C. J. Chang-Hasnain, “Surface-normal emission of a high-Q resonator using a subwavelength high-contrast grating,” Opt. Express 16(22), 17282–17287 (2008).
[CrossRef] [PubMed]

Chase, C.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Chen, D.

D. Chen, J. Han, “High reflectance membrane-based distributed Bragg reflectors for GaN photonics,” Appl. Phys. Lett. 101(22), 221104 (2012).
[CrossRef]

Chen, H. Y.

Chen, J. S.

Chen, P.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Chen, R.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Chen, W. C.

Chen, W. T.

Chen, Y. Y.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Chiang, H. P.

Choi, H. W.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Choi, Y.-S.

J. Kim, D. Kim, J. Lee, H. Jeon, Y. Park, Y.-S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett. 95(2), 021102 (2009).
[CrossRef]

Christmann, G.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

Chua, S. J.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Chuang, L. C.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Daskalakis, K. S.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Dharanipathy, U.

U. Dharanipathy, N. Vico Triviño, C. Yan, Z. Diao, J.-F. Carlin, N. Grandjean, R. Houdré, “Near-infrared characterization of gallium nitride photonic-crystal waveguides and cavities,” Opt. Lett. 37(22), 4588–4590 (2012).
[CrossRef] [PubMed]

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Diao, Z.

Eldridge, P. S.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Fong, K. Y.

Grandjean, N.

U. Dharanipathy, N. Vico Triviño, C. Yan, Z. Diao, J.-F. Carlin, N. Grandjean, R. Houdré, “Near-infrared characterization of gallium nitride photonic-crystal waveguides and cavities,” Opt. Lett. 37(22), 4588–4590 (2012).
[CrossRef] [PubMed]

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Gu, J. Q.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Gwo, S.

Han, J.

D. Chen, J. Han, “High reflectance membrane-based distributed Bragg reflectors for GaN photonics,” Appl. Phys. Lett. 101(22), 221104 (2012).
[CrossRef]

Han, M.

Han, N.

Hane, K.

Hong, C. H.

Houdre, R.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Houdré, R.

Hsu, C. L.

Hu, E. L.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Hu, F. R.

Huang, M. C. Y.

Hui, K. N.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Iliopoulos, E.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Iwamoto, S.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Jeon, H.

Kako, S.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Kanamori, Y.

Kang, J. H.

Kappers, M. J.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Karagodsky, V.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Katharria, Y. S.

Kauer, M.

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

Kern, J.

Kim, D.

J. Kim, D. Kim, J. Lee, H. Jeon, Y. Park, Y.-S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett. 95(2), 021102 (2009).
[CrossRef]

Kim, H. K.

Kim, H. Y.

Kim, J.

Ko, K. B.

Lai, P. T.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Lee, C. C.

Lee, J.

Levrat, J.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Lin, H. W.

Lu, T. C.

Magnusson, R.

Moewe, M.

Monroy, E.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Morandotti, R.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Murray, R.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Niu, N.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Oliver, R. A.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Ozaki, T.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Palacios, T.

Park, Y.

Park, Y. J.

Pelekanos, N. T.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Pernice, W.

Rao, Y.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Rossbach, G.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Russell, K. J.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Ryu, B. D.

Ryu, J. H.

Ryu, K. K.

Savvidis, P. G.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Schuck, C.

Sergent, S.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Suh, E. K.

Syu, Y. C.

Tanabe, K.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Tang, H. X.

Teng, J. H.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Tran, T.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Trichas, E.

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Tripathy, S.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Trivino, N. V.

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Tsai, D. P.

Tsai, Y. L.

Tu, Z. R.

Vico Triviño, N.

Wang, C. M.

Wang, M. W.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Wang, S. C.

Wang, Y. J.

Woolf, A.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Wu, C. Y.

Wu, M. L.

Wu, S. H.

Wu, T.

Wu, T. T.

Xiong, C.

Yan, C.

Yang, W.

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

Yang, W. J.

C. J. Chang-Hasnain, W. J. Yang, “High-contrast gratings for integrated optoelectronics,” Adv. Opt. Photonics 4(3), 379–440 (2012).
[CrossRef]

Zhang, W. L.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Zhang, X. H.

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

Zhou, Y.

Zhu, T.

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

Adv. Opt. Photonics

C. J. Chang-Hasnain, W. J. Yang, “High-contrast gratings for integrated optoelectronics,” Adv. Opt. Photonics 4(3), 379–440 (2012).
[CrossRef]

AIP Adv.

