Abstract

Horizontal multiple slot waveguides of polysilicon and silicon nanocrystalline oxide were grating coupled to a surface normal fiber array. Measurements yielded a coupling efficiency of 60% per grating. The fabrication-tolerant, four-stage grating design was genetically evolved from a random seed without starting from first-principle design. Theoretical coupling efficiency was 68% and was re-designed to 63% after accommodating all sources of fabrication error. To our knowledge, this is the first implementation of a purely polysilicon and silicon nanocrystalline oxide slot waveguide platform.

© 2013 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, “Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material,” Opt. Lett.29(14), 1626–1628 (2004).
    [CrossRef] [PubMed]
  2. R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
    [CrossRef] [PubMed]
  3. K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express17(3), 1527–1534 (2009).
    [CrossRef] [PubMed]
  4. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
    [CrossRef]
  5. R. Sun, P. Dong, N. Feng, C.- Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides:optical transmission at λ = 1550 nm,” Opt. Express15(26), 17967 (2007).
    [CrossRef]
  6. A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
    [CrossRef] [PubMed]
  7. R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express17(5), 3941–3950 (2009).
    [CrossRef] [PubMed]
  8. J. Shainline and J. Xu, “Silicon as an emissive optical medium,” Laser Photon. Rev.1(4), 334–348 (2007).
    [CrossRef]
  9. J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
    [CrossRef]
  10. G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
    [CrossRef]
  11. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett.29(23), 2749–2751 (2004).
    [CrossRef] [PubMed]
  12. M. Taillaert, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express19(4), 3592–3598 (2011).
    [CrossRef] [PubMed]
  13. D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
    [CrossRef]
  14. G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
    [CrossRef]
  15. C. Xiong, W. H. P. Pernice, M. Li, and H. X. Tang, “High performance nanophotonic circuits based on partially buried horizontal slot waveguides,” Opt. Express18(20), 20690–20698 (2010).
    [CrossRef] [PubMed]
  16. J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
    [CrossRef]
  17. N. N. Feng, J. Michel, and L. C. Kimerling, “Optical Field Concentration in Low-Index Waveguides,” IEEE J. Quantum Electron.42(9), 883–888 (2006).
    [CrossRef]
  18. B. Wang, J. Jiang, and G. Nordin, “Compact slanted grating couplers,” Opt. Express12(15), 3313–3326 (2004).
    [CrossRef] [PubMed]
  19. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
    [CrossRef]
  20. G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers,” Opt. Lett.32(11), 1495–1497 (2007).
    [CrossRef] [PubMed]
  21. H. Yamada, M. Nozawa, M. Kinoshita, and K. Ohashi, “Vertical-coupling optical interface for on-chip optical interconnection,” Opt. Express19(2), 698–703 (2011).
    [CrossRef] [PubMed]
  22. G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express14(24), 11622–11630 (2006).
    [CrossRef] [PubMed]
  23. D. Goldberg, Genetic Algorithms in Search, Optimization, and Machine Learning (Addison-Wesley, 1989).
  24. Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly Efficient Nonuniform Grating Coupler for Silicon-on-Insulator Nanophotonic Circuits,” Opt. Lett.35(8), 1290–1292 (2010).
    [CrossRef] [PubMed]
  25. D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, “Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration,” Opt. Express20(19), 21722–21728 (2012).
    [CrossRef] [PubMed]
  26. P. Bienstman and R. Baets, “Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers,” Opt. Quantum Electron.33(4/5), 327–341 (2001).
    [CrossRef]
  27. J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
    [CrossRef]
  28. T. Suhara and H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron.22(6), 845–867 (1986).
    [CrossRef]
  29. R. Emmons and D. Hall, “Buried-Oxide Silicon-on-Insulator Structures” lEEE J. Quantum Electron.28(1), 164 (1992).
  30. S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. Van Thourhout, and R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit” presented at Lasers and Electro-Optics/International Quantum Electronics Conference, Munich, Germany (2009).
    [CrossRef]
  31. J. Goodman, Introduction to Fourier Optics (McGraw Hill, 1996), Chap. 9.
  32. A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
    [CrossRef]
  33. K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
    [CrossRef]
  34. Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low Loss (~6.45dB/cm) Sub-Micron Polycrystalline Silicon Waveguide Integrated with Efficient SiON Waveguide Coupler,” Opt. Express16(9), 6425 (2008).
    [CrossRef]
  35. L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).
  36. E. Ibok and S. Garg, “A Characterization of the Effect of Deposition Temperature on Polysilicon Properties,” J. Electrochem. Soc.140(10), 2927–2937 (1993).
    [CrossRef]
  37. C. W. Holzwarth, T. Barwicz, and H. I. Smith, “Optimization of hydrogen silsesquioxane for photonic applications,” J. Vac. Sci. Technol. B25(6), 2658–2661 (2007).
    [CrossRef]
  38. L. W. Luo, G. S. Wiederhecker, J. Cardenas, C. Poitras, and M. Lipson, “High quality factor etchless silicon photonic ring resonators,” Opt. Express19(7), 6284–6289 (2011).
    [CrossRef] [PubMed]
  39. P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
    [CrossRef]

