Abstract

Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.

© 2013 OSA

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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
  16. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
    [CrossRef]
  17. A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
    [CrossRef]
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    [CrossRef]

2012 (3)

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

2011 (6)

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

I. Aharonovich, A. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics5(7), 397–405 (2011).
[CrossRef]

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

M.-C. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, and J. E. Bowers, “Ultra-high quality factor planar Si3N4 ring resonators on Si substrates,” Opt. Express19(14), 13551–13556 (2011).
[CrossRef] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett.36(17), 3398–3400 (2011).
[CrossRef] [PubMed]

2010 (1)

K. Fong, W. Pernice, M. Li, and H. Tang, “High Q optomechanical resonators in silicon nitride nanophotonic circuits,” Appl. Phys. Lett.97(7), 073112 (2010).
[CrossRef]

2009 (2)

2007 (2)

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007).
[CrossRef]

2006 (2)

R. Soref, “The past, present and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
[CrossRef]

B. Jalali and S. Fathpour, “Silicon photonics,” J. Lightwave Technol.24(12), 4600–4615 (2006).
[CrossRef]

2002 (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

1998 (1)

M. Füner, C. Wild, and P. Koidl, “Novel microwave plasma reactor for diamond synthesis,” Appl. Phys. Lett.72(10), 1149 (1998).
[CrossRef]

1974 (1)

W. Bludau, A. Onton, and W. Heinke, “Temperature dependence of the band gap of silicon,” J. Appl. Phys.45(4), 1846 (1974).
[CrossRef]

Acosta, V. M.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

Adibi, A.

Aharonovich, I.

I. Aharonovich, A. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics5(7), 397–405 (2011).
[CrossRef]

Atabaki, A. H.

Babinec, T. M.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Baets, R.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Barclay, P.

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

Baur, A.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Bauters, J. F.

Beausoleil, R.

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

Beausoleil, R. G.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

Becher, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Bergonzo, P.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Bienstman, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Bludau, W.

W. Bludau, A. Onton, and W. Heinke, “Temperature dependence of the band gap of silicon,” J. Appl. Phys.45(4), 1846 (1974).
[CrossRef]

Blumenthal, D. J.

Bogaerts, W.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Boucaud, P.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Bowers, J. E.

Butler, J. E.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

Castelletto, S.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Checoury, X.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Choi, Y.-S.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

Choy, J. T.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

De Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Fairchild, B.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Faraon, A.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

Fathpour, S.

Fischer, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Fong, K.

K. Fong, W. Pernice, M. Li, and H. Tang, “High Q optomechanical resonators in silicon nitride nanophotonic circuits,” Appl. Phys. Lett.97(7), 073112 (2010).
[CrossRef]

Fu, K.

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

Füner, M.

M. Füner, C. Wild, and P. Koidl, “Novel microwave plasma reactor for diamond synthesis,” Appl. Phys. Lett.72(10), 1149 (1998).
[CrossRef]

Gaeta, A. L.

Ganesan, K.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Gesset, C.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Gibson, B.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Girard, H.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Gondarenko, A.

Greentree, A.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

I. Aharonovich, A. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics5(7), 397–405 (2011).
[CrossRef]

Gsell, S.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Hadden, J.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Harrison, J.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Hausmann, B. J.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Heck, M. J. R.

Heinke, W.

W. Bludau, A. Onton, and W. Heinke, “Temperature dependence of the band gap of silicon,” J. Appl. Phys.45(4), 1846 (1974).
[CrossRef]

Hepp, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Hiscocks, M.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Ho, Y.-L.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Hu, E. L.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

Huang, Z.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

Huntington, S.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Jalali, B.

Kimerling, L.

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007).
[CrossRef]

Kipfstuhl, L.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Kirchain, R.

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007).
[CrossRef]

Koidl, P.

M. Füner, C. Wild, and P. Koidl, “Novel microwave plasma reactor for diamond synthesis,” Appl. Phys. Lett.72(10), 1149 (1998).
[CrossRef]

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Kubanek, A.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Ladouceur, F.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Lee, J. C.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

Levy, J. S.

Li, M.

K. Fong, W. Pernice, M. Li, and H. Tang, “High Q optomechanical resonators in silicon nitride nanophotonic circuits,” Appl. Phys. Lett.97(7), 073112 (2010).
[CrossRef]

Lipson, M.

Loncar, M.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Lukin, M. D.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Maletinsky, P.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Marseglia, L.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

McCutcheon, M.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Mücklich, F.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Neel, D.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Neu, E.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

O'Brien, J.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Okawachi, Y.

Onton, A.

W. Bludau, A. Onton, and W. Heinke, “Temperature dependence of the band gap of silicon,” J. Appl. Phys.45(4), 1846 (1974).
[CrossRef]

Pauly, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Pernice, W.

