Abstract

We investigate photovoltaic characteristics of crystalline Si solar cells with microhole-patterned surface. We compare patterned samples with different hole-widths and periods with a planar counterpart. From the finite-difference time-domain simulation, the patterned and planar samples are expected to have similar short circuit current density, Jsc (difference: 1.2%). In contrast, the difference in the measured Jsc is as large as 12.6%. The simulated optical field patterns reveal that the sample with more significantly concentrated light near the surface has higher quantum efficiency due to more efficient carrier collection. We report the highest efficiency of 15.6% among the hole-patterned solar cells.

© 2013 OSA

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    [CrossRef]
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    [CrossRef] [PubMed]
  33. L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).
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    [CrossRef]

2013

2012

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
[CrossRef] [PubMed]

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
[CrossRef]

K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
[CrossRef] [PubMed]

M. G. Deceglie, V. E. Ferry, A. P. Alivisatos, H. A. Atwater, “Design of nanostructured solar cells using coupled optical and electrical modeling,” Nano Lett. 12(6), 2894–2900 (2012).
[CrossRef] [PubMed]

P. Spinelli, M. A. Verschuuren, A. Polman, “Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators,” Nat Commun 3(692), 692 (2012).
[CrossRef] [PubMed]

A. Bozzola, M. Liscidini, L. C. Andreani, “Photonic light-trapping versus Lambertian limits in thin film silicon solar cells with 1D and 2D periodic patterns,” Opt. Express 20(S2Suppl 2), A224–A244 (2012).
[CrossRef] [PubMed]

X. Meng, V. Depauw, G. Gomard, O. El Daif, C. Trompoukis, E. Drouard, C. Jamois, A. Fave, F. Dross, I. Gordon, C. Seassal, “Design, fabrication and optical characterization of photonic crystal assisted thin film monocrystalline-silicon solar cells,” Opt. Express 20(S4Suppl 4), A465–A475 (2012).
[CrossRef] [PubMed]

S.-K. Kim, K.-D. Song, H.-G. Park, “Design of input couplers for efficient silicon thin film solar absorbers,” Opt. Express 20(S6), A997–A1004 (2012).
[CrossRef]

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

N. Huang, C. Lin, M. L. Povinelli, “Broadband absorption of semiconductor nanowire arrays for photovoltaic applications,” J. Opt. 14(2), 024004 (2012).
[CrossRef]

M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
[CrossRef] [PubMed]

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
[CrossRef]

2011

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

E. C. Garnett, M. L. Brongersma, Y. Cui, M. D. McGehee, “Nanowire solar cells,” Annu. Rev. Mater. Res. 41(1), 269–295 (2011).
[CrossRef]

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

R. Biswas, C. Xu, “Nano-crystalline silicon solar cell architecture with absorption at the classical 4n2 limit,” Opt. Express 19(S4Suppl 4), A664–A672 (2011).
[CrossRef] [PubMed]

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011).
[CrossRef] [PubMed]

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

2010

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

T. Saga, “Advances in crystalline silicon solar cell technology for industrial mass production,” NPG Asia Mater. 2(3), 96–102 (2010).
[CrossRef]

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

2009

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

2007

P. Bermel, C. Luo, L. Zeng, L. C. Kimerling, J. D. Joannopoulos, “Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals,” Opt. Express 15(25), 16986–17000 (2007).
[CrossRef] [PubMed]

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

2001

K. Kotsovos, K. Misiakos, “Three-dimensional simulation of carrier transport effects in the base of rear point contact silicon solar cells,” J. Appl. Phys. 89(4), 2491–2496 (2001).
[CrossRef]

1995

1991

J. Zhao, M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar-cells,” IEEE Trans. Electron. Dev. 38(8), 1925–1934 (1991).
[CrossRef]

Abass, A.

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

Alamariu, B. A.

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Alivisatos, A. P.

