Abstract

This paper reports a fiber-to-chip coupler consisting of a silicon inverted taper and a silicon oxynitride (SiON) double stage taper, where the cascaded taper structure enables adiabatic mode transfer between a submicron silicon waveguide and a single mode fiber. The coupler, fabricated by a simplified process, demonstrates an average coupling loss of 3.6 and 4.2 dB for TM and TE polarizations, respectively, with a misalignment tolerance of ± 2.2 µm for 1 dB loss penalty.

© 2013 Optical Society of America

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2012 (2)

2011 (2)

L. H. Gabrielli and M. Lipson, “Integrated Luneburg lens via ultra-strong index gradient on silicon,” Opt. Express19(21), 20122–20127 (2011).
[CrossRef] [PubMed]

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

2010 (3)

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun.283(19), 3678–3682 (2010).
[CrossRef]

A. Khilo, M. A. Popović, M. Araghchini, and F. X. Kärtner, “Efficient planar fiber-to-chip coupler based on two-stage adiabatic evolution,” Opt. Express18(15), 15790–15806 (2010).
[CrossRef] [PubMed]

2009 (1)

2008 (1)

2007 (1)

2004 (1)

2003 (2)

2002 (1)

M. Bose, D. N. Bose, and D. K. Basa, “Plasma enhanced growth, composition and refractive index of Silicon oxynitride films,” Mater. Lett.52(6), 417–422 (2002).
[CrossRef]

2000 (1)

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

1994 (1)

R. Ben-Michael, U. Koren, B. Miller, G. Young, M. Chien, and G. Raybon, “InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide,” IEEE Photon. Technol. Lett.6(12), 1412–1414 (1994).
[CrossRef]

Abdalla, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Agrawal, A.

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

Almeida, V. R.

Araghchini, M.

Ayre, M.

Baets, R.

Barkai, A.

Basa, D. K.

M. Bose, D. N. Bose, and D. K. Basa, “Plasma enhanced growth, composition and refractive index of Silicon oxynitride films,” Mater. Lett.52(6), 417–422 (2002).
[CrossRef]

Ben Bakir, B.

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

Ben-Michael, R.

R. Ben-Michael, U. Koren, B. Miller, G. Young, M. Chien, and G. Raybon, “InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide,” IEEE Photon. Technol. Lett.6(12), 1412–1414 (1994).
[CrossRef]

Bose, D. N.

M. Bose, D. N. Bose, and D. K. Basa, “Plasma enhanced growth, composition and refractive index of Silicon oxynitride films,” Mater. Lett.52(6), 417–422 (2002).
[CrossRef]

Bose, M.

M. Bose, D. N. Bose, and D. K. Basa, “Plasma enhanced growth, composition and refractive index of Silicon oxynitride films,” Mater. Lett.52(6), 417–422 (2002).
[CrossRef]

Chang, H.-H.

Chien, M.

R. Ben-Michael, U. Koren, B. Miller, G. Young, M. Chien, and G. Raybon, “InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide,” IEEE Photon. Technol. Lett.6(12), 1412–1414 (1994).
[CrossRef]

Cohen, R.

De Dobbelaere, P. M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Dobbelaere, P.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

Elek, N.

Fedeli, J.-M.

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

Foltz, D.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Foresi, J.

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

Gabay, R.

Gabrielli, L. H.

Gloeckner, S.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Hovey, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Hvam, J. M.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun.283(19), 3678–3682 (2010).
[CrossRef]

Izhaky, N.

Jackson, S.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Jones, R.

Kärtner, F. X.

Khilo, A.

Kim, D.

Kimerling, L. C.

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

Koren, U.

R. Ben-Michael, U. Koren, B. Miller, G. Young, M. Chien, and G. Raybon, “InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide,” IEEE Photon. Technol. Lett.6(12), 1412–1414 (1994).
[CrossRef]

Krauss, T.

Lee, K. K.

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

Liang, Y.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Lim, D. R.

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

Lipson, M.

Liu, A.

Liu, L.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun.283(19), 3678–3682 (2010).
[CrossRef]

Luan, H.-C.

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, “Effect of size and rougness on light transmission in a Si/SiO2 waveguide: experiments and model,” Appl. Phys. Lett.77(11), 1617–1619 (2000).
[CrossRef]

Lyan, P.

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

Mack, M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Malik, B. H.

Markov, P.

Masini, G.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

McNab, S.

Mekis, A.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Miller, B.

