Ellipsometry by specular reflection has been reworked as a precise surface normal vector detection method for the geometrical shape study of a glossy object. When the object is illuminated by circularly polarized light, the surface normal vector defines the shape of the reflection polarization ellipse; the azimuth and ellipticity are determined by the angle of the incident plane and the angle of incidence, respectively. The tilt-ellipsometry principle of tilt detection is demonstrated experimentally with a metallic polygon and a cube sample.
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F. Demichelis, M. Maja, and P. Valabrega
Appl. Opt. 8(5) 1035-1036 (1969)
Molly W. Williams
Appl. Opt. 25(20) 3616-3622 (1986)
S. C. Som and Chitralekha Chowdhury
J. Opt. Soc. Am. 62(1) 10-15 (1972)