M. G. Deceglie, V. E. Ferry, A. P. Alivisatos, H. A. Atwater, “Design of nanostructured solar cells using coupled optical and electrical modeling,” Nano Lett. 12(6), 2894–2900 (2012).
[CrossRef] [PubMed]

Alù, A.

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

Andreani, L. C.

Atwater, H. A.

M. G. Deceglie, V. E. Ferry, A. P. Alivisatos, H. A. Atwater, “Design of nanostructured solar cells using coupled optical and electrical modeling,” Nano Lett. 12(6), 2894–2900 (2012).
[CrossRef] [PubMed]

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Baek, J. Y.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Baek, S.-H.

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
[CrossRef]

Barber, G. D.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Bermel, P.

P. Bermel, C. Luo, L. Zeng, L. C. Kimerling, J. D. Joannopoulos, “Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals,” Opt. Express 15(25), 16986–17000 (2007).
[CrossRef] [PubMed]

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Biswas, R.

Boettcher, S. W.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Bozzola, A.

Branham, M. S.

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
[CrossRef] [PubMed]

Briggs, R. M.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Brongersma, M. L.

E. C. Garnett, M. L. Brongersma, Y. Cui, M. D. McGehee, “Nanowire solar cells,” Annu. Rev. Mater. Res. 41(1), 269–295 (2011).
[CrossRef]

Burgelman, M.

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

Chang, F.-Y.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Chen, G.

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
[CrossRef] [PubMed]

Chen, S.-W.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Chen, T.-G.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Cheng, Y.-C.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Cho, I. S.

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

Cho, Y. J.

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

Choi, B.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Choi, P.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Chou, S. Y.

Cui, Y.

K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
[CrossRef] [PubMed]

E. C. Garnett, M. L. Brongersma, Y. Cui, M. D. McGehee, “Nanowire solar cells,” Annu. Rev. Mater. Res. 41(1), 269–295 (2011).
[CrossRef]

Deceglie, M. G.

M. G. Deceglie, V. E. Ferry, A. P. Alivisatos, H. A. Atwater, “Design of nanostructured solar cells using coupled optical and electrical modeling,” Nano Lett. 12(6), 2894–2900 (2012).
[CrossRef] [PubMed]

Deparis, O.

C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
[CrossRef]

Depauw, V.

C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
[CrossRef]

X. Meng, V. Depauw, G. Gomard, O. El Daif, C. Trompoukis, E. Drouard, C. Jamois, A. Fave, F. Dross, I. Gordon, C. Seassal, “Design, fabrication and optical characterization of photonic crystal assisted thin film monocrystalline-silicon solar cells,” Opt. Express 20(S4Suppl 4), A465–A475 (2012).
[CrossRef] [PubMed]

Ding, W.

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C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
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K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
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M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
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Feng, N.-N.

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Ferry, V. E.

M. G. Deceglie, V. E. Ferry, A. P. Alivisatos, H. A. Atwater, “Design of nanostructured solar cells using coupled optical and electrical modeling,” Nano Lett. 12(6), 2894–2900 (2012).
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E. C. Garnett, M. L. Brongersma, Y. Cui, M. D. McGehee, “Nanowire solar cells,” Annu. Rev. Mater. Res. 41(1), 269–295 (2011).
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Gharghi, M.

M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
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Gomard, G.

Gong, D.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
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K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
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J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
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Gwon, M.

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
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Han, C.-S.

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

Han, S. E.

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
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Heine, C.

Herman, C.

C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
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Hong, C.-Y.

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Hsiao, J.-C.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
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Hu, B.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
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Hu, Y.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
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T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
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N. Huang, C. Lin, M. L. Povinelli, “Broadband absorption of semiconductor nanowire arrays for photovoltaic applications,” J. Opt. 14(2), 024004 (2012).
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J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
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Jamois, C.

Jang, S. J.

Jee, S.-W.

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
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Jeong, C.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
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Joannopoulos, J.

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Joannopoulos, J. D.

Ju, M.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Jung, J.-Y.

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

Kante, B.