Y. Y. Chen, I. A. I. Al-Naib, J. Q. Gu, M. W. Wang, T. Ozaki, R. Morandotti, W. L. Zhang, “Membrane metamaterial resonators with a sharp resonance: A comprehensive study towards practical terahertz filters and sensors,” AIP Adv. 2(2), 022109 (2012).
[CrossRef]

Appl. Phys. Express

M. Bellanger, V. Bousquet, G. Christmann, J. Baumberg, M. Kauer, “Highly reflective GaN-based air-gap distributed Bragg reflectors fabricated using AlInN wet etching,” Appl. Phys. Express 2(12), 121003 (2009).
[CrossRef]

Appl. Phys. Lett.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

J. Kim, D. Kim, J. Lee, H. Jeon, Y. Park, Y.-S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett. 95(2), 021102 (2009).
[CrossRef]

D. Chen, J. Han, “High reflectance membrane-based distributed Bragg reflectors for GaN photonics,” Appl. Phys. Lett. 101(22), 221104 (2012).
[CrossRef]

T. T. Wu, S. H. Wu, T. C. Lu, S. C. Wang, “GaN-based high contrast grating surface-emitting lasers,” Appl. Phys. Lett. 102(8), 081111 (2013).
[CrossRef]

I. Aharonovich, A. Woolf, K. J. Russell, T. Zhu, N. Niu, M. J. Kappers, R. A. Oliver, E. L. Hu, “Low threshold, room-temperature microdisk lasers in the blue spectral range,” Appl. Phys. Lett. 103(2), 021112 (2013).
[CrossRef]

H. W. Choi, K. N. Hui, P. T. Lai, P. Chen, X. H. Zhang, S. Tripathy, J. H. Teng, S. J. Chua, “Lasing in GaN microdisks pivoted on Si,” Appl. Phys. Lett. 89(21), 211101 (2006).
[CrossRef]

N. V. Trivino, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butte, R. Houdre, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

T. Tran, V. Karagodsky, Y. Rao, W. Yang, R. Chen, C. Chase, L. C. Chuang, C. J. Chang-Hasnain, “Surface-normal second harmonic emission from AlGaAs high-contrast gratings,” Appl. Phys. Lett. 102(2), 021102 (2013).
[CrossRef]

K. S. Daskalakis, P. S. Eldridge, G. Christmann, E. Trichas, R. Murray, E. Iliopoulos, E. Monroy, N. T. Pelekanos, J. J. Baumberg, P. G. Savvidis, “All-dielectric GaN microcavity: Strong coupling and lasing at room temperature,” Appl. Phys. Lett. 102(10), 101113 (2013).
[CrossRef]

Opt. Express

Y. Zhou, M. Moewe, J. Kern, M. C. Y. Huang, C. J. Chang-Hasnain, “Surface-normal emission of a high-Q resonator using a subwavelength high-contrast grating,” Opt. Express 16(22), 17282–17287 (2008).
[CrossRef] [PubMed]

C. Xiong, W. Pernice, K. K. Ryu, C. Schuck, K. Y. Fong, T. Palacios, H. X. Tang, “Integrated GaN photonic circuits on silicon (100) for second harmonic generation,” Opt. Express 19(11), 10462–10470 (2011).
[CrossRef] [PubMed]

T. T. Wu, Y. C. Syu, S. H. Wu, W. T. Chen, T. C. Lu, S. C. Wang, H. P. Chiang, D. P. Tsai, “Sub-wavelength GaN-based membrane high contrast grating reflectors,” Opt. Express 20(18), 20551–20557 (2012).
[CrossRef] [PubMed]

J. Lee, S. Ahn, H. Chang, J. Kim, Y. Park, H. Jeon, “Polarization-dependent GaN surface grating reflector for short wavelength applications,” Opt. Express 17(25), 22535–22542 (2009).
[CrossRef] [PubMed]

J. H. Ryu, H. Y. Kim, H. K. Kim, Y. S. Katharria, N. Han, J. H. Kang, Y. J. Park, M. Han, B. D. Ryu, K. B. Ko, E. K. Suh, C. H. Hong, “High performance of InGaN light-emitting diodes by air-gap/GaN distributed Bragg reflectors,” Opt. Express 20(9), 9999–10003 (2012).
[CrossRef] [PubMed]

H. Y. Chen, H. W. Lin, C. Y. Wu, W. C. Chen, J. S. Chen, S. Gwo, “Gallium nitride nanorod arrays as low-refractive-index transparent media in the entire visible spectral region,” Opt. Express 16(11), 8106–8116 (2008).
[CrossRef] [PubMed]

Y. J. Wang, F. R. Hu, Y. Kanamori, T. Wu, K. Hane, “Large area, freestanding GaN nanocolumn membrane with bottom subwavelength nanostructure,” Opt. Express 18(6), 5504–5511 (2010).
[CrossRef] [PubMed]

Opt. Lett.

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Figures (4)

Fig. 1
Fig. 1

Schematic fabrication process of subwavelength GaN membrane grating.

Fig. 2
Fig. 2

(a) micrograph image of subwavelength GaN grating; (b) circular grating with Λ = 400nm and η = 0.6; (c) circular grating with Λ = 400nm and η = 0.5; (d) linear grating with Λ = 500nm and η = 0.6.

Fig. 3
Fig. 3

(a) PL spectra for GaN membrane; (b) PL spectra for subwavelength GaN grating; (c) PL spectra versus filling factor for circular grating; (d) reflectivity spectra for circular grating with Λ = 400nm and η = 0.6.

Fig. 4
Fig. 4

(a) PL spectra versus filling factor for linear grating with Λ = 500nm. (b) reflectivity spectra versus the filling factor; (c) measured reflectivity spectra versus polarization; (d) Calculated reflectivity spectra versus the thickness of GaN membrane.

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