Abstract

Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science.

© 2013 OSA

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References

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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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2012 (1)

2010 (1)

2009 (2)

J. Liu, J. Tan, H. Bin, and Y. Wang, “Improved differential confocal microscopy with ultrahigh signal-to-noise ratio and reflectance disturbance resistibility,” Appl. Opt. 48(32), 6195–6201 (2009).
[Crossref] [PubMed]

B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum. 80(7), 073706 (2009).
[Crossref] [PubMed]

2006 (1)

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

2004 (3)

2000 (2)

1998 (1)

1997 (1)

1996 (1)

M. F. M. Costa, “Surface inspection by an optical triangulation method,” Opt. Eng. 35(9), 2743–2747 (1996).
[Crossref]

1994 (3)

1992 (1)

M. A. Browne, O. Akinyemi, and A. Boyde, “Confocal surface profiling utilizing chromatic aberration,” Scanning 14(3), 145–153 (1992).
[Crossref]

1984 (1)

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Opt. Commun. 49(4), 229–233 (1984).
[Crossref]

1982 (1)

D. K. Hamilton and T. Wilson, “3-dimensional surface measurement using the confocal scanning microscope,” Appl. Phys. B 27(4), 211–213 (1982).
[Crossref]

Ahn, M.

Akinyemi, O.

M. A. Browne, O. Akinyemi, and A. Boyde, “Confocal surface profiling utilizing chromatic aberration,” Scanning 14(3), 145–153 (1992).
[Crossref]

Bin, H.

Boyde, A.

M. Maly and A. Boyde, “Real-time stereoscopic confocal reflection microscopy using objective lenses with linear longitudinal chromatic dispersion,” Scanning 16, 187–192 (1994).

M. A. Browne, O. Akinyemi, and A. Boyde, “Confocal surface profiling utilizing chromatic aberration,” Scanning 14(3), 145–153 (1992).
[Crossref]

Brown, G. M.

F. Chen, G. M. Brown, and M. M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39(1), 10–22 (2000).
[Crossref]

Browne, M. A.

M. A. Browne, O. Akinyemi, and A. Boyde, “Confocal surface profiling utilizing chromatic aberration,” Scanning 14(3), 145–153 (1992).
[Crossref]

Carson, J. J. L.

Cha, S. D.

Chapman, G. H.

Chen, F.

F. Chen, G. M. Brown, and M. M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39(1), 10–22 (2000).
[Crossref]

Chun, B. S.

B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum. 80(7), 073706 (2009).
[Crossref] [PubMed]

Costa, M. F. M.

M. F. M. Costa, “Surface inspection by an optical triangulation method,” Opt. Eng. 35(9), 2743–2747 (1996).
[Crossref]

de Groot, P.

Deck, L.

Dobson, S. L.

Fainman, Y.

Gharbi, T.

J. G. R, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, “Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre,” J. Opt. A, Pure Appl. Opt. 6(6), 544–548 (2004).
[Crossref]

Gweon, D.

B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum. 80(7), 073706 (2009).
[Crossref] [PubMed]

Hamilton, D. K.

D. K. Hamilton and T. Wilson, “3-dimensional surface measurement using the confocal scanning microscope,” Appl. Phys. B 27(4), 211–213 (1982).
[Crossref]

Kaminska, B.

Kim, K.

H. Leeghim, M. Ahn, and K. Kim, “Novel approach to optical profiler with gradient focal point methods,” Opt. Express 20(21), 23061–23073 (2012).
[Crossref] [PubMed]

B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum. 80(7), 073706 (2009).
[Crossref] [PubMed]

Leeghim, H.

Li, P.

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

K. B. Shi, P. Li, S. Z. Yin, and Z. W. Liu, “Chromatic confocal microscopy using supercontinuum light,” Opt. Express 12(10), 2096–2101 (2004).
[Crossref] [PubMed]

Lin, P. C.

Liu, J.

Liu, Z. W.

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

K. B. Shi, P. Li, S. Z. Yin, and Z. W. Liu, “Chromatic confocal microscopy using supercontinuum light,” Opt. Express 12(10), 2096–2101 (2004).
[Crossref] [PubMed]

Maly, M.

M. Maly and A. Boyde, “Real-time stereoscopic confocal reflection microscopy using objective lenses with linear longitudinal chromatic dispersion,” Scanning 16, 187–192 (1994).

Meneses, J.

J. G. R, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, “Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre,” J. Opt. A, Pure Appl. Opt. 6(6), 544–548 (2004).
[Crossref]

Molesini, G.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Opt. Commun. 49(4), 229–233 (1984).
[Crossref]

Nam, S. H.

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

Ng, E.

Pedrini, G.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Opt. Commun. 49(4), 229–233 (1984).
[Crossref]

Plata, A.