2012 (1)

2011 (5)

H. Yamada, M. Nozawa, M. Kinoshita, and K. Ohashi, “Vertical-coupling optical interface for on-chip optical interconnection,” Opt. Express19(2), 698–703 (2011).
[CrossRef] [PubMed]

M. Taillaert, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express19(4), 3592–3598 (2011).
[CrossRef] [PubMed]

L. W. Luo, G. S. Wiederhecker, J. Cardenas, C. Poitras, and M. Lipson, “High quality factor etchless silicon photonic ring resonators,” Opt. Express19(7), 6284–6289 (2011).
[CrossRef] [PubMed]

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

2010 (3)

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly Efficient Nonuniform Grating Coupler for Silicon-on-Insulator Nanophotonic Circuits,” Opt. Lett.35(8), 1290–1292 (2010).
[CrossRef] [PubMed]

C. Xiong, W. H. P. Pernice, M. Li, and H. X. Tang, “High performance nanophotonic circuits based on partially buried horizontal slot waveguides,” Opt. Express18(20), 20690–20698 (2010).
[CrossRef] [PubMed]

2009 (3)

2008 (5)

Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low Loss (~6.45dB/cm) Sub-Micron Polycrystalline Silicon Waveguide Integrated with Efficient SiON Waveguide Coupler,” Opt. Express16(9), 6425 (2008).
[CrossRef]

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
[CrossRef]

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

2007 (4)

2006 (3)

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

N. N. Feng, J. Michel, and L. C. Kimerling, “Optical Field Concentration in Low-Index Waveguides,” IEEE J. Quantum Electron.42(9), 883–888 (2006).
[CrossRef]

2005 (2)

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
[CrossRef]

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

2004 (3)

2002 (2)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

2001 (1)

P. Bienstman and R. Baets, “Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers,” Opt. Quantum Electron.33(4/5), 327–341 (2001).
[CrossRef]

2000 (1)

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

1993 (1)

E. Ibok and S. Garg, “A Characterization of the Effect of Deposition Temperature on Polysilicon Properties,” J. Electrochem. Soc.140(10), 2927–2937 (1993).
[CrossRef]

1992 (1)

R. Emmons and D. Hall, “Buried-Oxide Silicon-on-Insulator Structures” lEEE J. Quantum Electron.28(1), 164 (1992).

1986 (1)

T. Suhara and H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron.22(6), 845–867 (1986).
[CrossRef]

Agarwal, A.

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

Aillaerta, D.

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

Almeida, V. R.

Arbiol, J.

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Arguel, P.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Authier-Lafaye, O. G.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Baehr-Jones, T.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
[CrossRef]

Baets, R.

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers,” Opt. Lett.32(11), 1495–1497 (2007).
[CrossRef] [PubMed]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett.29(23), 2749–2751 (2004).
[CrossRef] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

P. Bienstman and R. Baets, “Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers,” Opt. Quantum Electron.33(4/5), 327–341 (2001).
[CrossRef]

Barwicz, T.