K. Fong, W. Pernice, M. Li, and H. Tang, “High Q optomechanical resonators in silicon nitride nanophotonic circuits,” Appl. Phys. Lett.97(7), 073112 (2010).
[CrossRef]

Prawer, S.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

I. Aharonovich, A. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics5(7), 397–405 (2011).
[CrossRef]

Quan, Q.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Rarity, J.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Riedrich-Möller, J.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Saada, S.

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

Saha, K.

Santori, C.

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

Schreck, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Shah Hosseini, E.

Shields, B.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Soltani, M.

Soref, R.

R. Soref, “The past, present and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
[CrossRef]

Spencer, D. T.

Stanley-Clarke, A.

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Taillaert, D.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Tang, H.

K. Fong, W. Pernice, M. Li, and H. Tang, “High Q optomechanical resonators in silicon nitride nanophotonic circuits,” Appl. Phys. Lett.97(7), 073112 (2010).
[CrossRef]

Tien, M.-C.

Van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Wandt, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Wang, C. F.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

Wen, Y. H.

Wild, C.

M. Füner, C. Wild, and P. Koidl, “Novel microwave plasma reactor for diamond synthesis,” Appl. Phys. Lett.72(10), 1149 (1998).
[CrossRef]

Wolff, S.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Yacoby, A.

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Yang, J.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

Yegnanarayanan, S.

Appl. Phys. Lett. (4)

K. Fong, W. Pernice, M. Li, and H. Tang, “High Q optomechanical resonators in silicon nitride nanophotonic circuits,” Appl. Phys. Lett.97(7), 073112 (2010).
[CrossRef]

M. Füner, C. Wild, and P. Koidl, “Novel microwave plasma reactor for diamond synthesis,” Appl. Phys. Lett.72(10), 1149 (1998).
[CrossRef]

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90(8), 081110 (2007).
[CrossRef]

X. Checoury, D. Neel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett.101(17), 171115 (2012).
[CrossRef]

IEEE J. Quantum Electron. (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

R. Soref, “The past, present and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
[CrossRef]

J. Appl. Phys. (1)

W. Bludau, A. Onton, and W. Heinke, “Temperature dependence of the band gap of silicon,” J. Appl. Phys.45(4), 1846 (1974).
[CrossRef]

J. Lightwave Technol. (1)

Nano Lett. (1)

B. J. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett.12(3), 1578–1582 (2012).
[CrossRef] [PubMed]

Nat. Nanotechnol. (1)

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol.7(1), 69–74 (2011).
[CrossRef] [PubMed]

Nat. Photonics (3)

A. Faraon, P. Barclay, C. Santori, K. Fu, and R. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics5(5), 301–305 (2011).
[CrossRef]

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007).
[CrossRef]

I. Aharonovich, A. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics5(7), 397–405 (2011).
[CrossRef]

New J. Phys. (1)

S. Castelletto, J. Harrison, L. Marseglia, A. Stanley-Clarke, B. Gibson, B. Fairchild, J. Hadden, Y.-L. Ho, M. Hiscocks, K. Ganesan, S. Huntington, F. Ladouceur, A. Greentree, S. Prawer, J. O'Brien, and J. Rarity, “Diamond-based structures to collect and guide light,” New J. Phys.13(2), 025020 (2011).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. Lett. (1)

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal cavities in monocrystalline diamond,” Phys. Rev. Lett.109(3), 033604 (2012).
[CrossRef] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

a) Optical micrograph of a fabricated chip with photonic circuits consisting of focusing grating couplers, partially etched waveguides and microring resonators with 40 μm radius. Inset: SEM picture of a focusing grating coupler b) False-color SEM image of a FIB cross-section through a diamond nanophotonic ridge waveguide. Inset: Diamond surface before etching, showing the surface roughness present. Overlay: Simulated distribution of the electric field in x-direction (TE-like mode) of the ridge DOI waveguide.

Fig. 2
Fig. 2

a) Typical transmission spectra for a near-critically coupled ring resonator devices with 40 µm radius showing resonances with a free-spectral range of 3.79 nm, enveloped by the profile of the grating coupler. The spectra are shown for two devices with the same coupling gap, but different central wavelength of the grating coupler. b) Measured extinction ratios depending on the coupling gap, near-critically coupled show extinction ratios exceeding 20 dB. Inset: SEM picture of the gap region between ring resonator and feeding waveguide.

Fig. 3
Fig. 3

a) The measured dependence of the optical quality factor of 55 µm rings on the coupling gapsize and ring width. Best Q factors of 11,000 are obtained for weakly coupled devices. b) The Lorentzian fit (red) to a resonance of a near-critically coupled ring cavity, showing 28dB extinction ratio and a quality factor of 2400.

Fig. 4
Fig. 4

a) An optical microscope image of a section of a fabricated chip, showing several meandering waveguides with lengths up to 4600 µm. Neighboring columns contain identical devices with varying grating coupler period, to enable a statistical estimation of the error bar. b) Measurement results for the normalized attenuation in the test waveguides, showing a propagation loss of 5.3 ± 0.3 dB/mm.

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