Abstract

We report the total and diffuse transmission enhancement of sapphires with the ultraviolet curable SU8 polymer surface structures consisting of conical subwavelength gratings (SWGs) at one- and both-side surfaces for different periods. The SWGs patterns on the silicon templates were transferred into the SU8 polymer film surface on sapphires by a simple and cost-effective soft lithography technique. For the fabricated samples, the surface morphologies, wetting behaviors, and optical characteristics were investigated. For theoretical optical analysis, a rigorous coupled-wave analysis method was used. At a period of 350 nm, the sample with SWGs on SU8 film/sapphire exhibited a hydrophobic surface and higher total transmittance compared to the bare sapphire over a wide wavelength of 450-1000 nm. As the period of SWGs was increased, the low total transmittance region of < 85% was shifted towards the longer wavelengths and became broader while the diffuse transmittance was increased (i.e., larger haze ratio). For the samples with SWGs at both-side surfaces, the total and diffuse transmittance spectra were further enhanced compared to the samples with SWGs at one-side surface. The theoretical optical calculation results showed a similar trend to the experimentally measured data.

© 2013 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
    [CrossRef]
  2. M. Viefhues, J. Regtmeier, and D. Anselmetti, “Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography,” J. Micromech. Microeng.22(11), 115024 (2012).
    [CrossRef]
  3. E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
    [CrossRef] [PubMed]
  4. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
    [CrossRef]
  5. T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, “Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio,” Adv. Funct. Mater.15(10), 1683–1688 (2005).
    [CrossRef]
  6. N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
    [CrossRef] [PubMed]
  7. T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
    [CrossRef]
  8. B. S. Patel and Z. H. Zaidi, “The suitability of sapphire for laser windows,” Meas. Sci. Technol.10(3), 146–151 (1999).
    [CrossRef]
  9. Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
    [CrossRef] [PubMed]
  10. J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, “Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications,” Appl. Phys. B100(4), 891–896 (2010).
    [CrossRef]
  11. J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
    [CrossRef]
  12. Y. H. Ko and J. S. Yu, “Design of hemi-urchin shaped ZnO nanostructures for broadband and wide-angle antireflection coatings,” Opt. Express19(1), 297–305 (2011).
    [CrossRef] [PubMed]
  13. J. W. Leem, Y. H. Yeh, and J. S. Yu, “Enhanced transmittance and hydrophilicity of nanostructured glass substrates with antireflective properties using disordered gold nanopatterns,” Opt. Express20(4), 4056–4066 (2012).
    [CrossRef] [PubMed]
  14. O. P. Parida and N. Bhat, “Characterization of optical properties of SU-8 and fabrication of optical components,” in Proc. Int. Conf. on Opt. Photon. (CSIO, Chandigarh, India, 2009), pp. 1–4.

2012 (3)

M. Viefhues, J. Regtmeier, and D. Anselmetti, “Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography,” J. Micromech. Microeng.22(11), 115024 (2012).
[CrossRef]

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

J. W. Leem, Y. H. Yeh, and J. S. Yu, “Enhanced transmittance and hydrophilicity of nanostructured glass substrates with antireflective properties using disordered gold nanopatterns,” Opt. Express20(4), 4056–4066 (2012).
[CrossRef] [PubMed]

2011 (2)

Y. H. Ko and J. S. Yu, “Design of hemi-urchin shaped ZnO nanostructures for broadband and wide-angle antireflection coatings,” Opt. Express19(1), 297–305 (2011).
[CrossRef] [PubMed]

E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
[CrossRef] [PubMed]

2010 (3)

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, “Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications,” Appl. Phys. B100(4), 891–896 (2010).
[CrossRef]

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

2009 (1)

Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
[CrossRef] [PubMed]

2007 (1)

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

2005 (1)

T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, “Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio,” Adv. Funct. Mater.15(10), 1683–1688 (2005).
[CrossRef]

2002 (1)

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

1999 (1)

B. S. Patel and Z. H. Zaidi, “The suitability of sapphire for laser windows,” Meas. Sci. Technol.10(3), 146–151 (1999).
[CrossRef]

Anselmetti, D.

M. Viefhues, J. Regtmeier, and D. Anselmetti, “Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography,” J. Micromech. Microeng.22(11), 115024 (2012).
[CrossRef]

Assouar, B.

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

Aubert, T.

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

Bao, K.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Bouvot, L.

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

Byeon, E. H.

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Chen, Y.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Dai, T.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Di Carlo, D.

E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
[CrossRef] [PubMed]

Dieringer, J. A.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Elmazria, O.

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

Foley, E. T.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

He, J. H.

Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
[CrossRef] [PubMed]

Hersam, M. C.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Hsu, J. W. P.

T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, “Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio,” Adv. Funct. Mater.15(10), 1683–1688 (2005).
[CrossRef]

Ji, H.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Jiang, N.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Kang, X. N.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Kim, D. S.

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Klingsporn, J. M.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Ko, Y. H.

Kwon, T. H.

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Lee, B. K.

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Lee, T. W.

T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, “Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio,” Adv. Funct. Mater.15(10), 1683–1688 (2005).
[CrossRef]

Lee, Y. T.

J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, “Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications,” Appl. Phys. B100(4), 891–896 (2010).
[CrossRef]

Leem, J. W.

J. W. Leem, Y. H. Yeh, and J. S. Yu, “Enhanced transmittance and hydrophilicity of nanostructured glass substrates with antireflective properties using disordered gold nanopatterns,” Opt. Express20(4), 4056–4066 (2012).
[CrossRef] [PubMed]

J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, “Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications,” Appl. Phys. B100(4), 891–896 (2010).
[CrossRef]

Lin, C. A.

Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
[CrossRef] [PubMed]

Lin, Y. R.

Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
[CrossRef] [PubMed]

Love, J. C.

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

Maoddi, P.

E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
[CrossRef] [PubMed]

Mitrofanov, O.

T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, “Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio,” Adv. Funct. Mater.15(10), 1683–1688 (2005).
[CrossRef]

Murray, C.

E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
[CrossRef] [PubMed]

Odom, T. W.

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

Oudich, M.

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

Patel, B. S.

B. S. Patel and Z. H. Zaidi, “The suitability of sapphire for laser windows,” Meas. Sci. Technol.10(3), 146–151 (1999).
[CrossRef]

Paul, K. E.

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

Regtmeier, J.

M. Viefhues, J. Regtmeier, and D. Anselmetti, “Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography,” J. Micromech. Microeng.22(11), 115024 (2012).
[CrossRef]

Ryu, J. J.

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Schatz, G. C.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Seideman, T.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Sollier, E.

E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
[CrossRef] [PubMed]

Song, Y. M.

J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, “Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications,” Appl. Phys. B100(4), 891–896 (2010).
[CrossRef]

Sonntag, M. D.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Valley, N. A.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Van Duyne, R. P.

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Viefhues, M.

M. Viefhues, J. Regtmeier, and D. Anselmetti, “Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography,” J. Micromech. Microeng.22(11), 115024 (2012).
[CrossRef]

Wang, H. P.

Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
[CrossRef] [PubMed]

Whitesides, G. M.

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

Wolfe, D. B.

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

Xiong, C.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Yeh, Y. H.

Yeo, J. H.

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Yu, J. S.

Zaidi, Z. H.

B. S. Patel and Z. H. Zaidi, “The suitability of sapphire for laser windows,” Meas. Sci. Technol.10(3), 146–151 (1999).
[CrossRef]

Zhang, B.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Zhang, G. Y.

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

Adv. Funct. Mater. (1)

T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, “Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio,” Adv. Funct. Mater.15(10), 1683–1688 (2005).
[CrossRef]

Appl. Phys. B (1)

J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, “Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications,” Appl. Phys. B100(4), 891–896 (2010).
[CrossRef]

Appl. Phys. Lett. (1)

T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, “Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications,” Appl. Phys. Lett.96(20), 203503 (2010).
[CrossRef]

IEEE Photonics Technol. Lett. (1)

K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, “Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting,” IEEE Photonics Technol. Lett.19(22), 1840–1842 (2007).
[CrossRef]

J. Appl. Phys. (1)

Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, “Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings,” J. Appl. Phys.106(11), 114310 (2009).
[CrossRef] [PubMed]

J. Micromech. Microeng. (1)

M. Viefhues, J. Regtmeier, and D. Anselmetti, “Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography,” J. Micromech. Microeng.22(11), 115024 (2012).
[CrossRef]

Lab Chip (1)

E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, “Rapid prototyping polymers for microfluidic devices and high pressure injections,” Lab Chip11(22), 3752–3765 (2011).
[CrossRef] [PubMed]

Langmuir (1)

T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, “Improved pattern transfer in soft lithography using composite stamps,” Langmuir18(13), 5314–5320 (2002).
[CrossRef]

Meas. Sci. Technol. (1)

B. S. Patel and Z. H. Zaidi, “The suitability of sapphire for laser windows,” Meas. Sci. Technol.10(3), 146–151 (1999).
[CrossRef]

Microsyst. Technol. (1)

J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, “Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert,” Microsyst. Technol.16(8–9), 1425–1430 (2010).
[CrossRef]

Nano Lett. (1)

N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, “Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy,” Nano Lett.12(10), 5061–5067 (2012).
[CrossRef] [PubMed]

Opt. Express (2)

Other (1)

O. P. Parida and N. Bhat, “Characterization of optical properties of SU-8 and fabrication of optical components,” in Proc. Int. Conf. on Opt. Photon. (CSIO, Chandigarh, India, 2009), pp. 1–4.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Schematic diagram for the fabrication procedure of SWGs on SU8 film/sapphire substrate using the soft lithography method.

Fig. 2
Fig. 2

(a) Top-view and cross-sectional SEM images of the transferred SWGs on SU8 film/sapphires for different periods of 350, 500, and 600 nm and (b) photographs of a water droplet on the bare sapphire, flat SU8 film/sapphire, and transferred SWGs with periods of 350, 500, and 600 nm on SU8 film/sapphires.

Fig. 3
Fig. 3

Measured (a) total and (b) diffuse transmittance spectra of bare sapphire, flat SU8 film/sapphire, and transferred SWGs on SU8 film/sapphires for different periods of 350, 500, and 600 nm at one-side and both-side surfaces. The haze ratio values at λ = 525 and 635 nm of the corresponding samples and photographs of the diffracted light patterns obtained from the light penetration through the sample with the SWGs on the SU8 film/sapphire at the period of 600 nm for λ = 525 and 635 nm are shown in the left and right insets of (b), respectively.

Fig. 4
Fig. 4

Contour plots of variations of the calculated (i) total and (ii) diffuse transmittance spectra of the SWGs on SU8 film/sapphire at one- and both-side surfaces for different (a) periods (height: 300 nm) and (b) heights (period: 500 nm) of SWGs.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

r= R SWG + ( H SWG z) 1/ O T and  x 2 + y 2 = z 2 (0z H SWG ),

Metrics