C. W. Holzwarth, T. Barwicz, and H. I. Smith, “Optimization of hydrogen silsesquioxane for photonic applications,” J. Vac. Sci. Technol. B25(6), 2658–2661 (2007).
[CrossRef]

Bienstman, P.

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett.29(23), 2749–2751 (2004).
[CrossRef] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

P. Bienstman and R. Baets, “Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers,” Opt. Quantum Electron.33(4/5), 327–341 (2001).
[CrossRef]

Blasco, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
[CrossRef]

Bogaerts, W.

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Bonnefont, S.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Bouscayrol, L.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Brision, S.

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

Cardenas, J.

Cazzanelli, M.

Chen, R. T.

Covey, J.

Ctyroky, J.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Daldosso, N.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
[CrossRef] [PubMed]

R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express17(5), 3941–3950 (2009).
[CrossRef] [PubMed]

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

De La Rue, R. M.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

De Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

De Ridder, R.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Degiorgio, V.

Dong, P.

Duan, X.

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

Edel-Pereira, E. B.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Emmons, R.

R. Emmons and D. Hall, “Buried-Oxide Silicon-on-Insulator Structures” lEEE J. Quantum Electron.28(1), 164 (1992).

Fang, Q.

Fedeli, J. M.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
[CrossRef] [PubMed]

R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express17(5), 3941–3950 (2009).
[CrossRef] [PubMed]

Fédéli, J.-M.

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

Feng, N.

Feng, N. N.

N. N. Feng, J. Michel, and L. C. Kimerling, “Optical Field Concentration in Low-Index Waveguides,” IEEE J. Quantum Electron.42(9), 883–888 (2006).
[CrossRef]

Ferraioli, L.

Galan, J. V.

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
[CrossRef]

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

Galán, J. V.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Garcia, C.

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

García-Rupérez, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Garg, S.

E. Ibok and S. Garg, “A Characterization of the Effect of Deposition Temperature on Polysilicon Properties,” J. Electrochem. Soc.140(10), 2927–2937 (1993).
[CrossRef]

Garrido, B.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Gautier, P.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

Giordana, E.

Grun, M.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Guider, R.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
[CrossRef] [PubMed]

Gylfason, K. B.

Halir, R.

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

Hall, D.

R. Emmons and D. Hall, “Buried-Oxide Silicon-on-Insulator Structures” lEEE J. Quantum Electron.28(1), 164 (1992).

He, S.

Helfert, S.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Hernandez, S.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Hernández, S.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Hochberg, M.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
[CrossRef]

Holzwarth, C. W.

C. W. Holzwarth, T. Barwicz, and H. I. Smith, “Optimization of hydrogen silsesquioxane for photonic applications,” J. Vac. Sci. Technol. B25(6), 2658–2661 (2007).
[CrossRef]

Hong, C.-

Hosseini, A.

Hugonin, J.-P.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Ibok, E.

E. Ibok and S. Garg, “A Characterization of the Effect of Deposition Temperature on Polysilicon Properties,” J. Electrochem. Soc.140(10), 2927–2937 (1993).
[CrossRef]

Izquierdo-Roca, V.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Jambois, O.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Jiang, J.

Jordana, E.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
[CrossRef] [PubMed]

Kimerling, L.

R. Sun, P. Dong, N. Feng, C.- Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides:optical transmission at λ = 1550 nm,” Opt. Express15(26), 17967 (2007).
[CrossRef]

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

Kimerling, L. C.

N. N. Feng, J. Michel, and L. C. Kimerling, “Optical Field Concentration in Low-Index Waveguides,” IEEE J. Quantum Electron.42(9), 883–888 (2006).
[CrossRef]

Kinoshita, M.

Klaasse, G.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Koukos, K.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Kwong, D.

Kwong, D. L.

Lalanne, P.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Lebour, Y.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Lee, K.

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

Li, M.

Liao, L.

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

Lim, D.

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

Lipson, M.

Lo, G. Q.

Lozes-Dupuy, F.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Luo, L. W.

Lyan, P.

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

Marti, J.

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
[CrossRef]

Martí, J.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

Martinez, A.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

Martínez, A.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Melchiorri, M.

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Michel, J.