M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
[CrossRef] [PubMed]

Kelzenberg, M. D.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
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Kendrick, C. E.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Kim, D. R.

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

Kim, D.-W.

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
[CrossRef]

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

Kim, H.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

Kim, J.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

Kim, J. H.

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
[CrossRef]

Kim, K.-R.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Kim, M.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

Kim, S.-K.

Kim, Y.

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
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Kim, Y. S.

Kimerling, L. C.

P. Bermel, C. Luo, L. Zeng, L. C. Kimerling, J. D. Joannopoulos, “Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals,” Opt. Express 15(25), 16986–17000 (2007).
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L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Ko, J.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

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K. Kotsovos, K. Misiakos, “Three-dimensional simulation of carrier transport effects in the base of rear point contact silicon solar cells,” J. Appl. Phys. 89(4), 2491–2496 (2001).
[CrossRef]

Le, K. Q.

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

Lee, C. H.

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

Lee, E.

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
[CrossRef]

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

Lee, J.-H.

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

Lee, K.-S.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Lee, S.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

Lee, S.-T.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

Lee, Y. T.

Lewis, N. S.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Li, C.-K.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Li, J. S.

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

Li, L.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

Li, Y. L.

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
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Lim, S. K.

Lin, C.

N. Huang, C. Lin, M. L. Povinelli, “Broadband absorption of semiconductor nanowire arrays for photovoltaic applications,” J. Opt. 14(2), 024004 (2012).
[CrossRef]

Liscidini, M.

Liu, V.

K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
[CrossRef] [PubMed]

Luo, C.

Maes, B.

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

Mallouk, T. E.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Mavrokefalos, A.

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
[CrossRef] [PubMed]

Mayer, T. S.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

McGehee, M. D.

E. C. Garnett, M. L. Brongersma, Y. Cui, M. D. McGehee, “Nanowire solar cells,” Annu. Rev. Mater. Res. 41(1), 269–295 (2011).
[CrossRef]

Meng, X.

Misiakos, K.

K. Kotsovos, K. Misiakos, “Three-dimensional simulation of carrier transport effects in the base of rear point contact silicon solar cells,” J. Appl. Phys. 89(4), 2491–2496 (2001).
[CrossRef]

Morf, R. H.

Park, C. Y.

Park, H.-G.

Park, J.

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

Park, K.-T.

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

Park, Y. C.

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

Peng, K.-Q.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

Pillai, K.

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Podraza, N. J.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Polman, A.

P. Spinelli, M. A. Verschuuren, A. Polman, “Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators,” Nat Commun 3(692), 692 (2012).
[CrossRef] [PubMed]

Povinelli, M. L.

N. Huang, C. Lin, M. L. Povinelli, “Broadband absorption of semiconductor nanowire arrays for photovoltaic applications,” J. Opt. 14(2), 024004 (2012).
[CrossRef]

Putnam, M. C.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Rao, P. M.

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

Redwing, J. M.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Saga, T.

T. Saga, “Advances in crystalline silicon solar cell technology for industrial mass production,” NPG Asia Mater. 2(3), 96–102 (2010).
[CrossRef]

Seassal, C.

Sivoththaman, S.

M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
[CrossRef] [PubMed]

Song, K.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

Song, K.-D.

Song, Y. M.

Spinelli, P.

P. Spinelli, M. A. Verschuuren, A. Polman, “Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators,” Nat Commun 3(692), 692 (2012).
[CrossRef] [PubMed]

Trompoukis, C.

X. Meng, V. Depauw, G. Gomard, O. El Daif, C. Trompoukis, E. Drouard, C. Jamois, A. Fave, F. Dross, I. Gordon, C. Seassal, “Design, fabrication and optical characterization of photonic crystal assisted thin film monocrystalline-silicon solar cells,” Opt. Express 20(S4Suppl 4), A465–A475 (2012).
[CrossRef] [PubMed]

C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
[CrossRef]

Turner-Evans, D. B.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

Um, H.-D.

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

Verschuuren, M. A.