R. Ben-Michael, U. Koren, B. Miller, G. Young, M. Chien, and G. Raybon, “InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide,” IEEE Photon. Technol. Lett.6(12), 1412–1414 (1994).
[CrossRef]

Moll, N.

Narasimha, A.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

Orobtchouk, R.

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

Ou, H.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun.283(19), 3678–3682 (2010).
[CrossRef]

Panepucci, R. R.

Paniccia, M.

Peterson, M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Pinguet, T.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Popovic, M. A.

Porzier, C.

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

Pu, M.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun.283(19), 3678–3682 (2010).
[CrossRef]

Raybon, G.

R. Ben-Michael, U. Koren, B. Miller, G. Young, M. Chien, and G. Raybon, “InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide,” IEEE Photon. Technol. Lett.6(12), 1412–1414 (1994).
[CrossRef]

Reano, R. M.

Roelkens, G.

Roman, A.

B. Ben Bakir, A. Vazquez de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-Loss (<1 dB) and Polarization-Insensitive Edge Fiber Couplers Fabricated on 200-Mm Silicon-on-Insulator Wafers,” IEEE Photon. Technol. Lett.22(11), 739–741 (2010).
[CrossRef]

Sahni, S.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, “A grating-coupler enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011).
[CrossRef]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Schrauwen, J.

Sharp, M.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Sun, P.

M. Wood, P. Sun, and R. M. Reano, “Compact cantilever couplers for low-loss fiber coupling to silicon photonic integrated circuits,” Opt. Express20(1), 164–172 (2012).
[CrossRef] [PubMed]

P. Sun and R. M. Reano, “Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits,” Opt. Express17(6), 4565–4574 (2009).
[CrossRef] [PubMed]

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
[CrossRef]

Taillaert, D.

Tan, D.

A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
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A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
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A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
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A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
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A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
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M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun.283(19), 3678–3682 (2010).
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A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B. P. Welch, K. Yokoyama, S. Yu, and P. M. De Dobbelaere, “A CMOS photonics platform for high-speed optical interconnects,” in Proc. of IEEE Photonics Conference (IEEE, 2012), pp. 356–357.
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P. De Dobbelaere, S. Abdalla, S. Gloeckner, M. Mack, G. Masini, A. Mekis, T. Pinguet, S. Sahni, A. Narasimha, D. Guckenberger, and M. Harrison, “Si Photonics Based High-Speed optical Transceivers,” in European Conference and Exhibition on Optical Communication, OSA Technical Digest (online) (Optical Society of America, 2012), paper We.1.E.5.
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K. Ku and M. M. Lee, “Cascade of two opposite tapers for butt-coupling between fibers and silicon photonic wires with large misalignment tolerance and low polarization dependency,” in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (online) (Optical Society of America, 2013), paper OTu2C.3.
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Fimmwave/Fimmprop, Photon Design, http://www.photond.com .

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Figures (7)

Fig. 1
Fig. 1

Schematic illustration of the fiber-to-chip coupler

Fig. 2
Fig. 2

Simulated transmission loss at the interfaces of (a) the first stage and the second stage (b) the second stage and the third stage as a function of taper tip width. Refractive index of the SiON layer is assumed to be 2.28.

Fig. 3
Fig. 3

Simulated loss of (a) silicon inverted taper (b) SiON tapers the second stage and the third stage as a function of taper length. Inset of (a) is a required length for 0.1dB transmission loss as a function of overlaying SiON waveguide dimensions. Refractive index of the SiON layer is assumed to be 2.28.

Fig. 4
Fig. 4

Scanning electron microscope (SEM) images of the fabricated device. (a) fabricated device, the first and the third stages are partially shown in the image (b) silicon taper tip (~100nm tip width) (c) SiON taper tip (~400nm tip width) (d) Cross section of the output SiON waveguide.

Fig. 5
Fig. 5

Measured coupling loss vs output SiON waveguide widths. The height of the SiON waveguide is 8µm.

Fig. 6
Fig. 6

(a) Measured coupling loss vs wavelength for TE and TM polarizations. The output SiON waveguide has a height and a width of 8 and 10 µm, respectively. (b) Simulated optical intensity at each stage with launching the fundamental mode of the silicon input waveguide at a wavelength of 1550 nm for TE polarization.

Fig. 7
Fig. 7

Increase in coupling loss vs horizontal (x axis) and vertical (z axis) misalignment.

Tables (1)

Tables Icon

Table 1 Summary of dimensions of the fiber-to-chip coupler

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