R. Sun, P. Dong, N. Feng, C.- Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides:optical transmission at λ = 1550 nm,” Opt. Express15(26), 17967 (2007).
[CrossRef]

N. N. Feng, J. Michel, and L. C. Kimerling, “Optical Field Concentration in Low-Index Waveguides,” IEEE J. Quantum Electron.42(9), 883–888 (2006).
[CrossRef]

Miska, P.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Morante, J. R.

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Nishihara, H.

T. Suhara and H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron.22(6), 845–867 (1986).
[CrossRef]

Nordin, G.

Nozawa, M.

Ohashi, K.

Panepucci, R. R.

Pavesi, L.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
[CrossRef] [PubMed]

R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express17(5), 3941–3950 (2009).
[CrossRef] [PubMed]

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Pellegrino, P.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Pernice, W. H. P.

Petracek, J.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Pitanti, A.

Poitras, C.

Pregla, R.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Preston, K.

Ranc, B. F.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Rinnert, H.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Roelkens, G.

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers,” Opt. Lett.32(11), 1495–1497 (2007).
[CrossRef] [PubMed]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

Sanchis, P.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
[CrossRef]

Sarrabayrous, G.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Sarrabayrouse, G.

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Scheid, E.

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

Scherer, A.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
[CrossRef]

Schied, E.

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

Selvaraja, S.

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

Shainline, J.

J. Shainline and J. Xu, “Silicon as an emissive optical medium,” Laser Photon. Rev.1(4), 334–348 (2007).
[CrossRef]

Smith, H. I.

C. W. Holzwarth, T. Barwicz, and H. I. Smith, “Optimization of hydrogen silsesquioxane for photonic applications,” J. Vac. Sci. Technol. B25(6), 2658–2661 (2007).
[CrossRef]

Sohlström, H.

Song, J. F.

Spano, R.

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express17(5), 3941–3950 (2009).
[CrossRef] [PubMed]

Stoffer, R.

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Suhara, T.

T. Suhara and H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron.22(6), 845–867 (1986).
[CrossRef]

Sun, R.

Taillaert, D.

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett.29(23), 2749–2751 (2004).
[CrossRef] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Taillaert, M.

Tang, H. X.

Tang, Y.

Tao, S. H.

Tartara, L.

Van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Van Laere, F.

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

Van Thourhout, D.

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers,” Opt. Lett.32(11), 1495–1497 (2007).
[CrossRef] [PubMed]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

VanThourhout, D.

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

Vergnat, M.

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Vermeulen, D.

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

Walker, C.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
[CrossRef]

Wang, B.

Wang, Z.

Westergren, U.

Wiederhecker, G. S.

Wosinski, L.

Xiong, C.

Xu, J.

J. Shainline and J. Xu, “Silicon as an emissive optical medium,” Laser Photon. Rev.1(4), 334–348 (2007).
[CrossRef]

Xu, Q.

Xu, X.

Yamada, H.

Yre, M.

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

Yu, J.

Yu, M. B.

Zhang, Y.

Appl. Phys. Lett. (2)

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett.86(8), 081101 (2005).
[CrossRef]

G. Roelkens, D. Vermeulen, D. VanThourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, “High Efficiency Diffractive Grating Couplers for Interfacing a Single Mode Optical Fiber with a Nanophotonic Silicon-on-Insulator Waveguide Circuit,” Appl. Phys. Lett.92(13), 131101 (2008).
[CrossRef]

IEEE J Sel. Top. Quantum Electron. (1)

G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, “Grating-Based Optical Fiber Interfaces for Silicon-on-Insulator Photonic Integrated Circuits” IEEE J Sel. Top. Quantum Electron.17(3), 571–580 (2011).
[CrossRef]

IEEE J. Quantum Electron. (3)

N. N. Feng, J. Michel, and L. C. Kimerling, “Optical Field Concentration in Low-Index Waveguides,” IEEE J. Quantum Electron.42(9), 883–888 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002).
[CrossRef]

T. Suhara and H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron.22(6), 845–867 (1986).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

J. V. Galan, P. Sanchis, J. Blasco, and J. Marti, “Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides,” IEEE Photon. Technol. Lett.20(12), 985–987 (2008).
[CrossRef]

J Electron. Mater. (1)

L. Liao, D. Lim, A. Agarwal, X. Duan, K. Lee, and L. Kimerling, “Optical Transmission Losses in Polycrystalline Silicon Strip Waveguides: Effects of Waveguide Dimensions, Thermal Treatment, Hydrogen Passivation, and Wavelength” J Electron. Mater.29(12), 1380 (2000).