P. Spinelli, M. A. Verschuuren, A. Polman, “Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators,” Nat Commun 3(692), 692 (2012).
[CrossRef] [PubMed]

Wang, F.

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

Wang, K. X.

K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
[CrossRef] [PubMed]

Wang, X.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

Wong, S. M.

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

Wronski, C. R.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Wu, X.-L.

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

Wu, Y.-R.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Xu, C.

Yang, J. M.

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

Yang, M. F.

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

Yeo, C. I.

Yerci, S.

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
[CrossRef] [PubMed]

Yi, J.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Yi, Y.

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Yoon, H. P.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Yu, H. Y.

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

Yu, J. S.

Yu, P.

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Yu, Z.

K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
[CrossRef] [PubMed]

Yun, J.-H.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

Yuwen, Y. A.

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

Zeng, L.

P. Bermel, C. Luo, L. Zeng, L. C. Kimerling, J. D. Joannopoulos, “Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals,” Opt. Express 15(25), 16986–17000 (2007).
[CrossRef] [PubMed]

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Zhang, X.

M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
[CrossRef] [PubMed]

Zhao, J.

J. Zhao, M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar-cells,” IEEE Trans. Electron. Dev. 38(8), 1925–1934 (1991).
[CrossRef]

Zheng, X.

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

Annu. Rev. Mater. Res.

E. C. Garnett, M. L. Brongersma, Y. Cui, M. D. McGehee, “Nanowire solar cells,” Annu. Rev. Mater. Res. 41(1), 269–295 (2011).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

J. Kim, M. Kim, H. Kim, K. Song, E. Lee, D.-W. Kim, J.-H. Yun, S. Lee, C. Jeong, J. Yi, “Effective light management of three-dimensionally patterned transparent conductive oxide layers,” Appl. Phys. Lett. 101(14), 143904 (2012).
[CrossRef]

J. S. Li, H. Y. Yu, Y. L. Li, F. Wang, M. F. Yang, S. M. Wong, “Low aspect-ratio hemispherical nanopit surface texturing for enhancing light absorption in crystalline Si thin film-based solar cells,” Appl. Phys. Lett. 98(2), 021905 (2011).
[CrossRef]

H. P. Yoon, Y. A. Yuwen, C. E. Kendrick, G. D. Barber, N. J. Podraza, J. M. Redwing, T. E. Mallouk, C. R. Wronski, T. S. Mayer, “Enhanced conversion efficiencies for pillar array solar cells fabricated from crystalline silicon with short minority carrier diffusion lengths,” Appl. Phys. Lett. 96(21), 213503 (2010).
[CrossRef]

J. Kim, J.-H. Yun, C.-S. Han, Y. J. Cho, J. Park, Y. C. Park, “Multiple silicon nanowires-embedded Schottky solar cell,” Appl. Phys. Lett. 95(14), 143112 (2009).
[CrossRef]

L. Li, K.-Q. Peng, B. Hu, X. Wang, Y. Hu, X.-L. Wu, S.-T. Lee, “Broadband optical absorption enhancement in silicon nanofunnel arrays for photovoltaic applications,” Appl. Phys. Lett. 100(22), 223902 (2012).
[CrossRef]

Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics

T.-G. Chen, P. Yu, S.-W. Chen, F.-Y. Chang, B.-Y. Huang, Y.-C. Cheng, J.-C. Hsiao, C.-K. Li, Y.-R. Wu, “Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics,” Prog. Photovolt: Res. Appl. (on-line published, DOI: ).
[CrossRef]

Energy Environ. Sci.

M. D. Kelzenberg, D. B. Turner-Evans, M. C. Putnam, S. W. Boettcher, R. M. Briggs, J. Y. Baek, N. S. Lewis, H. A. Atwater, “High-performance Si microwire photovoltaics,” Energy Environ. Sci. 4(3), 866–871 (2011).
[CrossRef]

IEEE Trans. Electron. Dev.

