Abstract

Control of the sidewall angle of diamond microstructures was achieved by varying the gas mixture, bias power and mask shape during inductively coupled plasma etching. Different etch mechanisms were responsible for the angle of the lower and upper part of the sidewall formed during diamond etching. These angles could to some extent be controlled separately. The developed etch process was used to fabricate wideband antireflective structures with an average transmission of 96.4% for wavelengths between 10 and 50 µm. Smooth facetted edges for coupling light through waveguides from above were also demonstrated.

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2010 (2)

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

2009 (1)

N. Moldovan, R. Divan, H. Zeng, and J. A. Carlisle, “Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching,” J. Vac. Sci. Technol. B27(6), 3125–3131 (2009).
[CrossRef]

2008 (1)

2003 (1)

1999 (2)

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

1997 (1)

1995 (1)

O. Dorsch, M. Werner, and E. Obermeier, “Dry etching of undoped and boron doped polycrystalline diamond films,” Diamond Related Materials4(4), 456–459 (1995).
[CrossRef]

1993 (1)

1992 (1)

S. J. Pearton, A. Katz, F. Ren, and J. R. Lothian, “ECR plasma etching of chemically vapour deposited diamond thin films,” Electron. Lett.28(9), 822–824 (1992).
[CrossRef]

Baranov, A. V.

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

Carlisle, J. A.

N. Moldovan, R. Divan, H. Zeng, and J. A. Carlisle, “Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching,” J. Vac. Sci. Technol. B27(6), 3125–3131 (2009).
[CrossRef]

Chattopadhyay, S.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Chen, K. H.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Chen, L. C.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Divan, R.

N. Moldovan, R. Divan, H. Zeng, and J. A. Carlisle, “Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching,” J. Vac. Sci. Technol. B27(6), 3125–3131 (2009).
[CrossRef]

Dolganov, M. A.

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

Dorsch, O.

O. Dorsch, M. Werner, and E. Obermeier, “Dry etching of undoped and boron doped polycrystalline diamond films,” Diamond Related Materials4(4), 456–459 (1995).
[CrossRef]

Ganesan, K.

Ganguly, A.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Garnov, S. V.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Gibson, B. C.

Hiscocks, M. P.

Huang, Y. F.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Huntington, S. T.

Ismagilov, R. R.

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

Jen, Y. J.

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Karlsson, M.

Katz, A.

S. J. Pearton, A. Katz, F. Ren, and J. R. Lothian, “ECR plasma etching of chemically vapour deposited diamond thin films,” Electron. Lett.28(9), 822–824 (1992).
[CrossRef]

Khomich, A. V.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

Kononenko, T. V.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Kononenko, V. V.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Konov, V. I.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

Kopylov, P. G.

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

Ladouceur, F.

Li, L.

Loginov, B. A.

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

Lothian, J. R.

S. J. Pearton, A. Katz, F. Ren, and J. R. Lothian, “ECR plasma etching of chemically vapour deposited diamond thin films,” Electron. Lett.28(9), 822–824 (1992).
[CrossRef]

Moldovan, N.

N. Moldovan, R. Divan, H. Zeng, and J. A. Carlisle, “Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching,” J. Vac. Sci. Technol. B27(6), 3125–3131 (2009).
[CrossRef]

Morris, G. M.

Nikolajeff, F.

Obermeier, E.

O. Dorsch, M. Werner, and E. Obermeier, “Dry etching of undoped and boron doped polycrystalline diamond films,” Diamond Related Materials4(4), 456–459 (1995).
[CrossRef]

Obraztsov, A. N.

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

Pearton, S. J.

S. J. Pearton, A. Katz, F. Ren, and J. R. Lothian, “ECR plasma etching of chemically vapour deposited diamond thin films,” Electron. Lett.28(9), 822–824 (1992).
[CrossRef]

Pimenov, S. M.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Prawer, S.

Prokhorov, A. M.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Raguin, D. H.

Ralchenko, V. G.

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

Ren, F.

S. J. Pearton, A. Katz, F. Ren, and J. R. Lothian, “ECR plasma etching of chemically vapour deposited diamond thin films,” Electron. Lett.28(9), 822–824 (1992).
[CrossRef]

Savenko, N. V.

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

Tishchenko, A. V.

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Vlasov, I. I.

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

Werner, M.

O. Dorsch, M. Werner, and E. Obermeier, “Dry etching of undoped and boron doped polycrystalline diamond films,” Diamond Related Materials4(4), 456–459 (1995).
[CrossRef]

Zeng, H.

N. Moldovan, R. Divan, H. Zeng, and J. A. Carlisle, “Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching,” J. Vac. Sci. Technol. B27(6), 3125–3131 (2009).
[CrossRef]

Appl. Opt. (1)

Appl. Phys., A Mater. Sci. Process. (1)

T. V. Kononenko, V. V. Kononenko, V. I. Konov, S. M. Pimenov, S. V. Garnov, A. V. Tishchenko, A. M. Prokhorov, and A. V. Khomich, “Formation of antireflective surface structures on diamond films by laser patterning,” Appl. Phys., A Mater. Sci. Process.68(1), 99–102 (1999).
[CrossRef]

Diamond Related Materials (1)

O. Dorsch, M. Werner, and E. Obermeier, “Dry etching of undoped and boron doped polycrystalline diamond films,” Diamond Related Materials4(4), 456–459 (1995).
[CrossRef]

Electron. Lett. (1)

S. J. Pearton, A. Katz, F. Ren, and J. R. Lothian, “ECR plasma etching of chemically vapour deposited diamond thin films,” Electron. Lett.28(9), 822–824 (1992).
[CrossRef]

J. Opt. Soc. Am. A (1)

J. Vac. Sci. Technol. B (1)

N. Moldovan, R. Divan, H. Zeng, and J. A. Carlisle, “Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching,” J. Vac. Sci. Technol. B27(6), 3125–3131 (2009).
[CrossRef]

Mater. Sci. Eng. Rep. (1)

S. Chattopadhyay, Y. F. Huang, Y. J. Jen, A. Ganguly, K. H. Chen, and L. C. Chen, “Anti-reflecting and photonic nanostructures,” Mater. Sci. Eng. Rep.69(1-3), 1–35 (2010).
[CrossRef]

Opt. Express (2)

Phys. Status Solidi (1)

V. G. Ralchenko, A. V. Khomich, A. V. Baranov, I. I. Vlasov, and V. I. Konov, “Fabrication of CVD Diamond Optics with Antireflective Surface Structures,” Phys. Status Solidi174(1), 171–176 (1999) (a).
[CrossRef]

Rev. Sci. Instrum. (1)

A. N. Obraztsov, P. G. Kopylov, B. A. Loginov, M. A. Dolganov, R. R. Ismagilov, and N. V. Savenko, “Single crystal diamond tips for scanning probe microscopy,” Rev. Sci. Instrum.81(1), 013703 (2010).
[CrossRef] [PubMed]

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