J. Appl. Phys. (1)

P. Pellegrino, B. Garrido, C. Garcia, J. Arbiol, J. R. Morante, M. Melchiorri, N. Daldosso, L. Pavesi, E. Schied, and G. Sarrabayrouse, “Low-loss rib waveguides containing Si nanocrystals embedded in SiO2,” J. Appl. Phys.97(7), 074312 (2005).
[CrossRef]

J. Electrochem. Soc. (1)

E. Ibok and S. Garg, “A Characterization of the Effect of Deposition Temperature on Polysilicon Properties,” J. Electrochem. Soc.140(10), 2927–2937 (1993).
[CrossRef]

J. Vac. Sci. Technol. B (1)

C. W. Holzwarth, T. Barwicz, and H. I. Smith, “Optimization of hydrogen silsesquioxane for photonic applications,” J. Vac. Sci. Technol. B25(6), 2658–2661 (2007).
[CrossRef]

Jap. J. Appl. Phys. (2)

K. Koukos, E. B. Edel-Pereira, O. G. Authier-Lafaye, E. Scheid, L. Bouscayrol, B. F. Ranc, P. Arguel, S. Bonnefont, F. Lozes-Dupuy, and G. Sarrabayrous, “Effect of Annealing Conditions on Photoluminescence Properties of Low-Pressure Chemical Vapour Deposition-Grown Silicon Nanocrystals” Jap. J. Appl. Phys.47(1), 130–132 (2008).
[CrossRef]

D. Aillaerta, F. Van Laere, M. Yre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides” Jap. J. Appl. Phys.45(8A), 6071–6077 (2006).
[CrossRef]

Laser Photon. Rev. (1)

J. Shainline and J. Xu, “Silicon as an emissive optical medium,” Laser Photon. Rev.1(4), 334–348 (2007).
[CrossRef]

lEEE J. Quantum Electron. (1)

R. Emmons and D. Hall, “Buried-Oxide Silicon-on-Insulator Structures” lEEE J. Quantum Electron.28(1), 164 (1992).

Nano Lett. (1)

A. Martínez, J. Blasco, P. Sanchis, J. V. Galán, J. García-Rupérez, E. Jordana, P. Gautier, Y. Lebour, S. Hernández, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, J. Martí, and R. Spano, “Ultrafast All-Optical Switching in a Silicon-Nanocrystal-Based Silicon Slot Waveguide at Telecom Wavelengths,” Nano Lett.10(4), 1506–1511 (2010).
[CrossRef] [PubMed]

Opt. Commun. (1)

J. V. Galan, P. Sanchis, J. Blasco, A. Martinez, and J. Martí, “High efficiency fiber coupling to silicon sandwiched slot waveguides,” Opt. Commun.281(20), 5173–5176 (2008).
[CrossRef]

Opt. Express (12)

B. Wang, J. Jiang, and G. Nordin, “Compact slanted grating couplers,” Opt. Express12(15), 3313–3326 (2004).
[CrossRef] [PubMed]

R. Sun, P. Dong, N. Feng, C.- Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides:optical transmission at λ = 1550 nm,” Opt. Express15(26), 17967 (2007).
[CrossRef]

Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low Loss (~6.45dB/cm) Sub-Micron Polycrystalline Silicon Waveguide Integrated with Efficient SiON Waveguide Coupler,” Opt. Express16(9), 6425 (2008).
[CrossRef]

K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express17(3), 1527–1534 (2009).
[CrossRef] [PubMed]

R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express17(5), 3941–3950 (2009).
[CrossRef] [PubMed]

R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, and L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express17(23), 20762–20770 (2009).
[CrossRef] [PubMed]