J. Zhao, M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar-cells,” IEEE Trans. Electron. Dev. 38(8), 1925–1934 (1991).
[CrossRef]

J. Appl. Phys.

C. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, “Influence of the pattern shape on the efficiency of front-side periodically patterned ultrathin crystalline silicon solar cells,” J. Appl. Phys. 112(11), 113107 (2012).
[CrossRef]

K. Kotsovos, K. Misiakos, “Three-dimensional simulation of carrier transport effects in the base of rear point contact silicon solar cells,” J. Appl. Phys. 89(4), 2491–2496 (2001).
[CrossRef]

J. Opt.

N. Huang, C. Lin, M. L. Povinelli, “Broadband absorption of semiconductor nanowire arrays for photovoltaic applications,” J. Opt. 14(2), 024004 (2012).
[CrossRef]

Nano Lett.

M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, X. Zhang, “Heterojunction silicon microwire solar cells,” Nano Lett. 12(12), 6278–6282 (2012).
[CrossRef] [PubMed]

A. Mavrokefalos, S. E. Han, S. Yerci, M. S. Branham, G. Chen, “Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications,” Nano Lett. 12(6), 2792–2796 (2012).
[CrossRef] [PubMed]

D. R. Kim, C. H. Lee, P. M. Rao, I. S. Cho, X. Zheng, “Hybrid Si microwire and planar solar cells: passivation and characterization,” Nano Lett. 11(7), 2704–2708 (2011).
[CrossRef] [PubMed]

K. X. Wang, Z. Yu, V. Liu, Y. Cui, S. Fan, “Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings,” Nano Lett. 12(3), 1616–1619 (2012).
[CrossRef] [PubMed]

M. G. Deceglie, V. E. Ferry, A. P. Alivisatos, H. A. Atwater, “Design of nanostructured solar cells using coupled optical and electrical modeling,” Nano Lett. 12(6), 2894–2900 (2012).
[CrossRef] [PubMed]

Nanotechnology

J.-Y. Jung, Z. Guo, S.-W. Jee, H.-D. Um, K.-T. Park, M. S. Hyun, J. M. Yang, J.-H. Lee, “A waferscale Si wire solar cell using radial and bulk p-n junctions,” Nanotechnology 21(44), 445303 (2010).
[CrossRef] [PubMed]

Nat Commun

P. Spinelli, M. A. Verschuuren, A. Polman, “Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators,” Nat Commun 3(692), 692 (2012).
[CrossRef] [PubMed]

NPG Asia Mater.

T. Saga, “Advances in crystalline silicon solar cell technology for industrial mass production,” NPG Asia Mater. 2(3), 96–102 (2010).
[CrossRef]

Opt. Express

S. Y. Chou, W. Ding, “Ultrathin, high-efficiency, broad-band, omni-acceptance, organic solar cells enhanced by plasmonic cavity with subwavelength hole array,” Opt. Express 21(S1Suppl 1), A60–A76 (2013).
[CrossRef] [PubMed]

A. Bozzola, M. Liscidini, L. C. Andreani, “Photonic light-trapping versus Lambertian limits in thin film silicon solar cells with 1D and 2D periodic patterns,” Opt. Express 20(S2Suppl 2), A224–A244 (2012).
[CrossRef] [PubMed]

X. Meng, V. Depauw, G. Gomard, O. El Daif, C. Trompoukis, E. Drouard, C. Jamois, A. Fave, F. Dross, I. Gordon, C. Seassal, “Design, fabrication and optical characterization of photonic crystal assisted thin film monocrystalline-silicon solar cells,” Opt. Express 20(S4Suppl 4), A465–A475 (2012).
[CrossRef] [PubMed]

S.-K. Kim, K.-D. Song, H.-G. Park, “Design of input couplers for efficient silicon thin film solar absorbers,” Opt. Express 20(S6), A997–A1004 (2012).
[CrossRef]

