Abstract

Relationships between subsurface damage (SSD) depth and peak to valley surface roughness (Rt) have been widely studied and present a major interest for an easy assessment of the SSD depth. We look at the relation between SSD depth and other surface roughness parameters using the Abbott-Firestone curve on a large campaign of grinding tests (with different abrasive grain size, grinding speed and grinding mode). The results reveal that Abbott-Firestone parameters are better for an assessment of SSD depth and that relationships between SSD depth and surface roughness are not universal but depend on the grinding process.

© 2013 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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  17. NF EN ISO 13565. AFNOR, Paris, 1998.
  18. W. Weibull, “A statistical distribution function of wide applicability,” J. Appl. Mech.18, 293–297 (1951).

2013 (1)

2012 (1)

2009 (2)

2006 (2)

J. Wang and R. L. Maier, “Surface assessment of CaF2 deep-ultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angle technique,” Appl. Opt.45(22), 5621–5628 (2006).
[CrossRef] [PubMed]

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

2005 (3)

2004 (1)

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–272 (2004).
[CrossRef]

1998 (1)

J. C. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review74, 131–138 (1998).

1994 (1)

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

1993 (1)

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng.55, 569–572 (1993).

1987 (1)

1957 (1)

F. K. Aleinikov, “The effect of certain physical and mechanical properties on the grinding of brittle materials,” Sov. Phys. Tech. Phys.27, 2525–2538 (1957).

1951 (1)

W. Weibull, “A statistical distribution function of wide applicability,” J. Appl. Mech.18, 293–297 (1951).

1922 (1)

F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc.23(3), 141–164 (1922).
[CrossRef]

Abbott, E. J.

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng.55, 569–572 (1993).

Aleinikov, F. K.

F. K. Aleinikov, “The effect of certain physical and mechanical properties on the grinding of brittle materials,” Sov. Phys. Tech. Phys.27, 2525–2538 (1957).

Ambard, C.

Cahuc, O.

Cormont, P.

Darbois, N.

Darnis, P.

Davis, P.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Davis, P. J.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

Destribats, J.

Duparré, A.

Edwards, D. F.

Feit, M. D.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–272 (2004).
[CrossRef]

Firestone, F. A.

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng.55, 569–572 (1993).

Funkenbusch, P. D.

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

Golini, D.

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

Hed, P. P.

Herffurth, T.

Jacobs, S. D.

Laheurte, R.

Lambropoulos, J. C.

Legros, P.

Lindquist, A.

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

Luitot, C.

Maier, R. L.

Menapace, J.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Menapace, J. A.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

Miller, P.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Miller, P. E.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

Neauport, J.

Preston, F. W.

F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc.23(3), 141–164 (1922).
[CrossRef]

Quesnel, D. J.

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

Randi, J. A.

Rondeau, O.

Rubenchik, A. M.

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–272 (2004).
[CrossRef]

Schmitz, D.

Schröder, S.

Steele, R.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Steele, R. A.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

Suratwala, T.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Suratwala, T. I.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

Trost, M.

Tünnermann, A.

Walmer, D.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Wang, J.

Weibull, W.

W. Weibull, “A statistical distribution function of wide applicability,” J. Appl. Mech.18, 293–297 (1951).

Wong, L.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

Wong, L. L.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

Zhou, Y.

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

Appl. Opt. (5)

J. Am. Ceram. Soc. (1)

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994).
[CrossRef]

J. Appl. Mech. (1)

W. Weibull, “A statistical distribution function of wide applicability,” J. Appl. Mech.18, 293–297 (1951).

J. Non-Cryst. Solids (1)

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006).
[CrossRef]

LLE Review (1)

J. C. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review74, 131–138 (1998).

Mech. Eng. (1)

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng.55, 569–572 (1993).

Opt. Express (3)

Proc. SPIE (2)

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE5991, 56–68 (2005).
[CrossRef]

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–272 (2004).
[CrossRef]

Sov. Phys. Tech. Phys. (1)

F. K. Aleinikov, “The effect of certain physical and mechanical properties on the grinding of brittle materials,” Sov. Phys. Tech. Phys.27, 2525–2538 (1957).

Trans. Opt. Soc. (1)

F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc.23(3), 141–164 (1922).
[CrossRef]

Other (1)

NF EN ISO 13565. AFNOR, Paris, 1998.

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Figures (6)

Fig. 1
Fig. 1

(a) – simplified grinding mode, (b) – industrial grinding mode.

Fig. 2
Fig. 2

The Abbott-Firestone curve.

Fig. 3
Fig. 3

Repeatability of SSD depth and surface roughness measurements for batches A, C, D.

Fig. 4
Fig. 4

Mean and maximal error between the measured SSD and the estimated SSD for each surface roughness parameter, calculated for the whole experiments. Data from Miller [11] are plotted for comparison.

Fig. 5
Fig. 5

SSD = f(Mr2) for the whole set of experiments.

Fig. 6
Fig. 6

mean and maximal error between the measured SSD and the estimated SSD for each surface roughness parameter, calculated for 3 subsets of experiments (rough and intermediate grinding, finishing, and lapping).

Tables (3)

Tables Icon

Table 1 Summary of grinding parameters for fused silica samples Batches A-C

Tables Icon

Table 2 Summary of grinding parameters for fused silica samples Batches D-E

Tables Icon

Table 3 Summary of measured SSD and roughness parameters for fused silica samples Batches A-E except for batch D errors on SSD depth are less than 3%; errors on roughness measurements are less than 10%, see §3.1 for further details

Equations (4)

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SS D meas =a* R * +b.
SS D calc i =a* R meas i +b.
erro r i =| SS D meas i SS D calc i SS D meas i |.
SSD=4*Mr2+370.

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