C. Xiong, W. H. P. Pernice, M. Li, and H. X. Tang, “High performance nanophotonic circuits based on partially buried horizontal slot waveguides,” Opt. Express18(20), 20690–20698 (2010).
[CrossRef] [PubMed]

H. Yamada, M. Nozawa, M. Kinoshita, and K. Ohashi, “Vertical-coupling optical interface for on-chip optical interconnection,” Opt. Express19(2), 698–703 (2011).
[CrossRef] [PubMed]

M. Taillaert, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express19(4), 3592–3598 (2011).
[CrossRef] [PubMed]

L. W. Luo, G. S. Wiederhecker, J. Cardenas, C. Poitras, and M. Lipson, “High quality factor etchless silicon photonic ring resonators,” Opt. Express19(7), 6284–6289 (2011).
[CrossRef] [PubMed]

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, “Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration,” Opt. Express20(19), 21722–21728 (2012).
[CrossRef] [PubMed]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,” Opt. Express14(24), 11622–11630 (2006).
[CrossRef] [PubMed]

Opt. Lett. (4)

Opt. Quantum Electron. (2)

P. Bienstman and R. Baets, “Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers,” Opt. Quantum Electron.33(4/5), 327–341 (2001).
[CrossRef]

J. Ctyroky, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petracek, P. Lalanne, J.-P. Hugonin, and R. M. De La Rue, “Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron.34(5-6), 455–470 (2002).
[CrossRef]

Phys. Status Solidi. C (1)

A. Martinez, S. Hernandez, P. Pellegrino, O. Jambois, P. Miska, M. Grun, H. Rinnert, M. Vergnat, V. Izquierdo-Roca, J. M. Fedeli, and B. Garrido, “Comparative study of the nonlinear optical properties of Si nanocrystals fabricated by e-beam evaporation, PECVD or LPCVD,” Phys. Status Solidi. C8(3), 969–973 (2011).
[CrossRef]

Other (3)

S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. Van Thourhout, and R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit” presented at Lasers and Electro-Optics/International Quantum Electronics Conference, Munich, Germany (2009).
[CrossRef]

J. Goodman, Introduction to Fourier Optics (McGraw Hill, 1996), Chap. 9.

D. Goldberg, Genetic Algorithms in Search, Optimization, and Machine Learning (Addison-Wesley, 1989).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

(a) Rib-waveguide index profile obtained via partial etch. To simplify testing, isopropyl alcohol is the top cladding. The ripples in the polysilicon layers represent grain boundaries of approximate scale [25]. (b) TM mode profile of the multi-slot rib-waveguide, showing acceptable power confinement in the slots.

Fig. 2
Fig. 2

Flow diagram of the iterative design process involved in evolving grating designs via a genetic algorithm.

Fig. 3
Fig. 3

Grating cross section showing simulated surface normal E-field emission to a fiber aperture from a waveguide on the left. Polysilicon is shown in white, and the silicon nanocrystalline oxide slots are in grey. The blue inset shows an enlarged view of a grating tooth. The etch depth for all sections is 215 nm.

Fig. 4
Fig. 4

Colorized SEM depicting each grating stage. Red is the apodized grating/waveguide interface, yellow is the primary fiber-coupling region, green is the secondary coupling region of chirped grating period, and blue is the quasi-periodic DBR to partially emit and reflect light back into previous grating stages.

Fig. 5
Fig. 5

(a) Experimental lab setup for perfectly normal coupling between a standard fiber array and on-chip gratings. (b) Illustrated chip layout coupled to a normally-incident input/output fiber array.

Fig. 6
Fig. 6

Experimentally measured spectrum of single mode fiber coupling efficiency to/from a fabricated multiple horizontal slot grating. The data are normalized to the ASE source and for a single grating coupler.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

2π n eff_out λ cos( θ out )= 2π n eff_in λ cos( θ in )+ q2π Λ
g( x )=( comb( x Λ )rect( x ( Λff ) ) )rect( x L ) ,
G( k x )=( comb( Λ k x 2π )sinc( Λff k x 2π ) )sinc( L k x 2π ) ,

Metrics