J. G. R, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, “Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre,” J. Opt. A, Pure Appl. Opt. 6(6), 544–548 (2004).
[Crossref]

Poggi, P.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Opt. Commun. 49(4), 229–233 (1984).
[Crossref]

Qiu, L.

Quercioli, F.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Opt. Commun. 49(4), 229–233 (1984).
[Crossref]

R, J. G.

J. G. R, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, “Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre,” J. Opt. A, Pure Appl. Opt. 6(6), 544–548 (2004).
[Crossref]

Shi, K. B.

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

K. B. Shi, P. Li, S. Z. Yin, and Z. W. Liu, “Chromatic confocal microscopy using supercontinuum light,” Opt. Express 12(10), 2096–2101 (2004).
[Crossref] [PubMed]

Song, M. M.

F. Chen, G. M. Brown, and M. M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39(1), 10–22 (2000).
[Crossref]

Sun, P. C.

Tan, J.

Tiziani, H. J.

Tribillon, G.

J. G. R, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, “Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre,” J. Opt. A, Pure Appl. Opt. 6(6), 544–548 (2004).
[Crossref]

Uhde, H. M.

Vasefi, F.

Wang, Y.

Wilson, T.

D. K. Hamilton and T. Wilson, “3-dimensional surface measurement using the confocal scanning microscope,” Appl. Phys. B 27(4), 211–213 (1982).
[Crossref]

Yin, S. Z.

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

K. B. Shi, P. Li, S. Z. Yin, and Z. W. Liu, “Chromatic confocal microscopy using supercontinuum light,” Opt. Express 12(10), 2096–2101 (2004).
[Crossref] [PubMed]

Zhao, W.

Zhu, L. J.

Appl. Opt. (6)

Appl. Phys. B (1)

D. K. Hamilton and T. Wilson, “3-dimensional surface measurement using the confocal scanning microscope,” Appl. Phys. B 27(4), 211–213 (1982).
[Crossref]

J. Opt. A, Pure Appl. Opt. (1)

J. G. R, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, “Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre,” J. Opt. A, Pure Appl. Opt. 6(6), 544–548 (2004).
[Crossref]

Opt. Commun. (2)

K. B. Shi, S. H. Nam, P. Li, S. Z. Yin, and Z. W. Liu, “Wavelength division multiplexed confocal microscopy using supercontinuum,” Opt. Commun. 263(2), 156–162 (2006).
[Crossref]

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Opt. Commun. 49(4), 229–233 (1984).
[Crossref]

Opt. Eng. (2)

F. Chen, G. M. Brown, and M. M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39(1), 10–22 (2000).
[Crossref]

M. F. M. Costa, “Surface inspection by an optical triangulation method,” Opt. Eng. 35(9), 2743–2747 (1996).
[Crossref]

Opt. Express (4)

Rev. Sci. Instrum. (1)

B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum. 80(7), 073706 (2009).
[Crossref] [PubMed]

Scanning (2)

M. A. Browne, O. Akinyemi, and A. Boyde, “Confocal surface profiling utilizing chromatic aberration,” Scanning 14(3), 145–153 (1992).
[Crossref]

M. Maly and A. Boyde, “Real-time stereoscopic confocal reflection microscopy using objective lenses with linear longitudinal chromatic dispersion,” Scanning 16, 187–192 (1994).

Other (1)

A. Boyde, “The tandem scanning reflected light microscope part 2,” Pre-Micro 84 Applications at UCL Proc. Royal Microsc. Soc. May 1985. 20, 131–139 (1985).

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Figures (10)

Fig. 1
Fig. 1

Schematic of the chromatic confocal microscope with a transmittance detection method.

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Fig. 2
Fig. 2

Depth measurement process. (a) Depth information encoded by the wavelength due to axial chromatic aberration. (b) Dependence of color filter transmittance on the wavelength. (c) Depth information measured by the transmittance of the color filter.

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Fig. 3
Fig. 3

A schematic diagram of the chromatic confocal microscope with the transmittance detection method. BF: bandpass filter, BS: beam splitter, PBS: polarizing beam splitter, PMT: photo multiplier tube.

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Fig. 4
Fig. 4

Measured spectrum of the Xenon lamp.

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Fig. 5
Fig. 5

Transmittance curve of the colored glass filter.

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Fig. 6
Fig. 6

Layout of the designed lens system.

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Fig. 7
Fig. 7

Chromatic focal shift of the lens system.

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Fig. 8
Fig. 8

Relationship between the depth of the sample and transmittance of the reflected light. (a) Scatter plot and curve fitting of the experimental data and (b) expanded view with the standard deviation (SD).

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Fig. 9
Fig. 9

Lateral resolution of the developed system.

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Fig. 10
Fig. 10

Lateral resolution of the developed system.

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Equations (1)

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I PMT,1 I PMT,2 = I( t 0 , λ 0 )R( λ 0 )T( λ 0 )/2 I( t 0 , λ 0 )R( λ 0 )/2 =T( λ 0 ).

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