Abstract

A special optical alignment is adopted and corresponding reconstruction algorithm is developed to reduce the reconstruction error induced by the hysteresis or backlash error of the translation stage in Ptychographical Iterative Engine (PIE) imaging with weak scattering specimen. In this suggested method, the positions of the scanning probe are determined directly from the recorded diffraction patterns rather than from the readout of the stage meter. This method not only remarkably improves the reconstruction quality, but also completely lowers the dependency of PIE on the device accuracy and accordingly enhances its feasibility for many applications with weak scattering specimen.

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    [CrossRef]
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    [CrossRef]
  3. H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett.93(2), 023903 (2004).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]

2012 (2)

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

2010 (2)

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett.35(15), 2585–2587 (2010).
[CrossRef] [PubMed]

2009 (2)

C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy109(10), 1263–1275 (2009).
[CrossRef] [PubMed]

A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109(10), 1256–1262 (2009).
[CrossRef] [PubMed]

2008 (2)

J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys.150, 87–184 (2008).
[CrossRef]

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

2005 (1)

C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum.76(9), 095111 (2005).
[CrossRef]

2004 (3)

J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett.85(20), 4795–4797 (2004).
[CrossRef]

H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett.93(2), 023903 (2004).
[CrossRef] [PubMed]

J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy101(2-4), 149–152 (2004).
[CrossRef] [PubMed]

1994 (1)

S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng.16(1), 49–55 (1994).
[CrossRef]

1986 (1)

1982 (1)

Abbey, B.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Chen, C. C.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Clark, J. N.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Dahmen, U.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Ercius, P.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Faulkner, H. M. L.

J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett.85(20), 4795–4797 (2004).
[CrossRef]

H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett.93(2), 023903 (2004).
[CrossRef] [PubMed]

Fienup, J. R.

Howells, M.

J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy101(2-4), 149–152 (2004).
[CrossRef] [PubMed]

Hue, F.

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

Humphry, M. J.

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett.35(15), 2585–2587 (2010).
[CrossRef] [PubMed]

Hurst, A. C.

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

Jonge, M. D.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Jung, S. B.

S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng.16(1), 49–55 (1994).
[CrossRef]

Kim, S. W.

S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng.16(1), 49–55 (1994).
[CrossRef]

Kraus, B.

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

Liu, C.

C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy109(10), 1263–1275 (2009).
[CrossRef] [PubMed]

Maiden, A. M.

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett.35(15), 2585–2587 (2010).
[CrossRef] [PubMed]

A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109(10), 1256–1262 (2009).
[CrossRef] [PubMed]

McNulty, I.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Mecklenburg, M.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Miao, J. W.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Midgley, P. A.

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

Nugent, K. A.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Peele, A. G.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Pfeifer, M. A.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Regan, B. C.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Rodenburg, J. M.

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett.35(15), 2585–2587 (2010).
[CrossRef] [PubMed]

A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109(10), 1256–1262 (2009).
[CrossRef] [PubMed]

C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy109(10), 1263–1275 (2009).
[CrossRef] [PubMed]

J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys.150, 87–184 (2008).
[CrossRef]

J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett.85(20), 4795–4797 (2004).
[CrossRef]

H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett.93(2), 023903 (2004).
[CrossRef] [PubMed]

Ru, C. H.

C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum.76(9), 095111 (2005).
[CrossRef]

Scott, M. C.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Spence, J. C. H.

J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy101(2-4), 149–152 (2004).
[CrossRef] [PubMed]

Sun, L. N.

C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum.76(9), 095111 (2005).
[CrossRef]

Sweeney, F.

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

Wackerman, C. C.

Walther, T.

C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy109(10), 1263–1275 (2009).
[CrossRef] [PubMed]

Weierstall, U.

J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy101(2-4), 149–152 (2004).
[CrossRef] [PubMed]

Williams, G. J.

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Xu, R.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Zhu, C.

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Adv. Imaging Electron Phys. (1)

J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys.150, 87–184 (2008).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett.85(20), 4795–4797 (2004).
[CrossRef]

J. Opt. Soc. Am. A (1)

Nat. Phys. (1)

B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008).
[CrossRef]

Nature (1)

M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012).
[CrossRef] [PubMed]

Nature Commun. (1)

M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:.
[CrossRef]

Opt. Lett. (1)

Phys. Rev. B (1)

F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010).
[CrossRef]

Phys. Rev. Lett. (1)

H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett.93(2), 023903 (2004).
[CrossRef] [PubMed]

Precis. Eng. (1)

S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng.16(1), 49–55 (1994).
[CrossRef]

Rev. Sci. Instrum. (1)

C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum.76(9), 095111 (2005).
[CrossRef]

Ultramicroscopy (3)

A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109(10), 1256–1262 (2009).
[CrossRef] [PubMed]

C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy109(10), 1263–1275 (2009).
[CrossRef] [PubMed]

J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy101(2-4), 149–152 (2004).
[CrossRef] [PubMed]

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