R. Biswas, C. Xu, “Nano-crystalline silicon solar cell architecture with absorption at the classical 4n2 limit,” Opt. Express 19(S4Suppl 4), A664–A672 (2011).
[CrossRef] [PubMed]

P. Bermel, C. Luo, L. Zeng, L. C. Kimerling, J. D. Joannopoulos, “Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals,” Opt. Express 15(25), 16986–17000 (2007).
[CrossRef] [PubMed]

S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011).
[CrossRef] [PubMed]

K.-T. Park, Z. Guo, H.-D. Um, J.-Y. Jung, J. M. Yang, S. K. Lim, Y. S. Kim, J.-H. Lee, “Optical properties of Si microwires combined with nanoneedles for flexible thin film photovoltaics,” Opt. Express 19(101), A41–A50 (2011).
[CrossRef] [PubMed]

Phys. Rev. B

A. Abass, K. Q. Le, A. Alù, M. Burgelman, B. Maes, “Dual-interface gratings for broadband absorption enhancement in thin-film solar cells,” Phys. Rev. B 85(11), 115449 (2012).
[CrossRef]

Proc. MRS

L. Zeng, P. Bermel, Y. Yi, N.-N. Feng, B. A. Alamariu, C.-Y. Hong, X. Duan, J. Joannopoulos, L. C. Kimerling, “Optimized textured photonic crystal backside reflector for Si thin film solar cells,” Proc. MRS 974E, CC02–CC06 (2007).

Sol. Energy Mater. Sol. Cells

E. Lee, Y. Kim, M. Gwon, D.-W. Kim, S.-H. Baek, J. H. Kim, “Comparative experimental and simulative investigations of radial p-n junction Si microwire array solar cells,” Sol. Energy Mater. Sol. Cells 103, 93–97 (2012).
[CrossRef]

Thin Solid Films

J. Ko, D. Gong, K. Pillai, K.-S. Lee, M. Ju, P. Choi, K.-R. Kim, J. Yi, B. Choi, “Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells,” Thin Solid Films 519(20), 6887–6891 (2011).
[CrossRef]

Other

J. Nelson, The Physics of Solar Cells (Imperial College, 2003).

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Figures (6)

Fig. 1
Fig. 1

(a) A photograph image of a hole-array-patterned 6 inch Si wafer. (b) A schematic illustration of the device structure. Each device was fabricated at an identical size (3 × 3 cm2). Scanning electron microscopy (SEM) images of (c) first quadrant, (d) second quadrant, (e) third quadrant, and (f) fourth quadrant, referred to as Area 1, Area 2, Area 3, and Area 4, respectively.

Fig. 2
Fig. 2

Performance of microhole-patterned and the planar solar cells. Current-voltage characteristics (a) in the dark and (b) under one sun illumination. (c) EQE and (d) IQE profiles.

Fig. 3
Fig. 3

(a) Schematic illustration of the hole-patterned sample used for the FDTD modeling. (b) Planar Si absorber shows an exponential decay of electric field at the top surface. (c) SEM images and electric field distribution for Area 1-Area 4 at λ = 660 nm.

Fig. 4
Fig. 4

(a) Light absorption enhancement spectra of microhole-patterned and planar Si wafers with infinite optical thickness. (b) Comparison results of calculated and measured photocurrent.

Fig. 5
Fig. 5

(a) A LVSEM image of a patterned Si absorber coated with a 70 nm SiNx film. A n-type emitter layer (thickness: 270 nm) was formed adjacent to a p-type Si base. (b) A schematic diagram of the cross-sectional view of the surface region.

Fig. 6
Fig. 6

(a) Light absorption enhancement spectra for a 3 μm-thick Si absorber with a thin 100 nm-Al back contact. Area 2 shows notable enhancement at long wavelengths. (b) Calculated Jsc values and volume ratio of Si according to the hole-patterned structures.

Tables (1)

Tables Icon

Table 1 Geometric information and solar cell performances

Equations (1)

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J sc, calculated = 400nm λ g I(λ)A(λ) eλ hc dλ

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